WO2009106313A1 - Mikrospektrometer - Google Patents
Mikrospektrometer Download PDFInfo
- Publication number
- WO2009106313A1 WO2009106313A1 PCT/EP2009/001339 EP2009001339W WO2009106313A1 WO 2009106313 A1 WO2009106313 A1 WO 2009106313A1 EP 2009001339 W EP2009001339 W EP 2009001339W WO 2009106313 A1 WO2009106313 A1 WO 2009106313A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid channel
- optical
- microspectrometer
- housing
- microspectrometer according
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 35
- 239000012530 fluid Substances 0.000 claims abstract description 28
- 230000003595 spectral effect Effects 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims abstract description 8
- 238000011156 evaluation Methods 0.000 claims description 13
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 238000001746 injection moulding Methods 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 4
- 239000012491 analyte Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/532—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke with measurement of scattering and transmission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/062—LED's
- G01N2201/0628—Organic LED [OLED]
Definitions
- the invention relates to a microspectrometer.
- Microspectrometers are known. Typically, components such as optical grating, mirrors, evaluation electronics and optical fibers are arranged in a housing or on a base plate, which couple the light to be analyzed into the spectrometer. Outside the microspectrometer is a light source and the sample to be analyzed, which is irradiated by the light of the external light source. The light, which is separated from the optical grating into its spectral components, passes via optical fibers to a plurality of photodetectors.
- the invention provides a microspectrometer which can be made extremely compact and without external components and has only a fluidic interface and electrical connections to the outside.
- the advantage of the invention set out in the appended claims is that it permits the continuous spectroscopy of an analyte, e.g. in the monitoring of drinking water quality is of great importance.
- optical grating is rotatably arranged, so that instead of a detector line, a single photodetector can be used.
- the housing of the microspectrometer as a rigid molded body by injection molding from at least partially transparent To manufacture plastic.
- the fluid channel is then passed across a solid portion of the molded article from one side surface to the opposite surface.
- the required optical grating is molded during injection molding in a surface of the molding. But it is also possible to use a grid after injection into a recess of the housing.
- the light source may e.g. be an LED and integrated as Einlegteil in the molding.
- the light source could also be inserted into a recess of the plastic part and then attached, for example, by gluing.
- OLED it is also possible to use OLED or use other known methods such as laser technology to generate the light source.
- a further light source could be arranged below / above the fluid channel.
- the scattered light would then be radiated at an angle of 90 ° on the same path as the test section described.
- the scattered light falls on the grid, is spectrally decomposed and reaches the evaluation electronics.
- the fluid channel is transversely irradiated by a separate light source, and the scattered light occurring in this case is collected directly (without spectral decomposition) by means of another photodiode.
- the scattered light intensity is measured and evaluated separately.
- 1 is a schematic plan view of an embodiment of the microspectrometer with the housing open; 2 shows a plan view of a second exemplary embodiment of the microspectrometer with the housing open in a schematic illustration;
- FIG. 5 shows a rigid molded body, which is suitable as a housing.
- Fig. 6 shows an embodiment using the housing of Fig. 5;
- FIG. 7 shows a further embodiment using the housing according to Fig. 5; and
- FIG. 8 shows a further embodiment using a rigid shaped body as the housing.
- a light source 2 and an optical grating 6 are arranged in a housing 1 on opposite sides.
- the housing 1 is penetrated by a fluid channel 3.
- the channel 3 can either be filled and sealed with medium to be analyzed, or this medium can flow continuously through the channel.
- the fluid channel 3 can be connected to lines (not shown in FIG. 1) in which the medium is transported to and from the spectrometer.
- the fluid channel 3 is arranged in the housing such that it is located on the optical measuring path between the light source 2 and the grating 6.
- the fluid channel 3 must be made of translucent material.
- Fluid channel 3 can be either completely or partially provided in the injection mold for the housing 1 of the microspectrometer, or this or window-like parts thereof are subsequently made of transparent material such
- a diaphragm 4 wherein the opening is placed so that light from the light source 2 on the grid 6 falls.
- the diameter of the aperture 4 is ideally adjustable.
- a mirror 5 is arranged so that light reflected by the grating 6 is incident on it.
- the mirror 5 may for example be part of Aperture 4, arranged so that it faces the grating 6 and not the light source 2.
- the mirror 5 directs incident light on to an evaluation unit (not shown in FIG. 1).
- This evaluation unit can e.g. a photodetector like an organic photodiode array.
- the beam path 7 of the optical measuring path is shown.
- Light from the light source 2 ideally passes through the fluid channel 3 at an angle of incidence of 90 °, passes through the diaphragm 4 to the grating 6, which spectrally splits the light and reflects it onto the mirror 5, which redirects the light to the evaluation unit.
- the evaluation unit can be arranged inside the microspectrometer or can also be located outside.
- a second light source 2a e.g. LED arranged, which also sends light across the fluid channel. From the main beam at an angle of 90 ° sloping stray light (dashed line) passes according to beam path 8, for. for the purpose of turbidity measurement by the diaphragm 4 on the optical grating 6 and the evaluation unit.
- the light source 2 is not activated simultaneously with the light source 2a.
- the two light sources 2 and 2a are activated alternately, the turbidity and the concentration of constituents in liquids can thus be determined in succession with the same device.
- the evaluation of the scattered light with spectral decomposition takes place through the optical grating 6.
- FIG. 4 shows the sectional view of a further exemplary embodiment in which the evaluation of the scattered light takes place without spectral decomposition.
- the arrangement of the individual components is identical to that of the first embodiment, except that in addition below the fluid channel 3 is a photodiode 2b.
- the photodiode 2b detects scattered light radiated at an angle of 90 ° from the main beam emitted from the light source 2 and which transmits the light Transmitted fluid channel 3 transversely.
- the beam path of the scattered light is shown in dashed lines according to arrow 9.
- the main beam of the light source 2 can be optically decomposed and evaluated by means of grids and the scattered light occurring thereby can be collected directly by means of the photodiode 2b and the scattered light intensity can be measured.
- the rigid shaped body 20 which is suitable as a housing of the microspectrometer and is shown in FIG. 5, is a flat cuboid with a solid block 20a, which merges with a step 22 into a flat region 20b in which a rectangular recess 24 is formed. This recess 24 can be closed by a cover 26, which is flush with the block 20a.
- the molded body 20 is produced by injection molding of a particularly transparent plastic, such as polymethyl acrylate.
- a channel 28 is recessed, which is guided from one side surface up to the opposite side surface. Furthermore, a cylindrical recess 30 is introduced perpendicular to the channel 28 in the block 20 a.
- a light source such as an LED 32 is inserted in the recess 30.
- the channel 28 is provided at its ends with fluidic fittings 34.
- the recess 24 accommodates all further components of the microspectrometer: the diaphragm 36, the optical grating 38 and the photodetector row 40 with evaluation electronics 42.
- further optical and / or electronic components can be arranged in the recess 24.
- a plurality of light sources for different spectral ranges can be arranged in the block 20a.
- the micro-spectrometer has only a fluidic interface in the form of the connecting pieces 34 and electrical connections that can be realized by connectors. Since all optical components are in a rigid spatial relationship, no adjustments are required to make measurements.
- Fig. 7 differs from that of Fig. 6 by the use of a rotatably mounted optical grating 38a with rotary drive 44 and the use of a single photodiode 40a as a detector.
- the rotary drive 44 is activated by the evaluation electronics 42a in such a way. Experts that the photodiode 40a successively detects all the spectral components of the light reflected from the grid.
- the shaped body 20b forms a uniform flat cuboid made of transparent plastic.
- a recess 46 which is introduced into the molded body 20b parallel to the channel 28b, accommodates the photodetector row 40b and the evaluation electronics 42b.
- the optical grating 38b is formed in the outer surface of the molded body 20b opposite to the light source 32b and provided with a reflective coating, e.g. is applied by vapor deposition.
- the grid 38b is covered with a protective layer.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09714805A EP2245441A1 (de) | 2008-02-26 | 2009-02-25 | Mikrospektrometer |
US12/866,078 US8885160B2 (en) | 2008-02-26 | 2009-02-25 | Microspectrometer |
JP2010548019A JP2011513717A (ja) | 2008-02-26 | 2009-02-25 | 顕微分光計 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202008002683 | 2008-02-26 | ||
DE202008002683.0 | 2008-02-26 | ||
DE202008003977U DE202008003977U1 (de) | 2008-02-26 | 2008-03-20 | Mikrospektrometer |
DE202008003977.0 | 2008-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009106313A1 true WO2009106313A1 (de) | 2009-09-03 |
Family
ID=40822428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/001339 WO2009106313A1 (de) | 2008-02-26 | 2009-02-25 | Mikrospektrometer |
Country Status (5)
Country | Link |
---|---|
US (1) | US8885160B2 (de) |
EP (1) | EP2245441A1 (de) |
JP (1) | JP2011513717A (de) |
DE (1) | DE202008003977U1 (de) |
WO (1) | WO2009106313A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012021917A (ja) * | 2010-07-15 | 2012-02-02 | Kyokko Denki Kk | 流体検知センサ及び分光分析装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015100395B4 (de) * | 2014-02-03 | 2020-06-18 | Bürkert Werke GmbH | Spektrometer und Fluid-Analysesystem |
US9835816B2 (en) * | 2015-06-10 | 2017-12-05 | Telect, Inc. | Fiber blocking kits |
US9945790B2 (en) * | 2015-08-05 | 2018-04-17 | Viavi Solutions Inc. | In-situ spectral process monitoring |
DE102016222253A1 (de) * | 2016-11-14 | 2018-05-17 | BSH Hausgeräte GmbH | Spektrometer, System enthaltend ein Spektrometer und ein Haushaltsgerät und Verfahren zu deren Betrieb |
PL3536205T3 (pl) * | 2018-03-06 | 2021-12-06 | Vorwerk & Co. Interholding Gmbh | Urządzenie do przygotowywania potraw |
CN115552220A (zh) * | 2020-05-15 | 2022-12-30 | 株式会社堀场先进技术 | 光学测定装置以及水质分析系统 |
DE102020120199A1 (de) | 2020-07-30 | 2022-02-03 | Bürkert Werke GmbH & Co. KG | Verfahren zur Erfassung der Konzentration von organischen Partikeln in der Luft sowie Sensor hierfür |
US11841270B1 (en) * | 2022-05-25 | 2023-12-12 | Visera Technologies Company Ltd. | Spectrometer |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2600371A1 (de) * | 1975-01-07 | 1976-07-08 | Instruments Sa | Optischer baustein |
DE4122925A1 (de) * | 1991-07-11 | 1993-01-21 | Fraunhofer Ges Forschung | Optisches spektrometer |
DE4434814A1 (de) * | 1994-09-29 | 1996-04-04 | Microparts Gmbh | Infrarotspektrometrischer Sensor für Gase |
DE19717014A1 (de) * | 1997-04-23 | 1998-10-29 | Inst Mikrotechnik Mainz Gmbh | Verfahren und Form zur Herstellung miniaturisierter Formenkörper |
US20030098975A1 (en) * | 2001-11-26 | 2003-05-29 | Ando Electric Co., Ltd. | Optical spectrum analyzer and optical spectrum measuring method |
DE10305093A1 (de) * | 2003-02-07 | 2004-08-19 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren und Vorrichtung zur Bestimmung und Überwachung von Verunreinigungszuständen unterschiedlicher Flüssigkeiten |
DE10360563A1 (de) * | 2003-12-22 | 2005-07-14 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren und Vorrichtung zur Bestimmung des Verunreinigungszustands von Flüssigkeiten |
WO2007050123A2 (en) * | 2005-05-17 | 2007-05-03 | Honeywell International Inc. | Optical micro-spectrometer |
US20070164221A1 (en) * | 2001-08-31 | 2007-07-19 | Russell James T | Microspectrometer gas analyzer |
DE102006035581B3 (de) * | 2006-07-29 | 2008-02-07 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Optische Messzelle |
Family Cites Families (18)
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JPS5946332B2 (ja) * | 1976-03-31 | 1984-11-12 | 株式会社島津製作所 | 分光測定装置 |
GB2165061A (en) * | 1984-09-26 | 1986-04-03 | Int Standard Electric Corp | Optical coupler |
JPS6311822A (ja) * | 1986-07-02 | 1988-01-19 | Hitachi Ltd | 回折格子 |
JPH01308943A (ja) * | 1988-06-07 | 1989-12-13 | Fuji Electric Co Ltd | 微粒子測定装置 |
DE68903831T2 (de) * | 1989-05-20 | 1993-04-15 | Hewlett Packard Gmbh | Verfahren zum betrieb eines spektrometers mit einer fotodiodenanordnung und spektrometer mit einer anordnung von fotodioden. |
US5037201A (en) * | 1990-03-30 | 1991-08-06 | Xerox Corporation | Spectral resolving and sensing apparatus |
US5424826A (en) * | 1993-07-30 | 1995-06-13 | Control Development, Inc. | Wideband optical micro-spectrometer system |
US5856870A (en) * | 1997-04-08 | 1999-01-05 | Foster-Miller, Inc. | Spectroanalytical system |
JP4032483B2 (ja) | 1998-02-26 | 2008-01-16 | 株式会社日立製作所 | 分光測定装置 |
US6075252A (en) | 1998-11-16 | 2000-06-13 | Innovative Lasers Corporation | Contaminant identification and concentration determination by monitoring the temporal characteristics of an intracavity laser |
JP2000161654A (ja) * | 1998-11-20 | 2000-06-16 | Nippon Furnace Kogyo Kaisha Ltd | 蓄熱型バーナによる燃焼装置および燃焼方法 |
JP4018063B2 (ja) * | 2000-10-12 | 2007-12-05 | アムニス コーポレイション | 画像化システム及びその方法 |
IL146404A0 (en) * | 2001-11-08 | 2002-07-25 | E Afikin Computerized Dairy Ma | Spectroscopic fluid analyzer |
JP2003279483A (ja) * | 2002-03-26 | 2003-10-02 | Kubota Corp | 分光分析装置 |
US7012695B2 (en) * | 2003-07-18 | 2006-03-14 | Chemimage Corporation | Method and apparatus for multiwavelength imaging spectrometer |
US7324195B2 (en) * | 2004-01-08 | 2008-01-29 | Valorbec Societe Em Commandite | Planar waveguide based grating device and spectrometer for species-specific wavelength detection |
DE102004030029B3 (de) * | 2004-06-22 | 2005-12-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Transmissionsmessverfahren und deren Verwendung |
JP4473665B2 (ja) * | 2004-07-16 | 2010-06-02 | 浜松ホトニクス株式会社 | 分光器 |
-
2008
- 2008-03-20 DE DE202008003977U patent/DE202008003977U1/de not_active Expired - Lifetime
-
2009
- 2009-02-25 WO PCT/EP2009/001339 patent/WO2009106313A1/de active Application Filing
- 2009-02-25 EP EP09714805A patent/EP2245441A1/de not_active Withdrawn
- 2009-02-25 US US12/866,078 patent/US8885160B2/en active Active
- 2009-02-25 JP JP2010548019A patent/JP2011513717A/ja active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2600371A1 (de) * | 1975-01-07 | 1976-07-08 | Instruments Sa | Optischer baustein |
DE4122925A1 (de) * | 1991-07-11 | 1993-01-21 | Fraunhofer Ges Forschung | Optisches spektrometer |
DE4434814A1 (de) * | 1994-09-29 | 1996-04-04 | Microparts Gmbh | Infrarotspektrometrischer Sensor für Gase |
DE19717014A1 (de) * | 1997-04-23 | 1998-10-29 | Inst Mikrotechnik Mainz Gmbh | Verfahren und Form zur Herstellung miniaturisierter Formenkörper |
US20070164221A1 (en) * | 2001-08-31 | 2007-07-19 | Russell James T | Microspectrometer gas analyzer |
US20030098975A1 (en) * | 2001-11-26 | 2003-05-29 | Ando Electric Co., Ltd. | Optical spectrum analyzer and optical spectrum measuring method |
DE10305093A1 (de) * | 2003-02-07 | 2004-08-19 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren und Vorrichtung zur Bestimmung und Überwachung von Verunreinigungszuständen unterschiedlicher Flüssigkeiten |
DE10360563A1 (de) * | 2003-12-22 | 2005-07-14 | BSH Bosch und Siemens Hausgeräte GmbH | Verfahren und Vorrichtung zur Bestimmung des Verunreinigungszustands von Flüssigkeiten |
WO2007050123A2 (en) * | 2005-05-17 | 2007-05-03 | Honeywell International Inc. | Optical micro-spectrometer |
DE102006035581B3 (de) * | 2006-07-29 | 2008-02-07 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Optische Messzelle |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012021917A (ja) * | 2010-07-15 | 2012-02-02 | Kyokko Denki Kk | 流体検知センサ及び分光分析装置 |
Also Published As
Publication number | Publication date |
---|---|
US20110080583A1 (en) | 2011-04-07 |
US8885160B2 (en) | 2014-11-11 |
JP2011513717A (ja) | 2011-04-28 |
EP2245441A1 (de) | 2010-11-03 |
DE202008003977U1 (de) | 2009-07-02 |
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