WO2008049103A3 - Roll-to-roll electroplating for photovoltaic film manufacturing - Google Patents

Roll-to-roll electroplating for photovoltaic film manufacturing Download PDF

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Publication number
WO2008049103A3
WO2008049103A3 PCT/US2007/081912 US2007081912W WO2008049103A3 WO 2008049103 A3 WO2008049103 A3 WO 2008049103A3 US 2007081912 W US2007081912 W US 2007081912W WO 2008049103 A3 WO2008049103 A3 WO 2008049103A3
Authority
WO
WIPO (PCT)
Prior art keywords
roll
flexible foil
electroplating
film manufacturing
photovoltaic film
Prior art date
Application number
PCT/US2007/081912
Other languages
French (fr)
Other versions
WO2008049103A2 (en
Inventor
Bulent M Basol
Original Assignee
Solopower Inc
Bulent M Basol
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solopower Inc, Bulent M Basol filed Critical Solopower Inc
Priority to JP2009533561A priority Critical patent/JP2010507909A/en
Priority to EP07854221A priority patent/EP2087151A4/en
Priority to CN200780044723XA priority patent/CN101583741B/en
Publication of WO2008049103A2 publication Critical patent/WO2008049103A2/en
Publication of WO2008049103A3 publication Critical patent/WO2008049103A3/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/12Process control or regulation
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • C25D5/50After-treatment of electroplated surfaces by heat-treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0635In radial cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03926Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
    • H01L31/03928Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Inorganic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

A roll to roll system for forming an absorber structure for solar cells on a flexible foil as the flexible foil is advanced through units of the system and by unwrapping from a supply spool and wrapping around a take-up spool. Surface of the flexible foil is first conditioned in a conditioning unit to form an activated surface. A precursor stack including copper, gallium and indium layers is electroplated onto the activated surface by utilizing separate electroplating units for each layers. The precursor layer is reacted with at least one of Se and S in an annealing unit of the system.
PCT/US2007/081912 2006-10-19 2007-10-19 Roll-to-roll electroplating for photovoltaic film manufacturing WO2008049103A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009533561A JP2010507909A (en) 2006-10-19 2007-10-19 Roll-to-roll electroplating for the production of photovoltaic films
EP07854221A EP2087151A4 (en) 2006-10-19 2007-10-19 Roll-to-roll electroplating for photovoltaic film manufacturing
CN200780044723XA CN101583741B (en) 2006-10-19 2007-10-19 Roll-to-roll electroplating for photovoltaic film manufacturing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86216406P 2006-10-19 2006-10-19
US60/862,164 2006-10-19

Publications (2)

Publication Number Publication Date
WO2008049103A2 WO2008049103A2 (en) 2008-04-24
WO2008049103A3 true WO2008049103A3 (en) 2008-07-03

Family

ID=39314859

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/081912 WO2008049103A2 (en) 2006-10-19 2007-10-19 Roll-to-roll electroplating for photovoltaic film manufacturing

Country Status (7)

Country Link
US (1) US20080093221A1 (en)
EP (1) EP2087151A4 (en)
JP (1) JP2010507909A (en)
KR (1) KR20090098962A (en)
CN (1) CN101583741B (en)
TW (1) TW200832732A (en)
WO (1) WO2008049103A2 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1919703B1 (en) 2005-08-12 2013-04-24 Modumetal, LLC Compositionally modulated composite materials and methods for making the same
US7713773B2 (en) * 2005-11-02 2010-05-11 Solopower, Inc. Contact layers for thin film solar cells employing group IBIIIAVIA compound absorbers
US20070227633A1 (en) * 2006-04-04 2007-10-04 Basol Bulent M Composition control for roll-to-roll processed photovoltaic films
US7736913B2 (en) * 2006-04-04 2010-06-15 Solopower, Inc. Composition control for photovoltaic thin film manufacturing
US8648253B1 (en) 2010-10-01 2014-02-11 Ascent Solar Technologies, Inc. Machine and process for continuous, sequential, deposition of semiconductor solar absorbers having variable semiconductor composition deposited in multiple sublayers
US8465589B1 (en) 2009-02-05 2013-06-18 Ascent Solar Technologies, Inc. Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors
WO2009146187A1 (en) * 2008-04-15 2009-12-03 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
US20090266398A1 (en) * 2008-04-28 2009-10-29 Burak Metin Method and Apparatus to Form Back Contacts to Flexible CIGS Solar Cells
US20090266399A1 (en) * 2008-04-28 2009-10-29 Basol Bulent M Metallic foil substrate and packaging technique for thin film solar cells and modules
US8207012B2 (en) * 2008-04-28 2012-06-26 Solopower, Inc. Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
US20130230933A1 (en) * 2008-09-06 2013-09-05 Soltrium Technology, Ltd. Shenzhen Methods for fabricating thin film solar cells
US7979969B2 (en) 2008-11-17 2011-07-19 Solopower, Inc. Method of detecting and passivating a defect in a solar cell
US8318240B2 (en) * 2008-11-17 2012-11-27 Solopower, Inc. Method and apparatus to remove a segment of a thin film solar cell structure for efficiency improvement
US8318239B2 (en) * 2008-11-17 2012-11-27 Solopower, Inc. Method and apparatus for detecting and passivating defects in thin film solar cells
US20100200408A1 (en) * 2009-02-11 2010-08-12 United Solar Ovonic Llc Method and apparatus for the solution deposition of high quality oxide material
US20110177622A1 (en) * 2009-12-28 2011-07-21 Global Solar Energy, Inc. Apparatus and methods of mixing and depositing thin film photovoltaic compositions
WO2010126699A2 (en) 2009-04-29 2010-11-04 Hunter Douglas Industries B.V. Architectural panels with organic photovoltaic interlayers and methods of forming the same
EP2440691B1 (en) 2009-06-08 2019-10-23 Modumetal, Inc. Electrodeposited, nanolaminate coatings and claddings for corrosion protection
FR2951022B1 (en) * 2009-10-07 2012-07-27 Nexcis MANUFACTURE OF THIN LAYERS WITH PHOTOVOLTAIC PROPERTIES, BASED ON TYPE I-III-VI2 ALLOY, BY SUCCESSIVE ELECTRO-DEPOSITS AND THERMAL POST-TREATMENT.
WO2011142804A1 (en) * 2010-05-10 2011-11-17 The University Of Toledo Flexible photovoltaic cells and modules having an improved adhesion characteristic
MX2012013614A (en) 2010-05-26 2013-03-20 Univ Toledo Photovoltaic structures having a light scattering interface layer and methods of making the same.
US8304272B2 (en) 2010-07-02 2012-11-06 International Business Machines Corporation Germanium photodetector
CN101974772B (en) * 2010-08-11 2012-06-27 中国科学院半导体研究所 Secondary electroplating method of GaN based LED transferred substrate with vertical structure
US20120055612A1 (en) 2010-09-02 2012-03-08 International Business Machines Corporation Electrodeposition methods of gallium and gallium alloy films and related photovoltaic structures
US8545689B2 (en) * 2010-09-02 2013-10-01 International Business Machines Corporation Gallium electrodeposition processes and chemistries
US8426725B2 (en) 2010-12-13 2013-04-23 Ascent Solar Technologies, Inc. Apparatus and method for hybrid photovoltaic device having multiple, stacked, heterogeneous, semiconductor junctions
KR101154774B1 (en) 2011-04-08 2012-06-18 엘지이노텍 주식회사 Solar cell apparatus and method of fabricating the same
KR101257819B1 (en) 2011-06-20 2013-05-06 성안기계 (주) ROLL TO ROLL CdS DEPOSITION METHOD AND SYSTEM
KR101885821B1 (en) 2011-06-21 2018-09-10 삼성디스플레이 주식회사 Organic light emitting diode display and manufacturing method thereof
US9112095B2 (en) * 2012-12-14 2015-08-18 Intermolecular, Inc. CIGS absorber formed by co-sputtered indium
US10472727B2 (en) 2013-03-15 2019-11-12 Modumetal, Inc. Method and apparatus for continuously applying nanolaminate metal coatings
CA2905536C (en) 2013-03-15 2023-03-07 Modumetal, Inc. Electrodeposited compositions and nanolaminated alloys for articles prepared by additive manufacturing processes
WO2014145588A1 (en) 2013-03-15 2014-09-18 Modumetal, Inc. Nickel chromium nanolaminate coating having high hardness
EA201500947A1 (en) 2013-03-15 2016-03-31 Модьюметл, Инк. DEVICE AND METHOD OF ELECTRIC PROTECTION OF NANO-LAYERED COATING
BR112015022235A2 (en) 2013-03-15 2017-07-18 Modumetal Inc nanolaminated coatings
EP3194642A4 (en) * 2014-09-18 2018-07-04 Modumetal, Inc. A method and apparatus for continuously applying nanolaminate metal coatings
CN106794673B (en) 2014-09-18 2021-01-22 莫杜美拓有限公司 Method of making an article by electrodeposition and additive manufacturing processes
CN105170576B (en) * 2015-05-11 2017-11-14 柏弥兰金属化研究股份有限公司 The cleaning method and its system of volume to volume polyimide film
CN109952391B (en) 2016-09-08 2022-11-01 莫杜美拓有限公司 Method of providing a laminate coating on a workpiece, and articles made therefrom
US20190360116A1 (en) 2016-09-14 2019-11-28 Modumetal, Inc. System for reliable, high throughput, complex electric field generation, and method for producing coatings therefrom
WO2018085591A1 (en) 2016-11-02 2018-05-11 Modumetal, Inc. Topology optimized high interface packing structures
KR20180078674A (en) * 2016-12-30 2018-07-10 (주) 다쓰테크 Multilayer metal thin film forming apparatus and method for forming multi-metal layer
US11293272B2 (en) 2017-03-24 2022-04-05 Modumetal, Inc. Lift plungers with electrodeposited coatings, and systems and methods for producing the same
CA3060619A1 (en) 2017-04-21 2018-10-25 Modumetal, Inc. Tubular articles with electrodeposited coatings, and systems and methods for producing the same
KR102492733B1 (en) 2017-09-29 2023-01-27 삼성디스플레이 주식회사 Copper plasma etching method and manufacturing method of display panel
CN112272717B (en) 2018-04-27 2024-01-05 莫杜美拓有限公司 Apparatus, system, and method for producing multiple articles with nanolaminate coatings using rotation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4318938A (en) * 1979-05-29 1982-03-09 The University Of Delaware Method for the continuous manufacture of thin film solar cells
US6881671B2 (en) * 2000-08-14 2005-04-19 Ipu, Instituttet For Produktudvikling Process for depositing metal contacts on a buried grid solar cell and solar cell obtained by the process
US20050202589A1 (en) * 2004-03-15 2005-09-15 Basol Bulent M. Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2377550A (en) * 1940-12-02 1945-06-05 Hanson Van Winkle Munning Co Apparatus for electrogalvanizing
US2895888A (en) * 1957-10-07 1959-07-21 Industrial Nucleonics Corp Electrolytic plating apparatus and process
US4282073A (en) * 1979-08-22 1981-08-04 Thomas Steel Strip Corporation Electro-co-deposition of corrosion resistant nickel/zinc alloys onto steel substrates
US4581108A (en) * 1984-01-06 1986-04-08 Atlantic Richfield Company Process of forming a compound semiconductive material
DE3583142D1 (en) * 1984-11-22 1991-07-11 Kawasaki Steel Co METHOD FOR PRODUCING COLORED STAINLESS STEEL MATERIALS AND DEVICE FOR THEIR CONTINUOUS PRODUCTION.
US4798660A (en) * 1985-07-16 1989-01-17 Atlantic Richfield Company Method for forming Cu In Se2 films
US5804466A (en) * 1996-03-06 1998-09-08 Canon Kabushiki Kaisha Process for production of zinc oxide thin film, and process for production of semiconductor device substrate and process for production of photoelectric conversion device using the same film
JPH09321326A (en) * 1996-05-30 1997-12-12 Yazaki Corp Manufacturing cis thin film solar cell and forming copper-indium-selenium alloy
JP3249408B2 (en) * 1996-10-25 2002-01-21 昭和シェル石油株式会社 Method and apparatus for manufacturing thin film light absorbing layer of thin film solar cell
US20020011419A1 (en) * 1998-02-17 2002-01-31 Kozo Arao Electrodeposition tank, electrodeposition apparatus, and electrodeposition method
US6188044B1 (en) * 1998-04-27 2001-02-13 Cvc Products, Inc. High-performance energy transfer system and method for thermal processing applications
WO2001057932A1 (en) * 2000-02-07 2001-08-09 Cis Solartechnik Gmbh Flexible metal substrate for cis solar cells, and method for producing the same
JP2002083917A (en) * 2000-06-28 2002-03-22 Noge Denki Kogyo:Kk Lead frame having protrusions on surface, method of manufacturing the same, semiconductor device and manufacturing method thereof
JP2002212779A (en) * 2001-01-10 2002-07-31 Hitachi Ltd Surface treatment process and method for manufacturing thin film magnetic head using this process, and thin film magnetic head
JP2003183877A (en) * 2001-12-11 2003-07-03 Nagoya Plating Co Ltd Partial plating method
US7736940B2 (en) * 2004-03-15 2010-06-15 Solopower, Inc. Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
US20070111367A1 (en) * 2005-10-19 2007-05-17 Basol Bulent M Method and apparatus for converting precursor layers into photovoltaic absorbers
US20070093006A1 (en) * 2005-10-24 2007-04-26 Basol Bulent M Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4318938A (en) * 1979-05-29 1982-03-09 The University Of Delaware Method for the continuous manufacture of thin film solar cells
US6881671B2 (en) * 2000-08-14 2005-04-19 Ipu, Instituttet For Produktudvikling Process for depositing metal contacts on a buried grid solar cell and solar cell obtained by the process
US20050202589A1 (en) * 2004-03-15 2005-09-15 Basol Bulent M. Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication

Also Published As

Publication number Publication date
EP2087151A2 (en) 2009-08-12
CN101583741A (en) 2009-11-18
EP2087151A4 (en) 2012-03-28
TW200832732A (en) 2008-08-01
JP2010507909A (en) 2010-03-11
US20080093221A1 (en) 2008-04-24
WO2008049103A2 (en) 2008-04-24
CN101583741B (en) 2011-09-28
KR20090098962A (en) 2009-09-18

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