WO2008129755A1 - 半導体デバイスの検査方法および半導体デバイスの検査装置 - Google Patents
半導体デバイスの検査方法および半導体デバイスの検査装置 Download PDFInfo
- Publication number
- WO2008129755A1 WO2008129755A1 PCT/JP2008/000336 JP2008000336W WO2008129755A1 WO 2008129755 A1 WO2008129755 A1 WO 2008129755A1 JP 2008000336 W JP2008000336 W JP 2008000336W WO 2008129755 A1 WO2008129755 A1 WO 2008129755A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor device
- electromagnetic wave
- device inspecting
- inspected
- laser beam
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008533304A JP4744604B2 (ja) | 2007-04-10 | 2008-02-26 | 半導体デバイスの検査方法および半導体デバイスの検査装置 |
US12/294,127 US7852102B2 (en) | 2007-04-10 | 2008-02-26 | Method and apparatus for inspecting semiconductor device |
CN2008800000593A CN101542707B (zh) | 2007-04-10 | 2008-02-26 | 半导体器件的检查方法与半导体器件的检查装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-102598 | 2007-04-10 | ||
JP2007102598 | 2007-04-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008129755A1 true WO2008129755A1 (ja) | 2008-10-30 |
Family
ID=39875294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/000336 WO2008129755A1 (ja) | 2007-04-10 | 2008-02-26 | 半導体デバイスの検査方法および半導体デバイスの検査装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7852102B2 (ja) |
JP (1) | JP4744604B2 (ja) |
KR (1) | KR101021506B1 (ja) |
CN (1) | CN101542707B (ja) |
TW (1) | TWI378523B (ja) |
WO (1) | WO2008129755A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014009990A (ja) * | 2012-06-28 | 2014-01-20 | Dainippon Screen Mfg Co Ltd | 検査装置および検査方法 |
JP2014009988A (ja) * | 2012-06-28 | 2014-01-20 | Dainippon Screen Mfg Co Ltd | 検査装置および検査方法 |
JP2016151536A (ja) * | 2015-02-19 | 2016-08-22 | 株式会社Screenホールディングス | 検査装置および検査方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9581642B2 (en) * | 2010-05-12 | 2017-02-28 | International Business Machines Corporation | Method and system for quickly identifying circuit components in an emission image |
US9201096B2 (en) * | 2010-09-08 | 2015-12-01 | Dcg Systems, Inc. | Laser-assisted device alteration using synchronized laser pulses |
EP2546634B1 (en) * | 2011-07-14 | 2019-04-17 | SCREEN Holdings Co., Ltd. | Inspection apparatus and inspection method |
JP5835795B2 (ja) * | 2011-09-13 | 2015-12-24 | 株式会社Screenホールディングス | 検査方法および検査装置 |
JP2013076618A (ja) | 2011-09-30 | 2013-04-25 | Sony Corp | 光伝導素子、レンズ、テラヘルツ放射顕微鏡及びデバイスの製造方法 |
US9721854B2 (en) | 2012-12-05 | 2017-08-01 | International Business Machines Corporation | Structure and method for in-line defect non-contact tests |
WO2014160618A1 (en) | 2013-03-24 | 2014-10-02 | Dcg Systems, Inc. | Pulsed lada for acquisition of timing diagrams |
JP6406656B2 (ja) * | 2013-08-23 | 2018-10-17 | 株式会社Screenホールディングス | 検査装置および検査方法 |
CN103823135B (zh) * | 2014-02-24 | 2016-02-03 | 北京航空航天大学 | 一种用于多频快速敏感度测试中频点幅度调整方法 |
WO2017027505A1 (en) * | 2015-08-10 | 2017-02-16 | Delta Design, Inc. | Ic device-in-pocket detection with angular mounted lasers and a camera |
US10521897B2 (en) | 2016-07-22 | 2019-12-31 | International Business Machines Corporation | Using photonic emission to develop electromagnetic emission models |
US11579184B2 (en) * | 2017-11-27 | 2023-02-14 | Hamamatsu Photonics K.K. | Analysis method, analysis device, analysis program, and recording medium for recording analysis program |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005022180A1 (ja) * | 2003-08-29 | 2005-03-10 | Aisin Seiki Kabushiki Kaisha | 半導体デバイスの電界分布測定方法と装置 |
JP2006024774A (ja) * | 2004-07-08 | 2006-01-26 | Institute Of Physical & Chemical Research | 半導体デバイスの故障診断方法と装置 |
JP2006270063A (ja) * | 2005-02-28 | 2006-10-05 | Seiko Instruments Inc | 半導体ウェハおよびそれを用いた半導体検査装置の校正方法 |
JP2007073925A (ja) * | 2005-08-11 | 2007-03-22 | Fujitsu Ltd | 欠陥検査装置及びその感度校正方法、欠陥検出感度校正用基板及びその製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5708371A (en) * | 1995-03-16 | 1998-01-13 | Mitsubishi Denki Kabushiki Kaisha | Scanning photoinduced current analyzer capable of detecting photoinduced current in nonbiased specimen |
JP3749107B2 (ja) * | 1999-11-05 | 2006-02-22 | ファブソリューション株式会社 | 半導体デバイス検査装置 |
JP2006029997A (ja) * | 2004-07-16 | 2006-02-02 | Nidec-Read Corp | 基板検査装置及び基板検査方法 |
KR100524213B1 (ko) * | 2003-02-28 | 2005-10-27 | 삼성전자주식회사 | 기판 검사 방법 및 장치 |
KR20060035159A (ko) * | 2004-10-21 | 2006-04-26 | 삼성전자주식회사 | 반도체 기판 검사 장치 |
JP5050394B2 (ja) * | 2006-04-20 | 2012-10-17 | 日本電産リード株式会社 | 基板検査装置及び基板検査方法 |
-
2008
- 2008-02-26 KR KR1020087018793A patent/KR101021506B1/ko not_active IP Right Cessation
- 2008-02-26 JP JP2008533304A patent/JP4744604B2/ja not_active Expired - Fee Related
- 2008-02-26 WO PCT/JP2008/000336 patent/WO2008129755A1/ja active Application Filing
- 2008-02-26 US US12/294,127 patent/US7852102B2/en not_active Expired - Fee Related
- 2008-02-26 CN CN2008800000593A patent/CN101542707B/zh not_active Expired - Fee Related
- 2008-04-03 TW TW097112099A patent/TWI378523B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005022180A1 (ja) * | 2003-08-29 | 2005-03-10 | Aisin Seiki Kabushiki Kaisha | 半導体デバイスの電界分布測定方法と装置 |
JP2006024774A (ja) * | 2004-07-08 | 2006-01-26 | Institute Of Physical & Chemical Research | 半導体デバイスの故障診断方法と装置 |
JP2006270063A (ja) * | 2005-02-28 | 2006-10-05 | Seiko Instruments Inc | 半導体ウェハおよびそれを用いた半導体検査装置の校正方法 |
JP2007073925A (ja) * | 2005-08-11 | 2007-03-22 | Fujitsu Ltd | 欠陥検査装置及びその感度校正方法、欠陥検出感度校正用基板及びその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014009990A (ja) * | 2012-06-28 | 2014-01-20 | Dainippon Screen Mfg Co Ltd | 検査装置および検査方法 |
JP2014009988A (ja) * | 2012-06-28 | 2014-01-20 | Dainippon Screen Mfg Co Ltd | 検査装置および検査方法 |
JP2016151536A (ja) * | 2015-02-19 | 2016-08-22 | 株式会社Screenホールディングス | 検査装置および検査方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101542707A (zh) | 2009-09-23 |
US20100231253A1 (en) | 2010-09-16 |
KR101021506B1 (ko) | 2011-03-16 |
US7852102B2 (en) | 2010-12-14 |
JPWO2008129755A1 (ja) | 2010-07-22 |
JP4744604B2 (ja) | 2011-08-10 |
CN101542707B (zh) | 2010-10-27 |
TWI378523B (en) | 2012-12-01 |
TW200843014A (en) | 2008-11-01 |
KR20090086303A (ko) | 2009-08-12 |
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