JP2014112115A - Wiring inspection tool upper plate member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wiring inspection jig upper plate member capable of efficiently performing wiring inspection of a wiring board by suppressing a struck trace by a probe pin of a wiring board and further capable of reducing a cost.SOLUTION: The wiring inspection jig upper plate member includes: an upper surface and a lower surface; and a through hole formed of a first round hole punched from the upper surface and a second round hole punched from the lower surface, and holding a probe pin inserted into the through hole at a prescribed angle. The first hole and the second hole may be punched so as not to penetrate the upper plate member, and the second hole may be punched with the center displaced to a prescribed position in the horizontal direction from the center of the first hole. A distance between two intersecting points in the same plane as the first hole and the second hole may be larger than the diameter of the probe pin, and the diameter of the second hole may be the same as the diameter of the first hole or larger than the diameter of the first hole.

Description

  The present invention relates to a wiring inspection jig, and more particularly to a wiring inspection jig used for electrical wiring inspection such as conduction, short circuit and insulation of a wiring board.

  Currently, when a wiring board on which electronic components are mounted is shipped, wiring inspection is performed to detect abnormalities such as short circuit, disconnection, and insulation of the wiring pattern. The wiring board refers to wiring boards including various wirings such as semiconductor packages, IC substrates, IC probe heads, liquid crystal modules, plasma display electrode plates, glass substrates, and film carriers. Generally, an inspection apparatus having a universal jig is used for wiring inspection. A universal jig means a jig corresponding to a universal inspection machine. The dedicated jig means a jig corresponding to a dedicated inspection machine. Here, a structural example of a conventional wiring inspection apparatus 2000 is illustrated in FIG.

  A conventional wiring inspection apparatus 2000 shown in FIG. 16 includes a wiring inspection jig 2500 as an upper jig, a wiring inspection jig 2100 as a lower jig, and an upper control unit 4000 electrically connected to the wiring inspection jig 2500. And a lower control unit 3000 electrically connected to the wiring inspection jig 2100. Since the same wiring inspection jig and control unit are used in the upper part and the lower part, the configuration of the lower wiring inspection jig 2100 and the control part 3000 will be described below.

  16 includes a lower plate member 2130 having an upper plate member 2110, a first intermediate member 2121, a second intermediate member 2122, an upper surface portion 2131, an intermediate portion 2132, and a lower surface portion 2133, and A probe pin group 2140 having the same length is provided. Although not shown, the control unit 3000 includes a scanner and a measurement unit that control wiring inspection of a wiring board that is an inspection object. The control unit 3000 includes a wiring inspection electrode 2150 that is brought into contact with the probe pin group 2140. A wiring board 2300 that is an inspection object includes a first inspection point 2310 and a second inspection point 2320.

  Each of the upper plate member 2110, the first intermediate member 2121, the second intermediate member 2122, and the lower plate member 2130 has a through hole. A probe pin group 2140 having the same length is inserted into each through hole with an inclination. By inserting the probe pin group 2140 with an inclination, the wiring inspection jig 2100 can perform inspection corresponding to the minute pitch of the wiring board 2300. The probe pin group 2140 is inserted into the through hole 2134 of the lower plate member 2130 and is located below the lower surface portion 2133 of the lower plate member 2130, and the second inspection point 2320 of the wiring board 2300, the wiring inspection electrode 2150, Contact. As a result, the wiring inspection can be performed using the wiring inspection jig 2100.

  In the conventional wiring inspection jig 2100 described above, in order to reduce the cost, the probe pin group 2140 is recycled and the length of the probe pin group 2140 is unified to be the same length. In the wiring inspection, when the same length of the probe pin group 2140 is used, the inclination angle of the probe pin group 2140 that contacts the wiring inspection electrode 2150 and the second inspection point 2320 of the wiring board 2300 is large. The amount of protrusion of the tip of the probe pin group 2140 from the surface of the upper plate member 2110 becomes small. On the other hand, when the inclination angle of the probe pin group 2140 that contacts the wiring inspection electrode 2150 and the second inspection point 2320 of the wiring board 2300 is small, the protruding amount of the tip of the probe pin 2140 from the surface of the upper plate member 2110 Will grow. That is, when the same length of probe pin group 2140 is used, the distal end portion of the probe pin group 2140 protruding from the surface of the upper plate member 2110 that contacts the second inspection point 2320 of the wiring board 2300 depending on the inclination angle to be inserted. Will be uneven, resulting in large and small differences.

  For this reason, in the wiring inspection, a state in which the contact between the second inspection point 2320 of the wiring board 2300 and the tip portion of the probe pin group 2140 is unstable is likely to occur. When the tip portions of the probe pin group 2140 are uneven, the tip of the probe pin 2140 that protrudes strongly hits the second inspection point 2320 because the inspection is performed by applying a predetermined pressure. That is, the dent at the tip of the probe pin group 2140 becomes large, and the wiring board 2300 may be damaged. Therefore, it is required to suppress the pressure of the probe pin that hits each second inspection point 2320.

  Therefore, for example, Patent Document 1 proposes a board inspection jig that facilitates assembly with a small number of parts even on a fine pitch of a printed wiring board and ensures contact reliability. In this Patent Document 1, a spring is disposed between the tip of the contact on the side of the inspection device arranged with an inclination and the electrode part so that the contact is brought into contact with the electrode part while suppressing the pressure. Conduct continuity test. However, in the substrate inspection jig for performing the continuity inspection of the printed wiring board described in Patent Document 1, the contact of the contact may stab the electrode, and the printed wiring board may have a dent and damage the printed wiring board. There is sex. Moreover, in patent document 1, since it arrange | positions inclining to a contactor, it is necessary to arrange | position in consideration of the length of a contactor, and work efficiency may fall.

JP 2009-250917 A

  The present invention has been made in view of the problems as described above, and when performing a wiring inspection of a wiring board using a wiring inspection jig, the dent by the probe pin group to the wiring board is suppressed, The wiring inspection process can improve the quality of wiring inspection of the wiring board and suppress the increase of contact resistance with the inspection point by stabilizing the contact of the probe pin group, thereby reducing the cost of wiring inspection. The purpose is to provide ingredients.

  A wiring inspection jig according to an embodiment of the present invention includes a plurality of first perforations formed from an upper surface, a lower surface, and a circular first hole drilled from the upper surface and a circular second hole drilled from the lower surface. An upper plate member having one through hole, and a plurality of third through holes arranged corresponding to the first through hole, and a lower plate member having an upper surface portion, an intermediate portion, and a lower surface portion And a plurality of intermediate pins disposed in each of the plurality of third through holes, and a plurality of probe pins of the same length, each upper portion of the plurality of intermediate pins being The probe pins are arranged at predetermined distances from the upper surface portion of the lower plate member for each intermediate pin, and the plurality of probe pins pass through the plurality of first through holes, respectively, with respect to the upper surface portion of the lower plate member. Inserted at a predetermined angle, each one end of the plurality of probe pins The respective other pins of the plurality of probe pins have the same amount of protrusion from the plurality of first through holes. It is characterized by.

  In the third through hole, the diameter of the intermediate portion is larger than the diameter of the upper surface portion and the lower surface portion, the diameter of the upper surface portion and the lower surface portion is smaller than the diameter of the intermediate pin, and the plurality of intermediate pins have the same length. That is, it may be arranged in the middle part of the third through hole.

  The third through-hole has a tapered shape in which the diameter of the lower surface portion and the intermediate portion is the same as that of the intermediate pin, and the diameter of the lower surface portion and the intermediate portion expands upward in the upper surface portion. The plurality of intermediate pins may have the same length, and the plurality of intermediate pins may be press-fitted into the third through hole.

  At least one having a plurality of second through holes arranged corresponding to the plurality of first through holes and the plurality of third through holes, and arranged between the upper plate member and the lower plate member. One intermediate member may be further provided.

  According to the present invention, when performing the wiring inspection of the wiring board using the wiring inspection jig, the dent caused by the probe pin group on the wiring board is suppressed, and the quality of the wiring inspection of the wiring board is improved, and In addition, since the contact of the probe pin group is stable, an increase in contact resistance with the inspection point can be suppressed, and furthermore, the use of the probe pin group of the same length provides a wiring inspection jig that can reduce the cost. Is done.

It is a perspective view which shows the wiring inspection jig which concerns on 1st Embodiment. It is a schematic sectional drawing which shows A area | region in the XX1 cross section of FIG. (A) is an enlarged view showing the D region of FIG. 2, (b) is an enlarged view showing an example of the E region of FIG. 3 (a), (c) is another view of the E region of FIG. 3 (a). It is an enlarged view which shows an example. It is a schematic sectional drawing which shows the wiring inspection apparatus which concerns on 1st Embodiment. 4A is a schematic cross-sectional view showing an example of an E region at the time of inspection of the wiring inspection apparatus shown in FIG. 4, and FIG. 4B shows another example of the E region at the time of inspection of the wiring inspection apparatus shown in FIG. It is a schematic sectional drawing. It is a schematic sectional drawing which shows the wiring inspection jig which concerns on 2nd Embodiment. It is an enlarged view which shows F area | region of FIG. It is a schematic sectional drawing which shows the state at the time of the test | inspection of the wiring inspection apparatus shown in FIG. It is an expansion perspective view which shows the upper board member for wiring inspection jigs concerning 3rd Embodiment. (A) is sectional drawing which shows XX1 of several through-holes formed in the upper-plate member based on this 3rd Embodiment shown in FIG. 9, (b) is this 3rd shown in FIG. Sectional drawing which shows YY1 of several through-holes formed in the upper board member which concerns on this embodiment, (c) is formed in the upper board member which concerns on this 3rd Embodiment shown in FIG. It is a top view which shows one through-hole. (A)-(c) are the positional relationship of the center axis | shaft of each of the 1st drilling in the case of forming one through-hole shown in Fig.10 (a), and the relationship of the insertion angle of a probe pin. FIG. (A)-(c) is a figure which shows the relationship between the corner | angular part of a probe pin and a through-hole, and the angle | corner h and the angle | corner i inside an upper board member. It is a schematic sectional drawing which shows the wiring inspection apparatus which concerns on 3rd Embodiment. It is a schematic sectional drawing which shows the wiring inspection apparatus which concerns on 3rd Embodiment. It is a schematic sectional drawing which shows the wiring inspection apparatus which concerns on 3rd Embodiment. It is a schematic sectional drawing which shows the conventional wiring inspection apparatus. It is a schematic sectional drawing which shows the upper board member for the conventional wiring inspection jig | tool.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
(Wiring inspection jig)
FIG. 1 is a schematic view showing a wiring inspection jig 1100 according to the first embodiment of the present invention. As shown in FIG. 1, the wiring inspection jig 1100 according to the first embodiment of the present invention includes an upper plate member 1110, a first intermediate member 1120, a second intermediate member 1130, a lower plate member 1140, and a plurality of members. Probe pin group 1150, first guide pin 1160, second guide pin 1161, and base member 1162. Here, FIG. 1 shows a state in which a plurality of probe pin groups 1150 are arranged in the A region, the B region, and the C region. The A region, the B region, and the C region each have a different number of probe pins. Group 1150. FIG. 1 is an example, and the plurality of probe pin groups 1150 in the first embodiment of the present invention is not limited to the illustrated number, and may have several thousand to several tens of thousands of probe pin groups.

  On the surface of the upper plate member 1110 of the wiring inspection jig 1100, the tip portions of the plurality of probe pin groups 1150 protrude. That is, the upper plate member 1110 has a plurality of first through holes 1171, and the probe pin group 1150 is inserted through the predetermined first through holes 1171.

  The first intermediate member 1120 has a plurality of second through holes 1172 corresponding to the plurality of first through holes 1171. The second intermediate member 1130 also has a plurality of third through holes 1173 corresponding to the plurality of first through holes 1171 and the plurality of second through holes 1172. The first intermediate member 1120 and the second intermediate member 1130 are provided to guide insertion of the probe pin group 1150.

  The lower plate member 1140 includes an upper surface portion 1141, an intermediate portion 1142, and a lower surface portion 1143. The lower plate member 1140 has a plurality of fourth through holes 1174 corresponding to the plurality of first through holes 1171, the plurality of second through holes 172, and the plurality of third through holes 1173. Intermediate pins 1147 are respectively disposed in the plurality of fourth through holes 1174 of the lower plate member 1140.

  The plurality of probe pin groups 1150 pass through the plurality of first through holes 1171, the plurality of second through holes 1172, and the plurality of third through holes 1173, respectively, so that the upper surface 1141 of the lower plate member 1140 is formed. It inserts with a predetermined angle with respect to each, and is inserted until it contacts the upper part of each intermediate | middle pin arrange | positioned at the some 4th through-hole 1174. FIG. The plurality of probe pin groups 1150 have the same amount of protrusion from the first through hole 1171 of the upper plate member 1110. The details that the plurality of probe pin groups 1150 have the same amount of protrusion from the first through hole 1171 will be described later.

  The first guide pins 1160 guide the inspection points of the wiring board, which is the inspection object, so as to come into contact with the plurality of probe pin groups 1150. The second guide pin 1161 is disposed to support the upper plate member 1110, the first intermediate member 1120, the second intermediate member 1130, and the lower plate member 1140 on the base member 1162. Accordingly, the upper plate member 1110, the first intermediate member 1120, the second intermediate member 1130, and the lower plate member 1140 fixed on the base member 1162 by the second guide pins 1161 are spaced apart from the base member 1162 by a predetermined distance. Will be placed.

  The wiring inspection jig 1100 includes a connector support base 1210 and a connector 1220 on the connector support base 1210. The connector 1220 is connected to the control unit by one-touch connection or cable connection. The connector 1220 is electrically connected to the wiring 1300 connected to the intermediate pin 1147 of the lower plate member 1140. Here, the connector 1220 is electrically connected using the wiring 1300 integrated with the intermediate pin 1147 of the lower plate member 1140, but without using the wiring 1300 integrated with the intermediate pin 1147 of the lower plate member 1140. For example, the electrodes may be electrically connected using an electrode electrically connected to the intermediate pin 1147. That is, it is only necessary to confirm the electrical connection in the wiring inspection.

  When performing a wiring inspection using the wiring inspection jig 1100 illustrated in FIG. 1, a wiring board is sandwiched between two wiring inspection jigs 1100 arranged to face each other. In this case, a plurality of inspection points (hereinafter referred to as a first inspection point and a second inspection point) provided on both sides of the wiring board, and probe pin groups 1150 of the two wiring inspection jigs 1100, respectively. And so that it touches. Then, pressure is applied to the two wiring inspection jigs 1100 so that the probe pin group 1150 of each wiring inspection jig 1100 comes into contact with the first inspection point and the second inspection point, respectively.

  Next, FIG. 2 shows an enlarged view of the XX1 cross section in the region A of the probe pin group 1150 of the wiring inspection jig 1100 shown in FIG. As described above, the wiring inspection jig 1100 according to the first embodiment of the present invention includes the upper plate member 1110, the first intermediate member 1120, the second intermediate member 1130, the lower plate member 1140, and the probe pin group. 1150. In the wiring inspection, a wiring board 1400 having a first inspection point 1410 and a second inspection point 1420 which are inspection objects is disposed on the upper plate member 1110 shown in FIG.

  The upper plate member 1110 has a plurality of first through holes 1171, and a plurality of probe pin groups 1150 are inserted from the first through holes 1171. Although not shown, the plurality of first through holes 1171 of the upper plate member 1110 are holes formed on the upper surface when the wiring substrate 1400 side is the upper surface and the first intermediate member 1120 side is the lower surface. The hole formed on the lower surface is formed to be larger. That is, it is preferable that the shape of the hole is a taper shape or a step shape in which the lower surface side is expanded. By forming in a taper shape or a step shape, the work efficiency of inserting a probe pin group 1150 described later is improved. Since the pressing force is applied to the upper plate member 1110 when performing the wiring inspection by the press, it is preferable that the upper plate member 1110 is thicker than the first intermediate member 1120 and the second intermediate member 1130.

  The first intermediate member 1120 has a plurality of second through holes 1172, and the plurality of second through holes 1172 correspond to the plurality of first through holes 1171. The second intermediate member 1130 has a plurality of third through holes 1173, and the plurality of third through holes 1173 correspond to the plurality of second through holes 1172. The first intermediate member 1120 and the second intermediate member 1130 are arranged to guide the probe pin group 1150 when the probe pin group 1150 is inserted. Although the first and second intermediate members are arranged in the first embodiment, the number of intermediate members is not limited to this. There may be one intermediate member or three intermediate members. The first intermediate member 1120 and the second intermediate member 1130 do not have to be arranged when it is not necessary to guide the probe pin group 1150. However, considering the strength of the probe pin group 1150, it is preferable to dispose at least one or more intermediate members. In addition, the thickness of the first intermediate member 1120 and the second intermediate member 1130 is preferably thinner than the upper plate member 1110.

  Although not shown in FIG. 1, a rubber 1135 is disposed between the second intermediate member 1130 and the lower plate member 1140. The rubber 1135 prevents the inserted probe pin group 1150 from falling. When performing the wiring inspection, it is necessary to sandwich the wiring board with a wiring inspection jig. At this time, if the wiring inspection jig 1100 is inverted, the inserted probe pin group 1150 falls, and is prevented by the rubber 1135. Although the rubber 1135 is used in the embodiment of the present invention, the material is not limited to rubber as long as the probe pin group 1150 can be prevented from falling. For example, any of sponge, vinyl, and chemical fibers can be used. There may be.

  The lower plate member 1140 includes an upper surface part 1141, an intermediate part 1142, and a lower surface part 1143. The lower plate member 1140 has a plurality of fourth through holes 1174, and the plurality of fourth through holes 1174 correspond to the plurality of third through holes 1173. A plurality of intermediate pins 1147 are respectively disposed in the plurality of fourth through holes 1174 of the lower plate member 1140.

  Here, the fourth through-hole 1174 is formed as a cylindrical stepped hole with a cross-sectional shape having a cylindrical shape with a large middle portion and a small diameter at the upper and lower portions. The stepped holes are formed by drilling from both sides of the lower plate member 1140 on the upper surface portion 1141 side and the lower plate member 1140 on the lower surface portion 1143 side using a taper drill. In addition, the taper drill used when forming the stepped hole is an example and is not limited to this, and any one can be used as long as it can form a cylindrical stepped hole. .

  A stepped hole formed in the lower plate member 1140 will be described with reference to FIG. 3A showing an enlarged view of a region D of the lower plate member 1140 shown in FIG. The fourth through hole 1174, which is a stepped hole shown in FIG. 3A, includes a first hole 1148, a second hole 1144, and a third hole 1149. The diameter of the first hole 1148 and the diameter of the third hole 1149 are smaller than the diameter of the second hole 1144. An intermediate pin 1147 is disposed inside the second hole 1144.

  In the first embodiment, the intermediate pin 1147 is used to make the height of the tip of the probe pin group 1150 constant with the lower plate member 1140 protruding from the upper plate member 1110. . Here, the intermediate pin 1147 shown in FIG. 3A is made of a conductor and is formed in a spring shape. This will be described in more detail with reference to FIG. FIG. 3B is an enlarged cross-sectional view of region E in FIG. As shown in FIG. 3B, the upper part of the intermediate pin 1147 is formed in a cup shape so that the probe pin group 1150 can be easily contacted. A body-shaped wiring 1300 is formed and connected to the control unit. Another example of the intermediate pin 1147 is shown in FIG. The intermediate pin 1147 shown in FIG. 3C is made of a conductor and is formed in a telescopic shape. Although not shown, an elastic body such as a spring is disposed inside the intermediate pin 1147 formed in a telescopic shape to absorb pressure. The upper portion of the intermediate pin 1147 is configured to have a recess toward the center so that the probe pin group 1150 can be easily contacted, and the lower portion of the intermediate pin 1147 has a wiring 1300 integrated with the intermediate pin 1147. Is formed and connected to the control unit. Note that the structure of the two intermediate pins 1147 described above is an example, and is not limited to this as long as the height of the tip of the probe pin group 1150 can be made constant.

  The diameter of the intermediate pin 1147 is larger than the diameters of the first hole 1148 and the third hole 1149 and smaller than the diameter of the second hole 1144. Here, referring to FIG. 3A, it can be seen that the stepped holes in which the intermediate pins 1147 are arranged have different depths d1 to d4 with respect to the upper surface portion 1141 of the lower plate member 1140. The different depths d1 to d4 are changed according to the position of the second inspection point 1420 of the wiring board 1400 with which the tip of the probe pin group 1150 comes into contact.

  That is, as shown in FIG. 2, the probe pin group 1150 is arranged with an inclination using probe pins having the same length. For example, the probe pin 1150 shown at the left end of FIG. 2 includes the second through hole 1172 of the first intermediate member 1120 corresponding to the first through hole 1171 of the upper plate member 1110, and the second of the first intermediate member 1120. The angle of the third through hole 1173 of the second intermediate member 1130 corresponding to the through hole 1172 of the second plate, and the angle of the fourth through hole 1174 of the lower plate member 1140 corresponding to the third through hole 1173 of the second intermediate member 1130 of FIG. Are inserted at the same angle, with θ1 being θ1, respectively. This is because the arrangement positions of the respective holes are formed so as to be positioned on a straight line at an angle θ1 when the respective members are overlapped. Similarly, the inclination of the probe pin group 1150 in the second, third, and fourth through holes of the other probe pins 1150 is inserted at angles θ2, θ3, and θ4 so as to form the same angle. . The angles θ1, θ2, θ3, and θ4 described above are determined in accordance with the position of the inspection point of the wiring board to be inspected. In addition, the angles θ1, θ2, θ3, and θ4 and the depths d1, d2, d3, and d4 of the stepped holes are set correspondingly, and the protruding amount of the probe pin group 1150 is set to be constant. .

  Here, the angles θ1 to θ4 for inclining the probe pin group 1150 are 90 ° ± 20 °, assuming that the probe pin group 1150 is 90 ° perpendicular to the upper surface portion 1141 of the lower plate member 1140. It is preferable. This is because when the angle of the probe pin group 1150 exceeds 90 ° ± 20 °, the operation of the probe pin group 1150 is restricted by the first to fourth through holes.

  In the present invention, since the probe pin group 1150 having the same pin length is arranged at a predetermined angle, the cost can be reduced, and it is possible to cope with a miniaturized wiring board. In this case, the depths d1 to d4 of the stepped holes are made to correspond to the insertion angles θ1 to θ4 of the probe pin group 1150 in order to make the protruding amount of the tip of the probe pin group 1150 constant. Thereby, the protruding amount of the tip of the probe pin group 1150 can be made constant.

  3B and 3C show a state before the wiring inspection, and show a state before pressure is applied to the intermediate pin 1147. FIG.

  In the wiring inspection jig 1100 according to the first embodiment of the present invention, the probe pin group 1150 having the same length is inclined at a predetermined angle, and the position of the intermediate pin 1147 of the lower plate member 1140 is adjusted, respectively. The tip of the probe pin group 1150 is set to a certain height. By making the tip of the probe pin group 1150 have a constant height, wiring inspection can be performed efficiently.

(Wiring inspection of wiring board)
Next, a case where the wiring inspection of the wiring board 1400 is performed using the wiring inspection apparatus 1000 will be described with reference to FIG. When the wiring inspection is performed by the wiring inspection apparatus 1000 shown in FIG. 4, as shown in FIG. 4, the wiring board 1400 is sandwiched between the wiring inspection jig 1100 and the wiring inspection jig 1100 described above. Here, the wiring inspection apparatus 1000 includes two control units (upper control unit 4000 and lower control unit 3000) that are electrically connected to the upper wiring inspection jig and the lower wiring inspection jig and control the wiring inspection of the wiring board. ) Is arranged. Although not shown, the control unit includes a scanner and a measurement unit. The both sides of the wiring board 1400 are sandwiched between the wiring inspection jigs 1100 and pressure is applied in the direction of the arrow shown in FIG. 4 to bring the first inspection point 1410 and the second inspection point 1420 into contact with the probe pin group 1150. At this time, as shown in FIG. 5A, the intermediate pin 1147 of the lower plate member 1140 is pushed down in the vertical direction, and the intermediate pin 1147 is compressed. This absorbs pressure. When the other intermediate pin 1147 shown in FIG. 3C is used, as shown in FIG. 5B, the intermediate portion of the intermediate pin 1147 is pushed down in the vertical direction, The pin 1147 is compressed. This absorbs pressure. In the first embodiment of the present invention, an example in which pressure is applied from above during wiring inspection has been described. However, the direction in which pressure is applied is not limited to this, and wiring is performed by applying pressure from below. An inspection may be performed.

  In the first embodiment of the present invention, the depth at which the intermediate pin 1147 is arranged in the lower plate member 1140 is adjusted in accordance with the insertion angle of the probe pin 1150, so that the tip of the probe pin group 1150 protrudes. The amount can be the same. As described above, the probe pin group 1150 has the shortest distance due to the first and second inspection points and the intermediate pin 1147 of the lower plate member 1140, and is inclined at a predetermined angle using the same pin length. Even when they are arranged, the amount of protrusion at the tip of the probe pin group 1150 can be made the same, so that the wiring inspection of the wiring board 1400 with stable contact and improved quality can be performed.

(Second Embodiment)
(Wiring inspection equipment)
A second embodiment of the present invention will be described with reference to FIG. In the second embodiment of the present invention, the lower plate member 1180 having an upper portion 1182, an intermediate portion 1183, and a lower portion 1184, as shown in FIG. The intermediate pin 1181 having the same length is press-fitted into the fifth through hole 1175 formed in the above. The fifth through hole 1175 is formed so that the hole becomes smaller from the upper part 1182 to the lower part 1184 of the intermediate member 1180. That is, it is preferable that the shape of the hole is a tapered shape in which the upper portion 1182 side is expanded. FIG. 6 shows an example in which the lower plate member 1140 shown in FIG. 2 is configured as the lower plate member 1180 in the second embodiment of the present invention. The lower plate member 1180 shown in FIG. 6 has the same configuration as that of the wiring inspection jig 1100 shown in FIG. 2 except for the configuration in which the lower plate member 1180 is in contact with the wiring inspection electrode 1190 via the intermediate pin 1181. Are denoted by the same reference numerals and description thereof is omitted.

  In the lower plate member 1180 shown in FIG. 6, after the fifth through hole 1175 is formed, the intermediate pin 1181 having the same length is inserted by press-fitting. Since the diameter of the intermediate pin 1181 is larger than the diameter of the fifth through hole 1175, the intermediate pin 1181 is inserted under pressure. Each intermediate pin 1181 is inserted to a predetermined depth by changing the pressure as necessary. This predetermined depth is adjusted according to the inclination angle of the corresponding probe pin. Accordingly, the amount by which the lower end portion of the intermediate pin 1181 protrudes from the lower plate member 1180 is also different. At the time of inspection, the intermediate pin 1181 is in contact with and electrically connected to the wiring inspection electrode 1190. Although not shown, a spring is provided on the lower surface of the wiring inspection electrode 1190. By providing the spring, it is possible to absorb the pressure applied during the wiring inspection.

  FIG. 7 is an enlarged schematic cross-sectional view of a portion F shown in FIG. The intermediate pins 1181 having the same length shown in FIG. 7 are arranged according to the inclination of the probe pin group 1150 at a predetermined angle. Therefore, when the intermediate pin 1181 is not inserted, the probe pin 1150 may be perpendicular to the lower plate member 1180. When the intermediate pin 1181 is inserted shallowly with respect to the depth direction of the lower plate member 1180, there is a possibility that the inclination of the probe pin is 90 ° ± 20 °. That is, the depth of the fifth through-hole 1175 into which the intermediate pin 1181 is inserted is determined by a predetermined inclination angle of the probe pin group 1150, and thereby the height at which the tip of the probe pin group 1150 protrudes is the same. it can.

(Wiring inspection of wiring board)
Next, the case where the wiring inspection of the wiring board 1400 is performed using the wiring inspection jig 1100 according to the second embodiment of the present invention will be described with reference to FIG. When the wiring inspection is performed by the wiring inspection apparatus 1000 shown in FIG. 8, the wiring substrate 1400 is sandwiched between the same wiring inspection jig 1100 and the wiring inspection jig 1100 as in the first embodiment. . Then, pressure is applied in the direction of the arrow shown in FIG. 8 to bring the first inspection point 1410 and the second inspection point 1420 into contact with the probe pin group 1150. At this time, as shown in FIG. 8, the intermediate pin 1181 of the lower plate member 1140 comes into contact with the wiring inspection electrode 1190 to achieve electrical connection. As described above, a spring that absorbs pressure when contacting the intermediate pin 1181 is provided on the lower surface of the wiring inspection electrode 1190. Therefore, even if the protruding amount of the lower end portion of the intermediate pin 1181 is different and the pressure applied to the wiring inspection electrode 1190 is different, it can be absorbed. In the second embodiment of the present invention, the side to which pressure is applied from above is explained in the wiring inspection, but the direction in which pressure is applied is not limited to this, and wiring is performed by applying pressure from below. An inspection may be performed.

  In the second embodiment of the present invention, the position of the upper end portion of the intermediate pin 1181 is changed by changing the press-fitting amount of the intermediate pin 1181 having the same length with respect to the lower plate member 1180, thereby changing the probe pin. The amount of protrusion at the tip of the group 1150 can be made the same. Therefore, even when the same pin length is used and inclined at a predetermined angle, the protruding amount of the tip portion of the probe pin group 1150 can be made the same, so that the quality is improved and the probe pin contacts As a result, the increase in contact resistance with the inspection point can be suppressed, and the wiring inspection of the wiring board 1400 can be performed efficiently.

(Third embodiment)
(Upper plate member for wiring inspection jig)
A third embodiment of the present invention will be described with reference to the drawings. FIG. 9 is an enlarged perspective view of a portion corresponding to the region A shown in FIG. 1 of an upper plate member 1500 for a wiring inspection jig according to the third embodiment of the present invention. The third embodiment of the present invention is characterized by an upper plate member 1500 for a wiring inspection jig. The upper plate member 1500 of the third embodiment can hold the probe pin at a predetermined angle by simply inserting the probe pin into the plurality of through holes 1540. This is because the center of the hole in which the through hole 1540 of the upper plate member 1500 of the third embodiment is drilled deeper than the middle position of the thickness of the upper plate member 1500 as shown in FIG. This is because it is formed. The plurality of through holes 1540 are formed from a circular first perforation 1515 perforated from the upper surface 1510 side of the upper plate member 1500 and a circular second perforation 1535 perforated from the lower surface 1530 side of the upper plate member 1500. The first perforation 1515 and the second perforation 1535 are perforated so as not to penetrate the upper plate member 1500.

  Next, a method of forming a plurality of through holes 1540 by drilling each of the upper surface 1510 and the lower surface 1530 of the upper board member 1500 for wiring inspection jig according to the third embodiment of the present invention will be described with reference to FIG. It demonstrates concretely with reference to (c). 10A to 10C illustrate an example in which the depth of each of the first perforation 1515 and the second perforation 1535 is perforated deeper than the middle position of the thickness of the upper plate member 1500. However, the depth of each drilling is not limited to this. It is also possible to set each perforation to a depth at an intermediate position of the thickness of the upper plate member 1500.

  10A is a cross-sectional view showing X-X1 of the plurality of through holes 1540 formed in the upper plate member 1500 according to the third embodiment shown in FIG. 9, and FIG. Sectional drawing which shows YY1 of the some through-hole 1540 formed in the upper-plate member 1500 which concerns on this 3rd embodiment to show, (c) is based on this 3rd Embodiment shown in FIG. 5 is a top view showing one through hole 1540 formed in the upper plate member 1500. FIG. Each through hole 1540 shown in FIGS. 10A and 10B is formed by connecting a first perforation 1515 and a second perforation 1535. Each through hole 1540 has positions of the first perforation 1515 and the second perforation 1535 as shown in the cross-sectional view taken along the line X-X1 in FIG. 10A and the cross-sectional view taken along the line Y-Y1 in FIG. By staggering, it is penetrated in a staircase pattern. In each through hole 1540, an angle h and an angle i are formed as shown in FIG. That is, the through hole 1540 has two corners inside.

  When one through hole 1540 shown in FIG. 10C is formed, a first hole drilled from the lower surface 1530 side with respect to the central axis of the first hole 1515 drilled from the upper surface 1510 side of the upper plate member 1500. The center axis of the second perforation 1535 is perforated by shifting to a predetermined position in the XY coordinates. The predetermined position is determined based on a predetermined angle and a direction in which the probe pin inserted into the through hole 1540 is inclined. However, the arrangement position of the second perforation 1535 is the distance between the intersections of the two perforations on the connection surface between the first perforation 1515 and the second perforation 1535 shown in FIG. 10C (in FIG. 10C). The “distance W” shown in FIG. 5 must be set to be equal to or larger than the diameter of the probe pin. This is because if the distance W is the same as or smaller than the diameter of the probe pin, the probe pin abuts on the connecting portion and cannot be inserted.

  With respect to the point that the inserted probe pin is held at a predetermined angle by the corners of the upper plate member 1500 of the upper plate member 1500 of the through hole 1540 and the corners h and i inside the through hole, as shown in FIG. It demonstrates in detail using a)-(c). FIGS. 11A and 11B show examples in which the central axis of the second perforation 1535 is shifted from the central axis of the first perforation 1515, and FIG. 11C shows the first perforation. An example is shown in which the central axis of the second perforation 1535 is not shifted with respect to the central axis of 1515 (the through hole is not a stepped through hole).

  FIGS. 11A to 11C show the positional relationship between the central axes of the first perforation 1515 and the second perforation 1535 and the probe pin 1150 when one through hole 1540 shown in FIG. 10A is formed. It is a figure which shows the relationship of the insertion angle. When forming one through-hole 1540 shown in FIGS. 11A and 11B, the lower plate 1530 side is from the central axis of the first drilled 1515 drilled from the upper surface 1510 side of the upper plate member 1500. The central axis of the second perforation 1535 to be perforated is shifted to a predetermined position in the XY coordinates and is perforated at the same depth as the first perforation 1515. The predetermined position is determined based on a predetermined angle and a direction in which the probe pin 1150 inserted into the through hole 1540 is inclined. However, the arrangement position of the second perforation 1535 is such that the distance W between the intersections of the two perforations on the connection surface between the first perforation 1515 and the second perforation 1535 shown in FIGS. The diameter is set to be larger than the diameter of the probe pin 1150. 11A and 11B illustrate an example in which the first perforation 1515 and the second perforation 1535 are perforated at the same depth when one through hole 1540 is formed. The depth of each drilling is not limited to the same. It is also possible to drill the first perforation 1515 and the second perforation 1535 to different depths.

  FIG. 11A shows an example in which the central axis of the second perforation 1535 is set near the central axis of the first perforation 1515. FIG. 11B shows an example in which the center axis of the second perforation 1535 is set to be shifted farther than that in FIG. In FIG. 11A, the amount of protrusion of the formed through-hole 1540 into the through-hole between the corner h and the corner i is small, and therefore the probe pin 1150 has the upper-surface corner of the upper plate member 1500, The insertion angle is regulated by the angle of the lower surface, and the insertion is performed with a small inclination. Further, in FIG. 11B, the protrusion amount of the formed through hole 1540 into the through hole at the corner h and the corner i is large, and therefore the probe pin 1150 is inserted by the corner h and the corner i. The angle is regulated, and it is inserted with a large inclination. On the other hand, in FIG.11 (c), the formed through-hole 1540 penetrates from the upper surface or the lower surface at a stretch. Accordingly, the probe pin 1150 is inserted perpendicular to the upper plate member 1500. In this way, the tilt angle of the probe pin 1150 can be adjusted by shifting the central axis of the second perforation 1535 to a predetermined position in the XY coordinates with respect to the central axis of the first perforation 1515. In this case, the location where the inclination angle of the inserted probe pin 1150 is regulated varies depending on the distance by which the central axis of the second perforation 1535 is shifted. If the amount of protrusion of the formed through hole 1540 between the angle h and the angle i into the through hole is small, the inclination angle becomes small, and if the amount of protrusion of the angle h and the angle i into the through hole is large, the inclination is inclined. The angle increases. However, since the insertion of the probe pin 1150 cannot be performed smoothly when the protrusion amount of the corners h and i into the through hole increases, it is preferable to set the protrusion amount as small as possible.

  As described above, the insertion angle of the probe pin 1150 is such that the diameter of the two perforations forming the through hole 1540, the diameter of the probe pin 1150, and the center axis of the two perforations drilled at the same depth are shifted. Can be adjusted by. In consideration of the ease of insertion of the probe pin 1150, the accuracy of insertion, and the stability of the inspection position of the probe pin 1150, the diameter of the hole and the positions of the two holes in the XY coordinates may be set.

  Furthermore, a modification example when the through hole 1540 of the above-described upper plate member 1500 is formed will be described. In this modification, in addition to shifting the central axis of the first perforation 1515 and the central axis of the second perforation 1535, the height of the portion of the first perforation 1515 and the second perforation 1535 remaining without being perforated is increased. It is characterized by adjusting the thickness. This allows fine adjustment of the inclination angle of the probe pin.

  With respect to the point that the inserted probe pin is held at a predetermined angle by the corners of the upper and lower surfaces of the upper plate member 1500 of the through-hole 1540 and the corners h and i inside the through-hole, FIG. Will be described in more detail. FIG. 12 is a diagram showing the relationship between the corners of the probe pin 1150 and the through hole 1540 and the corners h and i inside the upper plate member 1500. As shown in FIGS. 12A, 12 </ b> B, and 12 </ b> C, the inclination angle of the probe pin 1150 is such that the center of the second perforation 1535 is relative to the central axis of the first perforation 1515 that forms the through-hole 1540. The position varies depending on the position of the axis shift, the diameter of the probe pin 1150, and the height of the two unpierced portions remaining. 12A, 12B, and 12C, the diameter of the hole and the diameter of the probe pin 1150 are the same. 12A and 12B, the position of the second hole 1535 with respect to the first hole 1515 is reversed, and the inclination direction of the probe pin 1150 is reversed. In FIGS. 12A and 12B, the diameter of the hole is larger than the diameter of the probe pin 1150, and the height of the portion remaining without being drilled is low. For this reason, as shown in FIG. 12 (a), the probe pin 1150 is held by one of the corners of the perforation and the corner h or corner i, or as shown in FIG. 12 (b), the corner h And the corner i. That is, the insertion angle of the probe pin 1150 can be afforded. Also, FIGS. 12A and 12B and FIG. 12C differ in the height of the portion of the upper plate member 1500 that remains without being perforated. 12 (a) and 12 (b), the height of the portion of the upper plate member 1500 that remains without being drilled is the same, and FIG. 12 (c) shows that the upper plate member 1500 is drilled from (a) and (b). The height of the remaining part is formed high. Accordingly, in FIG. 12C, the probe pin is held by the two corners of the perforation, the corner h, and the corner i. In this case, there is no allowance for the probe pin insertion angle. As described above, in addition to shifting the central axis of the first perforation 1515 and the central axis of the second perforation 1535, the depths of the first perforation 1515 and the second perforation 1535 are adjusted. Thus, the tilt angle of the inserted probe pin can be finely adjusted.

  In the third embodiment, the diameters of the first perforation 1515 and the second perforation 1535 are the same, but the present invention is not limited to this. If the diameter of the second hole 1535 is set larger than the diameter of the first hole 1515, the inclination angle of the probe pin can be set larger, and the probe pin can be easily inserted, which is more preferable. Here, the predetermined angle for inclining the probe pin is preferably 90 ° ± 20 ° in the vertical direction of the upper plate member 1500. This is because if the angle of the probe pin exceeds 90 ° ± 20 °, the operation of the probe pin is restricted by the through hole 1540.

  As described above, the through hole 1540 of the upper plate member 1500 according to the third embodiment is formed by shifting the center positions of the two perforations and connecting the corners h and above and below the formed connecting portion. An angle i is formed. When the probe pin is inserted from the upper surface 1510 side of the upper plate member 1500, the insertion direction is regulated by the corners h and i of the connecting portion formed by the two perforations. Therefore, the inclination angle of the inserted probe pin is held at a predetermined angle by the corners of the upper plate member 1500 of the through hole 1540 with the upper and lower surfaces and the corners h and i inside the through hole. In other words, the probe pin passes through the through hole 1540 at a predetermined angle (90 ° ± 20 °), and the through hole 1540 itself has a predetermined angle.

  The above-described third embodiment of the present invention is applied not only when the through hole of the upper plate member 1500 is formed, but also when the through hole of the intermediate member used for guiding the probe pin is formed. can do. When the through hole of the intermediate member is formed by the above method, the effect of facilitating the insertion of the probe pin can be obtained as in the case of the upper plate member 1500 described above.

  Here, a conventional upper member 2110 for a wiring inspection jig will be described with reference to FIGS. 16 and 17. A conventional wiring inspection jig uses an upper plate member and a plurality of intermediate members each formed with a through hole, and the probe pins are arranged at a predetermined angle by sequentially shifting the positions of the formed through holes. Hold on. The through holes formed in the upper plate member and the plurality of intermediate members are formed so as to penetrate from the upper surface or the lower surface at a stretch. Therefore, the length of the through hole of the upper plate member with a thick layer is increased, and the inclination angle of the probe pin to be inserted is inevitably restricted, and the degree of freedom of the angle is lowered. Therefore, in order to secure the degree of freedom of the angle, in the conventional upper plate member 2110 for wiring inspection jig, as shown in FIG. 17, the back side of the area where the through hole 2650 is arranged is shaved (referred to as “ It was referred to as “sitting down”), and the length of the through hole 2650 was shortened to ensure the degree of freedom of the angle. For this reason, the strength of the upper plate member 2110 itself has been reduced, causing damage and the like. Further, since the upper plate member and the plurality of intermediate members are arranged, the height of the wiring inspection jig itself is inevitably increased. Moreover, in order to insert one probe pin so as to reach the lower plate member, it is necessary to penetrate a number of through-holes, so that a long time is required for the operation. On the other hand, in the upper plate member 1500 of the third embodiment described above, since the through hole 1540 itself has a predetermined angle, the probe pin is held at a predetermined angle only by inserting the probe pin into the through hole 1540. . Accordingly, it is possible to omit the intermediate member or to reduce the number of sheets as much as possible. In addition, it is not necessary to sit through the area where the through hole 1540 is arranged in order to ensure the degree of freedom of the angle, and the strength of the upper plate member 1500 can be ensured. Further, since the lower plate member can be easily inserted at a predetermined angle simply by inserting the probe pin into the through hole 1540, the working efficiency is dramatically improved.

  The upper plate member 1500 according to the third embodiment may be combined with the lower plate member of the conventional wiring inspection jig, or the lower plate according to the first and second embodiments of the present invention described above. It can also be combined with members. An example of a wiring inspection apparatus having a wiring inspection jig in combination with each of them is shown in FIGS. FIG. 13 is a cross-sectional view showing a wiring inspection apparatus in which an upper plate member 1500 according to the third embodiment of the present invention is combined with a lower plate member 2130 of a conventional wiring inspection jig. FIG. 14 is a cross-sectional view showing a wiring inspection apparatus in which an upper plate member 1500 according to the third embodiment of the present invention and a lower plate member 1140 according to the first embodiment of the present invention are combined. . FIG. 15 is a cross-sectional view showing a wiring inspection apparatus in which an upper plate member 1500 according to the third embodiment of the present invention and a lower plate member 1180 according to the second embodiment of the present invention are combined.

  As shown in FIG. 13, the wiring inspection jig 1100 according to the third embodiment of the present invention includes an upper plate member 1500, a lower plate member 2130, and a plurality of probe pin groups 1150. On the surface of the upper plate member 1500 of the wiring inspection jig 1100, the tip portions of the plurality of probe pin groups 1150 protrude. That is, the upper plate member 1500 has a plurality of first through holes 1540, and the probe pin group 1150 is inserted through the predetermined first through hole 1540. The first through hole 1540 is formed by connecting the first perforation 1515 and the second perforation 1535, although not shown.

  The lower plate member 2130 includes an upper surface portion 2131, an intermediate portion 2132, and a lower surface portion 2133. The lower plate member 2130 has a plurality of second through holes 1520 corresponding to the plurality of first through holes 1540.

  The plurality of probe pin groups 1150 are inserted at a predetermined angle with respect to the upper surface 2131 of the lower plate member 2130 by passing through the plurality of first through holes 1540 and the plurality of second through holes 1520, respectively. .

  Since the wiring inspection apparatus shown in FIG. 13 has the upper plate member 1500 described above, the intermediate member can be omitted or the number of sheets can be reduced as much as possible. Further, the strength of the upper plate member 1500 itself can be ensured. Furthermore, the probe pin can be easily inserted at a predetermined angle, and the working efficiency can be improved. Note that the amount of protrusion from the upper plate member 1500 of the probe pin group is different.

  The components of the wiring inspection apparatus shown in FIGS. 14 and 15 have been described above and thus will not be described in detail. However, in any wiring inspection apparatus, intermediate members may be omitted or the number of sheets may be minimized. it can. Further, the protruding amount of the probe pin group from the upper plate member 1500 can be made the same. Therefore, the working efficiency can be dramatically improved and the height of the wiring inspection jig can be suppressed. Also, when performing the wiring inspection of the wiring board, the dent caused by the probe pin group on the wiring board is suppressed. In addition, the quality of the wiring inspection of the wiring board is improved and the contact of the probe pin group is stabilized, so that an increase in contact resistance with the inspection point can be suppressed, and furthermore, the probe pin group having the same length is used. Therefore, the cost can be reduced.

  DESCRIPTION OF SYMBOLS 1000 ... Wiring inspection apparatus, 1100 ... Wiring inspection jig, 1110 ... Upper plate member, 1120 ... First intermediate member, 1130 ... Second intermediate member, 1140 ... Lower plate member, 1147 ... Intermediate pin, 1150 ... Probe pin Group, 1160 ... 1st guide pin, 1161 ... 2nd guide pin, 1162 ... Base member, 1171 ... 1st through-hole, 1172 ... 2nd through-hole, 1173 ... 3rd through-hole, 1174 ... 1st 4 through holes, 1175... Fifth through hole, 1181... Intermediate pin, 1190... Wiring inspection electrode, 1210... Connector support base, 1220. Point, 1420, second inspection point, 1500, upper plate member.

Claims (6)

The top surface;
The bottom surface,
A through hole formed from a circular first hole drilled from the upper surface and a circular second hole drilled from the lower surface;
An upper plate member for a wiring inspection jig that holds a probe pin inserted into the through hole at a predetermined angle.   The upper plate member for a wiring inspection jig according to claim 1, wherein the first drilling and the second drilling are each drilled so as not to penetrate the upper plate member.   The upper plate member for a wiring inspection jig according to claim 2, wherein the second perforation is perforated with a center shifted from the center of the first perforation to a predetermined position in the horizontal direction.   4. The upper part for a wiring inspection jig according to claim 3, wherein a distance between two intersections on the same plane of the first perforation and the second perforation is larger than a diameter of the probe pin. Plate member.   5. The wiring inspection treatment according to claim 1, wherein a diameter of the second perforation is equal to or larger than a diameter of the first perforation. Tool upper plate member.   The upper plate member for a wiring inspection jig according to claim 1, wherein the predetermined angle is 90 ° ± 20 ° with respect to a vertical direction.

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