WO2008117781A1 - Ｃｖｄ成膜装置 - Google Patents

Ｃｖｄ成膜装置 Download PDF

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Publication number
WO2008117781A1
WO2008117781A1 PCT/JP2008/055450 JP2008055450W WO2008117781A1 WO 2008117781 A1 WO2008117781 A1 WO 2008117781A1 JP 2008055450 W JP2008055450 W JP 2008055450W WO 2008117781 A1 WO2008117781 A1 WO 2008117781A1
Authority
WO
WIPO (PCT)
Prior art keywords
forming apparatus
film
wafer
cvd film
stage
Prior art date
Application number
PCT/JP2008/055450
Other languages
English (en)
French (fr)
Inventor
Hideaki Yamasaki
Isao Gunji
Daisuke Kuroiwa
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to JP2009506334A priority Critical patent/JP5238688B2/ja
Priority to CN2008800104060A priority patent/CN101646804B/zh
Publication of WO2008117781A1 publication Critical patent/WO2008117781A1/ja
Priority to US12/568,139 priority patent/US20100064972A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45519—Inert gas curtains

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

　載置台２２に載置されたウエハＷを加熱機構で加熱しつつ、ウエハの表面で成膜用のガスを反応させてＣＶＤによりウエハＷ上に所定の膜を成膜する成膜装置において、載置台２２におけるウエハＷの外側部分を覆うように、母材２４ａと母材の少なくとも裏面側に設けられた低輻射率膜２４ｂとを有するカバー部材２４をさらに有する。
PCT/JP2008/055450 2007-03-28 2008-03-24 Ｃｖｄ成膜装置 WO2008117781A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009506334A JP5238688B2 (ja) 2007-03-28 2008-03-24 Ｃｖｄ成膜装置
CN2008800104060A CN101646804B (zh) 2007-03-28 2008-03-24 Cvd成膜装置
US12/568,139 US20100064972A1 (en) 2007-03-28 2009-09-28 Cvd film forming apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007083870 2007-03-28
JP2007-083870 2007-03-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/568,139 Continuation US20100064972A1 (en) 2007-03-28 2009-09-28 Cvd film forming apparatus

Publications (1)

Publication Number Publication Date
WO2008117781A1 true WO2008117781A1 (ja) 2008-10-02

Family

ID=39788516

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055450 WO2008117781A1 (ja) 2007-03-28 2008-03-24 Ｃｖｄ成膜装置

Country Status (6)

Country Link
US (1) US20100064972A1 (ja)
JP (1) JP5238688B2 (ja)
KR (1) KR101207593B1 (ja)
CN (1) CN101646804B (ja)
TW (1) TW200902754A (ja)
WO (1) WO2008117781A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014116331A (ja) * 2011-11-30 2014-06-26 Dowa Electronics Materials Co Ltd 結晶成長装置、結晶成長方法及びサセプタ
JP2014212249A (ja) * 2013-04-19 2014-11-13 株式会社アルバック 基板加熱機構、成膜装置、サセプター
KR101545394B1 (ko) * 2013-09-06 2015-08-20 한양대학교 산학협력단 기판의 제조 방법 및 장치
JP6186067B1 (ja) * 2016-12-13 2017-08-23 住友精密工業株式会社 圧電体結晶膜の成膜方法および圧電体結晶膜成膜用トレイ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101248881B1 (ko) * 2011-09-26 2013-04-01 주식회사 유진테크 기판지지유닛 및 기판처리장치, 그리고 기판지지유닛을 제조하는 방법
US9330955B2 (en) * 2013-12-31 2016-05-03 Applied Materials, Inc. Support ring with masked edge
CN104911565B (zh) * 2014-03-11 2017-12-22 中微半导体设备(上海)有限公司 一种化学气相沉积装置
JP6444641B2 (ja) * 2014-07-24 2018-12-26 株式会社ニューフレアテクノロジー 成膜装置、サセプタ、及び成膜方法
JP7242979B2 (ja) * 2018-12-17 2023-03-22 株式会社レゾナック ＳｉＣエピタキシャル成長装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07245264A (ja) * 1994-03-03 1995-09-19 Toshiba Corp 気相成長装置
JP2003007694A (ja) * 2001-06-19 2003-01-10 Tokyo Electron Ltd 枚葉式の熱処理装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591671A (ja) * 1982-05-28 1984-01-07 Fujitsu Ltd プラズマｃｖｄ装置
US4445025A (en) * 1982-11-01 1984-04-24 Athena Controls Inc. Low mass flexible heating means
JP3257741B2 (ja) * 1994-03-03 2002-02-18 東京エレクトロン株式会社 プラズマエッチング装置及び方法
JP3636866B2 (ja) * 1997-07-16 2005-04-06 東京エレクトロン株式会社 ＣＶＤ−Ｔｉ膜の成膜方法
US6364957B1 (en) * 1997-10-09 2002-04-02 Applied Materials, Inc. Support assembly with thermal expansion compensation
JP4288767B2 (ja) * 1999-07-07 2009-07-01 東京エレクトロン株式会社 半導体装置の製造方法
JP4592916B2 (ja) * 2000-04-25 2010-12-08 東京エレクトロン株式会社 被処理体の載置装置
JP4325301B2 (ja) * 2003-01-31 2009-09-02 東京エレクトロン株式会社 載置台、処理装置及び処理方法
US7235139B2 (en) * 2003-10-28 2007-06-26 Veeco Instruments Inc. Wafer carrier for growing GaN wafers
US20060292310A1 (en) * 2005-06-27 2006-12-28 Applied Materials, Inc. Process kit design to reduce particle generation
US8038837B2 (en) * 2005-09-02 2011-10-18 Tokyo Electron Limited Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member
JP4783094B2 (ja) * 2005-09-02 2011-09-28 東京エレクトロン株式会社 プラズマ処理用環状部品、プラズマ処理装置、及び外側環状部材

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07245264A (ja) * 1994-03-03 1995-09-19 Toshiba Corp 気相成長装置
JP2003007694A (ja) * 2001-06-19 2003-01-10 Tokyo Electron Ltd 枚葉式の熱処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014116331A (ja) * 2011-11-30 2014-06-26 Dowa Electronics Materials Co Ltd 結晶成長装置、結晶成長方法及びサセプタ
JP2014212249A (ja) * 2013-04-19 2014-11-13 株式会社アルバック 基板加熱機構、成膜装置、サセプター
KR101545394B1 (ko) * 2013-09-06 2015-08-20 한양대학교 산학협력단 기판의 제조 방법 및 장치
JP6186067B1 (ja) * 2016-12-13 2017-08-23 住友精密工業株式会社 圧電体結晶膜の成膜方法および圧電体結晶膜成膜用トレイ
JP2018095918A (ja) * 2016-12-13 2018-06-21 住友精密工業株式会社 圧電体結晶膜の成膜方法および圧電体結晶膜成膜用トレイ

Also Published As

Publication number Publication date
CN101646804A (zh) 2010-02-10
US20100064972A1 (en) 2010-03-18
KR20100014643A (ko) 2010-02-10
JPWO2008117781A1 (ja) 2010-07-15
TW200902754A (en) 2009-01-16
JP5238688B2 (ja) 2013-07-17
CN101646804B (zh) 2011-11-23
KR101207593B1 (ko) 2012-12-03

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