WO2009008519A1 - ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関 - Google Patents

ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関 Download PDF

Info

Publication number
WO2009008519A1
WO2009008519A1 PCT/JP2008/062637 JP2008062637W WO2009008519A1 WO 2009008519 A1 WO2009008519 A1 WO 2009008519A1 JP 2008062637 W JP2008062637 W JP 2008062637W WO 2009008519 A1 WO2009008519 A1 WO 2009008519A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas treatment
plasma
treatment system
gas
combustion engine
Prior art date
Application number
PCT/JP2008/062637
Other languages
English (en)
French (fr)
Inventor
Yuji Ikeda
Shinobu Makita
Original Assignee
Imagineering, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imagineering, Inc. filed Critical Imagineering, Inc.
Priority to US12/668,852 priority Critical patent/US8367005B2/en
Priority to EP08791118.6A priority patent/EP2181761B1/en
Publication of WO2009008519A1 publication Critical patent/WO2009008519A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/92—Chemical or biological purification of waste gases of engine exhaust gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N13/00—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00
    • F01N13/009—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00 having two or more separate purifying devices arranged in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/806—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
    • F01N2240/05—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a magnetic, e.g. electromagnetic, device other than a valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
    • F01N2240/28—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a plasma reactor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas After Treatment (AREA)

Abstract

プラズマを利用してガスの処理を行うガス処理装置において、汎用性が高く、特に芳香族化合物など処理が困難な成分を含有する大量のガスを速やかに処理することができるガス処理装置を提供する。 ガスの流路上に直列配置された複数のガス処理ユニット２０Ａ，２０Ｂからなるプラズマ装置列と、プラズマ装置列の各プラズマ装置２０Ａ，２０Ｂの動作を制御する制御部１０とを備える。各プラズマ装置２０Ａ，２０Ｂは、ガスの流路に連通する導電体からなるキャビティ２２Ａ，２２Ｂと、このキャビティ２２Ａ，２２Ｂ内にプラズマを発生させるプラズマ発生器２３Ａ，２３Ｂと、このプラズマ始動部２３Ａ，２３Ｂの発生するプラズマにマイクロ波を照射するマイクロ波照射器２４Ａ，２４Ｂとを有する。制御手段１０は、稼働するプラズマ装置２０Ａ，２０Ｂの数を、導入されるガスの成分に応じて選択する。
PCT/JP2008/062637 2007-07-12 2008-07-12 ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関 WO2009008519A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/668,852 US8367005B2 (en) 2007-07-12 2008-07-12 Gas processing apparatus, gas processing system, and gas processing method, and exhaust gas processing system and internal combustion engine using the same
EP08791118.6A EP2181761B1 (en) 2007-07-12 2008-07-12 Gas treatment device and gas treatment system using plasma

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007183754 2007-07-12
JP2007-183754 2007-07-12

Publications (1)

Publication Number Publication Date
WO2009008519A1 true WO2009008519A1 (ja) 2009-01-15

Family

ID=40228689

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062637 WO2009008519A1 (ja) 2007-07-12 2008-07-12 ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関

Country Status (4)

Country Link
US (1) US8367005B2 (ja)
EP (1) EP2181761B1 (ja)
JP (1) JP5493063B2 (ja)
WO (1) WO2009008519A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120285146A1 (en) * 2009-09-17 2012-11-15 Imagineering, Inc. Gas treatment device and internal combustion engine
JP2013002320A (ja) * 2011-06-14 2013-01-07 Imagineering Inc プラズマ生成装置

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0911777D0 (en) * 2009-07-07 2009-08-19 Microwaste Ltd Disposal of waste materials
US8890410B2 (en) 2009-09-17 2014-11-18 Imagineering, Inc. Plasma generation device
WO2011034190A1 (ja) 2009-09-17 2011-03-24 イマジニアリング株式会社 プラズマ生成装置
EP2526339A4 (en) 2010-01-21 2015-03-11 Powerdyne Inc PRODUCTION OF STEAM FROM A CARBON SUBSTANCE
KR101145294B1 (ko) * 2010-07-21 2012-05-15 (주) 세아그린텍 마이크로파 유도 플라즈마를 이용한 반도체 배기 가스 처리 시스템
JP2012213720A (ja) * 2011-03-31 2012-11-08 Azbil Corp ガス処理装置
JP5723194B2 (ja) * 2011-03-31 2015-05-27 アズビル株式会社 ガス処理装置
JP5723195B2 (ja) * 2011-03-31 2015-05-27 アズビル株式会社 ガス処理装置
EP2799846A4 (en) * 2011-12-28 2015-09-02 Imagineering Inc DEVICE FOR ESTIMATING A GAS CONCENTRATION
WO2013099934A1 (ja) * 2011-12-28 2013-07-04 イマジニアリング株式会社 プラズマ生成装置
US9643125B2 (en) 2012-03-26 2017-05-09 Fluor Technologies Corporation Emissions reduction for CO2 capture
WO2014012169A1 (en) * 2012-07-18 2014-01-23 Atlantic Hydrogen Inc. Electromagnetic energy-initiated plasma reactor systems and methods
WO2014039704A1 (en) 2012-09-05 2014-03-13 Powerdyne, Inc. Fuel generation using high-voltage electric fields methods
US9273570B2 (en) 2012-09-05 2016-03-01 Powerdyne, Inc. Methods for power generation from H2O, CO2, O2 and a carbon feed stock
KR20150052226A (ko) 2012-09-05 2015-05-13 파워다인, 인코포레이티드 고전압 전기장 방법을 사용하는 연료 생성
EP2893326A4 (en) 2012-09-05 2016-05-18 Powerdyne Inc PROCESSES FOR PRODUCING FUEL BY MEANS OF HIGH VOLTAGE ELECTRIC FIELDS
KR20150052257A (ko) 2012-09-05 2015-05-13 파워다인, 인코포레이티드 플라즈마 소스들을 사용하여 수소가스를 발생시키기 위한 방법
EP2900353A4 (en) 2012-09-05 2016-05-18 Powerdyne Inc METHOD FOR SEQUESTRATING HEAVY METAL PARTICLES BY MEANS OF H2O, CO2, O2 AND PARTICLE SOURCE
BR112015004839A2 (pt) 2012-09-05 2017-07-04 Powerdyne Inc sistema para sintetizar um fluido combustível
JP6757267B2 (ja) * 2017-01-26 2020-09-16 アズビル株式会社 ガス処理装置
WO2019077391A1 (en) * 2017-10-18 2019-04-25 Giovanni Barco PROCESS AND APPARATUS FOR PRODUCING REACTIVE OXYGEN AND / OR NITROGEN SPECIES IN A LIQUID OR GASEOUS SOLUTION
GB201722035D0 (en) * 2017-12-28 2018-02-14 Arcs Energy Ltd Fluid traetment apparatus for an exhaust system and method thereof
JP6786534B2 (ja) * 2018-01-30 2020-11-18 株式会社東芝 オゾン発生器
JP2020147821A (ja) * 2019-03-15 2020-09-17 株式会社デンソー プラズマ窒化処理方法
CN112087853A (zh) * 2019-06-12 2020-12-15 中国石油化工股份有限公司 等离子体发生装置和用于等离子体发生装置的控制方法
CN112050220B (zh) * 2020-07-29 2023-04-14 沈阳航空航天大学 一种采用等离子体技术净化陈腐垃圾的处理系统及方法
KR102537241B1 (ko) * 2021-02-18 2023-05-26 (주)엘오티씨이에스 배기가스 처리용 유도결합 플라즈마 장치 및 이의 임피던스 매칭 방법
JP7270704B2 (ja) * 2021-09-08 2023-05-10 日揚科技股▲分▼有限公司 半導体排気ガス処理システム
KR102424314B1 (ko) * 2021-10-05 2022-07-22 제이엘솔루션 주식회사 배출허용기준을 자동 적용하는 플라즈마를 이용한 스마트 공기 청정기

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000325734A (ja) 1999-03-16 2000-11-28 Mitsubishi Heavy Ind Ltd 有害物質の分解装置及び分解方法
JP2001300296A (ja) 2000-04-20 2001-10-30 Mitsubishi Heavy Ind Ltd プラズマ分解処理装置及び排ガス処理装置
JP2004216231A (ja) 2003-01-10 2004-08-05 Toshiba Corp 高周波プラズマによる化合物分解方法および化合物分解装置
JP2005246353A (ja) * 2004-03-08 2005-09-15 Sumitomo Heavy Ind Ltd 気体改質装置
JP2005319357A (ja) 2004-05-06 2005-11-17 Canon Inc プラズマリアクターおよびプラズマガス処理装置
JP2006187766A (ja) 2004-12-07 2006-07-20 Canon Inc ガス処理装置およびガス処理用カートリッジ
JP2007113570A (ja) * 2005-09-20 2007-05-10 Imagineering Kk 点火装置、内燃機関、点火プラグ、プラズマ装置、排ガス分解装置、オゾン発生・滅菌・消毒装置及び消臭装置
JP2008036080A (ja) * 2006-08-04 2008-02-21 Sharp Corp 汚染ガス浄化装置および汚染ガス浄化方法

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4138980A (en) * 1974-08-12 1979-02-13 Ward Michael A V System for improving combustion in an internal combustion engine
US3934566A (en) 1974-08-12 1976-01-27 Ward Michael A V Combustion in an internal combustion engine
US4128980A (en) * 1976-06-11 1978-12-12 Civil & Civic Pty. Limited Reinforced concrete construction
JPS57119164A (en) 1981-01-14 1982-07-24 Hitachi Ltd Combined ignition engine by laser and microwave plasma
JPS57148022A (en) 1981-03-10 1982-09-13 Toyota Motor Corp Multiple-point-ignition internal combustion engine
DE3668163D1 (de) * 1985-11-08 1990-02-15 Inst Francais Du Petrole Verfahren zur thermischen umsetzung von methan in kohlenwasserstoffe mit hoeheren molekulargewichten.
JPH0698302B2 (ja) * 1987-04-20 1994-12-07 三菱重工業株式会社 マイクロ波による低分子物質の生成方法
JP2598435B2 (ja) * 1987-12-02 1997-04-09 三井東圧化学株式会社 排ガスの放電処理装置
US5270515A (en) * 1990-04-02 1993-12-14 Long Raymond E Microwave plasma detoxification reactor and process for hazardous wastes
US6545420B1 (en) * 1990-07-31 2003-04-08 Applied Materials, Inc. Plasma reactor using inductive RF coupling, and processes
US5288969A (en) * 1991-08-16 1994-02-22 Regents Of The University Of California Electrodeless plasma torch apparatus and methods for the dissociation of hazardous waste
JPH0712037A (ja) 1991-10-09 1995-01-17 Ito Yukio 内燃機関における燃料の燃焼方法及び装置
EP0554039B1 (en) * 1992-01-30 1996-11-20 Hitachi, Ltd. Method and apparatus for generating plasma, and semiconductor processing methods
GB9224745D0 (en) * 1992-11-26 1993-01-13 Atomic Energy Authority Uk Microwave plasma generator
JPH07139338A (ja) * 1993-11-18 1995-05-30 Hitachi Ltd 放電脱硝脱塵装置
US5490973A (en) * 1994-05-23 1996-02-13 The United States Of America As Represented By The Secretary Of The Navy Pulsed corona reactor system for abatement of pollution by hazardous agents
US5750823A (en) * 1995-07-10 1998-05-12 R.F. Environmental Systems, Inc. Process and device for destruction of halohydrocarbons
US5845480A (en) * 1996-03-13 1998-12-08 Unison Industries Limited Partnership Ignition methods and apparatus using microwave and laser energy
US6888040B1 (en) * 1996-06-28 2005-05-03 Lam Research Corporation Method and apparatus for abatement of reaction products from a vacuum processing chamber
DE69726830T2 (de) * 1996-11-28 2004-10-07 Accentus Plc Didcot Verfahren und Vorrichtung zur plasmachemischen Behandlung von Gasen
US6029602A (en) * 1997-04-22 2000-02-29 Applied Materials, Inc. Apparatus and method for efficient and compact remote microwave plasma generation
WO1999011572A1 (en) * 1997-09-01 1999-03-11 Laxarco Holding Limited Electrically assisted partial oxidation of light hydrocarbons by oxygen
US6329628B1 (en) * 1998-12-10 2001-12-11 Polytechnic University Methods and apparatus for generating a plasma torch
KR20000039290A (ko) 1998-12-12 2000-07-05 정몽규 내연기관의 전계에 의한 연소촉진 장치
JP2002195151A (ja) 2000-12-26 2002-07-10 Ishikawajima Harima Heavy Ind Co Ltd プラズマガス推進装置
JP2002233733A (ja) * 2001-02-09 2002-08-20 Toshiba Corp 有害物質処理システム
JP2002295259A (ja) 2001-03-28 2002-10-09 Osaka Gas Co Ltd 火花点火内燃機関
JP2002295264A (ja) 2001-03-28 2002-10-09 Osaka Gas Co Ltd ガス内燃機関
JP2003057183A (ja) * 2001-08-09 2003-02-26 Shinichi Kuroda フロン分解装置における分解処理制御方法
US7112306B2 (en) * 2002-05-06 2006-09-26 Carrier Corporation Electrodeless ultraviolet discharge fluid remediation
US6806439B2 (en) * 2003-01-13 2004-10-19 Han Sup Uhm Elimination of airborne chemical and biological warfare agents
GB0309932D0 (en) * 2003-04-30 2003-06-04 Boc Group Plc Apparatus and method for forming a plasma
JP3829199B2 (ja) 2003-12-09 2006-10-04 国立大学法人東北大学 着火方法、及び着火装置
JP4525335B2 (ja) 2004-10-07 2010-08-18 株式会社豊田中央研究所 内燃機関及びその点火装置
GB0521830D0 (en) * 2005-10-26 2005-12-07 Boc Group Plc Plasma reactor
JP3984636B1 (ja) 2006-03-07 2007-10-03 ミヤマ株式会社 多点点火エンジン
RU2418978C2 (ru) 2006-09-20 2011-05-20 Имэджиниринг, Инк. Устройство зажигания, двигатель внутреннего сгорания, свеча зажигания, плазменное оборудование, устройство для разложения отработавшего газа, озонообразующее/стерилизующее/дезинфицирующее устройство и устройство для устранения запахов

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000325734A (ja) 1999-03-16 2000-11-28 Mitsubishi Heavy Ind Ltd 有害物質の分解装置及び分解方法
JP2001300296A (ja) 2000-04-20 2001-10-30 Mitsubishi Heavy Ind Ltd プラズマ分解処理装置及び排ガス処理装置
JP2004216231A (ja) 2003-01-10 2004-08-05 Toshiba Corp 高周波プラズマによる化合物分解方法および化合物分解装置
JP2005246353A (ja) * 2004-03-08 2005-09-15 Sumitomo Heavy Ind Ltd 気体改質装置
JP2005319357A (ja) 2004-05-06 2005-11-17 Canon Inc プラズマリアクターおよびプラズマガス処理装置
JP2006187766A (ja) 2004-12-07 2006-07-20 Canon Inc ガス処理装置およびガス処理用カートリッジ
JP2007113570A (ja) * 2005-09-20 2007-05-10 Imagineering Kk 点火装置、内燃機関、点火プラグ、プラズマ装置、排ガス分解装置、オゾン発生・滅菌・消毒装置及び消臭装置
JP2008036080A (ja) * 2006-08-04 2008-02-21 Sharp Corp 汚染ガス浄化装置および汚染ガス浄化方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120285146A1 (en) * 2009-09-17 2012-11-15 Imagineering, Inc. Gas treatment device and internal combustion engine
US9359926B2 (en) * 2009-09-17 2016-06-07 Imagineering, Inc. Gas treatment device and internal combustion engine
JP2013002320A (ja) * 2011-06-14 2013-01-07 Imagineering Inc プラズマ生成装置

Also Published As

Publication number Publication date
US20100200390A1 (en) 2010-08-12
EP2181761B1 (en) 2018-01-24
US8367005B2 (en) 2013-02-05
JP5493063B2 (ja) 2014-05-14
JP2009034674A (ja) 2009-02-19
EP2181761A1 (en) 2010-05-05
EP2181761A4 (en) 2011-05-18

Similar Documents

Publication Publication Date Title
WO2009008519A1 (ja) ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関
WO2010022871A8 (en) Non-thermal plasma for wound treatment and associated apparatus and method
BRPI0923710A2 (pt) sistema de tratamento de emissões para tratamento de uma corrente de gás, de descarga do motor, e método para tratar uma corrente de gás de descarga do motor.
EP2255081A4 (en) SYSTEM, METHOD AND APPARATUS FOR REALIZING PLASMA-ASSISTED MAIZE COMBUSTION FROM AN ELECTRIC ARC
WO2008123288A1 (ja) トラップ装置、排気系及びこれを用いた処理システム
EP2007685A4 (en) SYSTEM, METHOD AND APPARATUS FOR TREATING LIQUIDS WITH ENERGY WAVES OF AN ELECTRIC ARC
WO2015187235A3 (en) Gas turbine air injection system control and method of operation
TW200942637A (en) Dual zone gas injection nozzle
BR112018070118A2 (pt) sistema de escape, e, método para tratamento de uma corrente de gás de escape.
MY159921A (en) Method and apparatus for uplink power control in a multicarrier wireless communication system
AR083498A1 (es) Sistema y metodo para proteccion de catalizador scr y control de emisiones multiples
TW200802561A (en) Control device and method for a substrate processing apparatus
WO2012067384A3 (ko) 피부 치료용 광학장치, 이의 제어방법 및 피부 치료 방법
WO2014151895A3 (en) Method and apparatus for generating highly repetitive pulsed plasmas
WO2006034130A3 (en) Apparatus and process for surface treatment of substrate using an activated reactive gas
TW200721918A (en) Plasma producing method and apparatus as well as plasma processing apparatus
SG148109A1 (en) Furnace atmosphere activation method and apparatus
IN2010KO00358A (ja)
EP2273081B8 (en) Exhaust gas control apparatus for internal combustion engine, and method of controlling the same
WO2009104918A3 (en) Apparatus and method for processing substrate
WO2006117651A3 (en) Method and apparatus for providing enhanced channel interleaving
WO2015128673A3 (en) Plasma enhanced catalytic conversion method and apparatus
WO2008147184A3 (en) Atmospheric pressure glow discharge plasma method and system using heated substrate
WO2009104919A3 (en) Apparatus and method for processing substrate
TW200708344A (en) An atomizer with MEMS-based spray device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08791118

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 12668852

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2008791118

Country of ref document: EP