WO2008099769A1 - 漏液検知機構およびそれを備えた液体材料塗布装置 - Google Patents

漏液検知機構およびそれを備えた液体材料塗布装置 Download PDF

Info

Publication number
WO2008099769A1
WO2008099769A1 PCT/JP2008/052098 JP2008052098W WO2008099769A1 WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1 JP 2008052098 W JP2008052098 W JP 2008052098W WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1
Authority
WO
WIPO (PCT)
Prior art keywords
leaked
liquid
detection mechanism
application device
liquid detection
Prior art date
Application number
PCT/JP2008/052098
Other languages
English (en)
French (fr)
Inventor
Kazumasa Ikushima
Original Assignee
Musashi Engineering, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashi Engineering, Inc. filed Critical Musashi Engineering, Inc.
Priority to CN2008800048709A priority Critical patent/CN101605613B/zh
Priority to KR1020097016089A priority patent/KR101475251B1/ko
Publication of WO2008099769A1 publication Critical patent/WO2008099769A1/ja
Priority to HK10101918.5A priority patent/HK1135936A1/xx

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00

Landscapes

  • Coating Apparatus (AREA)

Abstract

課題:吐出ユニットからの漏液が塗布対象物上へ落下することを防止することができ、しかも、少ない液量の漏液をも検知することができる漏液検知機構およびそれを備えた液体材料塗布装置の提供。 解決手段:テーブル上に載置されたワークと、ワークと対向する吐出ユニットを相対移動させて液体材料を塗布する塗布装置に取付可能な漏液検知機構であって、前記吐出ユニットの吐出口の対向位置に設けられた開口部を有する受け皿と、受け皿に溜まった漏液を検知する漏液検知装置とから構成され、吐出ユニットの直下に配設される漏液検知機構およびそれを備えた液体材料塗布装置。
PCT/JP2008/052098 2007-02-13 2008-02-08 漏液検知機構およびそれを備えた液体材料塗布装置 WO2008099769A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008800048709A CN101605613B (zh) 2007-02-13 2008-02-08 漏液检测机构及具备该机构的液体材料涂布装置
KR1020097016089A KR101475251B1 (ko) 2007-02-13 2008-02-08 누액 검지 기구 및 이것을 구비한 액체 재료 도포 장치
HK10101918.5A HK1135936A1 (en) 2007-02-13 2010-02-24 Leaked liquid detection mechanism and liquid material application device with the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-032000 2007-02-13
JP2007032000A JP5073310B2 (ja) 2007-02-13 2007-02-13 漏液検知機構およびそれを備えた液体材料塗布装置

Publications (1)

Publication Number Publication Date
WO2008099769A1 true WO2008099769A1 (ja) 2008-08-21

Family

ID=39690002

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052098 WO2008099769A1 (ja) 2007-02-13 2008-02-08 漏液検知機構およびそれを備えた液体材料塗布装置

Country Status (6)

Country Link
JP (1) JP5073310B2 (ja)
KR (1) KR101475251B1 (ja)
CN (1) CN101605613B (ja)
HK (1) HK1135936A1 (ja)
TW (1) TWI404572B (ja)
WO (1) WO2008099769A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367422A (zh) * 2017-08-07 2017-11-21 胡国良 萃取液泄露检测方法及萃取仪
CN110657351A (zh) * 2018-06-29 2020-01-07 台湾积体电路制造股份有限公司 微影设备及微影设备的操作方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103264006A (zh) * 2013-04-18 2013-08-28 合肥京东方光电科技有限公司 一种印刷机
JP6975630B2 (ja) * 2017-02-27 2021-12-01 株式会社Screenホールディングス 基板処理装置および基板処理方法
CN110841874A (zh) * 2019-12-02 2020-02-28 中冶南方工程技术有限公司 一种带擦拭功能的积液盘及辊涂机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286121A (ja) * 1998-02-06 1999-10-19 Canon Inc インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置
JP2004243186A (ja) * 2003-02-12 2004-09-02 Seiko Epson Corp 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2006276347A (ja) * 2005-03-29 2006-10-12 Brother Ind Ltd 立体画像表示装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010020885A (ko) * 1999-05-24 2001-03-15 히가시 데쓰로 용액공급노즐 및 용액공급장치
JP4032942B2 (ja) * 2002-11-27 2008-01-16 セイコーエプソン株式会社 吐出機能液の重量測定装置、およびこれを備えた液滴吐出装置、並びに電気光学装置、電気光学装置の製造方法および電子機器
EP1600294A4 (en) * 2003-02-28 2006-08-30 Seiko Epson Corp LIQUID DROP EJECTOR AND METHOD OF DETECTING / ESTIMATING AN ABNORMAL EJECTION OF A LIQUID DROP EJECTION HEAD
CN1286645C (zh) * 2003-02-28 2006-11-29 精工爱普生株式会社 液滴喷出装置及液滴喷出头的喷出异常检测、判断方法
JP2004361234A (ja) * 2003-06-04 2004-12-24 Seiko Epson Corp 液滴吐出評価試験装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286121A (ja) * 1998-02-06 1999-10-19 Canon Inc インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置
JP2004243186A (ja) * 2003-02-12 2004-09-02 Seiko Epson Corp 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2006276347A (ja) * 2005-03-29 2006-10-12 Brother Ind Ltd 立体画像表示装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367422A (zh) * 2017-08-07 2017-11-21 胡国良 萃取液泄露检测方法及萃取仪
CN110657351A (zh) * 2018-06-29 2020-01-07 台湾积体电路制造股份有限公司 微影设备及微影设备的操作方法
US11131931B2 (en) * 2018-06-29 2021-09-28 Taiwan Semiconductor Manufacturing Co., Ltd. Fluidic leakage handling for semiconductor apparatus

Also Published As

Publication number Publication date
TW200843864A (en) 2008-11-16
CN101605613A (zh) 2009-12-16
KR20090111830A (ko) 2009-10-27
TWI404572B (zh) 2013-08-11
KR101475251B1 (ko) 2014-12-22
JP2008194607A (ja) 2008-08-28
HK1135936A1 (en) 2010-06-18
CN101605613B (zh) 2012-09-26
JP5073310B2 (ja) 2012-11-14

Similar Documents

Publication Publication Date Title
WO2008099769A1 (ja) 漏液検知機構およびそれを備えた液体材料塗布装置
EP2009512A3 (en) Developing apparatus including a supplying member as developer amount detecting member
EP2550105A4 (en) DETECTION DEVICE FOR DETECTING ANALYTES IN A LIQUID SAMPLE
IL191071A0 (en) Device for detecting analytes in fluid samples
EP2674217A3 (en) Device and process for assays using binding members
WO2009058765A3 (en) Apparatus for dispensing and analysing test strips
EP2076766A4 (en) Apparatus for aspirating and dispensing liquids in an automated analyzer
EP1788385A4 (en) SENSOR FOR DETECTING A SUBSTANCE IN A LIQUID AND DEVICE FOR DETECTING A SUBSTANCE IN A LIQUID IN USE THEREOF
GB2435790B (en) Device for detecting an enzyme in a sample
WO2014058760A3 (en) Preloaded test substrates for testing lal-reactive substances, methods of use, and methods of making
EP2106588A4 (en) FAST AND ACCURATE STATISTICAL RECOGNITION OF DATA RUNNING RECIPIENTS OF SIMULTANEOUS PROGRAMS
MX2009007294A (es) Aparato para medir cartuchos de maquinas de afeitar.
EP2098828A4 (en) ROTATION INPUT DEVICE AND ROTATION DETECTION DEVICE USING THE SAME
WO2009075513A3 (en) A thin film bio valve device and its controlling apparatus
EP2015035A4 (en) APPARATUS FOR DETECTING THE LIQUID LEVEL
EP2062044A4 (en) Method and device for measuring liquid absorption
MX347366B (es) Aparato para dispensar material de hoja absorbente desde un rollo.
EP2306487A4 (en) WIRING DEVICE WITH LEAK DETECTION FUNCTION
GB0625380D0 (en) Leak detection device in fluid filled pipelines
EP1788384A4 (en) SENSOR FOR DETECTING A SUBSTANCE IN A LIQUID AND DEVICE FOR DETECTING A SUBSTANCE IN A LIQUID EMPLOYING THE SENSOR
EP2214026A4 (en) SAMPLE DETECTOR AND EQUIPPED MEASURING DEVICE
WO2009143225A3 (en) Multiple-mode location determining methods and systems
MX2009007009A (es) Aparato para transportar contenedores con seccion transversal no circular.
FR2933631B1 (fr) Dispositif de distribution automatique de composants
ZA200902282B (en) Dispensing device for liquids

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880004870.9

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08710977

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
WWE Wipo information: entry into national phase

Ref document number: 1020097016089

Country of ref document: KR

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08710977

Country of ref document: EP

Kind code of ref document: A1