WO2009057203A1 - コンタクトアームの接触部の異常を検出する異常検出装置 - Google Patents

コンタクトアームの接触部の異常を検出する異常検出装置 Download PDF

Info

Publication number
WO2009057203A1
WO2009057203A1 PCT/JP2007/071203 JP2007071203W WO2009057203A1 WO 2009057203 A1 WO2009057203 A1 WO 2009057203A1 JP 2007071203 W JP2007071203 W JP 2007071203W WO 2009057203 A1 WO2009057203 A1 WO 2009057203A1
Authority
WO
WIPO (PCT)
Prior art keywords
abnormality
detecting
contact
tim
detecting device
Prior art date
Application number
PCT/JP2007/071203
Other languages
English (en)
French (fr)
Inventor
Masayoshi Ichikawa
Hiroki Ikeda
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to KR1020107007442A priority Critical patent/KR101149334B1/ko
Priority to PCT/JP2007/071203 priority patent/WO2009057203A1/ja
Priority to US12/738,780 priority patent/US8422762B2/en
Priority to JP2009538879A priority patent/JP5087634B2/ja
Priority to CN200780100960A priority patent/CN101809454A/zh
Priority to TW097139382A priority patent/TW200928395A/zh
Publication of WO2009057203A1 publication Critical patent/WO2009057203A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

Abstract

　異常検出装置（２００）は、ＴＩＭ（１６７）の画像データを取得する撮像装置（２１０）と、撮像装置（２１０）により取得されたＴＩＭ（１６７）の画像データからＴＩＭ（１６７）の外観不良（１６７ａ）を検出する不良検出部（２４１）と、不良検出部（２４１）による検出結果に基づいて、ＴＩＭ（１６７）に異常が発生しているか否かを判断する判断装置（２６０）と、を備えている。
PCT/JP2007/071203 2007-10-31 2007-10-31 コンタクトアームの接触部の異常を検出する異常検出装置 WO2009057203A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020107007442A KR101149334B1 (ko) 2007-10-31 2007-10-31 콘택트 아암의 접촉부의 이상을 검출하는 이상검출장치, 이를 구비한 전자부품 시험장치 및 전자부품 시험시스템, 및 이상검출방법
PCT/JP2007/071203 WO2009057203A1 (ja) 2007-10-31 2007-10-31 コンタクトアームの接触部の異常を検出する異常検出装置
US12/738,780 US8422762B2 (en) 2007-10-31 2007-10-31 Abnormality detecting apparatus for detecting abnormality at interface portion of contact arm
JP2009538879A JP5087634B2 (ja) 2007-10-31 2007-10-31 コンタクトアームの接触部の異常を検出する異常検出装置
CN200780100960A CN101809454A (zh) 2007-10-31 2007-10-31 检测接触臂的接触部异常的异常检测装置
TW097139382A TW200928395A (en) 2007-10-31 2008-10-14 Abnormality detecting device for detecting abnormality of contact section of contact arm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071203 WO2009057203A1 (ja) 2007-10-31 2007-10-31 コンタクトアームの接触部の異常を検出する異常検出装置

Publications (1)

Publication Number Publication Date
WO2009057203A1 true WO2009057203A1 (ja) 2009-05-07

Family

ID=40590613

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071203 WO2009057203A1 (ja) 2007-10-31 2007-10-31 コンタクトアームの接触部の異常を検出する異常検出装置

Country Status (6)

Country Link
US (1) US8422762B2 (ja)
JP (1) JP5087634B2 (ja)
KR (1) KR101149334B1 (ja)
CN (1) CN101809454A (ja)
TW (1) TW200928395A (ja)
WO (1) WO2009057203A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110279812A1 (en) * 2010-05-17 2011-11-17 Advantest Corporation Test apparatus, test method, and device interface
TWI448704B (zh) * 2011-10-12 2014-08-11 Advantest Corp 測試裝置、測試方法以及裝置介面
KR20230120556A (ko) 2022-02-09 2023-08-17 주식회사 아도반테스토 전자부품 핸들링장치 및 전자부품 시험장치

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5379742B2 (ja) * 2010-05-17 2013-12-25 株式会社アドバンテスト 試験装置、試験方法、およびデバイスインターフェイス
WO2012173285A1 (ko) * 2011-06-13 2012-12-20 주식회사 에스엠솔루션즈 테스트 핸들러의 반도체 소자 비전검사 시스템 및 그 방법
JP2013053991A (ja) * 2011-09-06 2013-03-21 Seiko Epson Corp ハンドラー及び部品検査装置
JP6052657B2 (ja) * 2012-03-13 2016-12-27 パナソニックＩｐマネジメント株式会社 対象物検証装置、対象物検証プログラム、及び対象物検証方法
KR101430965B1 (ko) * 2014-05-20 2014-08-20 테크밸리 주식회사 반도체 테이프릴의 칩 카운팅방법 및 그 디스플레이시스템
TWI564578B (zh) * 2014-12-05 2017-01-01 上海兆芯集成電路有限公司 測試頭模組及其重新修整的方法
KR102468792B1 (ko) * 2015-11-13 2022-11-18 삼성전자주식회사 인터페이스 보드, 그를 포함하는 mcp 테스트 시스템 및 이를 이용한 mcp 테스트 방법
CN109082021B (zh) * 2017-06-13 2021-01-01 广东生益科技股份有限公司 一种聚合物树脂组合物及其在高频电路板中的应用
JP2019027922A (ja) * 2017-07-31 2019-02-21 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN111951877A (zh) * 2019-05-16 2020-11-17 第一检测有限公司 检测设备
CN111951879A (zh) * 2019-05-16 2020-11-17 第一检测有限公司 检测设备
CN111951880A (zh) * 2019-05-16 2020-11-17 第一检测有限公司 检测设备
CN111951878A (zh) * 2019-05-16 2020-11-17 第一检测有限公司 检测设备、芯片承载装置及电连接单元
CN112444723B (zh) * 2019-09-04 2022-12-16 创意电子股份有限公司 测试装置及使用其的测试流程
TWI710768B (zh) * 2019-09-04 2020-11-21 創意電子股份有限公司 測試裝置及使用其的測試流程

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221827A (ja) * 2000-02-04 2001-08-17 Sony Corp 半導体ソケット劣化判定装置
WO2006109358A1 (ja) * 2005-04-11 2006-10-19 Advantest Corporation 電子部品ハンドリング装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345312A (en) * 1979-04-13 1982-08-17 Hitachi, Ltd. Method and device for inspecting the defect of a pattern represented on an article
JPH11287843A (ja) 1998-04-02 1999-10-19 Advantest Corp Ｉｃ試験装置
JP4327335B2 (ja) 2000-06-23 2009-09-09 株式会社アドバンテスト コンタクトアームおよびこれを用いた電子部品試験装置
JP4391717B2 (ja) 2002-01-09 2009-12-24 富士通マイクロエレクトロニクス株式会社 コンタクタ及びその製造方法並びにコンタクト方法
TWM270358U (en) 2004-11-17 2005-07-11 Winway Technology Co Ltd Testing seat for integrated circuit devices
JP4881051B2 (ja) * 2005-09-16 2012-02-22 株式会社アドバンテスト 導電性流体検出装置用のフィルタユニット及びそれを用いた導電性流体検出装置
KR100728979B1 (ko) 2006-04-11 2007-06-15 주식회사 하이닉스반도체 반도체 메모리 장치의 데이터 경로 불량 테스트 회로

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221827A (ja) * 2000-02-04 2001-08-17 Sony Corp 半導体ソケット劣化判定装置
WO2006109358A1 (ja) * 2005-04-11 2006-10-19 Advantest Corporation 電子部品ハンドリング装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110279812A1 (en) * 2010-05-17 2011-11-17 Advantest Corporation Test apparatus, test method, and device interface
US8885157B2 (en) * 2010-05-17 2014-11-11 Advantest Corporation Test apparatus, test method, and device interface for testing a device under test using optical signaling
TWI448704B (zh) * 2011-10-12 2014-08-11 Advantest Corp 測試裝置、測試方法以及裝置介面
KR20230120556A (ko) 2022-02-09 2023-08-17 주식회사 아도반테스토 전자부품 핸들링장치 및 전자부품 시험장치

Also Published As

Publication number Publication date
JP5087634B2 (ja) 2012-12-05
KR20100051871A (ko) 2010-05-18
US20100239155A1 (en) 2010-09-23
US8422762B2 (en) 2013-04-16
CN101809454A (zh) 2010-08-18
TW200928395A (en) 2009-07-01
JPWO2009057203A1 (ja) 2011-03-10
KR101149334B1 (ko) 2012-06-01
TWI373625B (ja) 2012-10-01

Similar Documents

Publication Publication Date Title
WO2009057203A1 (ja) コンタクトアームの接触部の異常を検出する異常検出装置
WO2009007844A3 (en) Breathalyzer test device
WO2009137520A3 (en) Systems and methods for pulmonary monitoring and treatment
WO2007032853A3 (en) Video surveillance using spatial-temporal motion analysis
WO2009045235A3 (en) Capturing data for individual physiological monitoring
WO2008051576A3 (en) Optical inclusion sensor
WO2005084358A3 (en) Damage detection device
WO2009026064A3 (en) Multi-array sensor with integrated sub-array for parallax detection and photometer functionality
SG166684A1 (en) A multimodal camera and a method for selecting an operation mode of a camera
WO2006095320A3 (en) System and method for detecting the location, size and shape of multiple objects that interact with a touch screen display
WO2006013093A3 (en) Sensor electronic
WO2007131545A3 (en) A method and apparatus for automatic comparison of data sequences
EP1985981A3 (en) Information processing apparatus and method
WO2009026195A3 (en) Apparatus and methods for fault detection at vehicle startup
WO2008070498A3 (en) Device for providing location-based data
EP1973060A3 (en) Object image detection method and object image detection device
EP2273168A3 (en) Valve failure detection
WO2006127963A3 (en) Chemical sensor
WO2008102771A1 (ja) サーバ装置
WO2008114377A1 (ja) 運動状態検出装置、運動状態検出プログラム、運動状態検出方法
TW200725195A (en) Exposure method, exposure apparatus, and unit manufacturing method
WO2008116767A3 (en) A motion classification device
WO2009002596A3 (en) Method and system for remote estimation of motion parameters
WO2006096855A3 (en) Device, system and method of detection of input unit disconnection
WO2009005025A1 (ja) 移動物体検出装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200780100960.3

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07830937

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009538879

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 20107007442

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12738780

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07830937

Country of ref document: EP

Kind code of ref document: A1