WO2008129603A1 - 基板搬送システム - Google Patents

基板搬送システム Download PDF

Info

Publication number
WO2008129603A1
WO2008129603A1 PCT/JP2007/057681 JP2007057681W WO2008129603A1 WO 2008129603 A1 WO2008129603 A1 WO 2008129603A1 JP 2007057681 W JP2007057681 W JP 2007057681W WO 2008129603 A1 WO2008129603 A1 WO 2008129603A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
guide rails
substrates
platforms
moving unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057681
Other languages
English (en)
French (fr)
Inventor
Sunao Akizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to CN2007800524363A priority Critical patent/CN101652302B/zh
Priority to PCT/JP2007/057681 priority patent/WO2008129603A1/ja
Priority to JP2009510641A priority patent/JPWO2008129603A1/ja
Priority to TW096117251A priority patent/TWI408764B/zh
Publication of WO2008129603A1 publication Critical patent/WO2008129603A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

　予め定めた軌道（Ｒ）上を往復移動する移動ユニット（１０）を備え、軌道（Ｒ）に沿って配置された複数の装置のうち、基板の搬出元となる装置（２１０）から搬出先となる装置（２２０）へ基板を搬送する基板搬送システム（１００）において、基板の搬出元となる各々の装置（２１１、２１２、２１３）毎に配置され、基板の搬出元となる装置（２１０）から搬出される基板が載置される載置台２０と、移動ユニット（１０）に設けられ、載置台（２０）に載置された基板を昇降する昇降ユニット（３０）と、を備え、載置台（２０）は、基板の搬出元となる装置（２１０）から搬出される基板が載置される載置ユニット２１と、載置ユニット（２１）を、軌道（Ｒ）上であって移動ユニット（１０）よりも上方において支持する支持部材（２２）と、を備え、載置ユニット（２１）は、移動ユニット１０の移動及び昇降ユニット（３０）の昇降の際、昇降ユニット（３０）が通過する通過スペース（Ｓ）を有することを特徴とする。
PCT/JP2007/057681 2007-04-05 2007-04-05 基板搬送システム Ceased WO2008129603A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2007800524363A CN101652302B (zh) 2007-04-05 2007-04-05 基板输送系统
PCT/JP2007/057681 WO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム
JP2009510641A JPWO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム
TW096117251A TWI408764B (zh) 2007-04-05 2007-05-15 Substrate handling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057681 WO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム

Publications (1)

Publication Number Publication Date
WO2008129603A1 true WO2008129603A1 (ja) 2008-10-30

Family

ID=39875152

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057681 Ceased WO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム

Country Status (4)

Country Link
JP (1) JPWO2008129603A1 (ja)
CN (1) CN101652302B (ja)
TW (1) TWI408764B (ja)
WO (1) WO2008129603A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011168363A (ja) * 2010-02-18 2011-09-01 Hitachi High-Technologies Corp 基板搬送装置及び基板搬送方法
CN108750678A (zh) * 2018-07-31 2018-11-06 安徽胜利精密制造科技有限公司 玻璃片分bin机及其玻璃片接料框自动补给转移装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106629053B (zh) * 2016-09-20 2019-09-27 信义玻璃(天津)有限公司 一种千层架和调整玻璃传送顺序的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
JP2005330106A (ja) * 2004-05-19 2005-12-02 Dms:Kk 基板移送装置
WO2006137249A1 (ja) * 2005-06-22 2006-12-28 Hirata Corporation ワーク搬送システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3868223B2 (ja) * 2001-04-27 2007-01-17 東京エレクトロン株式会社 搬送装置
TWI224576B (en) * 2003-08-11 2004-12-01 Chi Mei Optoelectronics Corp Substrate transporting device for sequential cassette
JP4882654B2 (ja) * 2006-10-10 2012-02-22 株式会社ダイフク 板状体移載設備

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
JP2005330106A (ja) * 2004-05-19 2005-12-02 Dms:Kk 基板移送装置
WO2006137249A1 (ja) * 2005-06-22 2006-12-28 Hirata Corporation ワーク搬送システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011168363A (ja) * 2010-02-18 2011-09-01 Hitachi High-Technologies Corp 基板搬送装置及び基板搬送方法
CN108750678A (zh) * 2018-07-31 2018-11-06 安徽胜利精密制造科技有限公司 玻璃片分bin机及其玻璃片接料框自动补给转移装置

Also Published As

Publication number Publication date
JPWO2008129603A1 (ja) 2010-07-22
CN101652302B (zh) 2012-10-10
TWI408764B (zh) 2013-09-11
CN101652302A (zh) 2010-02-17
TW200841414A (en) 2008-10-16

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