WO2010078264A3 - Methods and systems of transferring, docking and processing substrates - Google Patents

Methods and systems of transferring, docking and processing substrates Download PDF

Info

Publication number
WO2010078264A3
WO2010078264A3 PCT/US2009/069601 US2009069601W WO2010078264A3 WO 2010078264 A3 WO2010078264 A3 WO 2010078264A3 US 2009069601 W US2009069601 W US 2009069601W WO 2010078264 A3 WO2010078264 A3 WO 2010078264A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
mobile transverse
chamber
systems
mobile
Prior art date
Application number
PCT/US2009/069601
Other languages
French (fr)
Other versions
WO2010078264A2 (en
Inventor
Lawrence Chung-Lai Lei
Alfred Mak
Rex Liu
Kon Park
Samuel S. Pak
Tzy-Chung Terry Wu
Simon Zhu
Ronald L. Rose
Gene Shin
Xiaoming Wang
Ying Tsong Loh
Original Assignee
Archers Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/319,231 external-priority patent/US7897525B2/en
Priority claimed from US12/319,223 external-priority patent/US8110511B2/en
Application filed by Archers Inc. filed Critical Archers Inc.
Publication of WO2010078264A2 publication Critical patent/WO2010078264A2/en
Publication of WO2010078264A3 publication Critical patent/WO2010078264A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

In accordance with some embodiments described herein, methods and systems for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules. In some embodiments a process module facility is integrated with a system for processing substrates comprising at least one process chamber carried in a frame, a sub floor adjacent the process module, a stationary pump and electrical box positioned atop the subfloor, and gas control lines and vacuum exhaust lines housed within the subfloor and coupled to the process.
PCT/US2009/069601 2008-12-31 2009-12-28 Methods and systems of transferring, docking and processing substrates WO2010078264A2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US12/319,231 2008-12-31
US12/319,231 US7897525B2 (en) 2008-12-31 2008-12-31 Methods and systems of transferring, docking and processing substrates
US31922409A 2009-01-03 2009-01-03
US31922509A 2009-01-03 2009-01-03
US12/319,223 US8110511B2 (en) 2009-01-03 2009-01-03 Methods and systems of transferring a substrate to minimize heat loss
US12/319,225 2009-01-03
US12/319,224 2009-01-03
US12/319,223 2009-01-03

Publications (2)

Publication Number Publication Date
WO2010078264A2 WO2010078264A2 (en) 2010-07-08
WO2010078264A3 true WO2010078264A3 (en) 2010-11-04

Family

ID=42310571

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/069601 WO2010078264A2 (en) 2008-12-31 2009-12-28 Methods and systems of transferring, docking and processing substrates

Country Status (1)

Country Link
WO (1) WO2010078264A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013143563A (en) 2012-01-10 2013-07-22 Hzo Inc Systems for assembling electronic devices with internal moisture-resistant coatings
WO2013142858A1 (en) 2012-03-23 2013-09-26 Hzo, Inc. Apparatuses, systems and methods for applying protective coatings to electronic device assemblies
WO2018171908A1 (en) * 2017-03-21 2018-09-27 Applied Materials, Inc. Apparatus for loading a substrate in a vacuum processing system, system for processing a substrate, and method for loading a substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053240A (en) * 1991-06-24 1993-01-08 Tdk Corp Method and apparatus for clean conveyance
JP2003258077A (en) * 2002-02-28 2003-09-12 Tokyo Electron Ltd Container for body to be treated and treatment system
KR20050072692A (en) * 2004-01-07 2005-07-12 토레센티 테크노로지즈 가부시키가이샤 Semiconductor manufacturing system, work manufacturing system, and conveyance system
KR20070029032A (en) * 2005-09-08 2007-03-13 주성엔지니어링(주) Movable transfer chamber and substrate processing apparatus comprising the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053240A (en) * 1991-06-24 1993-01-08 Tdk Corp Method and apparatus for clean conveyance
JP2003258077A (en) * 2002-02-28 2003-09-12 Tokyo Electron Ltd Container for body to be treated and treatment system
KR20050072692A (en) * 2004-01-07 2005-07-12 토레센티 테크노로지즈 가부시키가이샤 Semiconductor manufacturing system, work manufacturing system, and conveyance system
KR20070029032A (en) * 2005-09-08 2007-03-13 주성엔지니어링(주) Movable transfer chamber and substrate processing apparatus comprising the same

Also Published As

Publication number Publication date
WO2010078264A2 (en) 2010-07-08

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