WO2008099769A1 - 漏液検知機構およびそれを備えた液体材料塗布装置 - Google Patents
漏液検知機構およびそれを備えた液体材料塗布装置 Download PDFInfo
- Publication number
- WO2008099769A1 WO2008099769A1 PCT/JP2008/052098 JP2008052098W WO2008099769A1 WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1 JP 2008052098 W JP2008052098 W JP 2008052098W WO 2008099769 A1 WO2008099769 A1 WO 2008099769A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- leaked
- liquid
- detection mechanism
- application device
- liquid detection
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
Landscapes
- Coating Apparatus (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008800048709A CN101605613B (zh) | 2007-02-13 | 2008-02-08 | 漏液检测机构及具备该机构的液体材料涂布装置 |
KR1020097016089A KR101475251B1 (ko) | 2007-02-13 | 2008-02-08 | 누액 검지 기구 및 이것을 구비한 액체 재료 도포 장치 |
HK10101918.5A HK1135936A1 (en) | 2007-02-13 | 2010-02-24 | Leaked liquid detection mechanism and liquid material application device with the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-032000 | 2007-02-13 | ||
JP2007032000A JP5073310B2 (ja) | 2007-02-13 | 2007-02-13 | 漏液検知機構およびそれを備えた液体材料塗布装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008099769A1 true WO2008099769A1 (ja) | 2008-08-21 |
Family
ID=39690002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/052098 WO2008099769A1 (ja) | 2007-02-13 | 2008-02-08 | 漏液検知機構およびそれを備えた液体材料塗布装置 |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP5073310B2 (ja) |
KR (1) | KR101475251B1 (ja) |
CN (1) | CN101605613B (ja) |
HK (1) | HK1135936A1 (ja) |
TW (1) | TWI404572B (ja) |
WO (1) | WO2008099769A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107367422A (zh) * | 2017-08-07 | 2017-11-21 | 胡国良 | 萃取液泄露检测方法及萃取仪 |
CN110657351A (zh) * | 2018-06-29 | 2020-01-07 | 台湾积体电路制造股份有限公司 | 微影设备及微影设备的操作方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103264006A (zh) * | 2013-04-18 | 2013-08-28 | 合肥京东方光电科技有限公司 | 一种印刷机 |
JP6975630B2 (ja) * | 2017-02-27 | 2021-12-01 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
CN110841874A (zh) * | 2019-12-02 | 2020-02-28 | 中冶南方工程技术有限公司 | 一种带擦拭功能的积液盘及辊涂机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11286121A (ja) * | 1998-02-06 | 1999-10-19 | Canon Inc | インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置 |
JP2004243186A (ja) * | 2003-02-12 | 2004-09-02 | Seiko Epson Corp | 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器 |
JP2006276347A (ja) * | 2005-03-29 | 2006-10-12 | Brother Ind Ltd | 立体画像表示装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010020885A (ko) * | 1999-05-24 | 2001-03-15 | 히가시 데쓰로 | 용액공급노즐 및 용액공급장치 |
JP4032942B2 (ja) * | 2002-11-27 | 2008-01-16 | セイコーエプソン株式会社 | 吐出機能液の重量測定装置、およびこれを備えた液滴吐出装置、並びに電気光学装置、電気光学装置の製造方法および電子機器 |
EP1600294A4 (en) * | 2003-02-28 | 2006-08-30 | Seiko Epson Corp | LIQUID DROP EJECTOR AND METHOD OF DETECTING / ESTIMATING AN ABNORMAL EJECTION OF A LIQUID DROP EJECTION HEAD |
CN1286645C (zh) * | 2003-02-28 | 2006-11-29 | 精工爱普生株式会社 | 液滴喷出装置及液滴喷出头的喷出异常检测、判断方法 |
JP2004361234A (ja) * | 2003-06-04 | 2004-12-24 | Seiko Epson Corp | 液滴吐出評価試験装置 |
-
2007
- 2007-02-13 JP JP2007032000A patent/JP5073310B2/ja active Active
-
2008
- 2008-02-08 KR KR1020097016089A patent/KR101475251B1/ko active IP Right Grant
- 2008-02-08 WO PCT/JP2008/052098 patent/WO2008099769A1/ja active Application Filing
- 2008-02-08 CN CN2008800048709A patent/CN101605613B/zh active Active
- 2008-02-13 TW TW097105003A patent/TWI404572B/zh active
-
2010
- 2010-02-24 HK HK10101918.5A patent/HK1135936A1/xx unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11286121A (ja) * | 1998-02-06 | 1999-10-19 | Canon Inc | インクタンク、該インクタンクを用いるインクジェットプリントヘッド、プリントヘッドカ―トリッジおよびインクジェットプリント装置 |
JP2004243186A (ja) * | 2003-02-12 | 2004-09-02 | Seiko Epson Corp | 長尺体配設構造、液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器 |
JP2006276347A (ja) * | 2005-03-29 | 2006-10-12 | Brother Ind Ltd | 立体画像表示装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107367422A (zh) * | 2017-08-07 | 2017-11-21 | 胡国良 | 萃取液泄露检测方法及萃取仪 |
CN110657351A (zh) * | 2018-06-29 | 2020-01-07 | 台湾积体电路制造股份有限公司 | 微影设备及微影设备的操作方法 |
US11131931B2 (en) * | 2018-06-29 | 2021-09-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fluidic leakage handling for semiconductor apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW200843864A (en) | 2008-11-16 |
CN101605613A (zh) | 2009-12-16 |
KR20090111830A (ko) | 2009-10-27 |
TWI404572B (zh) | 2013-08-11 |
KR101475251B1 (ko) | 2014-12-22 |
JP2008194607A (ja) | 2008-08-28 |
HK1135936A1 (en) | 2010-06-18 |
CN101605613B (zh) | 2012-09-26 |
JP5073310B2 (ja) | 2012-11-14 |
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