WO2008120454A1 - 振動型アクチュエータの制御装置 - Google Patents

振動型アクチュエータの制御装置 Download PDF

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Publication number
WO2008120454A1
WO2008120454A1 PCT/JP2008/000600 JP2008000600W WO2008120454A1 WO 2008120454 A1 WO2008120454 A1 WO 2008120454A1 JP 2008000600 W JP2008000600 W JP 2008000600W WO 2008120454 A1 WO2008120454 A1 WO 2008120454A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
actuator
vibration
control device
driven
Prior art date
Application number
PCT/JP2008/000600
Other languages
English (en)
French (fr)
Inventor
Kenichi Honjo
Hideaki Mukae
Yusuke Adachi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2008535817A priority Critical patent/JP4814948B2/ja
Publication of WO2008120454A1 publication Critical patent/WO2008120454A1/ja
Priority to US12/469,257 priority patent/US8183738B2/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　本発明は、振動型アクチュエータの制御装置に関するものである。 　被駆動体を一方のアクチュエータでのみ駆動するときに、他方のアクチュエータによる被駆動体への摩擦力を低減することによって被駆動体を円滑に駆動する。 　駆動装置（１）は、ステージ（３）と、ステージ（３）をＸ方向へ駆動する第１超音波アクチュエータ（４Ａ）と、ステージ（３）をＹ方向へ駆動する第２超音波アクチュエータ（４Ｂ）とを備える。ステージ（３）がＸ方向及びＹ方向のうち一方の方向へのみ駆動されるときには、第１及び第２超音波アクチュエータ（４Ａ，４Ｂ）のうち一方の方向に対応する一方の超音波アクチュエータはステージ（３）の当接面に平行な縦振動とステージ（３）の当接面に直交する屈曲振動との合成振動を発生させる一方、他方の超音波アクチュエータはステージ（３）の当接面に平行な縦振動のみを発生させる。
PCT/JP2008/000600 2007-03-16 2008-03-14 振動型アクチュエータの制御装置 WO2008120454A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008535817A JP4814948B2 (ja) 2007-03-16 2008-03-14 振動型アクチュエータの制御装置
US12/469,257 US8183738B2 (en) 2007-03-16 2009-05-20 Control system for oscillatory actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-068329 2007-03-16
JP2007068329 2007-03-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/469,257 Continuation-In-Part US8183738B2 (en) 2007-03-16 2009-05-20 Control system for oscillatory actuator

Publications (1)

Publication Number Publication Date
WO2008120454A1 true WO2008120454A1 (ja) 2008-10-09

Family

ID=39808040

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000600 WO2008120454A1 (ja) 2007-03-16 2008-03-14 振動型アクチュエータの制御装置

Country Status (3)

Country Link
US (1) US8183738B2 (ja)
JP (1) JP4814948B2 (ja)
WO (1) WO2008120454A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4209463B2 (ja) * 2007-03-15 2009-01-14 パナソニック株式会社 超音波アクチュエータ
EP2905643B1 (de) * 2014-02-05 2019-07-03 TRUMPF Schweiz AG Verfahreinrichtung für einen nichtlinearen Kristall oder für sättigbare Absorber und Verfahren zum Ermitteln der Schrittweite der Verfahreinrichtung
WO2018107055A1 (en) * 2016-12-09 2018-06-14 New Scale Technologies, Inc. Semi-resonant motion devices and methods thereof
US11094499B1 (en) * 2020-10-04 2021-08-17 Borries Pte. Ltd. Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lens
CN114123852B (zh) * 2022-01-25 2022-05-13 上海隐冠半导体技术有限公司 一种微动台及运动装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158490A (ja) * 1992-11-06 1994-06-07 Tsudakoma Corp 編成針の異常停止方法
JPH08298795A (ja) * 1995-04-25 1996-11-12 Canon Inc サーボモータ制御方法及びサーボモータ制御装置
JPH11196587A (ja) * 1997-12-26 1999-07-21 Asmo Co Ltd 超音波モータの駆動回路

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05184167A (ja) * 1992-01-06 1993-07-23 Canon Inc 進行波型モータの制御装置
JP3412861B2 (ja) * 1993-05-10 2003-06-03 キヤノン株式会社 振動波アクチュエータの駆動制御方法及び装置
JPH10150786A (ja) 1996-11-19 1998-06-02 Nikon Corp 振動アクチュエータ及びその制御方法
JP3789017B2 (ja) * 1996-12-27 2006-06-21 キヤノン株式会社 位置制御装置
JP3347654B2 (ja) * 1997-10-29 2002-11-20 キヤノン株式会社 駆動装置
JPH11235063A (ja) 1998-02-20 1999-08-27 Seiko Instruments Inc 超音波モータを利用したステージ、および、これを用いた電子機器、印刷装置
US6252333B1 (en) * 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
JP4834243B2 (ja) * 2001-06-01 2011-12-14 キヤノン株式会社 振動型アクチュエータの制御装置
US6897598B2 (en) * 2002-03-15 2005-05-24 Kyocera Corporation Ultrasonic motor and guide apparatus having the same as driving source of movable body
US7439652B2 (en) * 2004-02-25 2008-10-21 Nanomotion Ltd. Multidirectional piezoelectric motor configuration
JP2006115631A (ja) * 2004-10-15 2006-04-27 Konica Minolta Holdings Inc 圧電駆動装置
JP4209465B2 (ja) * 2007-02-21 2009-01-14 パナソニック株式会社 駆動装置
JP4209464B2 (ja) * 2007-03-16 2009-01-14 パナソニック株式会社 超音波アクチュエータ装置
US7701115B2 (en) * 2007-05-01 2010-04-20 Panasonic Corporation Drive unit
US8237331B2 (en) * 2007-06-14 2012-08-07 Panasonic Corporation Vibratory actuator and drive unit including the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158490A (ja) * 1992-11-06 1994-06-07 Tsudakoma Corp 編成針の異常停止方法
JPH08298795A (ja) * 1995-04-25 1996-11-12 Canon Inc サーボモータ制御方法及びサーボモータ制御装置
JPH11196587A (ja) * 1997-12-26 1999-07-21 Asmo Co Ltd 超音波モータの駆動回路

Also Published As

Publication number Publication date
US20090224718A1 (en) 2009-09-10
US8183738B2 (en) 2012-05-22
JP4814948B2 (ja) 2011-11-16
JPWO2008120454A1 (ja) 2010-07-15

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