WO2009001631A1 - 圧力センサ、差圧式流量計及び流量コントローラ - Google Patents

圧力センサ、差圧式流量計及び流量コントローラ Download PDF

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Publication number
WO2009001631A1
WO2009001631A1 PCT/JP2008/059141 JP2008059141W WO2009001631A1 WO 2009001631 A1 WO2009001631 A1 WO 2009001631A1 JP 2008059141 W JP2008059141 W JP 2008059141W WO 2009001631 A1 WO2009001631 A1 WO 2009001631A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
pressure sensor
fluid
flow rate
rate controller
Prior art date
Application number
PCT/JP2008/059141
Other languages
English (en)
French (fr)
Inventor
Hiroki Igarashi
Original Assignee
Surpass Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surpass Industry Co., Ltd. filed Critical Surpass Industry Co., Ltd.
Priority to EP08764349.0A priority Critical patent/EP2163872B1/en
Priority to US12/664,969 priority patent/US8590561B2/en
Priority to KR1020097026940A priority patent/KR101424783B1/ko
Publication of WO2009001631A1 publication Critical patent/WO2009001631A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2703—Flow rate responsive
    • Y10T137/2705—Pressure differential
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

　圧縮性流体が圧力導入部内の圧力センサ受圧面付近に滞留することを防止した構造の圧力センサを提供する。圧力測定を行う流体が流れる流体主流路１２から上方へＴ字状に分岐する圧力導入流路２２Ａにセンサ本体２３を配置した圧力センサ２１Ｂにおいて、圧力導入流路２２Ａが、流体流れ方向下流側となる壁面に、流体の入口側開口面積を広げる方向の傾斜面２８を備えている。
PCT/JP2008/059141 2007-06-25 2008-05-19 圧力センサ、差圧式流量計及び流量コントローラ WO2009001631A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08764349.0A EP2163872B1 (en) 2007-06-25 2008-05-19 Pressure sensor, differential pressure flowmeter, and flow rate controller
US12/664,969 US8590561B2 (en) 2007-06-25 2008-05-19 Pressure sensor, differential pressure type flow meter, and flow rate controller
KR1020097026940A KR101424783B1 (ko) 2007-06-25 2008-05-19 압력 센서, 차압식 유량계 및 유량 제어기

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-166360 2007-06-25
JP2007166360A JP5079401B2 (ja) 2007-06-25 2007-06-25 圧力センサ、差圧式流量計及び流量コントローラ

Publications (1)

Publication Number Publication Date
WO2009001631A1 true WO2009001631A1 (ja) 2008-12-31

Family

ID=40185454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059141 WO2009001631A1 (ja) 2007-06-25 2008-05-19 圧力センサ、差圧式流量計及び流量コントローラ

Country Status (5)

Country Link
US (1) US8590561B2 (ja)
EP (1) EP2163872B1 (ja)
JP (1) JP5079401B2 (ja)
KR (1) KR101424783B1 (ja)
WO (1) WO2009001631A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266395A (ja) * 2009-05-18 2010-11-25 Advance Denki Kogyo Kk 圧力センサ及び流量検出装置
CN104024621A (zh) * 2011-12-30 2014-09-03 卡特彼勒公司 用于发动机的egr流量传感器

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5209524B2 (ja) 2009-02-05 2013-06-12 サーパス工業株式会社 流量計および流量コントローラ
JP5220642B2 (ja) 2009-02-05 2013-06-26 サーパス工業株式会社 差圧式流量計および流量コントローラ
JP5501806B2 (ja) * 2010-03-05 2014-05-28 サーパス工業株式会社 圧力センサ、差圧式流量計及び流量コントローラ
US9958302B2 (en) * 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
NO20120120A1 (no) * 2012-02-06 2013-08-07 Roxar Flow Measurement As Stromningsbegrenser
US20130240045A1 (en) * 2012-03-15 2013-09-19 Xiufeng Pang Method for Determining a Fluid Flow Rate With a Fluid Control Valve
KR101341600B1 (ko) * 2013-04-19 2013-12-13 김진택 유량검출기능을 내장한 원격 감시제어시스템 및 그 제어방법
JP2015155845A (ja) * 2014-02-20 2015-08-27 サーパス工業株式会社 差圧式流量計およびそれを備えた流量コントローラ
JP6651323B2 (ja) * 2015-10-02 2020-02-19 サーパス工業株式会社 流量調整装置
GB2549286B (en) * 2016-04-11 2019-07-24 Perkins Engines Co Ltd EGR valve with integrated sensor
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
JP6486986B2 (ja) 2017-04-03 2019-03-20 株式会社荏原製作所 液体供給装置及び液体供給方法
JP7152279B2 (ja) 2018-11-30 2022-10-12 株式会社荏原製作所 研磨装置
CN111060165B (zh) * 2019-12-23 2021-06-29 合肥固泰自动化有限公司 一种高精度冲板流量计
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS6064219A (ja) * 1983-09-19 1985-04-12 Yokogawa Hokushin Electric Corp 流量測定装置
JP2005164538A (ja) * 2003-12-05 2005-06-23 Nissan Motor Co Ltd 圧力センサ
JP2005207946A (ja) * 2004-01-23 2005-08-04 Surpass Kogyo Kk インライン型圧力センサー
JP2005221453A (ja) * 2004-02-09 2005-08-18 Denso Corp 圧力センサ
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット

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US7878980B2 (en) * 2003-06-13 2011-02-01 Treymed, Inc. Gas flow diverter for respiratory monitoring device
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JPS6064219A (ja) * 1983-09-19 1985-04-12 Yokogawa Hokushin Electric Corp 流量測定装置
JP2005164538A (ja) * 2003-12-05 2005-06-23 Nissan Motor Co Ltd 圧力センサ
JP2005207946A (ja) * 2004-01-23 2005-08-04 Surpass Kogyo Kk インライン型圧力センサー
JP2005221453A (ja) * 2004-02-09 2005-08-18 Denso Corp 圧力センサ
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット

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Title
See also references of EP2163872A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266395A (ja) * 2009-05-18 2010-11-25 Advance Denki Kogyo Kk 圧力センサ及び流量検出装置
CN104024621A (zh) * 2011-12-30 2014-09-03 卡特彼勒公司 用于发动机的egr流量传感器

Also Published As

Publication number Publication date
EP2163872A1 (en) 2010-03-17
US8590561B2 (en) 2013-11-26
KR101424783B1 (ko) 2014-08-13
JP5079401B2 (ja) 2012-11-21
EP2163872A4 (en) 2014-05-07
JP2009002901A (ja) 2009-01-08
EP2163872B1 (en) 2018-07-11
KR20100029094A (ko) 2010-03-15
US20100154895A1 (en) 2010-06-24

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