WO2008081719A1 - 対象物の物理量測定方法及び制御方法 - Google Patents

対象物の物理量測定方法及び制御方法 Download PDF

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Publication number
WO2008081719A1
WO2008081719A1 PCT/JP2007/074447 JP2007074447W WO2008081719A1 WO 2008081719 A1 WO2008081719 A1 WO 2008081719A1 JP 2007074447 W JP2007074447 W JP 2007074447W WO 2008081719 A1 WO2008081719 A1 WO 2008081719A1
Authority
WO
WIPO (PCT)
Prior art keywords
physical quantity
quantity measuring
measuring method
object physical
control method
Prior art date
Application number
PCT/JP2007/074447
Other languages
English (en)
French (fr)
Inventor
Tetsuya Hayashi
Eisuke Sasaoka
Yoshinori Yamamoto
Makoto Katayama
Tomohiko Kanie
Shinji Ishikawa
Osamu Ichikawa
Original Assignee
Sumitomo Electric Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries, Ltd. filed Critical Sumitomo Electric Industries, Ltd.
Priority to EP07850917A priority Critical patent/EP2116815A1/en
Priority to US12/521,078 priority patent/US20100033711A1/en
Priority to JP2008552086A priority patent/JP5077242B2/ja
Publication of WO2008081719A1 publication Critical patent/WO2008081719A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35303—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/02—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Electromagnetism (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Fluid Mechanics (AREA)
  • Multimedia (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Measuring Fluid Pressure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

　この発明は、ブリルアン散乱減少を利用し、微細構造物上又は微細構造物中に存在する対象物の物理量を測定及び制御するための光センシング技術に関する。当該測定方法は、マイクロ化学チップやＩＣチップなどの素子上又は素子中に一次元乃至三次元的に光導波路を用意し、この光導波路中で発生するブリルアン散乱光の特性変化に基づいて、対象物の物理量を測定する。
PCT/JP2007/074447 2006-12-28 2007-12-19 対象物の物理量測定方法及び制御方法 WO2008081719A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP07850917A EP2116815A1 (en) 2006-12-28 2007-12-19 Object physical quantity measuring method and control method
US12/521,078 US20100033711A1 (en) 2006-12-28 2007-12-19 Method of measuring physical quantity of object to be measured, and method of controlling the same
JP2008552086A JP5077242B2 (ja) 2006-12-28 2007-12-19 対象物の物理量測定方法及び制御方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-354906 2006-12-28
JP2006354906 2006-12-28

Publications (1)

Publication Number Publication Date
WO2008081719A1 true WO2008081719A1 (ja) 2008-07-10

Family

ID=39588404

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074447 WO2008081719A1 (ja) 2006-12-28 2007-12-19 対象物の物理量測定方法及び制御方法

Country Status (5)

Country Link
US (1) US20100033711A1 (ja)
EP (1) EP2116815A1 (ja)
JP (2) JP5077242B2 (ja)
CN (1) CN101573593A (ja)
WO (1) WO2008081719A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012507035A (ja) * 2008-10-27 2012-03-22 ジェナリーテ， インコーポレイテッド 光学的な探査及び検知に基づくバイオセンサ
US9921165B2 (en) 2010-11-05 2018-03-20 Genalyte, Inc. Optical analyte detection systems and methods of use
US9983206B2 (en) 2013-03-15 2018-05-29 The Board Of Trustees Of The University Of Illinois Methods and compositions for enhancing immunoassays
US10365224B2 (en) 2007-12-06 2019-07-30 Genalyte, Inc. Label-free optical sensors

Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
US9360304B2 (en) * 2012-08-10 2016-06-07 Research Institute Of Innovative Technology For Th Method for measuring volumetric changes of object
CN103674110B (zh) * 2013-11-26 2016-06-01 北京航天时代光电科技有限公司 一种基于布里渊光放大检测的分布式光纤温度应变传感器
US10247581B2 (en) 2014-04-28 2019-04-02 Optoplan As Interferometric optical fibre sensor system and method of interrogation
CN104155336B (zh) * 2014-07-17 2016-08-24 清华大学 同时测定低维材料热导率、热扩散率和热容的方法及系统
CN104142224B (zh) * 2014-07-22 2015-05-20 河海大学 分布式传感光纤多目标多自由度静动态测试装置及方法
CN105769118B (zh) * 2014-12-15 2019-07-05 汇嘉健康生活科技股份有限公司 光纤感应层及其监测系统
JP2018059851A (ja) * 2016-10-06 2018-04-12 株式会社東芝 温度測定装置
JP7066557B2 (ja) * 2018-07-12 2022-05-13 東京エレクトロン株式会社 温度測定センサ、温度測定システム、および、温度測定方法
KR102649602B1 (ko) * 2022-11-29 2024-03-20 (주)힉스컴퍼니 투과형 간섭계에서의 간섭 패턴 품질 향상 장치 및 방법

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JPH05107121A (ja) * 1991-10-18 1993-04-27 Toshiba Corp 測定装置
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JPH05107121A (ja) * 1991-10-18 1993-04-27 Toshiba Corp 測定装置
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10365224B2 (en) 2007-12-06 2019-07-30 Genalyte, Inc. Label-free optical sensors
JP2012507035A (ja) * 2008-10-27 2012-03-22 ジェナリーテ， インコーポレイテッド 光学的な探査及び検知に基づくバイオセンサ
JP2015062027A (ja) * 2008-10-27 2015-04-02 ジェナリーテ， インコーポレイテッド 光学的な探査及び検知に基づくバイオセンサ
US9846126B2 (en) 2008-10-27 2017-12-19 Genalyte, Inc. Biosensors based on optical probing and sensing
US11041811B2 (en) 2008-10-27 2021-06-22 Genalyte, Inc. Biosensors based on optical probing and sensing
US9921165B2 (en) 2010-11-05 2018-03-20 Genalyte, Inc. Optical analyte detection systems and methods of use
US9983206B2 (en) 2013-03-15 2018-05-29 The Board Of Trustees Of The University Of Illinois Methods and compositions for enhancing immunoassays
US10739340B2 (en) 2013-03-15 2020-08-11 The Board Of Trustees Of The University Of Illinois Methods and compositions for enhancing immunoassays

Also Published As

Publication number Publication date
US20100033711A1 (en) 2010-02-11
EP2116815A1 (en) 2009-11-11
CN101573593A (zh) 2009-11-04
JPWO2008081719A1 (ja) 2010-04-30
JP2012247427A (ja) 2012-12-13
JP5077242B2 (ja) 2012-11-21

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