WO2009060673A1 - 積層圧電素子及び超音波モータ - Google Patents

積層圧電素子及び超音波モータ Download PDF

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Publication number
WO2009060673A1
WO2009060673A1 PCT/JP2008/067114 JP2008067114W WO2009060673A1 WO 2009060673 A1 WO2009060673 A1 WO 2009060673A1 JP 2008067114 W JP2008067114 W JP 2008067114W WO 2009060673 A1 WO2009060673 A1 WO 2009060673A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric element
ultrasonic motor
laminated piezoelectric
groups
internal electrode
Prior art date
Application number
PCT/JP2008/067114
Other languages
English (en)
French (fr)
Inventor
Nagahide Sakai
Yasuaki Kasai
Junji Okada
Katsuji Horiuchi
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to CN200880114791A priority Critical patent/CN101849299A/zh
Publication of WO2009060673A1 publication Critical patent/WO2009060673A1/ja
Priority to US12/772,324 priority patent/US20100213792A1/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　第１の内部電極群（２３ａ，２５ａ，２７ａ）は、第１の圧電材料（２１ａ）の端部において形成された第１の露出部群（２９ａ，３３ａ，３１ａ）を備え、且つ、第２の内部電極群（２３ｂ，２５ｂ，２７ｂ）は、第２の圧電材料（２１ｂ）の端部において形成された第２の露出部群（２９ｂ，３３ｂ，３１ｂ）を備える積層圧電素子。
PCT/JP2008/067114 2007-11-05 2008-09-22 積層圧電素子及び超音波モータ WO2009060673A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880114791A CN101849299A (zh) 2007-11-05 2008-09-22 层叠压电元件以及超声波马达
US12/772,324 US20100213792A1 (en) 2007-11-05 2010-05-03 Multilayered piezoelectric element and ultrasonic motor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007287895A JP2009117559A (ja) 2007-11-05 2007-11-05 積層圧電素子及び超音波モータ
JP2007-287895 2007-11-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/772,324 Continuation US20100213792A1 (en) 2007-11-05 2010-05-03 Multilayered piezoelectric element and ultrasonic motor

Publications (1)

Publication Number Publication Date
WO2009060673A1 true WO2009060673A1 (ja) 2009-05-14

Family

ID=40625574

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067114 WO2009060673A1 (ja) 2007-11-05 2008-09-22 積層圧電素子及び超音波モータ

Country Status (4)

Country Link
US (1) US20100213792A1 (ja)
JP (1) JP2009117559A (ja)
CN (1) CN101849299A (ja)
WO (1) WO2009060673A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2270893A3 (en) * 2009-06-29 2013-10-30 Samsung Electronics Co., Ltd. Ultrasonic motor and manufacturing method of the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011061894A (ja) * 2009-09-07 2011-03-24 Olympus Corp 超音波モータ
JP5486255B2 (ja) * 2009-09-25 2014-05-07 太平洋セメント株式会社 超音波モータ
JP5486256B2 (ja) * 2009-09-25 2014-05-07 太平洋セメント株式会社 超音波モータ
JP5476079B2 (ja) * 2009-09-25 2014-04-23 太平洋セメント株式会社 超音波モータ
JP5531887B2 (ja) * 2010-09-30 2014-06-25 セイコーエプソン株式会社 電子部品、電子機器、および電子部品の製造方法
JP2013137852A (ja) * 2011-12-28 2013-07-11 Dainippon Printing Co Ltd サスペンション用基板、サスペンション、ヘッド付サスペンションおよびハードディスクドライブ
WO2013145845A1 (ja) * 2012-03-26 2013-10-03 京セラ株式会社 圧電振動部品および携帯端末
JP6274949B2 (ja) * 2014-04-04 2018-02-07 オリンパス株式会社 光ファイバスキャナ、照明装置および観察装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09312235A (ja) * 1996-05-21 1997-12-02 Rohm Co Ltd 電子部品の製造方法
JPH1084184A (ja) * 1996-09-06 1998-03-31 Sumitomo Kinzoku Electro Device:Kk セラミック多層基板の製造方法
JPH11233846A (ja) * 1998-02-17 1999-08-27 Canon Inc 積層圧電素子の製造方法
JP2002036568A (ja) * 2000-07-26 2002-02-05 Brother Ind Ltd 圧電アクチュエータ及びその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4328113B2 (ja) * 2003-03-13 2009-09-09 オリンパス株式会社 超音波モータ
JP4209465B2 (ja) * 2007-02-21 2009-01-14 パナソニック株式会社 駆動装置
JP5201873B2 (ja) * 2007-05-07 2013-06-05 パナソニック株式会社 駆動装置
JP4954783B2 (ja) * 2007-05-07 2012-06-20 パナソニック株式会社 圧電素子及び振動型アクチュエータ
US7646136B2 (en) * 2007-05-07 2010-01-12 Panasonic Corporation Piezoelectric element, vibratory actuator and drive unit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09312235A (ja) * 1996-05-21 1997-12-02 Rohm Co Ltd 電子部品の製造方法
JPH1084184A (ja) * 1996-09-06 1998-03-31 Sumitomo Kinzoku Electro Device:Kk セラミック多層基板の製造方法
JPH11233846A (ja) * 1998-02-17 1999-08-27 Canon Inc 積層圧電素子の製造方法
JP2002036568A (ja) * 2000-07-26 2002-02-05 Brother Ind Ltd 圧電アクチュエータ及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2270893A3 (en) * 2009-06-29 2013-10-30 Samsung Electronics Co., Ltd. Ultrasonic motor and manufacturing method of the same

Also Published As

Publication number Publication date
JP2009117559A (ja) 2009-05-28
US20100213792A1 (en) 2010-08-26
CN101849299A (zh) 2010-09-29

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