WO2009028708A1 - プローブホルダおよびプローブユニット - Google Patents

プローブホルダおよびプローブユニット Download PDF

Info

Publication number
WO2009028708A1
WO2009028708A1 PCT/JP2008/065681 JP2008065681W WO2009028708A1 WO 2009028708 A1 WO2009028708 A1 WO 2009028708A1 JP 2008065681 W JP2008065681 W JP 2008065681W WO 2009028708 A1 WO2009028708 A1 WO 2009028708A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
end portion
tip
guide
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/065681
Other languages
English (en)
French (fr)
Inventor
Shigeki Ishikawa
Shogo Imuta
Takashi Nidaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Priority to JP2009530229A priority Critical patent/JP5490537B2/ja
Publication of WO2009028708A1 publication Critical patent/WO2009028708A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

　ワイヤ型のプローブを確実に保持することができるプローブホルダおよびプローブユニットを提供する。この目的のため、導電性材料を用いて形成され、ワイヤ状をなし、両端で異なる導電領域と接触可能なプローブの一方の端部を該端部の案内方向へ進退可能に保持する先端側プレートと、プローブの他方の端部を、案内方向からオフセットした位置で案内方向とは異なる方向へ進退可能に保持する基端側プレートと、を備え、先端側プレートが、同一のプローブをそれぞれ挿通する複数の先端側挿通孔からなる組を複数組有し、同じ組をなす複数の先端側挿通孔の各々の中心軸が互いに異なることとする。
PCT/JP2008/065681 2007-08-31 2008-09-01 プローブホルダおよびプローブユニット Ceased WO2009028708A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009530229A JP5490537B2 (ja) 2007-08-31 2008-09-01 プローブホルダ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007226862 2007-08-31
JP2007-226862 2007-08-31

Publications (1)

Publication Number Publication Date
WO2009028708A1 true WO2009028708A1 (ja) 2009-03-05

Family

ID=40387411

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065681 Ceased WO2009028708A1 (ja) 2007-08-31 2008-09-01 プローブホルダおよびプローブユニット

Country Status (3)

Country Link
JP (1) JP5490537B2 (ja)
TW (1) TWI391666B (ja)
WO (1) WO2009028708A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276097A (ja) * 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
JP2014112115A (ja) * 2009-12-24 2014-06-19 Gardian Japan Co Ltd 配線検査治具用上板部材
AT515628A1 (de) * 2014-04-14 2015-10-15 Rainer Dr Gaggl Vertikalnadelkarte
WO2019187957A1 (ja) * 2018-03-30 2019-10-03 日本電産リード株式会社 検査治具、及びこれを備えた検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278476A (ja) * 1991-03-05 1992-10-05 Corp Of Herumesu:Kk プリント基板テスト用アダプタ
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4788496A (en) * 1982-11-05 1988-11-29 Martin Maelzer Adapter for a printed circuit board testing device
JP4344032B2 (ja) * 1999-01-27 2009-10-14 三菱電機株式会社 ウエハテスト用プローブカード
JP2001023744A (ja) * 1999-07-06 2001-01-26 Nippon Konekuto Kogyo Kk 多極コネクタ
JP4480258B2 (ja) * 2000-03-29 2010-06-16 株式会社日本マイクロニクス 半導体デバイス検査装置における電気的接触装置
JP3978314B2 (ja) * 2001-03-26 2007-09-19 株式会社 東京ウエルズ プローブ装置及びプローブ固定方法
JP3791689B2 (ja) * 2004-01-09 2006-06-28 日本電子材料株式会社 プローブカード
JP2005338065A (ja) * 2004-04-26 2005-12-08 Koyo Technos:Kk 検査冶具および検査装置
TWI273247B (en) * 2005-11-24 2007-02-11 Mjc Probe Inc Microhole guide plate with enhanced structure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278476A (ja) * 1991-03-05 1992-10-05 Corp Of Herumesu:Kk プリント基板テスト用アダプタ
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276097A (ja) * 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
JP2014112115A (ja) * 2009-12-24 2014-06-19 Gardian Japan Co Ltd 配線検査治具用上板部材
AT515628A1 (de) * 2014-04-14 2015-10-15 Rainer Dr Gaggl Vertikalnadelkarte
AT515628B1 (de) * 2014-04-14 2020-07-15 Dr Gaggl Rainer Vertikalnadelkarte
WO2019187957A1 (ja) * 2018-03-30 2019-10-03 日本電産リード株式会社 検査治具、及びこれを備えた検査装置
JPWO2019187957A1 (ja) * 2018-03-30 2021-04-22 日本電産リード株式会社 検査治具、及びこれを備えた検査装置
US11327094B2 (en) 2018-03-30 2022-05-10 Nidec-Read Corporation Inspection jig, and inspection device including the same

Also Published As

Publication number Publication date
JP5490537B2 (ja) 2014-05-14
TWI391666B (zh) 2013-04-01
JPWO2009028708A1 (ja) 2010-12-09
TW200914839A (en) 2009-04-01

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