WO2008102481A1 - 圧電共振子の製造方法及び圧電共振子 - Google Patents

圧電共振子の製造方法及び圧電共振子 Download PDF

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Publication number
WO2008102481A1
WO2008102481A1 PCT/JP2007/071104 JP2007071104W WO2008102481A1 WO 2008102481 A1 WO2008102481 A1 WO 2008102481A1 JP 2007071104 W JP2007071104 W JP 2007071104W WO 2008102481 A1 WO2008102481 A1 WO 2008102481A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric resonator
vibrating section
manufacturing
piezoelectric vibrating
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/071104
Other languages
English (en)
French (fr)
Inventor
Tetsuya Morimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2008102481A1 publication Critical patent/WO2008102481A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

　製造工程の煩雑さを招くことなく、特性ばらつきが少なく、圧電振動部への振動の閉じ込め性が良好であり、良好な周波数特性を得ることを可能とする圧電共振子の製造方法を得る。 　圧電基板１の第１の主面１ａ上に第１の励振電極２を形成し、第２の主面１ｂ上に第２の励振電極３を形成し、第１の主面１ａ上に圧電振動部と隔てられて、圧電振動部の周囲の領域内に第１の分極電極４，５を形成し、第２の主面１ｂにおいて、圧電振動部と隔てられて圧電振動部の周囲の領域内に第２の分極電極６，７を形成し、第１，２の励振電極２，３間、及び第１の分極電極４，５と第２の分極電極６，７との間にそれぞれ直流電圧を印加して分極する、各工程を備える、圧電共振子１の製造方法。
PCT/JP2007/071104 2007-02-21 2007-10-30 圧電共振子の製造方法及び圧電共振子 Ceased WO2008102481A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-041336 2007-02-21
JP2007041336 2007-02-21

Publications (1)

Publication Number Publication Date
WO2008102481A1 true WO2008102481A1 (ja) 2008-08-28

Family

ID=39709764

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071104 Ceased WO2008102481A1 (ja) 2007-02-21 2007-10-30 圧電共振子の製造方法及び圧電共振子

Country Status (1)

Country Link
WO (1) WO2008102481A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102468423A (zh) * 2010-11-11 2012-05-23 日本碍子株式会社 压电元件的制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4889688A (ja) * 1972-02-23 1973-11-22
JPS5282375U (ja) * 1975-12-16 1977-06-20
JP2001223555A (ja) * 2000-02-08 2001-08-17 Tdk Corp 圧電部品
JP2003249837A (ja) * 2002-02-25 2003-09-05 Murata Mfg Co Ltd 電子部品及びその製造方法
JP2006140980A (ja) * 2004-10-14 2006-06-01 Murata Mfg Co Ltd エネルギー閉じ込め型圧電共振子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4889688A (ja) * 1972-02-23 1973-11-22
JPS5282375U (ja) * 1975-12-16 1977-06-20
JP2001223555A (ja) * 2000-02-08 2001-08-17 Tdk Corp 圧電部品
JP2003249837A (ja) * 2002-02-25 2003-09-05 Murata Mfg Co Ltd 電子部品及びその製造方法
JP2006140980A (ja) * 2004-10-14 2006-06-01 Murata Mfg Co Ltd エネルギー閉じ込め型圧電共振子

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102468423A (zh) * 2010-11-11 2012-05-23 日本碍子株式会社 压电元件的制造方法
JP2012104715A (ja) * 2010-11-11 2012-05-31 Ngk Insulators Ltd 圧電素子の製造方法
EP2453495A3 (en) * 2010-11-11 2014-01-22 NGK Insulators, Ltd. Method for manufacturing piezoelectric element
CN102468423B (zh) * 2010-11-11 2015-09-30 日本碍子株式会社 压电元件的制造方法
US9246081B2 (en) 2010-11-11 2016-01-26 Ngk Insulators, Ltd. Method for manufacturing piezoelectric element

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