WO2009098829A1 - Guide d'ondes optique et procédé de fabrication correspondant - Google Patents

Guide d'ondes optique et procédé de fabrication correspondant Download PDF

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Publication number
WO2009098829A1
WO2009098829A1 PCT/JP2008/073302 JP2008073302W WO2009098829A1 WO 2009098829 A1 WO2009098829 A1 WO 2009098829A1 JP 2008073302 W JP2008073302 W JP 2008073302W WO 2009098829 A1 WO2009098829 A1 WO 2009098829A1
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WIPO (PCT)
Prior art keywords
optical waveguide
layer
rib
core
type optical
Prior art date
Application number
PCT/JP2008/073302
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English (en)
Japanese (ja)
Inventor
Masashige Ishizaka
Yutaka Urino
Original Assignee
Nec Corporation
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Filing date
Publication date
Application filed by Nec Corporation filed Critical Nec Corporation
Publication of WO2009098829A1 publication Critical patent/WO2009098829A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G02F1/3133—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials

Definitions

  • the present invention relates to an optical waveguide and a method for manufacturing the same.
  • planar light circuits play an important role as a key component supporting the recent optical communication market with AWG (Arrayed Waveguide Grating) and splitters, etc. as the development and commercialization centered on quartz systems.
  • AWG Arrayed Waveguide Grating
  • splitters etc.
  • SOA Semiconductor Optical Amplifier
  • Examples of the SOI optical waveguide include a channel optical waveguide and a rib optical waveguide.
  • a channel-type optical waveguide (Si wire waveguide) has the advantage that light can be propagated even with a bending radius of several microns to 10 microns with almost no optical loss, and the optical circuit can be miniaturized. is there.
  • the disadvantage is that the influence of changes in structural parameters such as width and thickness on optical characteristics such as propagation loss and effective refractive index is large, and manufacturing tolerance is extremely small. This is an important issue particularly when a resonator, a filter, or the like is created by a PLC.
  • the rib-type optical waveguide As an advantage of the rib-type optical waveguide, the light wave propagation loss, the above-mentioned structural tolerance, etc. are improved by an order of magnitude compared to the channel-type optical waveguide. This is an advantage when creating PLCs with various functions.
  • the minimum bending radius is about 50 microns, and it cannot be bent more steeply than the channel type optical waveguide.
  • each of the channel type optical waveguide and the rib type optical waveguide has advantages and disadvantages.
  • JP-A-8-146248 discloses an optical coupling device.
  • the optical coupling device converts the mode size.
  • the upper and lower waveguide guide layers are sandwiched between an upper clad layer and a lower clad layer having a refractive index lower than that of the waveguide guide layer.
  • a low-refractive index layer having a refractive index lower than that of the lower cladding layer is disposed below, and the thickness of at least one of the waveguide guide layer and the upper cladding layer is reduced toward the output end. .
  • Japanese Patent Application Laid-Open No. 5-249331 discloses a waveguide beam spot conversion element.
  • the waveguide-type beam spot conversion element is an optical waveguide that emits light, and has an output optical waveguide portion that emits substantially single-mode light, and a core that is continuous with the core of the output optical waveguide portion.
  • a spot size conversion optical waveguide section for converting the spot size and a light propagation section for propagating the converted spot light are disposed on the substrate.
  • the core of the optical waveguide part for spot size conversion is changed to a taper shape in the width direction toward the tip of the element, the taper is made thin in the thickness direction, and the core is spot size
  • At least one second core having a refractive index higher than that of the substrate is disposed on at least one of the upper and lower cores of the output optical waveguide unit and the spot size converting optical waveguide unit. It is characterized by that.
  • Japanese Patent Laid-Open No. 2002-374035 discloses a semiconductor laser element.
  • the semiconductor laser element includes a stacked structure in which a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer different from the first conductivity type are sequentially stacked.
  • a waveguide region is formed that restricts the spread of light in the width direction and guides light in a direction orthogonal to the width direction.
  • the waveguide region has a first waveguide region and a second waveguide region.
  • the first waveguide region is a region in which light is confined in the restricted active layer by a difference in refractive index between the active layer and the regions on both sides thereof by limiting the width of the active layer.
  • the second waveguide region is characterized in that light is confined by effectively providing a refractive index difference in the active layer.
  • JP 2006-517673 A discloses an optical device.
  • the optical device includes a single mode waveguide supporting a first optical mode in a first region and a second optical mode in a second region, the waveguide including at least one wing extending outward from the guide layer. It is out.
  • an object of the present invention is to connect a channel type optical waveguide and a rib type optical waveguide with low loss, and to complement the characteristics (advantages) of the channel type optical waveguide and the rib type optical waveguide.
  • An object of the present invention is to provide a waveguide and a manufacturing method thereof.
  • the optical waveguide of the present invention includes a first cladding layer formed on a substrate, a core layer formed on the first cladding layer, and a second cladding layer covering the first cladding layer and the core layer. And.
  • the core layer includes a rib-type optical waveguide and a channel-type optical waveguide.
  • the rib-type optical waveguide includes a slab portion formed on the first clad layer and a rib portion formed on the slab portion. The length of the slab portion extends from one end portion to the other end portion in the optical waveguide direction, and the width thereof is reduced in the optical waveguide direction.
  • the length of the rib portion extends from one end portion to the other end portion in the optical waveguide direction, the width thereof decreases in the optical waveguide direction, and is narrower than the width of the slab portion.
  • the channel-type optical waveguide includes a core portion formed on the first cladding layer. The length of the core portion extends from one end to the other end in the optical waveguide direction, and one end is connected to the other end of the slab portion. The thickness and width of the core part are equal to the thickness and width of the other end part of the slab part, respectively.
  • the channel-type optical waveguide and the rib-type optical waveguide can be connected with low loss, and the characteristics (advantages) of the channel-type optical waveguide and the rib-type optical waveguide are complemented. be able to.
  • FIG. 1 is a perspective view showing a configuration of an optical waveguide according to an embodiment of the present invention.
  • FIG. 2A shows the mode-feel shape of the fundamental mode in the waveguide cross section 111.
  • FIG. 2B shows the mode-feel shape of the fundamental mode in the waveguide cross section 112.
  • FIG. 2C shows a mode-feel shape of the fundamental mode in the waveguide cross section 113.
  • FIG. 3A shows the calculation result of the lightwave electric field amplitude in the horizontal direction (direction X) in the rib-type optical waveguide and the channel-type optical waveguide.
  • FIG. 3B shows the calculation result of the light wave electric field amplitude in the vertical direction (direction Z) superimposed on the rib type optical waveguide and the channel type optical waveguide.
  • FIG. 3A shows the calculation result of the lightwave electric field amplitude in the horizontal direction (direction X) in the rib-type optical waveguide and the channel-type optical waveguide.
  • FIG. 3B shows the calculation result of the light
  • FIG. 4A illustrates a process for manufacturing an optical waveguide according to an embodiment of the present invention.
  • FIG. 4B illustrates a process for manufacturing an optical waveguide according to an embodiment of the present invention.
  • FIG. 4C illustrates a process for manufacturing an optical waveguide according to an embodiment of the present invention.
  • FIG. 4D shows a process for manufacturing an optical waveguide according to an embodiment of the present invention.
  • FIG. 4E illustrates a process for manufacturing an optical waveguide according to an embodiment of the present invention.
  • FIG. 5 shows a 1 ⁇ 8 optical switch to which an optical waveguide according to an embodiment of the present invention is applied.
  • FIG. 1 is a perspective view showing a configuration of an optical waveguide according to an embodiment of the present invention.
  • the optical waveguide includes a first clad layer 102 formed on the substrate 101, a core layer formed on the first clad layer 102, and a second clad that covers the first clad layer 102 and the core layer.
  • a cladding layer 104 is a cladding layer 104.
  • the substrate 101, the first cladding layer 102, and the core layer constitute an SOI (Silicon on Insulator) substrate.
  • the core layer has a higher refractive index than the first cladding layer 102 and the second cladding layer 104.
  • the core layer includes a rib type optical waveguide and a channel type optical waveguide.
  • the rib-type optical waveguide includes a slab part 107 formed on the first clad layer 102 and a rib part 105 formed on the slab part 107.
  • the length of the slab part 107 and the rib part 105 extends from one end part to the other end part in the first direction Z (hereinafter referred to as the direction Z), and the width decreases monotonously in the direction Z. .
  • the slab part 107 and the rib part 105 are what is called a taper shape.
  • a direction Z represents an optical waveguide direction (light waveguide direction).
  • the length of the rib part 105 and the slab part 107 represents the length in the direction Z parallel to the substrate 101.
  • the widths of the rib portion 105 and the slab portion 107 are parallel to the substrate 101 and represent the length in the second direction X (hereinafter, direction X) perpendicular to the direction Z.
  • the thickness (height) of the rib part 105 and the slab part 107 represents the length of a third direction Y (hereinafter, direction Y) that is parallel to the substrate 101 and perpendicular to the directions Z and X Yes.
  • the widths of the one end and the other end of the rib portion 105 are 1.0 microns and 0.1 microns, respectively, and the thickness of the rib portion 105 is 1.2 microns.
  • the width of the one end part and the other end part of the rib part 105 is narrower than the width of the one end part and the other end part of the slab part 107, respectively.
  • the thickness and width of the other end of the slab 107 are 0.3 and 0.5 microns, respectively.
  • the channel type optical waveguide includes a core portion 103 formed on the first cladding layer 102.
  • the length of the core portion 103 extends from one end portion to the other end portion in the direction Z, and one end portion is connected to the other end portion of the slab portion 107.
  • the length, width, and thickness of the core portion 103 represent the lengths in the directions Z, X, and Y, respectively.
  • the thickness and width of the core portion 103 are 0.3 and 0.5 microns, respectively. That is, the thickness and width of the core portion 103 are equal to the thickness and width of the other end portion of the slab portion 107, respectively.
  • the light wave incident on the rib-type optical waveguide (rib portion 105, slab portion 107) propagates from one end of the rib portion 105 and slab portion 107 to the other end, and the connection between the rib-type optical waveguide and the channel-type optical waveguide. Propagate to unit 108.
  • the light wave incident on the channel type optical waveguide (core portion 103) propagates from one end portion of the core portion 103 to the other end portion.
  • the optical waveguide according to the embodiment of the present invention achieves the following effects.
  • FIGS. 2A to 2C show the mode feel shapes of the fundamental modes in the waveguide cross sections 111, 112, and 113 (only half in the lateral direction (direction X) in consideration of symmetry), respectively.
  • FIG. 3A shows the calculation result of the light wave electric field amplitude in the horizontal direction (direction X) in the rib type optical waveguide and the channel type optical waveguide
  • FIG. 3B shows the rib type optical waveguide and the channel type optical waveguide.
  • Fig. 5 shows the calculation result of the light wave electric field amplitude in the vertical direction (direction Z) in an overlapping manner.
  • the width and thickness of the slab portion 107 of the rib type optical waveguide are made equal to the width and thickness of the core portion 103 of the channel type optical waveguide. For this reason, since the cross-sectional shapes of the rib-type optical waveguide and the channel-type optical waveguide are equal at the connecting portion 108, the mode-field shape of the rib-type optical waveguide almost matches the mode-field shape of the channel-type optical waveguide.
  • the connecting portion 108 in addition to making the width and thickness of the slab portion 107 of the rib-type optical waveguide equal to the width and thickness of the core portion 103 of the channel-type optical waveguide,
  • the width of the rib portion 105 is preferably sufficiently smaller than the width of the core portion 103 of the channel type optical waveguide.
  • the core layer rib type optical waveguide, channel type optical waveguide
  • the first cladding layer 102 and the second cladding layer 104 contain the same (silicon). ing.
  • the effective refractive indexes also match, and the Fresnel reflection at the connection portion 108 is sufficiently suppressed. Can do. That is, according to the optical waveguide according to the embodiment of the present invention, it is possible to suppress two loss factors due to the difference between the mode feel and the effective refractive index, and to reduce the waveguide connection loss as a whole.
  • the channel-type optical waveguide and the rib-type optical waveguide can be connected with low loss, and the characteristics (advantages) of the channel-type optical waveguide and the rib-type optical waveguide ) Can be complemented.
  • a small optical functional circuit with low optical loss can be realized. That is, a channel type optical circuit is used for a portion having a waveguide bend, a rib type optical circuit is used for a straight portion, and the present embodiment is used for coupling a rib type optical waveguide and a channel type optical waveguide.
  • an optical functional circuit in which both bending loss and propagation loss are minimized can be realized.
  • [Production method] 4A-4E illustrate a process in which an optical waveguide according to an embodiment of the present invention is manufactured.
  • a first clad layer 102 which is a silicon oxide film, is formed on a substrate 101 (silicon substrate).
  • a core layer 121 which is a silicon layer having a thickness of 1.5 microns is formed on the first cladding layer 102.
  • a first insulating layer which is a silicon oxide film, is laminated (formed) on the core layer 121 by a CVD (Chemical Vapor Deposition) method.
  • the second insulating layer 122 (silicon oxide film) is formed on the core layer 121 by patterning so as to partially leave the first insulating layer by a photolithography process.
  • the second insulating layer 122 has a first shape 123 having a tapered shape and a second shape 124 having a linear shape.
  • the length of the first shape 123 extends from one end to the other end in the direction Z, and the width is monotonously reduced in the direction Z.
  • the length of the second shape 124 extends from one end to the other end in the direction Z, and one end is connected to the other end of the first shape 123.
  • the width of the second shape 124 is equal to the width of the other end portion of the first shape 123.
  • the length, width, and thickness of the first shape 123 and the second shape 124 indicate the lengths in the directions Z, X, and Y, respectively.
  • the upper surface portion of the core layer 121 is etched so that the first shape 123 and the second shape 124 have the same thickness.
  • the core layer 121 is removed by a thickness of 0.3 microns by dry etching.
  • the second insulating layer 122 is patterned so as to partially leave the third insulating layer 125 (silicon oxide layer) on the first shape 123 of the second insulating layer 122. Film) is formed.
  • the third insulating layer 125 has a third shape that is narrower than the first shape 123 and has a tapered shape.
  • a rib-type optical waveguide provided with a slab portion 107 and a rib portion 105 corresponding to the first shape 123 and the second shape 124, respectively.
  • the core layer 121 is etched so that a channel-type optical waveguide including the core portion 103 corresponding to the third shape 125 is formed. In this case, the core layer 121 is removed by a thickness of 1.3 microns by dry etching.
  • a second cladding layer 104 which is a silicon oxide film, is laminated (formed) by a CVD method on the first cladding layer 102, the rib-type optical waveguide, and the channel-type optical waveguide.
  • the manufacturing cost of the above-described high-performance optical circuit can be reduced. That is, in two dry etching processes for creating a channel type optical waveguide and a rib type optical waveguide, a spot size converter for connecting the two waveguides is formed at the same time, so that the manufacturing process is prevented from becoming complicated. Thus, it is possible to improve the yield and reduce the manufacturing cost.
  • FIG. 5 shows a 1 ⁇ 8 optical switch to which an optical waveguide according to an embodiment of the present invention is applied.
  • the optical switch includes a plurality of (2 ⁇ 2) optical switch portions 202, 203, 205, 210, 208, 212, and 213 formed on the SOI substrate 201, and a channel type optical waveguide 204.
  • the optical switch sections 202, 203, 205, 210, 208, 212, and 213 include directional couplers and rib-type optical waveguides, and are connected in a tree shape by the channel-type optical waveguide 204.
  • the optical waveguide 214 (rib type optical waveguide and channel type optical waveguide) has the same configuration as the optical waveguide described above.
  • the 2 ⁇ 2 optical switch unit has a Mach-Zehnder interference type configuration with a rib-type optical waveguide having a waveguide width of 1.0 ⁇ m, a rib height of 1.2 ⁇ m, and a slab height of 0.3 ⁇ m. It is formed of a directional coupler and two optical waveguides arranged between them. One of the two optical waveguides includes a heater 209 for providing a phase modulation function.
  • the channel type optical waveguide 204 connecting the optical switch portions has a crank shape having two bends having a curvature radius of 5 microns in order to reduce the element size.
  • the signal light input from one end of the optical switch unit 202 is distributed to the optical switch unit 203 or 205 through the channel type optical waveguide by phase adjustment by the heater, and further, the optical switch is transmitted from each optical switch through the channel type optical waveguide.
  • the signals are distributed from the units 210 to 213, and finally distributed in two directions from each optical switch unit in the same manner. Accordingly, eight output ends can be selected as output destinations of optical signals input from one end by appropriately adjusting the heaters of the respective optical switch sections.
  • a channel type optical waveguide is used in a portion that requires a sharp bend to reduce propagation loss and stability of optical characteristics (suppression of characteristic variations due to structural variations).
  • a rib-type optical waveguide is adopted in the portion where the optical fiber is required, and a small, low loss and highly reliable optical switch element can be realized.
  • the optical switch to which the optical waveguide according to the embodiment of the present invention is applied in addition to the above-described effects, it is possible to achieve both performance variation and miniaturization of the optical functional circuit.
  • a channel-type optical waveguide with a small bending radius is required.
  • the channel-type optical waveguide has a small tolerance to the structure such as width and thickness, and it is optical with a slight change in the waveguide size. It has the characteristic that the characteristics vary greatly.
  • a channel-type optical waveguide can be used only in a portion requiring waveguide bending. Therefore, it is possible to realize an optical element that is small and has little variation in optical characteristics as an entire optical functional circuit. It is.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

La présente invention concerne un guide d'ondes optique permettant de réduire, non seulement la largeur de nervure d'un guide d'ondes optique à nervure, et ce, de façon monotone, mais aussi l'épaisseur d'une partie en forme de barre ou de plaque. Au niveau de la zone de raccordement entre le guide d'ondes à nervure et un guide d'onde optique à canal, la largeur et l'épaisseur de la barre ou de la plaque du guide d'ondes à nervure sont ramenées à celles du cœur du guide d'ondes optique à canal. Dans cette zone de raccordement, les formes en coupe du guide d'ondes à nervure et du guide d'onde optique à canal sont identiques, si bien que la forme du champ de mode du guide d'ondes optique à nervure correspond presque à celle du guide d'ondes optique à canal. L'invention permet ainsi un raccordement entre guide d'ondes optique à canal et guide d'ondes optique à nervure n'occasionnant qu'une faible perte, tout en profitant de la complémentarité entre les caractéristiques des guides d'ondes à nervure et celles du guide d'onde optique à canal.
PCT/JP2008/073302 2008-02-06 2008-12-22 Guide d'ondes optique et procédé de fabrication correspondant WO2009098829A1 (fr)

Applications Claiming Priority (2)

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JP2008025957 2008-02-06
JP2008-025957 2008-10-09

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011141943A (ja) * 2010-01-07 2011-07-21 Headway Technologies Inc 熱アシスト磁気記録促進構造およびその製造方法
JP2011187149A (ja) * 2010-03-09 2011-09-22 Tdk Corp 光導波路およびそれを用いた熱アシスト磁気記録ヘッド
KR20170075439A (ko) * 2015-12-23 2017-07-03 삼성전자주식회사 광 소자 및 그 제조 방법
WO2018047683A1 (fr) * 2016-09-06 2018-03-15 旭硝子株式会社 Guide d'ondes optique en résine et guide d'ondes optique composite
JP2021060482A (ja) * 2019-10-04 2021-04-15 富士通株式会社 光半導体素子及び受信器

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US5078516A (en) * 1990-11-06 1992-01-07 Bell Communications Research, Inc. Tapered rib waveguides
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US6028973A (en) * 1996-09-20 2000-02-22 Siemens Aktiengesellschaft Arrangement of two integrated optical waveguides on the surface of a substrate
JPH1164653A (ja) * 1997-08-11 1999-03-05 Nippon Telegr & Teleph Corp <Ntt> アレイ導波路格子素子
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JPWO2018047683A1 (ja) * 2016-09-06 2019-06-24 Ａｇｃ株式会社 樹脂光導波路及び複合光導波路
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