WO2008102553A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

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Publication number
WO2008102553A1
WO2008102553A1 PCT/JP2008/000278 JP2008000278W WO2008102553A1 WO 2008102553 A1 WO2008102553 A1 WO 2008102553A1 JP 2008000278 W JP2008000278 W JP 2008000278W WO 2008102553 A1 WO2008102553 A1 WO 2008102553A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
actuator
driven
drive device
driving
Prior art date
Application number
PCT/JP2008/000278
Other languages
English (en)
French (fr)
Inventor
Hideaki Mukae
Yusuke Adachi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2008534216A priority Critical patent/JP4209465B2/ja
Publication of WO2008102553A1 publication Critical patent/WO2008102553A1/ja
Priority to US12/469,153 priority patent/US7667373B2/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　本発明は、第１アクチュエータと第２アクチュエータとを備えて被駆動体を駆動する駆動装置に関するものである。 　被駆動体を一方のアクチュエータでのみ駆動するときに、他方のアクチュエータによる被駆動体への摩擦力を低減することによって被駆動体を円滑に駆動する。 　駆動装置（１）は、ステージ（３）と、ステージ（３）をＸ方向へ駆動する第１超音波アクチュエータ（４Ａ）と、ステージ（３）をＹ方向へ駆動する第２超音波アクチュエータ（４Ｂ）とを備える。ステージ（３）がＸ及びＹ方向のうち一方の方向へのみ駆動されるときには、第１及び第２超音波アクチュエータ（４Ａ，４Ｂ）のうち一方の方向に対応する一方の超音波アクチュエータはステージ（３）の当接面に平行な縦振動と直交する屈曲振動との合成振動を発生させる一方、他方の超音波アクチュエータはステージ（３）の当接面に平行な縦振動のみを発生させる。
PCT/JP2008/000278 2007-02-21 2008-02-20 駆動装置 WO2008102553A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008534216A JP4209465B2 (ja) 2007-02-21 2008-02-20 駆動装置
US12/469,153 US7667373B2 (en) 2007-02-21 2009-05-20 Drive unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007040890 2007-02-21
JP2007-040890 2007-02-21

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/469,153 Continuation US7667373B2 (en) 2007-02-21 2009-05-20 Drive unit

Publications (1)

Publication Number Publication Date
WO2008102553A1 true WO2008102553A1 (ja) 2008-08-28

Family

ID=39709833

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000278 WO2008102553A1 (ja) 2007-02-21 2008-02-20 駆動装置

Country Status (3)

Country Link
US (1) US7667373B2 (ja)
JP (1) JP4209465B2 (ja)
WO (1) WO2008102553A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011200085A (ja) * 2010-03-23 2011-10-06 Canon Inc 振動型駆動装置
JP2012044832A (ja) * 2010-08-23 2012-03-01 Canon Inc 振動波駆動装置及び画像振れ補正装置
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102176644A (zh) * 2006-08-28 2011-09-07 松下电器产业株式会社 驱动装置
WO2008126354A1 (ja) * 2007-03-15 2008-10-23 Panasonic Corporation 超音波アクチュエータ
WO2008120454A1 (ja) * 2007-03-16 2008-10-09 Panasonic Corporation 振動型アクチュエータの制御装置
JP2009117559A (ja) * 2007-11-05 2009-05-28 Olympus Corp 積層圧電素子及び超音波モータ
JP6040530B2 (ja) * 2012-01-17 2016-12-07 セイコーエプソン株式会社 ハンドラーおよび検査装置
JP5818707B2 (ja) * 2012-01-31 2015-11-18 キヤノン株式会社 振動波駆動装置、二次元駆動装置及び画像振れ補正装置
JP5959915B2 (ja) 2012-04-19 2016-08-02 キヤノン株式会社 振動子の製造方法
JP2013255959A (ja) * 2012-06-12 2013-12-26 Seiko Epson Corp 移動機構、電子部品搬送装置、電子部品検査装置
US10532922B2 (en) * 2017-11-27 2020-01-14 Stmicroelectronics S.R.L. Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101608A (ja) * 1982-12-03 1984-06-12 Canon Inc 駆動装置
JPH08237970A (ja) * 1995-02-28 1996-09-13 Olympus Optical Co Ltd 超音波アクチュエータ及びその駆動方法
JP2007006596A (ja) * 2005-06-23 2007-01-11 Olympus Corp 超音波モータの駆動方法及びその装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560263A (en) * 1982-12-03 1985-12-24 Canon Kabushiki Kaisha Drive system for a vibration wave motor for lens control
JP2722211B2 (ja) 1988-07-30 1998-03-04 本多電子株式会社 超音波駆動装置
DE69429744T2 (de) 1993-07-09 2002-08-14 Nanomotion Ltd Keramischer Motor
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
IL106296A0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor
IL114656A0 (en) * 1995-07-18 1995-11-27 Nanomotion Ltd Ceramic motor
US5682076A (en) * 1993-08-03 1997-10-28 Nanomotion Ltd. Ceramic disc-drive actuator
JPH08280185A (ja) * 1995-04-07 1996-10-22 Nikon Corp 超音波アクチュエータ
US6252333B1 (en) * 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
JPH11235063A (ja) 1998-02-20 1999-08-27 Seiko Instruments Inc 超音波モータを利用したステージ、および、これを用いた電子機器、印刷装置
JP4510179B2 (ja) * 1998-08-07 2010-07-21 セイコーインスツル株式会社 超音波モータおよび超音波モータ付電子機器
US6897598B2 (en) * 2002-03-15 2005-05-24 Kyocera Corporation Ultrasonic motor and guide apparatus having the same as driving source of movable body
JP4679938B2 (ja) * 2005-03-11 2011-05-11 オリンパス株式会社 超音波モータ
US7545085B2 (en) * 2006-01-23 2009-06-09 Panasonic Corporation Piezoelectric element and ultrasonic actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101608A (ja) * 1982-12-03 1984-06-12 Canon Inc 駆動装置
JPH08237970A (ja) * 1995-02-28 1996-09-13 Olympus Optical Co Ltd 超音波アクチュエータ及びその駆動方法
JP2007006596A (ja) * 2005-06-23 2007-01-11 Olympus Corp 超音波モータの駆動方法及びその装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011200085A (ja) * 2010-03-23 2011-10-06 Canon Inc 振動型駆動装置
JP2012044832A (ja) * 2010-08-23 2012-03-01 Canon Inc 振動波駆動装置及び画像振れ補正装置
US9172313B2 (en) 2010-08-23 2015-10-27 Canon Kabushiki Kaisha Oscillatory wave drive unit and image stabilization device
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

Also Published As

Publication number Publication date
JP4209465B2 (ja) 2009-01-14
US20090230818A1 (en) 2009-09-17
US7667373B2 (en) 2010-02-23
JPWO2008102553A1 (ja) 2010-05-27

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