WO2008099769A1 - 漏液検知機構およびそれを備えた液体材料塗布装置 - Google Patents

漏液検知機構およびそれを備えた液体材料塗布装置 Download PDF

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Publication number
WO2008099769A1
WO2008099769A1 PCT/JP2008/052098 JP2008052098W WO2008099769A1 WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1 JP 2008052098 W JP2008052098 W JP 2008052098W WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1
Authority
WO
WIPO (PCT)
Prior art keywords
leaked
liquid
detection mechanism
application device
liquid detection
Prior art date
Application number
PCT/JP2008/052098
Other languages
English (en)
French (fr)
Inventor
Kazumasa Ikushima
Original Assignee
Musashi Engineering, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashi Engineering, Inc. filed Critical Musashi Engineering, Inc.
Priority to CN2008800048709A priority Critical patent/CN101605613B/zh
Priority to KR1020097016089A priority patent/KR101475251B1/ko
Publication of WO2008099769A1 publication Critical patent/WO2008099769A1/ja
Priority to HK10101918.5A priority patent/HK1135936A1/xx

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00

Landscapes

  • Coating Apparatus (AREA)

Abstract

課題：吐出ユニットからの漏液が塗布対象物上へ落下することを防止することができ、しかも、少ない液量の漏液をも検知することができる漏液検知機構およびそれを備えた液体材料塗布装置の提供。 解決手段：テーブル上に載置されたワークと、ワークと対向する吐出ユニットを相対移動させて液体材料を塗布する塗布装置に取付可能な漏液検知機構であって、前記吐出ユニットの吐出口の対向位置に設けられた開口部を有する受け皿と、受け皿に溜まった漏液を検知する漏液検知装置とから構成され、吐出ユニットの直下に配設される漏液検知機構およびそれを備えた液体材料塗布装置。
PCT/JP2008/052098 2007-02-13 2008-02-08 漏液検知機構およびそれを備えた液体材料塗布装置 WO2008099769A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008800048709A CN101605613B (zh) 2007-02-13 2008-02-08 漏液检测机构及具备该机构的液体材料涂布装置
KR1020097016089A KR101475251B1 (ko) 2007-02-13 2008-02-08 누액 검지 기구 및 이것을 구비한 액체 재료 도포 장치
HK10101918.5A HK1135936A1 (en) 2007-02-13 2010-02-24 Leaked liquid detection mechanism and liquid material application device with the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-032000 2007-02-13
JP2007032000A JP5073310B2 (ja) 2007-02-13 2007-02-13 漏液検知機構およびそれを備えた液体材料塗布装置

Publications (1)

Publication Number Publication Date
WO2008099769A1 true WO2008099769A1 (ja) 2008-08-21

Family

ID=39690002

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052098 WO2008099769A1 (ja) 2007-02-13 2008-02-08 漏液検知機構およびそれを備えた液体材料塗布装置

Country Status (6)

Country Link
JP (1) JP5073310B2 (ja)
KR (1) KR101475251B1 (ja)
CN (1) CN101605613B (ja)
HK (1) HK1135936A1 (ja)
TW (1) TWI404572B (ja)
WO (1) WO2008099769A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367422A (zh) * 2017-08-07 2017-11-21 胡国良 萃取液泄露检测方法及萃取仪
CN110657351A (zh) * 2018-06-29 2020-01-07 台湾积体电路制造股份有限公司 微影设备及微影设备的操作方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103264006A (zh) * 2013-04-18 2013-08-28 合肥京东方光电科技有限公司 一种印刷机
JP6975630B2 (ja) * 2017-02-27 2021-12-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN110841874A (zh) * 2019-12-02 2020-02-28 中冶南方工程技术有限公司 一种带擦拭功能的积液盘及辊涂机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286121A (ja) * 1998-02-06 1999-10-19 Canon Inc インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置
JP2004243186A (ja) * 2003-02-12 2004-09-02 Seiko Epson Corp 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2006276347A (ja) * 2005-03-29 2006-10-12 Brother Ind Ltd 立体画像表示装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010020885A (ko) * 1999-05-24 2001-03-15 히가시 데쓰로 용액공급노즐 및 용액공급장치
JP4032942B2 (ja) * 2002-11-27 2008-01-16 セイコーエプソン株式会社 吐出機能液の重量測定装置、およびこれを備えた液滴吐出装置、並びに電気光学装置、電気光学装置の製造方法および電子機器
EP1600294A4 (en) * 2003-02-28 2006-08-30 Seiko Epson Corp LIQUID DROP EJECTOR AND METHOD OF DETECTING / ESTIMATING AN ABNORMAL EJECTION OF A LIQUID DROP EJECTION HEAD
CN1286645C (zh) * 2003-02-28 2006-11-29 精工爱普生株式会社 液滴喷出装置及液滴喷出头的喷出异常检测、判断方法
JP2004361234A (ja) * 2003-06-04 2004-12-24 Seiko Epson Corp 液滴吐出評価試験装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11286121A (ja) * 1998-02-06 1999-10-19 Canon Inc インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置
JP2004243186A (ja) * 2003-02-12 2004-09-02 Seiko Epson Corp 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2006276347A (ja) * 2005-03-29 2006-10-12 Brother Ind Ltd 立体画像表示装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367422A (zh) * 2017-08-07 2017-11-21 胡国良 萃取液泄露检测方法及萃取仪
CN110657351A (zh) * 2018-06-29 2020-01-07 台湾积体电路制造股份有限公司 微影设备及微影设备的操作方法
US11131931B2 (en) * 2018-06-29 2021-09-28 Taiwan Semiconductor Manufacturing Co., Ltd. Fluidic leakage handling for semiconductor apparatus

Also Published As

Publication number Publication date
TW200843864A (en) 2008-11-16
CN101605613A (zh) 2009-12-16
KR20090111830A (ko) 2009-10-27
TWI404572B (zh) 2013-08-11
KR101475251B1 (ko) 2014-12-22
JP2008194607A (ja) 2008-08-28
HK1135936A1 (en) 2010-06-18
CN101605613B (zh) 2012-09-26
JP5073310B2 (ja) 2012-11-14

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