WO2009081467A1 - Générateur de vide - Google Patents

Générateur de vide Download PDF

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Publication number
WO2009081467A1
WO2009081467A1 PCT/JP2007/074648 JP2007074648W WO2009081467A1 WO 2009081467 A1 WO2009081467 A1 WO 2009081467A1 JP 2007074648 W JP2007074648 W JP 2007074648W WO 2009081467 A1 WO2009081467 A1 WO 2009081467A1
Authority
WO
WIPO (PCT)
Prior art keywords
hole
vacuum
diffuser
nozzle
compressed air
Prior art date
Application number
PCT/JP2007/074648
Other languages
English (en)
Japanese (ja)
Inventor
Koichi Morimoto
Original Assignee
Koganei Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corporation filed Critical Koganei Corporation
Priority to PCT/JP2007/074648 priority Critical patent/WO2009081467A1/fr
Publication of WO2009081467A1 publication Critical patent/WO2009081467A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/42—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow characterised by the input flow of inducing fluid medium being radial or tangential to output flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/463—Arrangements of nozzles with provisions for mixing

Definitions

  • the present invention relates to a vacuum generator that jets compressed air from a nozzle to a diffuser to generate a negative pressure by a jet of compressed air.
  • a vacuum generator that supplies compressed air from a nozzle to a diffuser and sucks outside air into a suction hole formed in the diffuser to generate negative pressure is also called an ejector vacuum pump or simply an ejector.
  • a vacuum is generated using the viscosity of Since this type of vacuum generator has no moving parts and does not require a vacuum tank, it can be miniaturized.
  • an electronic component or the like is used as a transported object. It is used to supply negative pressure to the vacuum suction tool.
  • a vacuum generator used for sucking and transporting an object to be transported constitutes an apparatus main body by incorporating a nozzle having a diffusion hole for expanding compressed air and a diffuser having a suction hole communicating with the outside. Has a block.
  • An air supply control solenoid valve for controlling the supply of compressed air to the nozzle is attached to this block.
  • a vacuum breaking electromagnetic valve is attached to this block, the detachment of the object to be conveyed from the vacuum suction tool can be performed quickly by supplying compressed air to the vacuum suction tool when releasing the suction of the object to be conveyed by the vacuum suction tool. It can be carried out.
  • the nozzle has a diffusion hole for expanding compressed air at its tip
  • the diffuser has a suction hole formed at its base end, and mixes the jet air ejected from the nozzle and the air flowing from the suction hole. Since the mixing portion is formed, the nozzle and the diffuser are manufactured separately, and these are combined and mounted on the block of the apparatus main body.
  • the nozzle and the diffuser have a separate structure.
  • the jet flow from the nozzle will flow in the diffuser flow path, and if foreign matter in the compressed air adheres to the diffuser flow path, the desired vacuum degree will not be obtained and the vacuum performance will deteriorate, so it is necessary to replace the diffuser. is there.
  • An electromagnetic valve is attached to the outside of the block, and when the diffuser is replaced, the electromagnetic valve is removed from the block and the diffuser is separated from the nozzle.
  • the nozzle and the diffuser are processed separately, and these have a separate structure. Therefore, in order to prevent air leakage from the gap between them, the sealing material is used as the nozzle. I try to put it between the blocks. As described above, when the sealing material is mounted, a slight clearance is provided in these fitting portions in consideration of the assembling property of the nozzle and the diffuser. For this reason, it was speculated that the nozzle vibrates or displaces in the radial direction although it is slightly with respect to the diffuser when air is blown out.
  • the compressed air supplied to the nozzle has the same pressure and flow rate as compared to the conventional separate structure.
  • the integrated structure can suppress the variation in the degree of vacuum obtained in each vacuum generator and stabilize the vacuum performance, thereby improving the performance of the vacuum generator.
  • the present invention has been made by finding out the nozzle behavior when jets are discharged in this way.
  • An object of the present invention is to improve the performance of a vacuum generator.
  • a vacuum generator is a vacuum generator that generates negative pressure air by a jet of compressed air, and is formed in a circular shape that has a compressed air supply hole formed at one end thereof, communicates with the supply hole, and opens at the other end surface.
  • An inflow hole communicating with the supply hole in the base end portion, a nozzle provided with a diffusion hole in the distal end portion for inflating compressed air toward the front end surface, and a vacuum channel formed in the main block.
  • a diffuser flow path is provided that has a joining end portion in which a suction hole that communicates is formed, guides air flowing in from the diffusion hole and the suction hole toward the tip, and the nozzle is fastened to the joining end portion.
  • Said A diffuser that forms an ejector element that fits into the housing hole integrally with the slip, and a muffler that is attached to the other end surface of the main block and silences the air that has passed through the diffuser and exhausts the air from the exhaust hole to the outside. And a built-in silencer assembly.
  • the silencer assembly is detachably connected to the other end surface of the main block, and a fitting hole is formed in the silencer assembly to fit the tip of the ejector element.
  • a fitting hole is formed in the silencer assembly to fit the tip of the ejector element.
  • the vacuum generator of the present invention has the same outer diameter as the outer diameter of the diffuser and the base end of the nozzle, communicates the supply hole with the bottom surface of the supply hole, and pushes the ejector element into the bottom surface.
  • the contact hole is mounted in the receiving hole.
  • the vacuum generator according to the present invention is for vacuum breaking, wherein the compressed air from a compressed air supply source is supplied to the vacuum channel to switch between a state in which the vacuum in the vacuum channel is broken and a state in which the supply of compressed air is stopped.
  • a solenoid valve is attached to the surface of the main block.
  • the nozzle and the diffuser are integrated to form an ejector element, and the nozzle is coaxially joined to the diffuser, the compressed air from the nozzle is centered in the diffuser flow path of the diffuser. Is ejected without displacement.
  • the vacuum performance of the negative pressure air obtained compared with the case where a nozzle and a diffuser are made into a separate structure can be stabilized, and the performance of a vacuum generator can be improved.
  • the ejector element is formed by integrating the nozzle and diffuser, when the silencer assembly is removed from the main block, the tip of the ejector element protrudes from the end face of the main block, and the protruding end is held in the hand.
  • the ejector element can be easily removed from the main block. Thereby, replacement
  • FIG. (A) is an enlarged front view showing the ejector element disassembled into a nozzle and a diffuser
  • FIG. (B) is a sectional view showing the ejector element formed by integrating the nozzle and the diffuser.
  • FIG. (A) is an enlarged front view showing the ejector element disassembled into a nozzle and a diffuser
  • FIG. (B) is a sectional view showing the ejector element formed by integrating the nozzle and the diffuser.
  • FIG. (B) is a sectional view showing the ejector element formed by integrating the nozzle and the diffuser.
  • FIG. It is a pneumatic circuit diagram which shows the flow of the air in the vacuum generator shown by FIG.
  • FIG. is a schematic sectional drawing which shows the vacuum generator shown as a comparative example.
  • FIG. 1 is a perspective view showing an appearance of a vacuum generator according to an embodiment of the present invention
  • FIG. 2 is an enlarged sectional view of FIG.
  • the vacuum generator 10 includes a main block 11 having a substantially rectangular parallelepiped shape, and the main block 11 is attached to the manifold block 12. Although a plurality of vacuum generators 10 are attached to the manifold block 12, only one vacuum generator 10 is shown in FIG.
  • a screw member 14 protruding from the attachment surface 13 is provided on the main block 11, and a sheet-like gasket 15 is provided between the attachment surface 13 and the manifold block 12. It is designed to be incorporated.
  • a supply hole 16 is formed at one end of the main block 11 so as to open to the end face, and an accommodation hole 17 communicating with the supply hole 16 is formed in the main block 11.
  • the hole 17 is open to the other end surface of the main block 11.
  • Both the supply hole 16 and the accommodation hole 17 have a circular cross section, the inner diameter of the supply hole 16 is set to be smaller than the inner diameter of the accommodation hole 17, and the bottom surface of the accommodation hole 17 is abutted in the radial direction.
  • Surface 18 is formed.
  • An ejector element 19 is inserted into the accommodation hole 17 so as to abut against the abutment surface 18.
  • An air supply control solenoid valve 22 is attached to one end surface of the main block 11 via an adapter 21.
  • the adapter 21 is fixed to one end surface of the main block 11 by a plurality of screw members 23, and the air supply control electromagnetic valve 22 is fixed to the adapter 21 so as to cover the screw members 23 by the plurality of screw members 24.
  • the main block 11 is formed with a communication channel 26 that communicates with a common channel 25 formed in the manifold block 12, and the communication channel 26 supplies air via an air supply channel 27 formed in the adapter 21. It communicates with the air supply port 28 of the control solenoid valve 22.
  • the adapter 21 is formed with an output flow path 31 for communicating the output port 29 of the air supply control electromagnetic valve 22 with the supply hole 16.
  • a compressed air supply source such as a compressor (not shown) is connected to the common flow path 25, and the compressed air discharged from the compressed air supply source is supplied to the air supply flow path 27 via the communication flow path 26.
  • a rectangular parallelepiped muffler assembly 32 is detachably attached to the other end surface of the main block 11.
  • the silencer assembly 32 has a silencer block 32a, and a connection plate 35 is attached to an end surface of the silencer block 32a by a screw member 34 via a sheet-like gasket 33.
  • a plurality of nuts 38 are incorporated in the main block 11, and the silencer assembly 32 is detachably attached to the main block 11 by a plurality of screw members 39 screwed to the respective nuts 38.
  • the coupling plate 35 is formed with a fitting hole 41 into which the tip of the ejector element 19 is fitted.
  • the ejector element 19 is inserted into the step 36 of the fitting hole 41.
  • the front end surface abuts and is sandwiched between the stepped portion 36 and the abutting surface 18, and the ejector element 19 is positioned and fixed in the axial direction. Since the tip of the ejector element 19 protrudes from the end face of the main block 11, when the screw member 39 is loosened and the silencer assembly 32 is removed from the main block 11 together with the connecting plate 35, the tip of the ejector element 19 is moved to the main block. 11 is projected from the end face.
  • the muffler assembly 32 is formed with a muffler chamber 42 that communicates with the receiving hole 17, and the muffler chamber 42 is provided with a muffler 43 to mute the exhaust sound of the air discharged from the ejector element 19.
  • the muffler block 32 is formed with an exhaust hole 44 that opens to the end face thereof.
  • the ejector element 19 is formed by the nozzle 45 and the diffuser 46 being coaxially joined together.
  • FIG. 3 (A) is an enlarged front view showing the ejector element disassembled into a nozzle and a diffuser
  • FIG. 3 (B) is a cross-sectional view showing the ejector element formed by integrating the nozzle and the diffuser.
  • the nozzle 45 has a base end portion 45a having an outer diameter corresponding to the accommodation hole 17 and a tip portion 45b having a smaller diameter.
  • An inflow hole 47 communicating with the supply hole 16 is formed in the base end portion 45a, and a diffusion hole 48 for inflating compressed air toward the distal end surface is formed in the distal end portion 45b so as to communicate with the inflow hole 47.
  • the outer peripheral surface of 45b is a tapered surface 49 whose outer diameter becomes smaller toward the distal end surface.
  • the outer diameter of the diffuser 46 corresponds to the inner diameter of the accommodation hole 17, and one end portion is a joining end portion 46 a into which the tip portion 45 b of the nozzle 45 is press-fitted.
  • a press-fit hole 51 is formed in the joint end portion 46a, and an annular groove 52 is formed on the outer peripheral surface.
  • a plurality of suction holes 53 are formed in the joint end portion 46 a so as to communicate with the annular groove 52, and each suction hole 53 is formed between the inner surface of the joint end portion 46 a and the tapered surface 49 of the nozzle 45. It communicates with the mixing chamber 54.
  • a diffuser channel 55 is formed in the diffuser 46 so as to communicate with the mixing chamber 54, and the diffuser channel 55 opens at the tip end surface of the diffuser 46.
  • the diffuser channel 55 has a straight portion 55a at the center in the longitudinal direction, a reduced diameter portion 55b for guiding the air flowing out from the mixing chamber 54 to the straight portion 55a, and a diffusion portion 55c for guiding the air flowing out from the straight portion 55a.
  • the distal end side of the diffusion portion 55c is an expansion chamber 55d having a larger diameter.
  • a vacuum channel 56 is formed in the main block 11 so as to communicate with the suction hole 53 of the diffuser 46, and the vacuum channel 56 is connected to a vacuum supply port 57 formed in the manifold block 12. Communicated. Therefore, the compressed air supplied from the common flow path 25 of the manifold block 12 to the inflow hole 47 of the nozzle 45 through the air supply control solenoid valve 22 expands in the diffusion hole 48 to increase the flow velocity. The pressure drops. As a result, the vacuum flow path 56 communicating with the mixing chamber 54 is in a negative pressure state, that is, a vacuum state, and a negative pressure is supplied to a vacuum device such as a vacuum suction tool connected thereto via the vacuum supply port 57. The air that has flowed into the diffuser channel 55 from the inflow hole 47 and the suction hole 53 through the mixing chamber 54 passes through the muffler 43 and is silenced, and then is discharged to the outside through the exhaust hole 44.
  • the nozzle 45 and the diffuser 46 are separately manufactured in a shape shown in FIG. 3 by machining using a metal material.
  • the inner diameter of the press-fit hole 51 of the joint end 46a is formed to be slightly smaller than the outer diameter of the tip 45b of the nozzle 45, and as shown by the arrow in FIG. 3A, the press-fit hole 51 of the joint end 46a.
  • the nozzle 45 and a part of the diffuser 46 are elastically deformed and bonded to each other as described above. Air does not leak to the outside from the gap, and it is not necessary to install a sealing material between them. Moreover, since the nozzle 45 is integrated with the diffuser 46 to form the ejector element 19, mixing is performed when the compressed air from the inflow hole 47 and the air from the vacuum channel 56 are mixed in the mixing chamber 54. Even if a vortex is generated in the chamber 54 and the vibration caused by the generation and disappearance of the vortex propagates to the nozzle 45, the central axis of the nozzle 45 always coincides with the central axis of the diffuser 46.
  • the vacuum generator having the ejector element 19 having an integrated structure in which the nozzle 45 and the diffuser 46 are integrated is separate from the conventional one. Rather than the structure, it is possible to stabilize the vacuum performance of the negative pressure air supplied to the vacuum equipment such as a vacuum suction tool via the vacuum supply port 57.
  • the nozzle 45 may be welded between the nozzle 45 and the press-fitting hole 51 of the diffuser 46 after the nozzle 45 is press-fitted into the joint end 46 a of the diffuser 46.
  • the nozzle 45 and the diffuser 46 are integrated via the weld metal. Moreover, you may make it integrate both by an adhesive agent.
  • annular grooves 55e are formed on the outer peripheral surface of the diffuser 46, and seal materials 59a and 59b are attached to the respective annular grooves 55e.
  • the sealing material 59 a prevents air leakage from between the sound deadening cover 35 and the diffuser 46
  • the sealing material 59 b prevents air leakage from between the diffuser 46 and the accommodation hole 17.
  • a sealing material 59 c is attached to the end face of the nozzle 45 to prevent air leakage from between the nozzle 45 and the accommodation hole 17.
  • a vacuum breaking electromagnetic valve 60 is attached by a screw member 61 to the surface 58 of the main block 11, that is, the surface opposite to the attachment surface 13.
  • the main block 11 is formed with a branch flow path 62 communicating with the air supply flow path 27 of the adapter 21, and this branch flow path 62 communicates with the air supply port 63 of the vacuum break electromagnetic valve 60.
  • the main block 11 is formed with an output flow path 65 for communicating the output port 64 of the vacuum breaking electromagnetic valve 60 and the vacuum flow path 56.
  • FIG. 4 is a pneumatic circuit showing the flow of air in the vacuum generator shown in FIG.
  • the vacuum generator 10 When the vacuum generator 10 is used for a long period of time and foreign matter adheres to the diffusion hole 48 of the nozzle 45, the vacuum generation capability will be reduced, and the ejector element 19 will be replaced.
  • the silencer assembly 32 is separated from the main block 11 by loosening the screw member 39, the tip of the ejector element 19 formed integrally with the nozzle 45 and the diffuser 46 protrudes from the end face of the main block 11. Therefore, the operator can easily take out the ejector element 19 from the main block 11 and replace it with a new one while holding the protruding tip portion in his hand.
  • FIG. 5 is a schematic cross-sectional view showing a vacuum generator as a comparative example, and members having the same functions as those in the above-described embodiment are denoted by the same reference numerals.
  • the vacuum generator 10 of the present invention improved the stability of the vacuum performance.
  • the reason for this is that, as shown in FIG. 5, when the diffuser 46 and the nozzle 45 are brought into contact with each other and a sealing material 71 is mounted between them and incorporated in the main block 11, the air discharged from the nozzle 45 and the suction holes It is considered that the nozzle 45 slightly vibrates in the radial direction with respect to the diffuser 46 due to the vortex generated when the air flowing in from the mixing chamber 53 is mixed in the mixing chamber 54.
  • the nozzle 45 is press-fitted and fastened to the diffuser 46, and these are integrated to form the ejector element 19, so that the nozzle 45 is not vibrated or displaced, and the vacuum performance can be stabilized.
  • the main block 11 is formed by the two block pieces 11a and 11b. Therefore, when the foreign object adheres to the diffuser 46 and the diffuser 46 is replaced, the air supply control is performed. After the electromagnetic valve 22 is removed from the main block 11, the block pieces 11a and 11b are separated from each other. Next, after the nozzle 45 is removed, the diffuser 46 that is separated from the nozzle 45 and remains in the block piece 11a is exchanged. For this exchange, it is necessary to take out the diffuser 46 from the block piece 11a.
  • the tip of the ejector element 19 comes from the end face of the main block 11. Since it protrudes, the ejector element 19 can be easily removed, and the replacement work can be performed quickly and easily.
  • vacuum generator 10 is mounted on the manifold block 12, it can be used alone.
  • the vacuum generator of the present invention is applied, for example, to suck and convey a workpiece in a production line for manufacturing a mass-produced product.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

Un orifice de réception (17) est formé dans le bloc principal (11) d'un générateur de vide (10), et un élément éjecteur (19) est ajusté dans l'orifice de réception (17). L'élément éjecteur (19) est formé en reliant une buse (45), qui comprend une partie d'extrémité de base sur laquelle un orifice d'admission (47) est formé et une partie d'extrémité de pointe sur laquelle un orifice de diffusion (48) est formé, et un diffuseur (46) dans lequel un orifice d'aspiration (53) est formé. De l'air comprimé fourni depuis une source de pression d'air via une électrovanne (22) pour la commande de l'alimentation en air est envoyé depuis la buse (45) vers un passage d'écoulement du diffuseur (55). Un passage d'écoulement de vide (56) communiquant avec l'orifice d'aspiration (53) est réalisé dans l'état de pression négative par le flux envoyé depuis la buse. L'extrémité de pointe de l'élément éjecteur (19) fait saillie depuis la surface d'extrémité du bloc principal (11). Lorsqu'un ensemble silencieux (32) est séparé du bloc principal (11), l'extrémité de pointe de l'élément éjecteur (19) fait saillie vers l'extérieur.
PCT/JP2007/074648 2007-12-21 2007-12-21 Générateur de vide WO2009081467A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/074648 WO2009081467A1 (fr) 2007-12-21 2007-12-21 Générateur de vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/074648 WO2009081467A1 (fr) 2007-12-21 2007-12-21 Générateur de vide

Publications (1)

Publication Number Publication Date
WO2009081467A1 true WO2009081467A1 (fr) 2009-07-02

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PCT/JP2007/074648 WO2009081467A1 (fr) 2007-12-21 2007-12-21 Générateur de vide

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WO (1) WO2009081467A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012215173A (ja) * 2011-03-28 2012-11-08 Koganei Corp エジェクタ
CN103270314A (zh) * 2011-01-03 2013-08-28 韩国气压系统有限公司 快速释放真空泵
CN108930674A (zh) * 2017-05-24 2018-12-04 闫韬 一种蒸汽引射器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49133903A (fr) * 1973-04-26 1974-12-23
JPS619599U (ja) * 1984-06-20 1986-01-21 株式会社 妙徳 エゼクタポンプ
JPH07279900A (ja) * 1994-04-12 1995-10-27 Motoyama Seisakusho:Kk 真空発生器
JP2003120598A (ja) * 2001-10-11 2003-04-23 Myotoku Ltd 真空機器
JP2003222100A (ja) * 2003-02-05 2003-08-08 Nippon Pisuko:Kk 真空発生器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49133903A (fr) * 1973-04-26 1974-12-23
JPS619599U (ja) * 1984-06-20 1986-01-21 株式会社 妙徳 エゼクタポンプ
JPH07279900A (ja) * 1994-04-12 1995-10-27 Motoyama Seisakusho:Kk 真空発生器
JP2003120598A (ja) * 2001-10-11 2003-04-23 Myotoku Ltd 真空機器
JP2003222100A (ja) * 2003-02-05 2003-08-08 Nippon Pisuko:Kk 真空発生器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103270314A (zh) * 2011-01-03 2013-08-28 韩国气压系统有限公司 快速释放真空泵
JP2012215173A (ja) * 2011-03-28 2012-11-08 Koganei Corp エジェクタ
CN108930674A (zh) * 2017-05-24 2018-12-04 闫韬 一种蒸汽引射器

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