WO2008107933A1 - 洗浄装置および洗浄方法 - Google Patents

洗浄装置および洗浄方法 Download PDF

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Publication number
WO2008107933A1
WO2008107933A1 PCT/JP2007/000176 JP2007000176W WO2008107933A1 WO 2008107933 A1 WO2008107933 A1 WO 2008107933A1 JP 2007000176 W JP2007000176 W JP 2007000176W WO 2008107933 A1 WO2008107933 A1 WO 2008107933A1
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
flat surface
cleaned
ultraviolet light
technique
Prior art date
Application number
PCT/JP2007/000176
Other languages
English (en)
French (fr)
Inventor
Makoto Sasaki
Tsukasa Itani
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/000176 priority Critical patent/WO2008107933A1/ja
Priority to JP2009502348A priority patent/JP4731622B2/ja
Publication of WO2008107933A1 publication Critical patent/WO2008107933A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

本発明により、平坦な表面を有する洗浄対象物の当該表面を洗浄するための新規な洗浄技術が提供される。本発明は、表面に壊れやすい微細な構造物が形成された、ウエハ等の洗浄対象物の洗浄に特に適する。平坦な表面を有する洗浄対象物の当該表面を洗浄するための洗浄装置において、超音波と紫外線とを伝播し得る構造体であって、前記表面に対向する平坦な表面を有する構造体と、前記洗浄対象物の前記表面を照射するための超音波振動子および紫外線照射装置と、前記構造体の前記表面を前記洗浄対象物の前記表面に対して一定の間隔を設けて平行に保持するための機構と、前記二つの表面間の空間に洗浄液を供給するための洗浄液供給機構とを備える。
PCT/JP2007/000176 2007-03-07 2007-03-07 洗浄装置および洗浄方法 WO2008107933A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/000176 WO2008107933A1 (ja) 2007-03-07 2007-03-07 洗浄装置および洗浄方法
JP2009502348A JP4731622B2 (ja) 2007-03-07 2007-03-07 洗浄装置および洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/000176 WO2008107933A1 (ja) 2007-03-07 2007-03-07 洗浄装置および洗浄方法

Publications (1)

Publication Number Publication Date
WO2008107933A1 true WO2008107933A1 (ja) 2008-09-12

Family

ID=39737839

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/000176 WO2008107933A1 (ja) 2007-03-07 2007-03-07 洗浄装置および洗浄方法

Country Status (2)

Country Link
JP (1) JP4731622B2 (ja)
WO (1) WO2008107933A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009058962B4 (de) * 2009-11-03 2012-12-27 Suss Microtec Photomask Equipment Gmbh & Co. Kg Verfahren und Vorrichtung zum Behandeln von Substraten
TWI676505B (zh) * 2018-05-24 2019-11-11 大陸商友達光電（昆山）有限公司 一種清洗系統及其水幕分叉檢測方法
TWI679694B (zh) * 2015-10-28 2019-12-11 日商東京威力科創股份有限公司 基板處理方法、基板處理裝置、基板處理系統及記憶媒體

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101962305B1 (ko) * 2016-12-20 2019-03-26 주식회사 티씨케이 반도체 제조용 부품 생산 공정의 폐 흑연 재활용 방법
KR101987705B1 (ko) * 2017-02-28 2019-06-11 (주)엔피홀딩스 Uv 램프를 이용한 기판 세정 노즐

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01111337A (ja) * 1987-10-26 1989-04-28 Toshiba Corp ウエーハ洗浄装置
JPH10177978A (ja) * 1996-12-18 1998-06-30 Tadahiro Omi 洗浄やエッチング、現像、剥離等を含むウエット処理に用いる省液型の液体供給ノズル、省液型の液体供給ノズル装置及びウエット処理装置
JP2000107706A (ja) * 1998-10-08 2000-04-18 Furontekku:Kk 洗浄装置
JP2000182974A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 枚葉式の熱処理装置
JP2000279888A (ja) * 1999-03-29 2000-10-10 Kaijo Corp 超音波洗浄装置
JP2000296374A (ja) * 1999-04-14 2000-10-24 Kaijo Corp 超音波励振装置及びこれを備えた超音波洗浄装置
JP2003092277A (ja) * 2001-09-17 2003-03-28 Alps Electric Co Ltd ウェット処理装置
JP2003093984A (ja) * 2001-06-26 2003-04-02 Alps Electric Co Ltd ウエット処理ノズルおよびウエット処理装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01111337A (ja) * 1987-10-26 1989-04-28 Toshiba Corp ウエーハ洗浄装置
JPH10177978A (ja) * 1996-12-18 1998-06-30 Tadahiro Omi 洗浄やエッチング、現像、剥離等を含むウエット処理に用いる省液型の液体供給ノズル、省液型の液体供給ノズル装置及びウエット処理装置
JP2000107706A (ja) * 1998-10-08 2000-04-18 Furontekku:Kk 洗浄装置
JP2000182974A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 枚葉式の熱処理装置
JP2000279888A (ja) * 1999-03-29 2000-10-10 Kaijo Corp 超音波洗浄装置
JP2000296374A (ja) * 1999-04-14 2000-10-24 Kaijo Corp 超音波励振装置及びこれを備えた超音波洗浄装置
JP2003093984A (ja) * 2001-06-26 2003-04-02 Alps Electric Co Ltd ウエット処理ノズルおよびウエット処理装置
JP2003092277A (ja) * 2001-09-17 2003-03-28 Alps Electric Co Ltd ウェット処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009058962B4 (de) * 2009-11-03 2012-12-27 Suss Microtec Photomask Equipment Gmbh & Co. Kg Verfahren und Vorrichtung zum Behandeln von Substraten
TWI679694B (zh) * 2015-10-28 2019-12-11 日商東京威力科創股份有限公司 基板處理方法、基板處理裝置、基板處理系統及記憶媒體
TWI676505B (zh) * 2018-05-24 2019-11-11 大陸商友達光電（昆山）有限公司 一種清洗系統及其水幕分叉檢測方法

Also Published As

Publication number Publication date
JP4731622B2 (ja) 2011-07-27
JPWO2008107933A1 (ja) 2010-06-03

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