WO2009069230A1 - ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置 - Google Patents

ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置 Download PDF

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Publication number
WO2009069230A1
WO2009069230A1 PCT/JP2007/073223 JP2007073223W WO2009069230A1 WO 2009069230 A1 WO2009069230 A1 WO 2009069230A1 JP 2007073223 W JP2007073223 W JP 2007073223W WO 2009069230 A1 WO2009069230 A1 WO 2009069230A1
Authority
WO
WIPO (PCT)
Prior art keywords
head slider
coating layer
storage device
manufacturing
substrate
Prior art date
Application number
PCT/JP2007/073223
Other languages
English (en)
French (fr)
Inventor
Yoshiharu Kasamatsu
Takayuki Musashi
Keiji Watanabe
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/073223 priority Critical patent/WO2009069230A1/ja
Priority to JP2009543633A priority patent/JPWO2009069230A1/ja
Publication of WO2009069230A1 publication Critical patent/WO2009069230A1/ja
Priority to US12/790,228 priority patent/US20100246066A1/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/102—Manufacture of housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40—Protective measures on heads, e.g. against excessive temperature 
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/581—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following maintaining desired contact or spacing by direct interaction of forces generated between heads or supports thereof and record carriers or supports thereof, e.g. attraction-repulsion interactions
    • G11B5/582—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following maintaining desired contact or spacing by direct interaction of forces generated between heads or supports thereof and record carriers or supports thereof, e.g. attraction-repulsion interactions interactions in a magnetic field
    • G11B5/583—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following maintaining desired contact or spacing by direct interaction of forces generated between heads or supports thereof and record carriers or supports thereof, e.g. attraction-repulsion interactions interactions in a magnetic field using repulsion generated by superconductors in a magnetic field, e.g. by "Meissner effect"
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G11B5/6011—Control of flying height
    • G11B5/6064—Control of flying height using air pressure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G11B5/6011—Control of flying height
    • G11B5/607—Control of flying height using thermal means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3173—Batch fabrication, i.e. producing a plurality of head structures in one batch
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G11B5/6082—Design of the air bearing surface

Abstract

　コーティング層を厚くしてヘッドスライダから微粒子の脱落を防止することができ、かつマグネチック・スペーシングロスが発生しないヘッドスライダが提供される。 　基板上に積層により形成された素子部（１３）と、基板を切断して形成された切断面（１４～１７）と、浮上時に媒体に対向する浮上面（１８）と、コーティング層（４１）とを有するヘッドスライダ（１０）であって、コーティング層（４１）は、切断面（１４、１６）に形成され、少なくとも素子部（１３）の浮上面上にはコーティング層（４１）は形成されない。
PCT/JP2007/073223 2007-11-30 2007-11-30 ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置 WO2009069230A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2007/073223 WO2009069230A1 (ja) 2007-11-30 2007-11-30 ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置
JP2009543633A JPWO2009069230A1 (ja) 2007-11-30 2007-11-30 ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置
US12/790,228 US20100246066A1 (en) 2007-11-30 2010-05-28 Head slider, storage device, and method of manufacturing head slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/073223 WO2009069230A1 (ja) 2007-11-30 2007-11-30 ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/790,228 Continuation US20100246066A1 (en) 2007-11-30 2010-05-28 Head slider, storage device, and method of manufacturing head slider

Publications (1)

Publication Number Publication Date
WO2009069230A1 true WO2009069230A1 (ja) 2009-06-04

Family

ID=40678146

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/073223 WO2009069230A1 (ja) 2007-11-30 2007-11-30 ヘッドスライダの製造方法、ヘッドスライダ、および記憶装置

Country Status (3)

Country Link
US (1) US20100246066A1 (ja)
JP (1) JPWO2009069230A1 (ja)
WO (1) WO2009069230A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017510930A (ja) * 2014-03-18 2017-04-13 清▲華▼大学 リード／ライトコンタクトハードディスクの磁気ヘッド、ハードディスク機器及移転方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8837082B2 (en) * 2012-04-27 2014-09-16 International Business Machines Corporation Magnetic recording head having quilted-type coating
US9036297B2 (en) 2012-08-31 2015-05-19 International Business Machines Corporation Magnetic recording head having protected reader sensors and near zero recession writer poles
JP2023030363A (ja) * 2021-08-23 2023-03-08 株式会社東芝 磁気ヘッド、及びその製造方法、磁気記録再生装置、及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364684A (ja) * 1986-09-04 1988-03-23 Fujitsu Ltd ヘツドスライダ
JPH10255243A (ja) * 1997-03-14 1998-09-25 Toshiba Corp 磁気ヘッドおよびその製造方法
WO2002082442A1 (fr) * 2001-04-05 2002-10-17 Fujitsu Limited Curseur avant et son procede de fabrication

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2897462B2 (ja) * 1991-06-14 1999-05-31 富士通株式会社 薄膜磁気ヘッド組立体とその製造方法
JPH08138223A (ja) * 1994-11-10 1996-05-31 Hitachi Ltd 薄膜磁気ヘッドスライダの製造方法
JP2002074871A (ja) * 2000-08-31 2002-03-15 Tdk Corp 微小位置決め用アクチュエータを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えたディスク装置及び該ヘッドジンバルアセンブリの製造方法
JP2004288352A (ja) * 2003-03-04 2004-10-14 Tdk Corp 薄膜磁気ヘッドにおける媒体対向面のラッピング方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6364684A (ja) * 1986-09-04 1988-03-23 Fujitsu Ltd ヘツドスライダ
JPH10255243A (ja) * 1997-03-14 1998-09-25 Toshiba Corp 磁気ヘッドおよびその製造方法
WO2002082442A1 (fr) * 2001-04-05 2002-10-17 Fujitsu Limited Curseur avant et son procede de fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017510930A (ja) * 2014-03-18 2017-04-13 清▲華▼大学 リード／ライトコンタクトハードディスクの磁気ヘッド、ハードディスク機器及移転方法

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Publication number Publication date
JPWO2009069230A1 (ja) 2011-04-07
US20100246066A1 (en) 2010-09-30

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