WO2009069650A1 - 耐食性部材 - Google Patents

耐食性部材 Download PDF

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Publication number
WO2009069650A1
WO2009069650A1 PCT/JP2008/071438 JP2008071438W WO2009069650A1 WO 2009069650 A1 WO2009069650 A1 WO 2009069650A1 JP 2008071438 W JP2008071438 W JP 2008071438W WO 2009069650 A1 WO2009069650 A1 WO 2009069650A1
Authority
WO
WIPO (PCT)
Prior art keywords
halogen
producing
type
corrosion
ppm
Prior art date
Application number
PCT/JP2008/071438
Other languages
English (en)
French (fr)
Inventor
Hiromasa Shimojima
Makoto Sakamaki
Yoshifumi Tsutai
Yukio Inoue
Original Assignee
Nihon Ceratec Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Ceratec Co., Ltd. filed Critical Nihon Ceratec Co., Ltd.
Priority to JP2009543826A priority Critical patent/JP5412290B2/ja
Publication of WO2009069650A1 publication Critical patent/WO2009069650A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides

Abstract

　半導体製造装置内、フラットパネルディスプレイ製造装置内または太陽電池製造装置内のようにハロゲン系腐食ガスまたはハロゲン系ガスプラズマ雰囲気中に曝される面の耐食性を高め、長期間の使用を可能にする。そのため、ＧｄまたはＹｂを含み、かつ、鉄族金属化合物が酸化物換算で５ppmより多く、５０ppmよりも少なく含まれている酸化物皮膜で耐食性部材を形成することで、ハロゲン系腐食ガスまたはハロゲン系ガスプラズマに対する十分な耐食性を確保し、パーティクルの発生を少なくする。
PCT/JP2008/071438 2007-11-30 2008-11-26 耐食性部材 WO2009069650A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009543826A JP5412290B2 (ja) 2007-11-30 2008-11-26 耐食性部材

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-311117 2007-11-30
JP2007311117 2007-11-30
JP2008-176272 2008-07-04
JP2008176272 2008-07-04

Publications (1)

Publication Number Publication Date
WO2009069650A1 true WO2009069650A1 (ja) 2009-06-04

Family

ID=40678545

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071438 WO2009069650A1 (ja) 2007-11-30 2008-11-26 耐食性部材

Country Status (3)

Country Link
JP (1) JP5412290B2 (ja)
TW (1) TWI444331B (ja)
WO (1) WO2009069650A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010106319A (ja) * 2008-10-30 2010-05-13 Nihon Ceratec Co Ltd 耐食性部材
JP2010106317A (ja) * 2008-10-30 2010-05-13 Nihon Ceratec Co Ltd 耐食性部材
JP2010126776A (ja) * 2008-11-28 2010-06-10 Nihon Ceratec Co Ltd 耐食性部材およびその製造方法
CN112908519A (zh) * 2021-01-19 2021-06-04 大正(江苏)微纳科技有限公司 一种抗化学腐蚀的透明导电薄膜及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05148610A (ja) * 1991-11-26 1993-06-15 Kurosaki Refract Co Ltd 溶射材
JP2002080954A (ja) * 2000-06-29 2002-03-22 Shin Etsu Chem Co Ltd 溶射粉及び溶射被膜
JP2004190056A (ja) * 2002-12-09 2004-07-08 Shin Etsu Chem Co Ltd 耐熱性被覆部材
JP2007138288A (ja) * 2005-10-21 2007-06-07 Shin Etsu Chem Co Ltd 多層コート耐食性部材

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05148610A (ja) * 1991-11-26 1993-06-15 Kurosaki Refract Co Ltd 溶射材
JP2002080954A (ja) * 2000-06-29 2002-03-22 Shin Etsu Chem Co Ltd 溶射粉及び溶射被膜
JP2004190056A (ja) * 2002-12-09 2004-07-08 Shin Etsu Chem Co Ltd 耐熱性被覆部材
JP2007138288A (ja) * 2005-10-21 2007-06-07 Shin Etsu Chem Co Ltd 多層コート耐食性部材

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010106319A (ja) * 2008-10-30 2010-05-13 Nihon Ceratec Co Ltd 耐食性部材
JP2010106317A (ja) * 2008-10-30 2010-05-13 Nihon Ceratec Co Ltd 耐食性部材
JP2010126776A (ja) * 2008-11-28 2010-06-10 Nihon Ceratec Co Ltd 耐食性部材およびその製造方法
CN112908519A (zh) * 2021-01-19 2021-06-04 大正(江苏)微纳科技有限公司 一种抗化学腐蚀的透明导电薄膜及其制备方法
CN112908519B (zh) * 2021-01-19 2022-04-12 大正(江苏)微纳科技有限公司 一种抗化学腐蚀的透明导电薄膜及其制备方法

Also Published As

Publication number Publication date
JPWO2009069650A1 (ja) 2011-04-14
JP5412290B2 (ja) 2014-02-12
TW200936504A (en) 2009-09-01
TWI444331B (zh) 2014-07-11

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