WO2009037776A1 - 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法 - Google Patents

硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法 Download PDF

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Publication number
WO2009037776A1
WO2009037776A1 PCT/JP2007/068308 JP2007068308W WO2009037776A1 WO 2009037776 A1 WO2009037776 A1 WO 2009037776A1 JP 2007068308 W JP2007068308 W JP 2007068308W WO 2009037776 A1 WO2009037776 A1 WO 2009037776A1
Authority
WO
WIPO (PCT)
Prior art keywords
coating
hard laminated
laminated coating
hard
providing
Prior art date
Application number
PCT/JP2007/068308
Other languages
English (en)
French (fr)
Inventor
Takaomi Toihara
Mei Wang
Masatoshi Sakurai
Original Assignee
Osg Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osg Corporation filed Critical Osg Corporation
Priority to DE112007003659.1T priority Critical patent/DE112007003659B4/de
Priority to PCT/JP2007/068308 priority patent/WO2009037776A1/ja
Priority to JP2009533008A priority patent/JP5180221B2/ja
Publication of WO2009037776A1 publication Critical patent/WO2009037776A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/02—Milling-cutters characterised by the shape of the cutter
    • B23C5/10—Shank-type cutters, i.e. with an integral shaft
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23C2228/10—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Laminated Bodies (AREA)
  • Drilling Tools (AREA)

Abstract

　図１に示すように、エンドミル１０の刃部１４に設けられた硬質積層被膜２０は、Ａｌx Ｃｒ1-x-y Ｙy （Ｂa Ｃb Ｏc Ｎ1-a-b-c ）にて構成されている第１被膜２２と、Ｍ（Ｂd Ｃe Ｏf Ｎ1-d-e-f ）にて構成されている第２被膜２４とが、０．２ｎｍ～１００ｎｍの範囲内の積層周期ｔで交互に多数積層されたもので、このような硬質積層被膜２０によれば、被膜硬さが例えばＨＶ０．０２５で３０００～３５００程度の非常に硬いものとなり、ＳＫＤ１１（６０ＨＲＣ）等の硬質材料に対して切削加工を行なう場合でも優れた耐摩耗性（耐久性）が得られるようになる。
PCT/JP2007/068308 2007-09-20 2007-09-20 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法 WO2009037776A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE112007003659.1T DE112007003659B4 (de) 2007-09-20 2007-09-20 Verbundschicht, mit Verbundschicht beschichtetes Werkzeug und Schichtbildungsverfahren
PCT/JP2007/068308 WO2009037776A1 (ja) 2007-09-20 2007-09-20 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法
JP2009533008A JP5180221B2 (ja) 2007-09-20 2007-09-20 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/068308 WO2009037776A1 (ja) 2007-09-20 2007-09-20 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法

Publications (1)

Publication Number Publication Date
WO2009037776A1 true WO2009037776A1 (ja) 2009-03-26

Family

ID=40467607

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/068308 WO2009037776A1 (ja) 2007-09-20 2007-09-20 硬質積層被膜、硬質積層被膜被覆工具、および被膜形成方法

Country Status (3)

Country Link
JP (1) JP5180221B2 (ja)
DE (1) DE112007003659B4 (ja)
WO (1) WO2009037776A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011045970A (ja) * 2009-08-27 2011-03-10 Osg Corp 硬質被膜、および硬質被膜被覆工具
JP2012106299A (ja) * 2010-11-16 2012-06-07 Mitsubishi Materials Corp 表面被覆切削工具
JP2014076500A (ja) * 2012-10-09 2014-05-01 Mitsubishi Materials Corp 表面被覆切削工具
WO2014123053A1 (ja) * 2013-02-07 2014-08-14 三菱重工業株式会社 表面被覆材料及びこれを利用する切削工具及び工作機械

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001105205A (ja) * 1999-10-08 2001-04-17 Hitachi Tool Engineering Ltd 硬質皮膜被覆工具
JP2003089004A (ja) * 2001-07-13 2003-03-25 Hitachi Tool Engineering Ltd 被覆切削工具
JP2006289538A (ja) * 2005-04-08 2006-10-26 Mitsubishi Materials Corp 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP2007007764A (ja) * 2005-06-30 2007-01-18 Mitsubishi Materials Corp 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3460287B2 (ja) 1994-01-21 2003-10-27 住友電気工業株式会社 耐摩耗性に優れた表面被覆部材
JP3343727B2 (ja) * 1999-05-19 2002-11-11 日立ツール株式会社 硬質皮膜被覆工具
JP4408231B2 (ja) 2004-03-11 2010-02-03 株式会社神戸製鋼所 硬質積層皮膜および硬質積層皮膜の形成方法
JP2008077764A (ja) * 2006-09-21 2008-04-03 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッドスライダの洗浄方法、製造方法および洗浄装置
JP2008240079A (ja) * 2007-03-28 2008-10-09 Tungaloy Corp 被覆部材

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001105205A (ja) * 1999-10-08 2001-04-17 Hitachi Tool Engineering Ltd 硬質皮膜被覆工具
JP2003089004A (ja) * 2001-07-13 2003-03-25 Hitachi Tool Engineering Ltd 被覆切削工具
JP2006289538A (ja) * 2005-04-08 2006-10-26 Mitsubishi Materials Corp 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP2007007764A (ja) * 2005-06-30 2007-01-18 Mitsubishi Materials Corp 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011045970A (ja) * 2009-08-27 2011-03-10 Osg Corp 硬質被膜、および硬質被膜被覆工具
JP2012106299A (ja) * 2010-11-16 2012-06-07 Mitsubishi Materials Corp 表面被覆切削工具
JP2014076500A (ja) * 2012-10-09 2014-05-01 Mitsubishi Materials Corp 表面被覆切削工具
WO2014123053A1 (ja) * 2013-02-07 2014-08-14 三菱重工業株式会社 表面被覆材料及びこれを利用する切削工具及び工作機械
CN104755201A (zh) * 2013-02-07 2015-07-01 三菱重工业株式会社 表面包覆材料、利用该表面包覆材料的切削工具及机床
US9528186B2 (en) 2013-02-07 2016-12-27 Mitsubishi Heavy Industries Machine Tool Co., Ltd. Surface-coating material, cutting tool in which said material is used, and working machine in which said material is used

Also Published As

Publication number Publication date
JP5180221B2 (ja) 2013-04-10
DE112007003659T5 (de) 2010-07-22
DE112007003659B4 (de) 2021-05-06
JPWO2009037776A1 (ja) 2011-01-06

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