WO2009017196A1 - 流量制御弁及び流量制御弁用のスプール位置検出装置 - Google Patents

流量制御弁及び流量制御弁用のスプール位置検出装置 Download PDF

Info

Publication number
WO2009017196A1
WO2009017196A1 PCT/JP2008/063774 JP2008063774W WO2009017196A1 WO 2009017196 A1 WO2009017196 A1 WO 2009017196A1 JP 2008063774 W JP2008063774 W JP 2008063774W WO 2009017196 A1 WO2009017196 A1 WO 2009017196A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow rate
control valve
rate control
coil
probe
Prior art date
Application number
PCT/JP2008/063774
Other languages
English (en)
French (fr)
Inventor
Atsutoshi Goto
Original Assignee
Atsutoshi Goto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atsutoshi Goto filed Critical Atsutoshi Goto
Priority to EP08791989.0A priority Critical patent/EP2172683B1/en
Priority to JP2009525450A priority patent/JP5506385B2/ja
Priority to CN200880101199XA priority patent/CN101772667B/zh
Priority to US12/671,396 priority patent/US8555918B2/en
Publication of WO2009017196A1 publication Critical patent/WO2009017196A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B13/0442—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors with proportional solenoid allowing stable intermediate positions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0603—Multiple-way valves
    • F16K31/061—Sliding valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8175—Plural
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8242—Electrical

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetically Actuated Valves (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Electromagnets (AREA)

Abstract

　流量制御弁のスプール１２の一端に取り付けられる磁気応答性のターゲット・プローブ３１と、スリーブ１１の一端に取り付けられるセンサ・ハウジング３２とを有する。センサ・ハウジング３２はターゲット・プローブ３１の侵入を許す内部空間を形成する筒部３３を有し、筒部３３の周囲には軸方向に所定間隔を空けて配置された第１及び第２のコイルＣ１，Ｃ２が設けられる。プローブ３１は、コイルに対する磁気応答性が該プローブの直線位置に応じて一方向に漸次変化する構造を成している。第１コイルＣ１はプローブ３１に感応し、第２コイルＣ２は感応しないように配されている。第１コイルＣ１のインピーダンスがプローブ３１の直線位置に応じて変化し、第１及び第２のコイルの出力を差動合成することにより、プローブ３１の直線位置を検出する。
PCT/JP2008/063774 2007-07-31 2008-07-31 流量制御弁及び流量制御弁用のスプール位置検出装置 WO2009017196A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08791989.0A EP2172683B1 (en) 2007-07-31 2008-07-31 Flow rate control valve and flow rate control valve spool position detection device
JP2009525450A JP5506385B2 (ja) 2007-07-31 2008-07-31 流量制御弁及び流量制御弁用のスプール位置検出装置
CN200880101199XA CN101772667B (zh) 2007-07-31 2008-07-31 流量控制阀以及流量控制阀用的滑阀位置检测装置
US12/671,396 US8555918B2 (en) 2007-07-31 2008-07-31 Flow rate control valve and spool position detection device for the flow rate control valve

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-198214 2007-07-31
JP2007198214 2007-07-31

Publications (1)

Publication Number Publication Date
WO2009017196A1 true WO2009017196A1 (ja) 2009-02-05

Family

ID=40304424

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063774 WO2009017196A1 (ja) 2007-07-31 2008-07-31 流量制御弁及び流量制御弁用のスプール位置検出装置

Country Status (5)

Country Link
US (1) US8555918B2 (ja)
EP (1) EP2172683B1 (ja)
JP (1) JP5506385B2 (ja)
CN (2) CN101772667B (ja)
WO (1) WO2009017196A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221112A (zh) * 2010-04-14 2011-10-19 南京理工大学 气动/液压内磁式位置检测滑阀
JP2012219840A (ja) * 2011-04-04 2012-11-12 Jtekt Corp ソレノイドバルブ装置、およびこれを備える油圧装置、およびこれを備える油圧パワーステアリング装置
JP2014211232A (ja) * 2013-04-18 2014-11-13 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ 流量制御弁構成アッセンブリ
WO2016117063A1 (ja) * 2015-01-22 2016-07-28 株式会社 島津製作所 コントロールバルブ
JP2019015657A (ja) * 2017-07-10 2019-01-31 三木 篤子 位置検出装置
JP2021119362A (ja) * 2017-03-30 2021-08-12 株式会社東京精密 渦電流式変位計

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2472004A (en) * 2009-07-20 2011-01-26 Ultronics Ltd Control arrangement for controlling movement of a differential piston in a hydraulic circuit
DE102010043637A1 (de) * 2010-11-09 2012-05-10 Ebe Elektro-Bau-Elemente Gmbh Weggeber
DE102012217452B4 (de) * 2012-09-26 2015-05-07 Skf Lubrication Systems Germany Gmbh Schmierstoffverteiler für die Abgabe von Schmierstoff an mindestens eine Schmierstelle sowie Verfahren zum Betrieb desselben
CN102979948B (zh) * 2012-11-30 2014-05-21 中国第一汽车股份有限公司无锡油泵油嘴研究所 柴油机电控系统电磁阀关闭时刻检测电路
EP2848821B1 (en) * 2013-09-12 2016-11-02 Start Elevator S.r.l. Flow control and check valve for a hydraulic control circuit of a lifting installation
DE102014226617A1 (de) * 2014-12-19 2016-06-23 Robert Bosch Gmbh Antriebsregelvorrichtung für einen elektro-hydraulischen Antrieb
DE102015202437A1 (de) * 2015-02-11 2016-08-11 Robert Bosch Gmbh Verfahren zum Betreiben eines an eine elektrische Maschine angeschlossenen aktiven Umrichters und Mittel zu dessen Implementierung
DE102015202440A1 (de) * 2015-02-11 2016-08-11 Robert Bosch Gmbh Verfahren zum Betreiben eines an eine elektrische Maschine angeschlossenen aktiven Umrichters und Mittel zu dessen Implementierung
DE102015205548B4 (de) 2015-03-26 2017-05-24 Danfoss Power Solutions Gmbh & Co. Ohg Endlagendetektion in einer verstellbaren hydraulikmaschine
JP6517324B2 (ja) * 2015-08-03 2019-05-22 日鍛バルブ株式会社 エンジンバルブの軸接部の探傷検査方法および装置
FI128135B (fi) * 2017-10-20 2019-10-31 Pneumaxpert Oy Oskillointisylinterijärjestely
CN108413911A (zh) * 2018-02-26 2018-08-17 中国长江电力股份有限公司 一种非接触式调速器主配阀芯位移测量方法及装置
EP3567262A1 (de) * 2018-04-30 2019-11-13 Tries GmbH & CO. KG Ventileinheit mit zwei vorsteuerventilen und zwei hauptventilen
CN108535009B (zh) * 2018-07-10 2020-06-16 兰州理工大学 一种液压滑阀副摩擦试验系统及试验方法
JP2022092363A (ja) * 2020-12-10 2022-06-22 住友重機械工業株式会社 スプール型流量制御弁およびその製造方法
CN113175532B (zh) * 2021-04-28 2023-01-20 北京航空航天大学 一种可调汽蚀文氏管
US20240230468A1 (en) * 2023-01-11 2024-07-11 Hamilton Sundstrand Corporation Proximity probe piston positioning systems

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148905U (ja) * 1984-03-15 1985-10-03 三菱重工業株式会社 タ−ビンロ−タ伸び差計測装置
JPS62287606A (ja) * 1986-06-06 1987-12-14 Fuji Electric Co Ltd 交流電磁石
JPH05280914A (ja) * 1992-03-31 1993-10-29 Isuzu Motors Ltd 変位量検出センサ
JPH0743105A (ja) * 1993-07-30 1995-02-10 Shimadzu Corp 位置検出装置
JPH09177137A (ja) 1995-11-30 1997-07-08 Caterpillar Inc 電気油圧システムの調整方法および装置
JP2000213506A (ja) 1999-01-26 2000-08-02 Shin Caterpillar Mitsubishi Ltd 作業用機械の油圧制御回路
JP2000337808A (ja) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd センサ
JP2002297243A (ja) 2001-03-30 2002-10-11 Sumitomo Heavy Ind Ltd スプール型流量制御弁及びその制御装置
JP2003329404A (ja) * 2002-05-08 2003-11-19 Ribekkusu:Kk 液圧流量制御弁における位置検出器
JP2006220671A (ja) * 2006-05-25 2006-08-24 Tadatoshi Goto 位置検出装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1854A (en) * 1840-11-13 smith and benjamin mulliken
US3994163A (en) * 1974-04-29 1976-11-30 W. R. Grace & Co. Stuck well pipe apparatus
JPS60148905A (ja) 1984-01-13 1985-08-06 三菱重工業株式会社 主桁
DE3410534A1 (de) * 1984-03-22 1985-10-03 Feinmechanische Werke Mainz Gmbh, 6500 Mainz Weg- oder geschwindigkeitsaufnehmer fuer hydraulische oder pneumatische zylinder oder ventile
US4953590A (en) * 1988-04-22 1990-09-04 Tokyo Keiki Company Ltd. Electromagnetic directional control valve
US5045785A (en) * 1990-03-05 1991-09-03 Borg-Warner Automotive, Inc. Linear position sensor with movable tapered element
US5117182A (en) * 1990-06-08 1992-05-26 Atomic Energy Of Canada Limited Ferromagnetic eddy current probe having multiple levels of magnetization
US5663631A (en) * 1994-07-19 1997-09-02 Nippondenso Co., Ltd. Generator with circuitry for controlling power generation based on rotational speed
US5787915A (en) * 1997-01-21 1998-08-04 J. Otto Byers & Associates Servo positioning system
USH1854H (en) * 1998-12-28 2000-07-04 Caterpillar Inc. Inductive spool displacement sensor
FR2790313A1 (fr) * 1999-02-25 2000-09-01 Lpmi Capteur inductif sans contact pour la mesure de deplacements rectilignes ou angulaires
JP2001272201A (ja) * 2000-03-27 2001-10-05 Sony Precision Technology Inc 位置検出装置
US6807875B2 (en) * 2000-12-01 2004-10-26 Honeywell International Inc. Self-compensating position sensor
WO2003029753A2 (en) * 2001-10-03 2003-04-10 Measurement Specialties, Inc. Modular non-contacting position sensor
JP3911670B2 (ja) * 2002-03-27 2007-05-09 ミネベア株式会社 回転位置検出器
US7841357B2 (en) * 2006-03-13 2010-11-30 Colder Products Company Connection state sensing for coupling device
US7576532B2 (en) * 2006-04-03 2009-08-18 Scientific Drilling International Motion transducer for motion related to the direction of the axis of an eddy-current displacement sensor
US7886767B2 (en) * 2007-02-27 2011-02-15 Parker-Hannifin Corporation Hydraulic valve with spool position sensing assembly

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148905U (ja) * 1984-03-15 1985-10-03 三菱重工業株式会社 タ−ビンロ−タ伸び差計測装置
JPS62287606A (ja) * 1986-06-06 1987-12-14 Fuji Electric Co Ltd 交流電磁石
JPH05280914A (ja) * 1992-03-31 1993-10-29 Isuzu Motors Ltd 変位量検出センサ
JPH0743105A (ja) * 1993-07-30 1995-02-10 Shimadzu Corp 位置検出装置
JPH09177137A (ja) 1995-11-30 1997-07-08 Caterpillar Inc 電気油圧システムの調整方法および装置
JP2000213506A (ja) 1999-01-26 2000-08-02 Shin Caterpillar Mitsubishi Ltd 作業用機械の油圧制御回路
JP2000337808A (ja) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd センサ
JP2002297243A (ja) 2001-03-30 2002-10-11 Sumitomo Heavy Ind Ltd スプール型流量制御弁及びその制御装置
JP2003329404A (ja) * 2002-05-08 2003-11-19 Ribekkusu:Kk 液圧流量制御弁における位置検出器
JP2006220671A (ja) * 2006-05-25 2006-08-24 Tadatoshi Goto 位置検出装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102221112A (zh) * 2010-04-14 2011-10-19 南京理工大学 气动/液压内磁式位置检测滑阀
JP2012219840A (ja) * 2011-04-04 2012-11-12 Jtekt Corp ソレノイドバルブ装置、およびこれを備える油圧装置、およびこれを備える油圧パワーステアリング装置
US9211907B2 (en) 2011-04-04 2015-12-15 Jtekt Corporation Solenoid valve device, hydraulic apparatus equipped with the solenoid valve device, and hydraulic power steering system equipped with the hydraulic apparatus
JP2014211232A (ja) * 2013-04-18 2014-11-13 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ 流量制御弁構成アッセンブリ
WO2016117063A1 (ja) * 2015-01-22 2016-07-28 株式会社 島津製作所 コントロールバルブ
JPWO2016117063A1 (ja) * 2015-01-22 2017-10-05 株式会社島津製作所 コントロールバルブ
JP2021119362A (ja) * 2017-03-30 2021-08-12 株式会社東京精密 渦電流式変位計
JP2019015657A (ja) * 2017-07-10 2019-01-31 三木 篤子 位置検出装置

Also Published As

Publication number Publication date
US20100200785A1 (en) 2010-08-12
US8555918B2 (en) 2013-10-15
CN104019276A (zh) 2014-09-03
EP2172683A1 (en) 2010-04-07
CN104019276B (zh) 2016-11-02
JP5506385B2 (ja) 2014-05-28
JPWO2009017196A1 (ja) 2010-10-21
EP2172683B1 (en) 2023-09-13
CN101772667B (zh) 2013-12-11
CN101772667A (zh) 2010-07-07
EP2172683A4 (en) 2017-07-19

Similar Documents

Publication Publication Date Title
WO2009017196A1 (ja) 流量制御弁及び流量制御弁用のスプール位置検出装置
JP2006340937A5 (ja)
JP6181353B2 (ja) 磁気近接センサ
ATE493671T1 (de) Kalibrierbarer mehrdimensionaler magnetischer punktsensor
US7788983B2 (en) Sensor arrangement
US9410788B2 (en) Magnetic length measuring system, length measuring method and method for producing a magnetic length measuring system
EP2530284A3 (en) Motor-driven throttle valve control device having inductance-based noncontact rotation angle detecting device, and rotation angle detecting device used for the same
EP2644870A1 (en) Throttle opening detection device
WO2007115857A3 (de) Gebervorrichtung für eine elektrische maschine
JP2013504161A5 (ja)
US20110050373A1 (en) Adjustable Magnetic Target
WO2009044820A1 (ja) マグネトインピーダンス素子およびマグネトインピーダンスセンサ
WO2010136164A3 (de) Verfahren und anordnung zur magnetischen positionsbestimmung
WO2009034480A3 (en) Underwater electric field electromagnetic prospecting system
EP2466265A3 (en) Magnetic field sensor
US10151404B2 (en) Off-axis position monitoring and control system and related methods
WO2008094813A3 (en) Magnetic speed, direction, and/or movement extent sensor
WO2008010186A3 (en) A twist-grip control device, in particular for motor vehicles
EP1975637A3 (en) Magnetic substance detection sensor and magnetic substance detecting apparatus
JP6534682B2 (ja) 運動する構成部材のストロークを検出するためのセンサ装置
WO2008040659A3 (de) Verfahren zum betreiben eines magnetfeldsensors und zugehöriger magnetfeldsensor
WO2010014877A3 (en) Nanowire magnetic compass and position sensor
JP2016020926A (ja) エレメントの運動を検出するように構成されたセンサ装置
US20070029996A1 (en) Contactless hall-effect angular position sensor
US10982793B2 (en) Valve control head

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880101199.X

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08791989

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009525450

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2008791989

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12671396

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE