WO2008066160A1 - Convertisseur optique et procédé de fabrication afférent - Google Patents

Convertisseur optique et procédé de fabrication afférent Download PDF

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Publication number
WO2008066160A1
WO2008066160A1 PCT/JP2007/073195 JP2007073195W WO2008066160A1 WO 2008066160 A1 WO2008066160 A1 WO 2008066160A1 JP 2007073195 W JP2007073195 W JP 2007073195W WO 2008066160 A1 WO2008066160 A1 WO 2008066160A1
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WO
WIPO (PCT)
Prior art keywords
waveguide
core
optical converter
tapered
optical
Prior art date
Application number
PCT/JP2007/073195
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English (en)
Japanese (ja)
Inventor
Masatoshi Tokushima
Original Assignee
Nec Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corporation filed Critical Nec Corporation
Priority to US12/517,100 priority Critical patent/US8170383B2/en
Priority to JP2008547057A priority patent/JPWO2008066160A1/ja
Publication of WO2008066160A1 publication Critical patent/WO2008066160A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon

Definitions

  • the present invention relates to an optical converter and a manufacturing method thereof, and more particularly to an optical converter for an optical integrated circuit and a manufacturing method thereof.
  • the present invention also relates to an optical integrated circuit including an optical converter and a manufacturing method thereof.
  • a silicon on insulator (SOI) substrate is a silicon dioxide thin film called a buried oxide film formed on a silicon substrate, and a silicon thin film called a silicon active layer on the silicon oxide thin film. Is a laminated substrate.
  • the S OI substrate can be used as a substrate for an optical integrated circuit.
  • By processing the silicon active layer into a thin line it is possible to form an optical waveguide having silicon as a core and a buried oxide film and air as cladding.
  • the silicon core may be embedded with silicon dioxide.
  • “Fine line” refers only to the core of the waveguide, and the same applies to the following description, and “core width” refers to the distance between the side surfaces of the core in a cross section perpendicular to the waveguide direction. (The height of the core refers to the distance between the top surface and the bottom surface of the core in a cross section perpendicular to the waveguide direction.)
  • An optical integrated circuit can be realized by combining minute element optical elements having various basic functions and integrating them on a single SOI substrate.
  • Most of the elemental optical elements constituting the optical integrated circuit are of the waveguide type that can be easily miniaturized.
  • the most basic element optical element is an optical waveguide, which includes a straight waveguide, a bent waveguide, a branched waveguide, and the like. By combining these waveguides as parts, directional couplers and An optical element such as an interferometer can be configured. Furthermore, by combining these optical elements with wavelength filters, it is possible to construct optical elements such as wavelength multiplexers / demultiplexers and optical switches.
  • the most basic element optical element is an optical waveguide.
  • the cross-sectional shape and size of the core of the optical waveguide are selected so that the optical waveguide is single-mode.
  • the cross-sectional shape and size of the waveguide core suitable for individual elements are not necessarily the same (see, for example, Patent Document 1 and Patent Document 2).
  • the most important characteristic of an optical waveguide is a small waveguide loss.
  • the silicon core is processed into a thin line shape, the side wall (side surface) becomes rough, which causes scattering loss. Therefore, a core with a low height is desirable in order to reduce the area of the side wall in a straight waveguide.
  • the core is too thin (ie, the height of the core is low), the mode 'field will be widened, which leads to increased waveguide loss in the bent waveguide.
  • optical elements such as directional couplers contain many bent waveguides, in the case of optical circuits that require high integration, a higher core is better.
  • the silicon active layer of the SOI substrate has a uniform thickness, the conventional technique has a trade-off between reducing the loss of the entire optical circuit and increasing the integration level, thereby increasing the waveguide core height of the entire optical circuit. Has been chosen.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2000-206352
  • Patent Document 2 Japanese Patent Laid-Open No. 2000-249856
  • Patent Documents 1 and 2 described above are incorporated herein by reference.
  • the following is an analysis of the related art according to the present invention. With such conventional technology
  • each optical circuit has a different silicon active layer thickness.
  • An object of the present invention is to eliminate the trade-off relationship between the loss reduction and the increase in the degree of integration regarding the selection of the height of the waveguide core included in the optical circuit. In addition, this will enable the optical circuit to be realized on a single SOI substrate and improve the productivity of optical integrated circuits.
  • the spot size converter force S for changing the core cross-sectional size by simultaneously increasing the height and width of the core is disclosed in, for example, Patent Document 1 and Patent Document 2.
  • the waveguides before and after connection are desired to have a width so that the mode becomes a single mode, or when the long sides of the core cross section are orthogonal to each other
  • these conventional spot size converters cannot be applied.
  • An optical converter includes a first waveguide, a second waveguide, and a tapered waveguide provided between the two waveguides.
  • the first waveguide core and the second waveguide core have different heights, and both ends in the waveguide direction of the taper waveguide core are respectively the cores of the first waveguide.
  • the cross-sectional shape and refractive index of the core of the waveguide change continuously or stepwise in the waveguide direction.
  • the width of the core of the first waveguide and the core of the second waveguide are different.
  • the waveguide directions of the two waveguides to be connected are the same at each connection point.
  • the width of the core of the tapered waveguide is monotonously changed in the waveguide direction or is a combination of a monotonically changing portion and a constant portion.
  • the height of the core of the tapered waveguide monotonously changes in the direction of the waveguide, or a combination of a monotonously changing portion and a constant portion.
  • the bottom surfaces of the cores of the first waveguide, the second waveguide, and the tapered waveguide are all on the same plane.
  • the length of the tapered waveguide in the waveguide direction is the difference between the width of the core of the first waveguide and the width of the core of the second waveguide, and More than 10 times the larger of the difference between the height of the core of the first waveguide and the height of the core of the second waveguide.
  • the upper surface of the core of the tapered waveguide includes an inclined plane that forms an angle between 0 ° and 90 ° with the bottom surface, and the normal of the inclined plane is on the bottom surface.
  • the projected direction matches the waveguide direction of the tapered waveguide.
  • an angle formed by the inclined plane and the bottom surface of the core of the tapered waveguide is 30 ° or less.
  • the upper surface of the core of the tapered waveguide includes a concave surface and a convex surface, and the tangent plane at an arbitrary position of the concave surface and the convex surface is 30 ° or less from the bottom surface of the core of the tapered waveguide.
  • the direction formed by projecting the normal direction of the tangent plane onto the bottom surface coincides with the waveguide direction.
  • the refractive index of the core is 3 or more, and the refractive index of cladding is 2 or less.
  • An optical converter according to a second aspect of the present invention is an optical converter having a tapered waveguide provided between a first waveguide and a second waveguide,
  • the tapered waveguide core is connected to the first waveguide core and the second waveguide core at both ends of the waveguide direction, respectively.
  • the two waveguide cores to be connected are connected.
  • the cross-sectional shape and the refractive index change continuously or stepwise, and the cross-sectional shape and the refractive index of the core of the tapered waveguide change continuously or stepwise in the waveguide direction. .
  • an optical integrated circuit includes the above-described optical converter in a single SOI substrate.
  • a method of manufacturing an optical converter according to a third aspect of the present invention includes a taper formed by processing a core material having a step structure in which a thick film and a thin film are connected via a taper in the thickness direction.
  • a method of manufacturing an optical converter by forming a waveguide, in which a thin wire is guided in a direction crossing the normal of the tangential plane of the top surface of the core of the tapered waveguide to the bottom surface of the core of the tapered waveguide. Forming a core of the wave path.
  • the manufacturing method of the optical converter of the twelfth development mode is within a range crossing the step of the tapered portion.
  • the level of the step difference is low, from the high to the low! /,
  • a method for manufacturing an optical converter according to a thirteenth development mode includes a step of processing so that the width of the core of the tapered waveguide is constant in a range crossing the step of the tapered portion, and a step thickness is increased. And a step of processing so that the width of the core of the tapered waveguide monotonously decreases at a large portion.
  • a method for manufacturing an optical integrated circuit according to a fourteenth development form is a method for manufacturing an optical integrated circuit for a single SOI substrate, and preferably includes the method for manufacturing an optical converter described above. .
  • optical waveguides having different heights can be connected to each other, and the height of the core of the waveguide can be changed depending on the location. Therefore, the height of the core can be reduced in the straight waveguide portion, and the core height can be increased in the bent waveguide portion. As a result, low loss and high integration of the optical integrated circuit can be optimized at the same time, and the trade-off relationship that has conventionally occurred between them can be eliminated.
  • the optical converter of the present invention can gradually change the height of the core, and optical waveguides having different heights can be coupled without loss. Furthermore, by using the optical converter of the present invention, the width of the core is gradually changed, so that both optical waveguides coupled via the optical converter can be set to a single 'mode.
  • FIG. 1 is a perspective view of an optical converter based on a first embodiment of the present invention.
  • FIG. 2 is a perspective view of an optical converter based on a second embodiment of the present invention.
  • FIG. 3 is a view for explaining a method of manufacturing an optical converter and an optical integrated circuit including the optical converter according to the first embodiment of the present invention.
  • FIG. 4 is a view for explaining an optical converter and a method for manufacturing an optical integrated circuit including the optical converter according to the second embodiment of the present invention.
  • the optical converter according to the embodiment of the present invention includes a first waveguide core (1 in FIG. 1) and a second waveguide core having a height different from that of the first waveguide core (1). 2) in Fig. 1 and a taper waveguide core (3 in Fig. 1), both ends of the taper waveguide core are connected to the core of the first waveguide and the core of the second waveguide, respectively.
  • the first waveguide core and the tapered waveguide core are connected to each other at the connecting portion between the second waveguide core and the tapered waveguide core.
  • the cross-sectional shape and refractive index of the cores of the two waveguides change continuously or stepwise (that is, almost continuously), and the cross-sectional shape and refractive index of the core of the tapered waveguide are between the two ends. It changes continuously or in steps (ie, almost continuously).
  • the core of the first waveguide and the core of the second waveguide may have different widths.
  • the waveguide direction of the first waveguide and the waveguide direction of the tapered waveguide in the vicinity of the connection end with the first waveguide are the same, and the waveguide of the second waveguide is the same.
  • the direction preferably coincides with the waveguide direction of the tapered waveguide in the vicinity of the connection end with the second waveguide.
  • the width of the core in the cross section perpendicular to the waveguide axis of the tapered waveguide is determined in the process from the connection end with the core of the first waveguide to the connection end with the core of the second waveguide.
  • Monotonously It may be a combination of a decreasing part or a monotonically decreasing part and a certain part.
  • the height of the core in the cross section perpendicular to the waveguide direction of the tapered waveguide is the process from the connection end with the core of the first waveguide to the connection end with the core of the second waveguide. It may be a monotonically increasing force, or a combination of a monotonically increasing part and a constant part.
  • the bottom surfaces of the first waveguide core, the second waveguide core, and the tapered waveguide core may all be on the same plane.
  • the length of the taper waveguide core is different from the width of the core of the first waveguide and the width of the core of the second waveguide or the height of the core of the first waveguide.
  • the difference from the height of the core of the second waveguide! /, The deviation is large! /, Preferably 10 times or more of the direction! /.
  • Including a tilted plane having an angle of between 90 ° and 90 °, and the direction in which the normal of the tilted plane is projected onto the bottom surface may coincide with or substantially coincide with the waveguide direction of the tapered waveguide. preferable.
  • the angle formed between the inclined plane and the bottom surface of the core of the tapered waveguide is preferably 30 ° or less.
  • the upper surface (3a in FIG. 1) of the core of the tapered waveguide includes a concave surface and a convex surface, and the tangent plane at an arbitrary position of the concave surface or the convex surface is 30 ° or less with respect to the bottom surface of the core of the tapered waveguide.
  • the direction in which the normal of the tangent plane is projected onto the bottom surface may coincide with or substantially coincide with the direction of the waveguide axis.
  • the refractive index of the core is 3 or more and the refractive index of the cladding is 2 or less.
  • an optical converter includes a core material (6 in Fig. 3) having a step structure in which a thick film and a thin film are connected via a taper in the thickness direction. Then, it is formed by processing so as to form a thin waveguide core in a direction crossing the normal of the tangential plane of the upper surface of the taper to the direction projected onto the bottom surface of the taper.
  • the fine line ie, from the lower step to the higher step
  • the width of the core may be monotonously decreased, or may be formed by processing so as to be a combination of a monotonously decreasing portion and a constant portion.
  • an optical integrated circuit is manufactured by applying these optical converter manufacturing methods to a single SOI substrate.
  • An optical circuit including waveguides having different core heights is realized by using mode-field conversion having a core shape as shown in FIG.
  • the optical converter includes a first waveguide, a second waveguide, and a tapered waveguide provided between the two waveguides, and the core 1 and the second waveguide of the first waveguide.
  • the two cores of the tapered waveguide are connected to the core 1 of the first waveguide and the core 2 of the second waveguide, respectively.
  • the cross-sectional shape and refractive index of the cores of the two waveguides to be connected are continuous or almost continuous, and the cross-sectional shape and refractive index of the core 3 of the tapered waveguide are It changes continuously or almost continuously in the waveguide direction.
  • the core 1 of the first waveguide and the core 2 of the second waveguide may have different widths.
  • the waveguide direction of the taper waveguide is constant throughout the entire length of the taper waveguide.
  • tapered waveguides may be curved due to manufacturing errors or conscious design. Therefore, when connecting the core 3 of the tapered waveguide to the core 1 of the first waveguide and the core 2 of the second waveguide, the two waveguides connected to each other are connected to each other. It is preferable to match the waveguide direction.
  • the width of the core 3 of the tapered waveguide may change monotonously in the waveguide direction, or may be a combination of a monotonously changing portion and a constant portion.
  • the three heights of the core of the tapered waveguide may be a force that changes monotonously in the direction of the waveguide, or a combination of a monotonously changing portion and a constant portion.
  • the bottom surfaces of the core 1 of the first waveguide, the core 2 of the second waveguide, and the core 3 of the tapered waveguide may all be on the same plane.
  • Both side surfaces 3b of the core 3 of the tapered waveguide are configured as surfaces orthogonal to the bottom surface of the core 3 and the inclined plane 3a as the top surface, and have a taper opposite to the taper formed by the inclined plane 3a and the bottom surface. Make it.
  • the length of the core 3 of the taper waveguide is the width of the core 1 of the first waveguide.
  • the top surface of the core 3 of the tapered waveguide includes an inclined plane 3a that forms an angle between 0 ° and 90 ° with the bottom surface of the core 3 of the tapered waveguide.
  • the direction projected onto the bottom surface of the core 3 is preferably coincident with or almost coincident with the waveguide direction of the taper.
  • the angle formed by the inclined plane 3a and the bottom surface of the core 3 of the tapered waveguide is 30 °. It is preferable that:
  • connection is made at the connection between the core 1 of the first waveguide and the core 3 of the taper waveguide, and at the connection between the core 2 of the second waveguide and the core 3 of the taper waveguide. It is desirable that the cross-sectional shape and refractive index of the core of the waveguide to be produced are completely continuous, but in the case of manufacturing, it may be slightly discontinuous in steps, in other words, it may be substantially continuous. As described above, even if the discontinuity is almost continuous, if the degree of discontinuity is small, the reflection and loss of the guided light caused by the discontinuity are negligible.
  • the cross-sectional shape and refractive index of the core 3 of the taper waveguide change completely continuously between both ends, but in manufacturing, they are discontinuously slightly stepped. In other words, it may change almost continuously. Even in the case of such a continuous change, if the degree of discontinuity is small, the reflection and loss of the guided light due to the discontinuity are negligible, so there is no practical problem.
  • the upper surface of the core 3 of the tapered waveguide includes an inclined plane 3a that forms an angle between 0 ° and 90 ° with the bottom surface of the core 3 of the tapered waveguide. It is desirable that the direction projected onto the bottom surface of the film is completely coincident with the waveguide direction, but in production, it may be slightly discontinuous in a stepped manner, in other words, in some cases. In this way, even if they almost match, if the degree of mismatch is small, reflection or loss of guided light due to the mismatch is small. Is negligible, so there is no problem in practical use.
  • the taper in the height direction and the lateral direction is realized simultaneously and in the opposite direction in the core 3 of the tapered waveguide.
  • the first core portion 4 and the second core portion 5 having different tapered shapes may be connected to each other.
  • the tapered first core portion 4 and part of the second core portion 5 may be overlapped or separated by a slight gap.
  • Both side surfaces 4b of the first core portion 4 of the tapered waveguide are configured as surfaces orthogonal to the inclined plane 4a having a constant width as the bottom surface and the top surface of the first core portion 4, and are parallel to each other. Further, the distance between the top surface 4 a and the bottom surface of the first core portion 4 monotonously increases from the end portion of the core 1 toward the second core portion 5. That is, the first core portion 4 has a taper structure only in the height direction.
  • both side surfaces 5b of the second core portion 5 of the tapered waveguide are configured as surfaces orthogonal to the bottom surface of the second core portion 5 and the top surface 5a having a constant height, and the width (interval) between the side surfaces 5b is defined. ) Decreases monotonically from the end of the first core portion 4 toward the core 2. Further, the distance between the upper surface 5a and the bottom surface of the second core portion 5 is constant. That is, the second core portion 5 has a taper structure only for the width (interval) between the side surfaces 5b.
  • the upper surface 3a of the core 3 of the tapered waveguide and the upper surface 4a of the first core portion 4 of the tapered waveguide shown in FIGS. 1 and 2 do not necessarily have to be a plane or a combination of planes.
  • the upper surface of the core of the tapered waveguide includes a concave surface and a convex surface, and the tangent plane at an arbitrary position of the concave surface and the convex surface forms an angle of 30 ° or less with the bottom surfaces of the core 3 and the first core portion 4 of the tapered waveguide.
  • the structure in which the normal of the tangential plane is projected onto the bottom surface may coincide with or substantially coincide with the waveguide direction.
  • the refractive index of the cores of the first, second and tapered waveguides is preferably 3 or more, and the refractive index of cladding is preferably 2 or less.
  • the core material 6 having a step structure in which the thick film portion and the thin film portion are connected via a taper in the thickness direction (that is, the boundary portion) is used.
  • a thin waveguide core 3 is formed so as to cross the normal of the tangential plane of the top surface (see 3a in Fig. 1) in the direction projected onto the bottom surface of the taper. That is, the core 3 is formed so that its waveguide direction is perpendicular to the boundary between the thick film and the thin film forming a step.
  • the “boundary” is not a spring because it is tapered and wide. Therefore, the exact expression as described above was used. In this way, the optical converter of the first embodiment of the present invention shown in FIG. 1 can be formed.
  • the width between both side surfaces (see 3b in Fig. 1) of the core 3 of the taper waveguide ie, the upper surface 3a
  • the width may be processed so as to monotonously decrease, or a combination of a monotonously decreasing portion and a certain portion may be processed.
  • the width of both sides (refer to 5b in Fig. 2) of the second waveguide portion 5 of the tapered waveguide (that is, the width of the upper surface 5a) monotonously decreases in the portion where the thickness of the step is large.
  • an SOI substrate can be used, and a silicon active layer contained in the SOI substrate can be used as a core of a waveguide.
  • a tapered step is formed on the silicon active layer of the SOI substrate by patterning with a photoresist and etching using a potassium hydroxide solution or a mixed solution of nitric acid and hydrogen peroxide.
  • a photoresist that gradually dissolves during etching is used, and the thickness is set to be equal to or greater than the necessary taper length.
  • the photoresist pattern gradually recedes during etching, and a long and gentle taper can be created.
  • a new thin waveguide core is formed in a direction that crosses the step vertically.
  • the core is processed into a thin line by anisotropic dry etching. And form an optical converter.
  • the direction in which the thin waveguide core is perpendicularly crossed the step means that the normal of the upper surface of the taper sandwiched between the thick film portion and the thin film portion is the bottom surface of the taper.
  • processing the core part into a thin line means that the core material is processed so that the longitudinal direction of the core (usually coincides with the waveguide direction) is such a projection direction.
  • the present invention makes it possible to realize an optical integrated circuit in which element optical elements having different heights are integrated on a single SOI substrate. This makes it possible to produce optical integrated circuits easily and inexpensively, contributing to the development of next-generation high-speed optical communication systems.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un convertisseur optique qui permet de réduire les pertes et d'améliorer l'intégration d'un circuit optique intégré simultanément sur un substrat SOI unique. L'invention concerne également un procédé de fabrication dudit convertisseur optique. Pour coupler sans à coup deux noyaux de guides d'ondes de différentes hauteurs et largeurs, on introduit un convertisseur optique comprenant un guide d'ondes conique selon un sens vertical et latéral. Le dispositif d'éclairage ayant une hauteur de noyeau optimale peut ensuite être arrangé dans le circuit d'intégration optique.
PCT/JP2007/073195 2006-12-01 2007-11-30 Convertisseur optique et procédé de fabrication afférent WO2008066160A1 (fr)

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US12/517,100 US8170383B2 (en) 2006-12-01 2007-11-30 Optical converter
JP2008547057A JPWO2008066160A1 (ja) 2006-12-01 2007-11-30 光変換器およびその製造方法

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JP2006-325731 2006-12-01
JP2006325731 2006-12-01

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US9563015B1 (en) 2015-07-23 2017-02-07 National Sun Yat-Sen University Optical waveguide structure and manufacturing method thereof
WO2018179752A1 (fr) * 2017-03-30 2018-10-04 旭化成エレクトロニクス株式会社 Guide d'ondes optique, dispositif de mesure de concentration optique, procédé de fabrication de guide d'ondes optique

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WO2015183992A1 (fr) 2014-05-27 2015-12-03 Skorpios Technologies, Inc. Extenseur de mode du guide d'ondes faisant appel au silicium amorphe
JP2016024438A (ja) * 2014-07-24 2016-02-08 住友電気工業株式会社 半導体光素子
JP2017134348A (ja) * 2016-01-29 2017-08-03 ソニー株式会社 光導波シート、光伝送モジュール及び光導波シートの製造方法
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CN111566527B (zh) * 2017-12-06 2022-12-06 菲尼萨公司 具有竖直锥化的波导的绝热耦合光子系统
US11360263B2 (en) 2019-01-31 2022-06-14 Skorpios Technologies. Inc. Self-aligned spot size converter
US10845669B2 (en) * 2019-02-08 2020-11-24 Ii-Vi Delaware Inc. Vertical junction based silicon modulator
GB2583348A (en) * 2019-04-24 2020-10-28 Univ Southampton Photonic chip and method of manufacture
CN115441141B (zh) * 2022-10-17 2023-04-25 北京星英联微波科技有限责任公司 阶梯扭波导

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JPWO2008066160A1 (ja) 2010-03-11

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