WO2008075763A1 - Répartiteur de lumière - Google Patents

Répartiteur de lumière Download PDF

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Publication number
WO2008075763A1
WO2008075763A1 PCT/JP2007/074618 JP2007074618W WO2008075763A1 WO 2008075763 A1 WO2008075763 A1 WO 2008075763A1 JP 2007074618 W JP2007074618 W JP 2007074618W WO 2008075763 A1 WO2008075763 A1 WO 2008075763A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
shielding film
opening
optical
incident
Prior art date
Application number
PCT/JP2007/074618
Other languages
English (en)
Japanese (ja)
Inventor
Tsutomu Ishi
Original Assignee
Nec Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corporation filed Critical Nec Corporation
Publication of WO2008075763A1 publication Critical patent/WO2008075763A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices

Definitions

  • the present invention relates to an optical distributor, and more particularly to an optical distributor that obtains a plurality of outputs from a single output end.
  • An optical distributor having an optical element that branches one optical path into a plurality of optical paths is used in the field of optical communication.
  • a planar optical waveguide circuit as a structure for distributing light into a plurality of waveguides, a Y-branch type optical waveguide 40 having a Y-shape shown in FIG. 7 or shown in FIG.
  • the directional coupler type waveguide 50 that has been used has been widely used so far.
  • both Y-branch type and directional coupler type waveguides have a problem that the dependence on the device structure, material, and dimensions is large in terms of device characteristics, and the tolerance for fabrication errors is small. there were. For this reason, it was not easy to manufacture the device, and there was a problem that the optical output loss increased when a manufacturing error occurred.
  • MM I Multi-Mode Interferometer
  • MM I has the drawback that it is difficult to reduce the size of the circuit when trying to ensure low loss. For example, if the number of branches in the input / output waveguide increases, the M M l width (core width) must be increased and the waveguide length must be increased, which necessitates a larger circuit.
  • the multimode interference waveguide is arranged from the optical input / output waveguide disposed on the outermost side
  • the configuration is such that the distance to the edge along the same direction as the waveguide direction is narrower than the distance between the optical input / output waveguides, or the edge of the input / output waveguide and the edge of the MM I waveguide
  • a technology to reduce the size of the optical multiplexing / demultiplexing circuit by adopting an almost matched configuration has been proposed. According to this technology, it is possible to provide a small optical multiplexing / demultiplexing circuit that multiplexes or demultiplexes an optical wave transmitted through an optical waveguide with low loss.
  • the structure of the optical branching element suitable for the planar optical waveguide circuit found in the first document can be relatively easily formed on the substrate by using a technique such as photolithography. However, it is difficult to branch the light incident from the perpendicular direction to the substrate surface using the structure of the formed light branching element.
  • Japanese Laid-Open Patent Publication No. 2 0 1-2 9 1 2 6 5 uses surface plasmon amplified light transmission to make light incident from a direction perpendicular to the substrate surface into a minute region.
  • a technique for condensing light is disclosed. According to this technology, it is possible to substantially increase the intensity of the transmitted light that passes through the opening of the avatar by the interaction between the plasmon amplifying device and the surface plasmon.
  • light that is incident from a direction perpendicular to the substrate surface can be condensed on a specific area by using a small optical circuit without using a large converging lens or the like. This overcomes some of the restrictions on circuit layout described above.
  • an object of the present invention is to provide an optical distributor that splits incident light with a simple structure.
  • a further object of the present invention is to provide a function of converting incident light into electrical signals at a plurality of output ends using such an optical distributor.
  • a first invention for solving the above-described problems includes a light-shielding film and an opening formed in the light-shielding film, and the longitudinal dimension of the opening is n times the wavelength of light to be distributed (n Is an optical distributor characterized by:
  • n times (n is an integer greater than or equal to 2) is not limited to an integer multiple in a mathematically exact sense. For example, if it is within the range of ⁇ 10%, since the inventors have obtained the same effect as in the case of integer multiple, in the present invention, such a case is also multiplied by n (integer multiple). I think.
  • a second invention for solving the above problem is an optical distributor, characterized in that in the first invention, the opening has a slit shape.
  • a third invention for solving the above-described problem is an optical distributor, in the first invention or the second invention, wherein the light incident surface of the light shielding film at the side of the opening or A groove is provided on at least one surface of the back surface.
  • a fourth invention for solving the above-described problem is an optical distributor, wherein the groove is provided on both sides of the opening.
  • a fifth invention for solving the above-mentioned problems is an optical distributor, wherein in the third invention or the fourth invention, the groove is an annular groove surrounding the opening.
  • a seventh invention for solving the above-mentioned problems is an optical distributor, and corresponds to the plurality of condensing points formed by the opening in any one of the first to fifth inventions.
  • a photoelectric conversion element is provided.
  • An eighth invention for solving the above-mentioned problems is an optical distributor, characterized in that, in any one of the first to seventh inventions, the light shielding film is a metal film.
  • a ninth invention for solving the above-mentioned problems is an optical distributor, characterized in that, in any one of the first to eighth inventions, the light shielding film is a conductive film.
  • a tenth aspect of the present invention for solving the above-described problem is an optical distributor, in any one of the first aspect to the ninth aspect of the present invention, wherein the light is incident in a direction perpendicular to the light shielding film. Are distributed.
  • An eleventh aspect of the present invention for solving the above-described problem is an optical distributor, wherein the light-shielding film has a thickness that is constant for incident light in any one of the first to tenth aspects of the present invention. It is characterized by being m times the half wavelength of the standing wave (m is a natural number).
  • a 12th invention for solving the above-mentioned problem is an optical distributor, wherein in one of the first invention to the 11th invention, light is incident on one surface of the light shielding film.
  • a plurality of condensing points formed in the opening on the other surface of the light shielding film are configured as light output ends.
  • FIG. 1A and 1B are a plan view of an optical distributor according to a first embodiment of the present invention, and FIG. It is a sectional view along line A—A ′.
  • FIG. 2 is a diagram showing the electric field distribution at the light output end by computer simulation.
  • FIG. 3 is a diagram showing the electric field distribution at the light output end by computer simulation.
  • FIGS. 4A and 4B are a plan view and a cross-sectional view taken along line B_B of the optical distributor according to the second embodiment of the present invention.
  • FIGS. 5A and 5B are plan views and lines of the optical distributor according to the second embodiment of the present invention.
  • FIG. 6 is a graph showing the relationship between the electric field intensity at the optical output end and the slit length by computer simulation.
  • FIG. 7 is a diagram showing an optical distributor using a Y-shaped optical waveguide used in a planar optical waveguide circuit.
  • FIG. 8 is a diagram showing an optical distributor using a directional coupler used in a planar optical waveguide circuit.
  • FIG. 9 is a diagram showing an optical distributor using a multimode interference waveguide used in a planar optical waveguide circuit.
  • FIG. 10 is a diagram showing an example of a configuration for obtaining a plurality of condensing points according to the technique related to the present invention.
  • FIG. 11 is a diagram showing an example of a configuration for obtaining a plurality of condensing points according to the present invention.
  • the optical divider 10 includes a light shielding film 11 1 made of a metal film or a conductive film, and a light shielding film 11 1. And a rectangular opening 12 formed into a rectangular shape.
  • a groove 13 is formed in the light shielding film 11. The groove 13 is formed in parallel to the longitudinal side of the opening 12 and on both sides of the opening 12 and at a predetermined interval.
  • Light shielding film 1 1 A substrate (not shown) is provided in parallel with the main surface of the optical distributor, and the optical distributor 10 is fixed to the substrate.
  • the thickness of the light shielding film 11 may be such that the portion excluding the opening can be regarded as opaque at the wavelength used by the incident light.
  • the thickness of the light shielding film 1 1 is an integral multiple (m times) of 1 2 of the wavelength of incident light, since the light transmittance (light intensity) at the opening 12 increases. .
  • the opening considering the opening as a waveguide, it is convenient to set the light-shielding film to such a thickness that the “antinodes” of the standing wave are located at both ends.
  • the above-mentioned integer multiple (m times) is not limited to an integer multiple in a mathematically strict sense. For example, if it is within a range of ⁇ 10%, it is the same as in the case of an integral multiple. Since the effect is obtained, the present invention considers such a case as m times (integer multiple).
  • the opening 12 is a single opening provided through the light shielding film 11.
  • the shape of the opening is a slit shape. In particular, for example, a rectangular shape.
  • the longitudinal dimension of the opening is n times the wavelength of the incident light (n is an integer multiple of 2 or more). For example, it is twice.
  • the grooves 13 are rectangular grooves provided on both sides of the opening 12 in order to increase the electric field strength at the condensing point. It is desirable to set the period for engraving the plurality of grooves 13 (interval between the plurality of grooves) to a value about 2 to 7% smaller than the wavelength of the target light. The reason why the electric field intensity at the condensing point can be increased by providing the grooves 13 as described above is as follows.
  • FIG. 2 and FIG. 3 are electric field distribution diagrams at the optical output end, in addition to FIG.
  • the graphs (a) and (b) in Fig. 2 and the graphs (a) and (b) in Fig. 3 convert the light intensity into the electric field strength. It is a measure of strength.
  • the following shows the results of examining the electric field distribution in the slit aperture by computer simulation using the finite difference time domain method.
  • the incident light wavelength is 640 nm
  • the beam diameter is 3 ⁇ m (Gaussian profile)
  • the light shielding film 11 is a silver film having a thickness of 240 nm.
  • the longitudinal dimension (hereinafter also referred to as slit length) is 600 nm
  • the lateral dimension (hereinafter also referred to as slit width) is 150 nm.
  • the incident light is linearly polarized light, and the electric field oscillation direction is the slit width direction.
  • the grooves 13 are formed on both sides of the opening q portion 12 in parallel to the long side direction of the opening, in a straight line on the surface of the light shielding film 11, and at a plurality of intervals. It is provided.
  • the interval (cutting period) is 600 nm
  • the 011 ratio is 0.5
  • the groove depth is 60 nm.
  • FIG. 2 shows the change in electric field strength when viewed from E 1 E 'on the light-shielding film.
  • the graph (b) in Fig. 2 shows the change in electric field strength when viewed from DD on the light-shielding film. It can be seen that the electric field intensity is maximum (maximum brightness) at one condensing point.
  • Graph (a) in Fig. 3 shows the change in electric field strength when viewed at G-G 'on the light-shielding film.
  • Graph (b) in Fig. 3 shows the change in electric field strength when viewed from FF 'on the light-shielding film. It can be seen that the electric field intensity is maximum (maximum brightness) at each condensing point.
  • Figure 6 is a graph showing the relationship between the electric field strength at the optical output end (vertical axis) and the slit length (horizontal axis). From Fig.
  • the length of the slit length that provides a strong electric field strength is an integral multiple of the incident light wavelength.
  • the electric field strength at the peak value decreases as the number of condensing points increases.
  • the longitudinal dimension of the opening is set to be twice the wavelength of the incident light, and two condensing points are formed inside the single opening. It is also possible to generate three condensing points by setting the size of to 3 times the wavelength of the incident light.
  • the light distributor has a single opening provided through the light shielding film, and the longitudinal dimension of the opening is n times the wavelength of the incident light ( Since n is an integer greater than 2, the incident light can be split with a simple structure (single aperture).
  • the light distributor has a single opening provided through the light shielding film, and the longitudinal dimension of the opening is n times the wavelength of the incident light (n is an integer of 2 or more). Therefore, the light incident from the direction perpendicular to the substrate surface can be branched with a simple structure (single opening).
  • the opening has been described as having a rectangular shape. However, it may be a slit shape, and is not necessarily rectangular. In other words, the corner of the opening may be chamfered or may have a shape close to a rhombus, as long as it has a slit shape.
  • the groove 1.3 is described as being formed on the surface of the light-shielding film in a plurality of lines at regular intervals, but the number of grooves formed is one. I do not care.
  • the groove is formed on both sides (left and right) of the opening.
  • a groove is formed so that the combined wave of incident light and surface plasmon excited on the surface of the light-shielding film is combined at the opening, so that the groove is formed only on one side of the opening. Even so, it is possible to obtain a certain effect.
  • the case where the groove is formed on the light incident side surface of the light shielding film has been described as an example.
  • the electric field intensity at the light spot can be increased. It is more effective to form grooves on the surface opposite to the light incident side in addition to the surface on the light incident side.
  • the longitudinal dimension (slit length) of the opening 12 is n times (integer multiple) the wavelength of the incident light.
  • n times integer multiple
  • a category within ⁇ 10% is considered n times (integer multiple).
  • the optical divider 20 includes a light shielding film 21 that is a metal film or a conductive film, and a light shielding film 2.
  • a light shielding film 21 that is a metal film or a conductive film
  • a light shielding film 2. 1 has a rectangular opening 2 2 formed in 1 and a groove 2 3.
  • the groove 23 provided in the light shielding film 21 is an annular (elliptical) groove formed by combining a straight line and an arc. In particular, it is provided so as to surround the opening 22. Furthermore, a plurality of grooves 23 are provided. Moreover, it is provided concentrically. The distance between the plurality of grooves 23 is as described in the first embodiment.
  • simulation results of the optical distributor 20 configured as described above will be described with reference to FIG.
  • the electric field distribution of the slit aperture is examined by computer simulation using the finite difference time domain method.
  • the simulation of the incident light type, wavelength, type of light shielding film, thickness, etc. The conditions are also the same as in the first embodiment described above.
  • the groove is preferably an annular groove as in the second embodiment.
  • the case where an annular groove is formed has been described as an example.
  • the coupling wave between the incident light and the surface plasmon excited on the surface of the light shielding film is combined at the opening. If a groove is provided, a certain effect can be obtained even when a groove having a shape in which a part of the ring-shaped groove is missing is formed.
  • the optical splitter 30 includes a light shielding film 31 that is a metal film or a conductive film, and a light shielding film 3. 1 has a rectangular opening 3 2 formed in 1 and a groove 3 3. There is a substrate parallel to the light shielding film 3 1, and an optical distributor 30 is attached to this substrate. Further, the photoelectric conversion element 34 is provided at a position corresponding to each of a plurality of condensing points formed in the opening 32. Since the configuration of the light shielding film 31, the opening 3 2, and the groove 33 is the same as that of the first embodiment, detailed description thereof is omitted.
  • the photoelectric conversion element 3 4 is an element that converts light into electric energy, and generates an electric output corresponding to the intensity of incident light.
  • the photoelectric conversion element 34 is provided at a position corresponding to a plurality of condensing points formed in the opening 32 of the optical distributor. That is, a plurality of condensing points formed in the opening 32 on the other surface of the light shielding film are regarded as light output ends, and photoelectric conversion elements 34 are provided at positions corresponding to the respective light output ends. It is desirable to install one photoelectric conversion element 3 4 at one condensing point.
  • the semiconductor material of the photoelectric conversion element 3 4 can efficiently emit light according to the wavelength of incident light. It is desirable to use a semiconductor material that absorbs water. For example, when the wavelength is in the visible light band, it may be composed of a semiconductor material such as silicon. On the other hand, a wavelength of 1.3 to 1.5 5 ⁇ is generally used for optical communication, but the wavelength in this band passes through silicon, so use a semiconductor material with a smaller band gap. Is desirable. In addition, it is desirable to select a device structure that is small and low in cost and excellent in photoelectric conversion efficiency and response speed for the photoelectric conversion device 34. For example, selecting an element structure using a ⁇ ⁇ junction or a Schottky junction is advantageous in terms of conversion efficiency and response speed.
  • the type / wavelength of the incident light, the type / thickness of the light shielding film, and the like are the same as in the first embodiment.
  • the slit length is 1.2 ⁇ , which is almost twice the wavelength, and that two condensing points are generated inside the single opening 3 2.
  • the photoelectric conversion element 34 is provided with a total of two photoelectric conversion elements corresponding to the two condensing points formed by the openings.
  • the photoelectric conversion element is provided corresponding to the two condensing points formed by the opening, the light is incident with a simple structure without providing a plurality of light branching portions. It is possible to provide a photoelectric conversion function for converting the obtained light into electrical signals at the output ends of a plurality of condensing points.
  • the photoelectric conversion element in the present invention is not limited to one made of a semiconductor material, and can receive light to take out an electrical signal. It can be made of any material.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un répartiteur de lumière qui comprend un film de protection contre la lumière (31) et une seule ouverture (32) formée sur le film de protection contre la lumière (31). La dimension de l'ouverture (32) dans la direction longitudinale correspond à une longueur d'onde de la lumière à répartir qui est multipliée par n (n étant un nombre entier qui n'est pas inférieur à 2). Un élément de conversion photoélectrique (34) est disposé à des positions correspondant à une pluralité de points de conversion de la lumière formés dans l'ouverture (32) en appliquant de la lumière sur une surface du film de protection contre la lumière(31).
PCT/JP2007/074618 2006-12-20 2007-12-17 Répartiteur de lumière WO2008075763A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006342642A JP2010096781A (ja) 2006-12-20 2006-12-20 光分配器
JP2006-342642 2006-12-20

Publications (1)

Publication Number Publication Date
WO2008075763A1 true WO2008075763A1 (fr) 2008-06-26

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PCT/JP2007/074618 WO2008075763A1 (fr) 2006-12-20 2007-12-17 Répartiteur de lumière

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JP (1) JP2010096781A (fr)
WO (1) WO2008075763A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009087573A1 (fr) * 2008-01-09 2009-07-16 Universite De Strasbourg (Etablissement Public National À Caractère Scientifique, Culturel Et Professionel) Dispositif pour modifier et/ou commander l'état de polarisation d'une lumière
WO2015025637A1 (fr) * 2013-08-23 2015-02-26 シャープ株式会社 Dispositif de conversion photoélectrique et procédé permettant de fabriquer ce dernier

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001236685A (ja) * 1999-12-14 2001-08-31 Fuji Xerox Co Ltd 光ヘッド、光磁気ヘッド、ディスク装置、および光ヘッドの製造方法
JP2001291265A (ja) * 2000-02-28 2001-10-19 Nec Corp 光データ記憶媒体用の表面プラズモン増幅による読み出し／書き込みヘッド
JP2001291264A (ja) * 2000-04-06 2001-10-19 Fuji Xerox Co Ltd 光ヘッド
WO2005003737A1 (fr) * 2003-07-08 2005-01-13 Kanagawa Academy Of Science And Technology Dispositif de photodetection et procede correspondant

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001236685A (ja) * 1999-12-14 2001-08-31 Fuji Xerox Co Ltd 光ヘッド、光磁気ヘッド、ディスク装置、および光ヘッドの製造方法
JP2001291265A (ja) * 2000-02-28 2001-10-19 Nec Corp 光データ記憶媒体用の表面プラズモン増幅による読み出し／書き込みヘッド
JP2001291264A (ja) * 2000-04-06 2001-10-19 Fuji Xerox Co Ltd 光ヘッド
WO2005003737A1 (fr) * 2003-07-08 2005-01-13 Kanagawa Academy Of Science And Technology Dispositif de photodetection et procede correspondant

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NISHI K. ET AL.: "Hyomen Plasmon Antenna o Mochiita Silicon Nano Photodiode", OPTRONICS, no. 299, 10 November 2006 (2006-11-10), pages 131 - 136 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009087573A1 (fr) * 2008-01-09 2009-07-16 Universite De Strasbourg (Etablissement Public National À Caractère Scientifique, Culturel Et Professionel) Dispositif pour modifier et/ou commander l'état de polarisation d'une lumière
WO2015025637A1 (fr) * 2013-08-23 2015-02-26 シャープ株式会社 Dispositif de conversion photoélectrique et procédé permettant de fabriquer ce dernier
JP6025989B2 (ja) * 2013-08-23 2016-11-16 シャープ株式会社 光電変換装置およびその製造方法
JPWO2015025637A1 (ja) * 2013-08-23 2017-03-02 シャープ株式会社 光電変換装置およびその製造方法
US9876125B2 (en) 2013-08-23 2018-01-23 Sharp Kabushiki Kaisha Photoelectric conversion device and method for manufacturing same

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