WO2009028708A1 - Probe holder, and probe unit - Google Patents

Probe holder, and probe unit Download PDF

Info

Publication number
WO2009028708A1
WO2009028708A1 PCT/JP2008/065681 JP2008065681W WO2009028708A1 WO 2009028708 A1 WO2009028708 A1 WO 2009028708A1 JP 2008065681 W JP2008065681 W JP 2008065681W WO 2009028708 A1 WO2009028708 A1 WO 2009028708A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
end portion
tip
guide
holder
Prior art date
Application number
PCT/JP2008/065681
Other languages
French (fr)
Japanese (ja)
Inventor
Shigeki Ishikawa
Shogo Imuta
Takashi Nidaira
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to JP2009530229A priority Critical patent/JP5490537B2/en
Publication of WO2009028708A1 publication Critical patent/WO2009028708A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Abstract

Intended is to provide a probe holder and a probe unit, which can hold a wire-type probe reliably. The probe holder comprises a tip plate for holding one end portion of a probe, which is formed of an electrically conductive material into a wire shape and which can contact different conductive regions at its two ends, in a manner to move forward and backward in the direction to guide that end portion, and a root plate for holding the other end portion of the probe at a position offset from the guide direction, in a manner to move forward and backward in a direction different from the guide direction. The tip plate includes a plurality of sets each composed of a plurality of tip insertion holes for inserting a common probe individually, and the tip insertion holes of the common set have center axes different from one another.
PCT/JP2008/065681 2007-08-31 2008-09-01 Probe holder, and probe unit WO2009028708A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009530229A JP5490537B2 (en) 2007-08-31 2008-09-01 Probe holder

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-226862 2007-08-31
JP2007226862 2007-08-31

Publications (1)

Publication Number Publication Date
WO2009028708A1 true WO2009028708A1 (en) 2009-03-05

Family

ID=40387411

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065681 WO2009028708A1 (en) 2007-08-31 2008-09-01 Probe holder, and probe unit

Country Status (3)

Country Link
JP (1) JP5490537B2 (en)
TW (1) TWI391666B (en)
WO (1) WO2009028708A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276097A (en) * 2008-05-12 2009-11-26 Nidec-Read Corp Substrate inspection jig
JP2014112115A (en) * 2009-12-24 2014-06-19 Gardian Japan Co Ltd Wiring inspection tool upper plate member
AT515628A1 (en) * 2014-04-14 2015-10-15 Rainer Dr Gaggl Vertical Adel map
WO2019187957A1 (en) * 2018-03-30 2019-10-03 日本電産リード株式会社 Inspection jig, and inspecting device provided with same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278476A (en) * 1991-03-05 1992-10-05 Corp Of Herumesu:Kk Adapter for printed board test
JP2007127488A (en) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd Probe card

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4788496A (en) * 1982-11-05 1988-11-29 Martin Maelzer Adapter for a printed circuit board testing device
JP4344032B2 (en) * 1999-01-27 2009-10-14 三菱電機株式会社 Probe card for wafer test
JP2001023744A (en) * 1999-07-06 2001-01-26 Nippon Konekuto Kogyo Kk Multipolar connector
JP4480258B2 (en) * 2000-03-29 2010-06-16 株式会社日本マイクロニクス Electrical contact device in semiconductor device inspection equipment
JP3978314B2 (en) * 2001-03-26 2007-09-19 株式会社 東京ウエルズ Probe apparatus and probe fixing method
JP3791689B2 (en) * 2004-01-09 2006-06-28 日本電子材料株式会社 Probe card
JP2005338065A (en) * 2004-04-26 2005-12-08 Koyo Technos:Kk Inspection jig and inspection equipment
TWI273247B (en) * 2005-11-24 2007-02-11 Mjc Probe Inc Microhole guide plate with enhanced structure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04278476A (en) * 1991-03-05 1992-10-05 Corp Of Herumesu:Kk Adapter for printed board test
JP2007127488A (en) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd Probe card

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009276097A (en) * 2008-05-12 2009-11-26 Nidec-Read Corp Substrate inspection jig
JP2014112115A (en) * 2009-12-24 2014-06-19 Gardian Japan Co Ltd Wiring inspection tool upper plate member
AT515628A1 (en) * 2014-04-14 2015-10-15 Rainer Dr Gaggl Vertical Adel map
AT515628B1 (en) * 2014-04-14 2020-07-15 Dr Gaggl Rainer Vertical pin card
WO2019187957A1 (en) * 2018-03-30 2019-10-03 日本電産リード株式会社 Inspection jig, and inspecting device provided with same
JPWO2019187957A1 (en) * 2018-03-30 2021-04-22 日本電産リード株式会社 Inspection jig and inspection equipment equipped with this
US11327094B2 (en) 2018-03-30 2022-05-10 Nidec-Read Corporation Inspection jig, and inspection device including the same

Also Published As

Publication number Publication date
JP5490537B2 (en) 2014-05-14
TWI391666B (en) 2013-04-01
TW200914839A (en) 2009-04-01
JPWO2009028708A1 (en) 2010-12-09

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