WO2008142747A1 - 加熱処理装置 - Google Patents

加熱処理装置 Download PDF

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Publication number
WO2008142747A1
WO2008142747A1 PCT/JP2007/060021 JP2007060021W WO2008142747A1 WO 2008142747 A1 WO2008142747 A1 WO 2008142747A1 JP 2007060021 W JP2007060021 W JP 2007060021W WO 2008142747 A1 WO2008142747 A1 WO 2008142747A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature
supporting member
heated object
object supporting
heat treatment
Prior art date
Application number
PCT/JP2007/060021
Other languages
English (en)
French (fr)
Inventor
Akira Kumagai
Masami Shibagaki
Kenji Numajiri
Akihiro Egami
Original Assignee
Canon Anelva Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corporation filed Critical Canon Anelva Corporation
Priority to CN2007800530025A priority Critical patent/CN101669016B/zh
Priority to PCT/JP2007/060021 priority patent/WO2008142747A1/ja
Priority to JP2009515017A priority patent/JP4436893B2/ja
Publication of WO2008142747A1 publication Critical patent/WO2008142747A1/ja
Priority to US12/613,288 priority patent/US8150243B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Control Of Resistance Heating (AREA)
  • Furnace Details (AREA)
  • Control Of Temperature (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Radiation Pyrometers (AREA)
  • Discharge Heating (AREA)

Abstract

常に一定の温度制御と、１８５０度以上の高温領域における温度制御が可能な加熱処理装置を提供することを目的とする。処理室と、処理室内に設けられた加熱物支持部材と、加熱物支持部材内に配置された加熱手段と、加熱物支持部材の温度を測定する温度測定手段とを有する加熱処理装置であって、温度測定手段が、処理室の周壁に設けられた加熱物支持部材の放射する赤外線エネルギーを透過可能な透過窓の外部に配置されており、温度測定手段が、加熱物支持部材の放射する赤外線エネルギーを集光する集光部と、赤外線内の２波長の強度比に基づいて温度を算出する算出部とを有する。
PCT/JP2007/060021 2007-05-16 2007-05-16 加熱処理装置 WO2008142747A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2007800530025A CN101669016B (zh) 2007-05-16 2007-05-16 加热处理设备
PCT/JP2007/060021 WO2008142747A1 (ja) 2007-05-16 2007-05-16 加熱処理装置
JP2009515017A JP4436893B2 (ja) 2007-05-16 2007-05-16 加熱処理装置
US12/613,288 US8150243B2 (en) 2007-05-16 2009-11-05 Heating process apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/060021 WO2008142747A1 (ja) 2007-05-16 2007-05-16 加熱処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/613,288 Continuation US8150243B2 (en) 2007-05-16 2009-11-05 Heating process apparatus

Publications (1)

Publication Number Publication Date
WO2008142747A1 true WO2008142747A1 (ja) 2008-11-27

Family

ID=40031474

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/060021 WO2008142747A1 (ja) 2007-05-16 2007-05-16 加熱処理装置

Country Status (4)

Country Link
US (1) US8150243B2 (ja)
JP (1) JP4436893B2 (ja)
CN (1) CN101669016B (ja)
WO (1) WO2008142747A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7666763B2 (en) 2007-05-29 2010-02-23 Canon Anelva Corporation Nanosilicon semiconductor substrate manufacturing method and semiconductor circuit device using nanosilicon semiconductor substrate manufactured by the method
CN101847573A (zh) * 2009-03-27 2010-09-29 佳能安内华股份有限公司 用于加热设备的温度控制方法
US7807553B2 (en) 2006-12-08 2010-10-05 Canon Anelva Corporation Substrate heating apparatus and semiconductor fabrication method
JP2010225613A (ja) * 2009-03-19 2010-10-07 Dainippon Screen Mfg Co Ltd 熱処理装置
CN102473641A (zh) * 2009-08-04 2012-05-23 佳能安内华股份有限公司 热处理设备以及半导体装置制造方法
JPWO2011077702A1 (ja) * 2009-12-25 2013-05-02 キヤノンアネルバ株式会社 基板加熱処理装置の温度制御方法、半導体デバイスの製造方法、基板加熱処理装置の温度制御プログラム及び記録媒体

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012209278B4 (de) * 2012-06-01 2018-04-12 Kgt Graphit Technologie Gmbh Suszeptor
DE102013114412A1 (de) * 2013-12-18 2015-06-18 Aixtron Se Vorrichtung und Verfahren zur Regelung der Temperatur in einer Prozesskammer eines CVD-Reaktors unter Verwendung zweier Temperatursensoreinrichtungen
JP6479525B2 (ja) * 2015-03-27 2019-03-06 株式会社ニューフレアテクノロジー 成膜装置及び温度測定方法
JP6539578B2 (ja) 2015-12-22 2019-07-03 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置および熱処理方法
US10629854B2 (en) * 2017-08-18 2020-04-21 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Substrate pre-baking device
CN108751186A (zh) * 2018-08-28 2018-11-06 湖南烯瑞自动化设备有限公司 一种红外测温装置及石墨化炉
CN110875208B (zh) * 2018-08-29 2022-11-25 北京北方华创微电子装备有限公司 工艺腔室用控温装置及方法、工艺腔室

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129714A (ja) * 1995-05-30 1997-05-16 Moore Epitaxial Inc 高速熱処理炉のサセプタ
JPH10104084A (ja) * 1996-09-27 1998-04-24 Mitsubishi Heavy Ind Ltd 多色温度計
JPH1135334A (ja) * 1997-07-15 1999-02-09 Nikon Corp 制御方法、および、これを用いた成形装置
JP2000036370A (ja) * 1998-07-17 2000-02-02 Sukegawa Electric Co Ltd 板体加熱装置
JP2001021416A (ja) * 1999-02-19 2001-01-26 Applied Materials Inc 非貫入型の作動温度測定及び監視システム
JP2001081569A (ja) * 1999-09-16 2001-03-27 Toshiba Corp 気相成長装置
JP2004193238A (ja) * 2002-12-10 2004-07-08 Hitachi Kokusai Electric Inc 半導体製造装置
WO2006043530A1 (ja) * 2004-10-19 2006-04-27 Canon Anelva Corporation 基板加熱処理装置及び基板加熱処理に用いられる基板搬送用トレイ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5820686A (en) 1993-01-21 1998-10-13 Moore Epitaxial, Inc. Multi-layer susceptor for rapid thermal process reactors
US5444217A (en) * 1993-01-21 1995-08-22 Moore Epitaxial Inc. Rapid thermal processing apparatus for processing semiconductor wafers
US7734439B2 (en) * 2002-06-24 2010-06-08 Mattson Technology, Inc. System and process for calibrating pyrometers in thermal processing chambers
JP2008166729A (ja) * 2006-12-08 2008-07-17 Canon Anelva Corp 基板加熱処理装置及び半導体製造方法
CN101569000B (zh) * 2007-09-03 2011-07-13 佳能安内华股份有限公司 衬底热处理设备和衬底热处理方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129714A (ja) * 1995-05-30 1997-05-16 Moore Epitaxial Inc 高速熱処理炉のサセプタ
JPH10104084A (ja) * 1996-09-27 1998-04-24 Mitsubishi Heavy Ind Ltd 多色温度計
JPH1135334A (ja) * 1997-07-15 1999-02-09 Nikon Corp 制御方法、および、これを用いた成形装置
JP2000036370A (ja) * 1998-07-17 2000-02-02 Sukegawa Electric Co Ltd 板体加熱装置
JP2001021416A (ja) * 1999-02-19 2001-01-26 Applied Materials Inc 非貫入型の作動温度測定及び監視システム
JP2001081569A (ja) * 1999-09-16 2001-03-27 Toshiba Corp 気相成長装置
JP2004193238A (ja) * 2002-12-10 2004-07-08 Hitachi Kokusai Electric Inc 半導体製造装置
WO2006043530A1 (ja) * 2004-10-19 2006-04-27 Canon Anelva Corporation 基板加熱処理装置及び基板加熱処理に用いられる基板搬送用トレイ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"MES Interface Kino o Goshiyo no Sai no Seino ni Tsuite", MITSUBISHI GRAPHIC OPERATION TERMINAL TECHNICAL NEWS NO.GOT-D-0012, 31 May 2006 (2006-05-31), XP003024094, Retrieved from the Internet <URL:http://wwwf2.mitsubishielectric.co.jp/got/technews/gotd0012/gotd0012.pdf> *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7807553B2 (en) 2006-12-08 2010-10-05 Canon Anelva Corporation Substrate heating apparatus and semiconductor fabrication method
US7666763B2 (en) 2007-05-29 2010-02-23 Canon Anelva Corporation Nanosilicon semiconductor substrate manufacturing method and semiconductor circuit device using nanosilicon semiconductor substrate manufactured by the method
JP2010225613A (ja) * 2009-03-19 2010-10-07 Dainippon Screen Mfg Co Ltd 熱処理装置
CN101847573A (zh) * 2009-03-27 2010-09-29 佳能安内华股份有限公司 用于加热设备的温度控制方法
CN102473641A (zh) * 2009-08-04 2012-05-23 佳能安内华股份有限公司 热处理设备以及半导体装置制造方法
US9147742B2 (en) 2009-08-04 2015-09-29 Canon Anelva Corporation Heat treatment apparatus and semiconductor device manufacturing method
JPWO2011077702A1 (ja) * 2009-12-25 2013-05-02 キヤノンアネルバ株式会社 基板加熱処理装置の温度制御方法、半導体デバイスの製造方法、基板加熱処理装置の温度制御プログラム及び記録媒体
JP5469678B2 (ja) * 2009-12-25 2014-04-16 キヤノンアネルバ株式会社 基板加熱処理装置の温度制御方法、半導体デバイスの製造方法、基板加熱処理装置の温度制御プログラム及び記録媒体
US9431281B2 (en) 2009-12-25 2016-08-30 Canon Anelva Corporation Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium

Also Published As

Publication number Publication date
JPWO2008142747A1 (ja) 2010-08-05
JP4436893B2 (ja) 2010-03-24
CN101669016A (zh) 2010-03-10
US20100111512A1 (en) 2010-05-06
US8150243B2 (en) 2012-04-03
CN101669016B (zh) 2012-01-18

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