WO2009028537A1 - 製造装置、情報処理方法、及びプログラム - Google Patents

製造装置、情報処理方法、及びプログラム Download PDF

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Publication number
WO2009028537A1
WO2009028537A1 PCT/JP2008/065271 JP2008065271W WO2009028537A1 WO 2009028537 A1 WO2009028537 A1 WO 2009028537A1 JP 2008065271 W JP2008065271 W JP 2008065271W WO 2009028537 A1 WO2009028537 A1 WO 2009028537A1
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WIPO (PCT)
Prior art keywords
function
execution
propriety
section
manufacturing equipment
Prior art date
Application number
PCT/JP2008/065271
Other languages
English (en)
French (fr)
Inventor
Ryoko Mimura
Noriki Shioyama
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Publication of WO2009028537A1 publication Critical patent/WO2009028537A1/ja

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/60—Protecting data
    • G06F21/62—Protecting access to data via a platform, e.g. using keys or access control rules
    • G06F21/6218—Protecting access to data via a platform, e.g. using keys or access control rules to a system of files or objects, e.g. local or distributed file system or database
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2221/00—Indexing scheme relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F2221/21—Indexing scheme relating to G06F21/00 and subgroups addressing additional information or applications relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F2221/2149—Restricted operating environment

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Security & Cryptography (AREA)
  • Bioethics (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Storage Device Security (AREA)

Abstract

【課題】製造装置における各機能の実行の可否を容易に管理することができる製造装置を提供する。 【解決手段】被処理基板に対する半導体プロセスを行う製造装置３０であり、製造装置３０の使用の可否を示す装置可否情報及び各機能の実行の可否を示す機能可否情報に対応するライセンスキーを受け付けるライセンスキー受付部３１と、受け付けられたライセンスキーに対応する装置可否情報及び機能可否情報を用いて、製造装置３０における各機能の実行の可否を判断する機能認証部３３と、各機能の処理を実行する実行部３４と、実行部３４による各機能の実行を指示する実行指示を受け付ける実行指示受付部３５と、機能認証部３３による可否の判断に応じて、実行部３４によって実行することが許可されていないと判断された機能が実行されないように制御する実行制御部３６とを備える。
PCT/JP2008/065271 2007-08-29 2008-08-27 製造装置、情報処理方法、及びプログラム WO2009028537A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-222680 2007-08-29
JP2007222680 2007-08-29

Publications (1)

Publication Number Publication Date
WO2009028537A1 true WO2009028537A1 (ja) 2009-03-05

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ID=40387255

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PCT/JP2008/065271 WO2009028537A1 (ja) 2007-08-29 2008-08-27 製造装置、情報処理方法、及びプログラム

Country Status (2)

Country Link
TW (1) TWI478261B (ja)
WO (1) WO2009028537A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013178845A (ja) * 2013-06-18 2013-09-09 Ricoh Co Ltd ライセンス移行システム
JP2014165476A (ja) * 2013-02-28 2014-09-08 Dainippon Screen Mfg Co Ltd 製造装置およびパラメータ変更方法
WO2016098887A1 (ja) * 2014-12-19 2016-06-23 株式会社日立国際電気 処理装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001143981A (ja) * 1999-07-29 2001-05-25 Applied Materials Inc コンピュータ統合製造技術
JP2001326151A (ja) * 2000-05-16 2001-11-22 Nec Corp 半導体集積回路製作システム
JP2004259088A (ja) * 2003-02-27 2004-09-16 Hitachi Kokusai Electric Inc 半導体製造装置のソフトウエア提供システム
JP2005107878A (ja) * 2003-09-30 2005-04-21 Toshiba Corp 半導体プロセス技術情報の提供システム、提供方法、及び購入方法
JP2007173336A (ja) * 2005-12-20 2007-07-05 Nikon Corp 機能供給方法、露光方法、露光装置、測定・検査方法、測定・検査装置、機能供給システム、プログラム、記録媒体及び提供条件決定方法
JP2007193579A (ja) * 2006-01-19 2007-08-02 Tokyo Electron Ltd 基板処理装置、ライセンス管理プログラム、ライセンス情報提供装置、ライセンス情報提供プログラム、ライセンス管理システム及び記録媒体

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI284846B (en) * 2002-12-24 2007-08-01 Powerchip Semiconductor Corp Semiconductor automation system for a daily check and method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001143981A (ja) * 1999-07-29 2001-05-25 Applied Materials Inc コンピュータ統合製造技術
JP2001326151A (ja) * 2000-05-16 2001-11-22 Nec Corp 半導体集積回路製作システム
JP2004259088A (ja) * 2003-02-27 2004-09-16 Hitachi Kokusai Electric Inc 半導体製造装置のソフトウエア提供システム
JP2005107878A (ja) * 2003-09-30 2005-04-21 Toshiba Corp 半導体プロセス技術情報の提供システム、提供方法、及び購入方法
JP2007173336A (ja) * 2005-12-20 2007-07-05 Nikon Corp 機能供給方法、露光方法、露光装置、測定・検査方法、測定・検査装置、機能供給システム、プログラム、記録媒体及び提供条件決定方法
JP2007193579A (ja) * 2006-01-19 2007-08-02 Tokyo Electron Ltd 基板処理装置、ライセンス管理プログラム、ライセンス情報提供装置、ライセンス情報提供プログラム、ライセンス管理システム及び記録媒体

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165476A (ja) * 2013-02-28 2014-09-08 Dainippon Screen Mfg Co Ltd 製造装置およびパラメータ変更方法
JP2013178845A (ja) * 2013-06-18 2013-09-09 Ricoh Co Ltd ライセンス移行システム
WO2016098887A1 (ja) * 2014-12-19 2016-06-23 株式会社日立国際電気 処理装置
JPWO2016098887A1 (ja) * 2014-12-19 2017-10-19 株式会社日立国際電気 処理装置

Also Published As

Publication number Publication date
TWI478261B (zh) 2015-03-21
TW200933780A (en) 2009-08-01

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