WO2008143222A1 - 白金測温抵抗素子の製造方法 - Google Patents

白金測温抵抗素子の製造方法 Download PDF

Info

Publication number
WO2008143222A1
WO2008143222A1 PCT/JP2008/059157 JP2008059157W WO2008143222A1 WO 2008143222 A1 WO2008143222 A1 WO 2008143222A1 JP 2008059157 W JP2008059157 W JP 2008059157W WO 2008143222 A1 WO2008143222 A1 WO 2008143222A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
platinum
oxygen
purge gas
temperature
Prior art date
Application number
PCT/JP2008/059157
Other languages
English (en)
French (fr)
Inventor
Hideo Kimura
Kazuya Yoneshita
Toru Yamaguchi
Original Assignee
Yamatake Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamatake Corporation filed Critical Yamatake Corporation
Priority to CN200880016142XA priority Critical patent/CN101680808B/zh
Priority to US12/600,756 priority patent/US8247040B2/en
Priority to EP08752953A priority patent/EP2151675A4/en
Publication of WO2008143222A1 publication Critical patent/WO2008143222A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G01K1/10—Protective devices, e.g. casings for preventing chemical attack
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
    • H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
    • H01C17/06533—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of oxides
    • H01C17/0654—Oxides of the platinum group

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)

Abstract

【課題】白金抵抗線の酸化・還元の定量的な抵抗値変化のメカニズムを解明し、これを応用することにより、使用温度領域において抵抗値変化の少ない安定した白金測温抵抗素子を得るための製造方法を提供せんとする。 【解決手段】封止部に釉薬を塗膜した状態の感温部を作製する工程Ｓ１と、封止前の素子をトレイ４に載せてチャンバー２内に挿入する工程Ｓ２と、チャンバー２に不活性ガスと酸素とを含むパージガスを封入する工程Ｓ３と、白金の酸化物生成自由エネルギーから求められる前記パージガス中の酸素分圧における還元領域まで、チャンバー内部温度を上げる工程Ｓ４と、パージガスを、酸素１ｋＰａ以下の不活性ガスに置換する工程Ｓ５と、置換した状態でフリット熔融温度までランプ加熱装置６で炉内（チャンバー２内）を急速に加熱し、感温部の封止部を封止する工程Ｓ６とを備えた。
PCT/JP2008/059157 2007-05-18 2008-05-19 白金測温抵抗素子の製造方法 WO2008143222A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN200880016142XA CN101680808B (zh) 2007-05-18 2008-05-19 铂测温电阻元件的制造方法
US12/600,756 US8247040B2 (en) 2007-05-18 2008-05-19 Process for manufacturing platinum temperature-measuring resistance element
EP08752953A EP2151675A4 (en) 2007-05-18 2008-05-19 METHOD FOR PRODUCING A TEMPERATURE-MEASURING PLATINUM RESISTANCE ELEMENT

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007133394 2007-05-18
JP2007-133394 2007-05-18

Publications (1)

Publication Number Publication Date
WO2008143222A1 true WO2008143222A1 (ja) 2008-11-27

Family

ID=40031919

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059157 WO2008143222A1 (ja) 2007-05-18 2008-05-19 白金測温抵抗素子の製造方法

Country Status (5)

Country Link
US (1) US8247040B2 (ja)
EP (1) EP2151675A4 (ja)
JP (1) JP5163277B2 (ja)
CN (1) CN101680808B (ja)
WO (1) WO2008143222A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5163276B2 (ja) * 2007-05-18 2013-03-13 アズビル株式会社 白金抵抗温度計の製造方法
CN109029755B (zh) * 2018-06-01 2020-12-25 湖南江麓仪器仪表有限公司 用于提高铠装铂电阻温度计响应时间的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02121302A (ja) * 1988-10-31 1990-05-09 Mazda Motor Corp 貴金属薄膜抵抗体とその製造方法
JPH07201521A (ja) * 1993-12-28 1995-08-04 Ricoh Co Ltd Ｐｔ薄膜およびその製膜方法
JP2001291607A (ja) * 2000-04-04 2001-10-19 Mitsui Mining & Smelting Co Ltd 白金薄膜抵抗体の製造方法
JP2001296186A (ja) * 2000-04-14 2001-10-26 Tokyo Electron Ltd 温度測定装置及び方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
CN85204630U (zh) * 1985-11-05 1986-08-27 庞凤荣 抗氧化组装钨铼系热电偶
US4719443A (en) * 1986-04-03 1988-01-12 General Electric Company Low capacitance power resistor using beryllia dielectric heat sink layer and low toxicity method for its manufacture
JP2517587B2 (ja) 1987-04-03 1996-07-24 株式会社 ネツシン 白金測温素子の製造方法
US5430428A (en) * 1991-02-15 1995-07-04 Siemens Aktiengesellschaft High-temperature sensor made of metal of the platinum group
DE10020932C5 (de) * 2000-04-28 2004-12-30 Zitzmann, Heinrich, Dr. Temperaturmessfühler und Verfahren zur Herstellung desselben
CN1407320A (zh) * 2001-09-13 2003-04-02 上海浦东新区台华仪电科技研究所 铂热电阻温度传感器
JP3924460B2 (ja) 2001-12-12 2007-06-06 多摩電気工業株式会社 白金薄膜素子
JP5163276B2 (ja) * 2007-05-18 2013-03-13 アズビル株式会社 白金抵抗温度計の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02121302A (ja) * 1988-10-31 1990-05-09 Mazda Motor Corp 貴金属薄膜抵抗体とその製造方法
JPH07201521A (ja) * 1993-12-28 1995-08-04 Ricoh Co Ltd Ｐｔ薄膜およびその製膜方法
JP2001291607A (ja) * 2000-04-04 2001-10-19 Mitsui Mining & Smelting Co Ltd 白金薄膜抵抗体の製造方法
JP2001296186A (ja) * 2000-04-14 2001-10-26 Tokyo Electron Ltd 温度測定装置及び方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2151675A4 *

Also Published As

Publication number Publication date
US20100151148A1 (en) 2010-06-17
US8247040B2 (en) 2012-08-21
EP2151675A4 (en) 2013-03-13
EP2151675A1 (en) 2010-02-10
JP5163277B2 (ja) 2013-03-13
JP2009004764A (ja) 2009-01-08
CN101680808B (zh) 2011-11-02
CN101680808A (zh) 2010-03-24

Similar Documents

Publication Publication Date Title
TWI408115B (zh) 燒結玻璃料至玻璃板時控制氣體氛圍
US7837382B2 (en) Fixed-point cell, fixed-point temperature realizing apparatus, and method of thermometer calibration
EP2428781B1 (en) Temperature sensor and temperature sensor system
CN103162537B (zh) 用于烧结烧结料的设备和方法
WO2009079530A3 (en) Sheathed glow plug
WO2008143221A1 (ja) 白金抵抗温度計の製造方法
WO2008143222A1 (ja) 白金測温抵抗素子の製造方法
TW200730673A (en) Single-crystal semiconductor fabrication device and fabrication method thereof
EP2471755A3 (en) Method of manufacturing vitreous silica crucible
JP5655425B2 (ja) ガラス製造用容器、それを備えるガラス製造装置及びそれを用いたガラスの製造方法
CA3092946C (en) A heating element comprising chromium alloyed molybdenum disilicide and the use thereof
JP2011222737A (ja) サーミスタ素子及び温度センサ
CN106461440A (zh) 对流体流动的物理参数敏感的元件的制造方法以及相应的敏感元件
US8375748B2 (en) Glass manufacturing container, glass manufacturing apparatus with the same and glass manufacturing method using glass manufacturing apparatus
JP2007248223A (ja) ガスセンサとその製造方法
JP2004301679A (ja) 温度センサの製造方法
JP2005315642A (ja) 温度定点セル、温度定点装置および温度計校正方法
CN101552177A (zh) 一种带罩紧凑型荧光灯
JP6898274B2 (ja) 点火プラグ
CN108149074B (zh) 一种镍铈中间合金及其制备方法
CN109494140B (zh) 一种灯管固汞工艺
JP2005228492A (ja) パイプヒータ製造方法及びパイプヒータ
CA2631372A1 (en) Metal halide lamp
SU1281536A1 (ru) Стекло дл термочувствительных датчиков (его варианты)
CN201038133Y (zh) 半导体芯片退火炉

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880016142.X

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08752953

Country of ref document: EP

Kind code of ref document: A1

REEP Request for entry into the european phase

Ref document number: 2008752953

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12600756

Country of ref document: US

Ref document number: 2008752953

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE