WO2008120589A1 - 気相蒸着用蒸発源、放射線画像変換パネル、および放射線画像変換パネルの製造方法 - Google Patents

気相蒸着用蒸発源、放射線画像変換パネル、および放射線画像変換パネルの製造方法 Download PDF

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Publication number
WO2008120589A1
WO2008120589A1 PCT/JP2008/055341 JP2008055341W WO2008120589A1 WO 2008120589 A1 WO2008120589 A1 WO 2008120589A1 JP 2008055341 W JP2008055341 W JP 2008055341W WO 2008120589 A1 WO2008120589 A1 WO 2008120589A1
Authority
WO
WIPO (PCT)
Prior art keywords
image conversion
radiographic image
conversion panel
vapor deposition
vapor
Prior art date
Application number
PCT/JP2008/055341
Other languages
English (en)
French (fr)
Inventor
Hiroshi Isa
Shigetami Kasai
Original Assignee
Konica Minolta Medical & Graphic, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Medical & Graphic, Inc. filed Critical Konica Minolta Medical & Graphic, Inc.
Priority to JP2009507463A priority Critical patent/JP5218395B2/ja
Publication of WO2008120589A1 publication Critical patent/WO2008120589A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7728—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing europium
    • C09K11/7732—Halogenides
    • C09K11/7733—Halogenides with alkali or alkaline earth metals
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
    • G21K2004/06—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens with a phosphor layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
  • Physical Vapour Deposition (AREA)
  • Luminescent Compositions (AREA)

Abstract

　本発明は、気相蒸着法で薄膜を作製するときに、突沸（スプラッシュ）による膜欠陥がない薄膜を作製することを可能とする気相蒸着用蒸発源、それを用いて製造された放射線画像変換パネル、および、放射線画像変換パネルの製造方法、を提供する。この手段として、ルツボから取り外し可能でありルツボへ連通する小孔を有する蓋と、前記ルツボと、その加熱手段から構成され、前記小孔の開口部が前記蓋の側面壁にある気相蒸着用蒸発源を特徴とする。
PCT/JP2008/055341 2007-03-29 2008-03-22 気相蒸着用蒸発源、放射線画像変換パネル、および放射線画像変換パネルの製造方法 WO2008120589A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009507463A JP5218395B2 (ja) 2007-03-29 2008-03-22 気相蒸着用蒸発源、放射線画像変換パネル、および放射線画像変換パネルの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-087253 2007-03-29
JP2007087253 2007-03-29

Publications (1)

Publication Number Publication Date
WO2008120589A1 true WO2008120589A1 (ja) 2008-10-09

Family

ID=39808171

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055341 WO2008120589A1 (ja) 2007-03-29 2008-03-22 気相蒸着用蒸発源、放射線画像変換パネル、および放射線画像変換パネルの製造方法

Country Status (2)

Country Link
JP (1) JP5218395B2 (ja)
WO (1) WO2008120589A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011021223A (ja) * 2009-07-15 2011-02-03 Konica Minolta Medical & Graphic Inc 蒸着装置及び成膜方法
JP2017186603A (ja) * 2016-04-05 2017-10-12 株式会社アルバック 蒸発源、真空蒸着装置および真空蒸着方法
JP2020097669A (ja) * 2018-12-17 2020-06-25 キヤノン株式会社 シンチレータの製造方法
CN112301313A (zh) * 2019-07-29 2021-02-02 佳能特机株式会社 喷嘴单元、坩埚、蒸发源以及蒸镀装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172087A (ja) * 1984-09-14 1986-04-14 Konishiroku Photo Ind Co Ltd 放射線画像変換方法及びその方法に用いられる放射線画像変換パネル
JPH0258000A (ja) * 1988-05-27 1990-02-27 Konica Corp 放射線画像変換パネル及びその製造方法
JP2004232090A (ja) * 2003-01-28 2004-08-19 Eastman Kodak Co 蒸着方法
JP2005029839A (ja) * 2003-07-11 2005-02-03 Ulvac Japan Ltd 蒸発容器、蒸発源および真空蒸着方法
JP2006009134A (ja) * 2003-07-31 2006-01-12 Semiconductor Energy Lab Co Ltd 製造装置
JP2007066564A (ja) * 2005-08-29 2007-03-15 Toshiba Matsushita Display Technology Co Ltd 有機ｅｌ表示装置の製造方法及び製造装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172087A (ja) * 1984-09-14 1986-04-14 Konishiroku Photo Ind Co Ltd 放射線画像変換方法及びその方法に用いられる放射線画像変換パネル
JPH0258000A (ja) * 1988-05-27 1990-02-27 Konica Corp 放射線画像変換パネル及びその製造方法
JP2004232090A (ja) * 2003-01-28 2004-08-19 Eastman Kodak Co 蒸着方法
JP2005029839A (ja) * 2003-07-11 2005-02-03 Ulvac Japan Ltd 蒸発容器、蒸発源および真空蒸着方法
JP2006009134A (ja) * 2003-07-31 2006-01-12 Semiconductor Energy Lab Co Ltd 製造装置
JP2007066564A (ja) * 2005-08-29 2007-03-15 Toshiba Matsushita Display Technology Co Ltd 有機ｅｌ表示装置の製造方法及び製造装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011021223A (ja) * 2009-07-15 2011-02-03 Konica Minolta Medical & Graphic Inc 蒸着装置及び成膜方法
JP2017186603A (ja) * 2016-04-05 2017-10-12 株式会社アルバック 蒸発源、真空蒸着装置および真空蒸着方法
JP2020097669A (ja) * 2018-12-17 2020-06-25 キヤノン株式会社 シンチレータの製造方法
JP7149834B2 (ja) 2018-12-17 2022-10-07 キヤノン株式会社 シンチレータの製造方法
CN112301313A (zh) * 2019-07-29 2021-02-02 佳能特机株式会社 喷嘴单元、坩埚、蒸发源以及蒸镀装置
CN112301313B (zh) * 2019-07-29 2024-03-19 佳能特机株式会社 喷嘴单元、坩埚、蒸发源以及蒸镀装置

Also Published As

Publication number Publication date
JP5218395B2 (ja) 2013-06-26
JPWO2008120589A1 (ja) 2010-07-15

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