WO2008081704A1 - プローブユニットの配線固定方法およびプローブユニット - Google Patents

プローブユニットの配線固定方法およびプローブユニット Download PDF

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Publication number
WO2008081704A1
WO2008081704A1 PCT/JP2007/074211 JP2007074211W WO2008081704A1 WO 2008081704 A1 WO2008081704 A1 WO 2008081704A1 JP 2007074211 W JP2007074211 W JP 2007074211W WO 2008081704 A1 WO2008081704 A1 WO 2008081704A1
Authority
WO
WIPO (PCT)
Prior art keywords
wiring
probe unit
fixing
inserting hole
wiring board
Prior art date
Application number
PCT/JP2007/074211
Other languages
English (en)
French (fr)
Inventor
Shigeki Ishikawa
Shogo Imuta
Takashi Nidaira
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to JP2008552081A priority Critical patent/JP4804542B2/ja
Priority to TW096149662A priority patent/TW200827729A/zh
Publication of WO2008081704A1 publication Critical patent/WO2008081704A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

　配線の特定を容易に行うことができるようになるとともに、耐久性を向上させることができるプローブユニットの配線固定方法およびプローブユニットを提供する。この目的のため、配線基板に設けられた挿通孔に配線を挿通した後、配線と配線基板とを固着する固着材を、配線基板がプローブホルダに取り付けられる際にプローブホルダと対向する挿通孔の端面から、挿通孔と該挿通孔に挿通された配線との隙間のうち、配線が挿通孔の外部に延出する側の端面付近を除く隙間に充填する。
PCT/JP2007/074211 2006-12-28 2007-12-17 プローブユニットの配線固定方法およびプローブユニット WO2008081704A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008552081A JP4804542B2 (ja) 2006-12-28 2007-12-17 プローブユニットの配線固定方法およびプローブユニット
TW096149662A TW200827729A (en) 2006-12-28 2007-12-24 Wiring fixing method of probe unit and probe unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006356384 2006-12-28
JP2006-356384 2006-12-28

Publications (1)

Publication Number Publication Date
WO2008081704A1 true WO2008081704A1 (ja) 2008-07-10

Family

ID=39588388

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074211 WO2008081704A1 (ja) 2006-12-28 2007-12-17 プローブユニットの配線固定方法およびプローブユニット

Country Status (3)

Country Link
JP (1) JP4804542B2 (ja)
TW (1) TW200827729A (ja)
WO (1) WO2008081704A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105223385A (zh) * 2014-06-27 2016-01-06 旺矽科技股份有限公司 探针卡的定位件与探针卡的探针头

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010117058A1 (ja) * 2009-04-09 2010-10-14 日本発條株式会社 コンタクトプローブおよびプローブユニット
KR101819355B1 (ko) 2016-08-03 2018-01-16 류동수 후 변위 텐션 부여 방식 와이어 프로브 지그
KR101819354B1 (ko) 2016-08-03 2018-01-16 류동수 후 변위 텐션 부여 방식 프로브 지그 제조 방법

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000088882A (ja) * 1998-09-10 2000-03-31 Ibiden Co Ltd チェッカーヘッドおよびその製造方法
JP2002214285A (ja) * 2001-01-16 2002-07-31 Nagase & Co Ltd ピッチ変換治具
JP2003130888A (ja) * 2001-10-26 2003-05-08 Internet Kk 受けピンを不要としたコンタクトプローブ受け基板
JP2003222637A (ja) * 2002-01-31 2003-08-08 Koyo Technos:Kk 検査冶具及びその製造方法
JP2003234385A (ja) * 2002-02-12 2003-08-22 Micronics Japan Co Ltd 電気的接続装置
JP2004138385A (ja) * 2002-10-15 2004-05-13 Ibiden Engineering Kk チェッカーヘッドおよびその製造方法
JP2006126180A (ja) * 2004-09-30 2006-05-18 Jsr Corp 回路装置検査用電極装置およびその製造方法並びに回路装置の検査装置
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055118A (ja) * 2000-08-11 2002-02-20 Citizen Watch Co Ltd プローバー

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000088882A (ja) * 1998-09-10 2000-03-31 Ibiden Co Ltd チェッカーヘッドおよびその製造方法
JP2002214285A (ja) * 2001-01-16 2002-07-31 Nagase & Co Ltd ピッチ変換治具
JP2003130888A (ja) * 2001-10-26 2003-05-08 Internet Kk 受けピンを不要としたコンタクトプローブ受け基板
JP2003222637A (ja) * 2002-01-31 2003-08-08 Koyo Technos:Kk 検査冶具及びその製造方法
JP2003234385A (ja) * 2002-02-12 2003-08-22 Micronics Japan Co Ltd 電気的接続装置
JP2004138385A (ja) * 2002-10-15 2004-05-13 Ibiden Engineering Kk チェッカーヘッドおよびその製造方法
JP2006126180A (ja) * 2004-09-30 2006-05-18 Jsr Corp 回路装置検査用電極装置およびその製造方法並びに回路装置の検査装置
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105223385A (zh) * 2014-06-27 2016-01-06 旺矽科技股份有限公司 探针卡的定位件与探针卡的探针头

Also Published As

Publication number Publication date
JP4804542B2 (ja) 2011-11-02
TWI348025B (ja) 2011-09-01
JPWO2008081704A1 (ja) 2010-04-30
TW200827729A (en) 2008-07-01

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