WO2008004315A1 - Process for production of decoratively plated articles by utilizing the impartation of electroconductivity to resin by sputtering - Google Patents

Process for production of decoratively plated articles by utilizing the impartation of electroconductivity to resin by sputtering Download PDF

Info

Publication number
WO2008004315A1
WO2008004315A1 PCT/JP2006/313968 JP2006313968W WO2008004315A1 WO 2008004315 A1 WO2008004315 A1 WO 2008004315A1 JP 2006313968 W JP2006313968 W JP 2006313968W WO 2008004315 A1 WO2008004315 A1 WO 2008004315A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
plating
sputtering
decorative
metal
Prior art date
Application number
PCT/JP2006/313968
Other languages
French (fr)
Japanese (ja)
Inventor
Kunihiro Kakihara
Yoshinori Noda
Takashi Ouro
Original Assignee
Kakihara Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kakihara Kogyo Co., Ltd. filed Critical Kakihara Kogyo Co., Ltd.
Publication of WO2008004315A1 publication Critical patent/WO2008004315A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/54Electroplating of non-metallic surfaces
    • C25D5/56Electroplating of non-metallic surfaces of plastics

Definitions

  • the present invention relates to a resin plating technique for applying metal plating to a resin molded product, and in particular, before the resin plating until the surface adjustment process of the resin resin plating, the etching process power, and the conductive metal treatment process.
  • the present invention relates to a method for producing a decorative adhesive product using a resin conductive material by sputtering, which is carried out by sputtering treatment without using hexavalent chromic acid.
  • a conventional general resin plating film forming method includes: an etching process for roughening the surface of the resin molded article, an etching neutralization process, Direct plating pretreatment process such as catalyst application process, conductive process (or electroless plating), etc.
  • This is a plating method in which bright nickel plating and MP nickel plating (microporous nickel plating) are used for each plating treatment, and finally chromium plating is applied to finish.
  • a conductive step direct plating pretreatment or electroless plating is required to impart conductivity to the resin as a pretreatment for electroplating.
  • the conductive process (or electroless plating) of a resin molded product that uses a general wet method for resin plating is performed with high concentrations of chromic acid (hexavalent chromium) and sulfuric acid.
  • a catalyst such as PdZSn
  • a pretreatment technique for plating when electroless plating is applied to a resin molded product for example, as disclosed in Japanese Patent Application Laid-Open No. 5-132785, “Electroless plating pretreatment method”, a glass fiber is used.
  • the surface of the insulating material is treated with chromic anhydride and sulfuric acid in the etching treatment of the insulating material, which is performed as a pretreatment when the surface of the insulating material made of polyimide resin containing
  • An electroless plating pretreatment method has been proposed in which a two-stage etching process is performed in which etching is performed using a solution containing hydrazine and then etching is performed using a solution containing hydrazine.
  • Patent Document 1 Japanese Patent Laid-Open No. 5-132785
  • the resin etching process that roughens the resin surface which is the basis of this resin plating, still uses a mixed acid of high-concentration chromic acid (hexavalent chromium) and sulfuric acid.
  • This etching process using chromic acid has the potential to adversely affect the human body even during work in the process that requires only waste liquid treatment.
  • various technologies have been proposed to eliminate the etching process using chromic acid.
  • a pretreatment has been proposed that satisfies the stringent adhesion standards that are the basic performance of resin plating, such as automotive parts standards! I did not hesitate.
  • a PA resin polyamide resin, 6-nylon
  • POM resin polyacetal
  • LC P resin liquid crystal polymer
  • some resin materials can be etched without using a chromic acid-based etching solution.
  • a resin molded product of a resin that is relatively weak in acidity such as PPE resin (polyphenyl ether) can be surface-roughened using a permanganic acid-based etching solution.
  • PPE resin polyphenyl ether
  • a resin molded product of a general-purpose resin such as ABS resin (acrylonitrile Z butadiene Z styrene resin) can be etched using a manganic acid-based etchant. Etching can be performed with a weak etchant such as permanganate etching by adding a solvent pre-etching process. Disclosure of the invention
  • PCZABS resin is mainly used for plating automotive door handles.
  • PC for the same type of resin
  • PCZ polyester-based materials such as ZPBT and PCZPET are used. This is because PCZ polyester-based materials are more suitable as a resin material for door handles, but it is not possible to make resin-handled door handles that can meet automotive specifications that are difficult to plate.
  • the present invention has been devised in order to solve the problem. That is, the object of the present invention is to provide a resin surface roughening to a resin molded product by a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in the conventional etching process and conductive process, that is, a dry method.
  • a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in the conventional etching process and conductive process, that is, a dry method.
  • the surface layer of the resin does not deteriorate due to such chemicals, and it is possible to prevent cracking due to peeling between the oils and prevent cracking, and the safety of the resin-plated product Is to provide a method for producing a decorative product using a resin conductive material by sputtering.
  • the object of the present invention is to suppress the deformation of the resin molded product and to sputter By using a sputtering device that has been improved so that it can be coated, by imparting conductivity to the resin molded product by the dry method, it is possible to plate a strong resin material that is difficult to fit by the wet method, Another object of the present invention is to provide a method for producing a decorative plated product, which can easily carry out a pretreatment process for various types of resin molded products.
  • the surface of the resin molded product is cleaned with a gas by sputtering and the surface modification activity is performed in a vacuum atmosphere state.
  • a metal thin film forming step (S2) for forming a metal film on the surface of the resin molded product to ensure adhesion to the resin by sputtering
  • a conductive film forming step (S4) for forming a conductive film on the metal thin film formed on the resin molded product by the metal thin film forming step (S2) by sputtering, and the conductive Production of decorative plating products using resin conductive material by sputtering, which is characterized by the fact that it has an electric plating process for electroplating the resin molded product after the chemical film formation process (S4) is completed.
  • a method is provided.
  • an active treatment step (S3) in which the metal thin film formed on the resin molded product is activated by an argon ion source treatment.
  • 'It is preferable to irradiate argon gas with a small amount of air remaining on the surface of the resin molded product by sputtering.
  • the resin surface cleaning 'activation step (S1) it is preferable to irradiate ion source by injecting argon and trace oxygen into the surface of the resin molded product by a magnetron sputtering method in a vacuum atmosphere. ,.
  • a single metal having a strong binding force with oxygen or a strong binding force with oxygen is formed on the surface of the resin molded product in a vacuum atmosphere.
  • An alloy containing a metal, or a magnetic metal or an alloy containing a magnetic metal can be formed by sputtering.
  • a magnetic metal ionized to 0.01 to 50% can be formed on the surface of the resin molded article in a vacuum atmosphere.
  • the film is formed so as to have a film thickness of about 0. O / zm.
  • the conductive film forming step (S4) it is preferable to form nickel or copper.
  • the film is formed so that the film thickness is about 0.1 ⁇ m to 5.0 m.
  • the electroplating process is performed in the order of bright copper sulfate plating (S6), semi-bright nickel plating (S7), Mitsuzawa-Neckel plating (S8), MP nickel plating (microporous nickel plating) (S9). It is preferable that each plating process is performed in step (b), and the plating process is completed by applying a decorative finish plating (S10).
  • a plating process such as trivalent chromium plating, tin Z nickel alloy plating, ruthenium or gold plating is performed.
  • the surface of the resin molded product is cleaned with gas by sputtering and the surface modification activity in the sputtering apparatus in the resin surface cleaning 'activity process (S1).
  • the metal thin film deposition step (S2) in the same sputtering apparatus, a single metal having a strong binding force with oxygen or an alloy containing a metal having a strong binding force with oxygen, or a magnetic metal Alternatively, an alloy containing a magnetic metal is formed, and then a conductive film is formed by sputtering a predetermined metal on the metal thin film formed on the resin molded product in the conductive film forming step (S4).
  • Conductive film processing step (S4) is performed by adding an activation processing step (S3) after the metal thin film deposition step (S2), which is processed for the purpose of obtaining adhesion to the resin.
  • the adhesion of the chemical film becomes stronger.
  • the final resin-plated product can be produced simply by applying the same electrical plating as in normal resin-plating.
  • the pretreatment of the resin plating that is, the conductive treatment of the resin molded product!
  • the resin plating is performed. Because it is not a wet conductive process that uses chemicals that have a large environmental impact in production, environmental impact substances can be drastically reduced. As before, waste liquid treatment such as hexavalent chromium can be unnecessary or drastically reduced.
  • FIG. 1 is a process diagram showing a method for producing a decorative garnish using a resin conductive material obtained by sputtering in Example 1.
  • FIG. 2 A bright nickel plating method is shown, (a) is a process diagram of a resin conductive treatment, and (b) is a wet electroplating process diagram.
  • FIG. 3 is a cross-sectional view of a plating film attached by the method for producing a decorative garment using the resin conductive material obtained by sputtering in Example 1.
  • FIG. 4 A table showing "Table 1. Plate adhesion measurement results”.
  • FIG. 5 is a table showing “Table 2. Sputtering experimental conditions”.
  • FIG. 8 is a table showing “Table 5. Actual Product Adhesion Measurement Results (Cr)”.
  • FIG. 9 is a process diagram showing a conventional bright nickel plating method.
  • FIG. 10 is a process chart showing a conventional method for conducting a resin.
  • the method for producing a decorative garnish using a resin conductive material by sputtering according to the present invention is a pretreatment method in which the wet conductive method of the resin plating is changed to the dry conductive method. After the electrification, wet electroplating is performed as usual.
  • FIG. 1 is a process diagram showing a method for producing a decorative garment using the resin conductive material by sputtering in Example 1.
  • FIG. 2 shows an example of the bright nickel plating method.
  • (A) is a process diagram of a resin conductive treatment, and (b) is a wet electroplating process diagram.
  • FIG. 3 is a cross-sectional view of the plating film attached by the method for producing a decorative garment using the resin conductive material obtained by sputtering in Example 1.
  • the resin molded product is set in a jig, and the resin surface cleaning 'active process step S1 is performed. Inside the sputtering device, the surface of the resin molded product is cleaned with gas and activated by surface modification in a vacuum atmosphere, and then in the metal thin film formation step S2, the resin molding is performed in the same sputtering device.
  • a single metal having a strong binding force with oxygen, or an alloy containing a metal having a strong binding force with oxygen, or a magnetic metal or an alloy containing a magnetic metal is deposited by sputtering,
  • a conductive metal film is formed by sputtering a predetermined metal on the metal thin film formed on the resin molded product.
  • the surface of the resin molded product is roughened and a metal film is formed by a dry-type magnetron sputtering method or the like to impart conductivity.
  • the resin molded product subjected to the resin conductive treatment is a method for producing a decorative swaged product, in which the jig force is also removed and the electric galling process S5 to S10 is performed as described later.
  • Sputtering equipment used in magnetron sputtering is a vacuum atmosphere. This is an apparatus that ionizes the target metal and deposits it on the resin molded product by argon gas ion irradiation. This sputtering process forms a target metal film on the resin molded product or irradiates the resin molded product with gas.
  • the resin molded product to be used as a decorative product of the present invention is a so-called "appearance product” such as a resin-coated component for automobiles, a housing-related resin-plated component such as a shower or faucet component.
  • an adhesive product such as a resin-coated component for automobiles, a housing-related resin-plated component such as a shower or faucet component.
  • the plating film floats due to the separation of the resin-molded products, which may cause personal injury such as cutting hands. is important.
  • it is a “functional product” such as a printed circuit board, it is not necessary to apply such decoration.
  • a vacuum atmosphere such as a vacuum chamber one' ⁇ surface cleaning by sputtering, Clean and activate the surface of the resin in vacuum.
  • it is irradiated with argon gas with a small amount of air remaining.
  • ion source irradiation with argon and trace oxygen is performed.
  • This resin surface cleaning 'active step S1 can use a plasma treatment method by an arc plasma deposition method in addition to the magnetron' sputtering method.
  • the metal thin film forming step S2 is a step for securing the adhesion between the resin and the plating film by the magnetron-sutter method in a vacuum atmosphere such as a vacuum chamber.
  • Vacuum for example 10 _2 ⁇ 3 (10 - 2-3 square) pulled about Pa, chromium ionized to 0.01 to 50% by the plasma, molybdenum, tungsten, titanium, zirconium, aluminum - ⁇ beam, indium
  • a single metal of a metal having a strong binding force with oxygen, such as nickel, noradium (an oxyphilic metal) or an alloy containing these metals is formed on a resin molded article.
  • the metal thin film for ensuring the adhesion between the resin and the plating film is not only a good adhesion with the resin but also a conductive film for smoothly treating the electric plating in the next process. It is necessary to use a metal with good adhesion.
  • a film-forming metal material with good adhesion is selected according to the type of resin and molding conditions. For example, metallic copper can be used. There is no limit on the film thickness to ensure the adhesion of plating. Considering plating stress, 0.05 / ⁇ ⁇ to 0.5 / zm was appropriate.
  • the resin molded product that has undergone the metal thin film formation step S2 is further subjected to an activation treatment in an activation treatment step S3.
  • an activation treatment step S3 a metal thin film formed on a resin molded product at a ratio of 0.01 / ⁇ ⁇ to 2. O / z m is activated by an argon ion source treatment. This increases the adhesion between the resin molded product and the metal thin film.
  • Conductive film forming step S4 is a step of forming a conductive film for electroplating the resin molded article.
  • the conductive film for electroplating is a conductive film for electroplating, but the plating film formed by the dry plating method and the film deposited by the electroplating method are closely attached. It is necessary to be a metal film that can withstand acid treatment for ensuring the property, soft etching with a dilute oxidizing agent, or electrolytic activation treatment. Therefore, the appropriate film thickness by the conductive film forming step S4 is, for example, 0. force and 2. O / zm in the case of metallic copper.
  • This conductive film formation process S4 film formation is a pre-process (activation process) of wet electroplating (electrocopper plating and electronickel plating), which is a subsequent process that has good adhesion to the underlying metal.
  • a metal other than metallic copper can be deposited if S5 is simple and has high adhesion.
  • a dry squeeze film is activated in the activation step S5 on a resin molded product that has been subjected to a resin conductivity treatment by magnetron sputtering.
  • This activation process S5 is a process for ensuring close contact with the electric plating. For example, when copper was used as the final conductive metal for dry plating, it was performed in a soft etching process that was immersed for 30 seconds in a 20 gZL sodium persulfate solution.
  • This active process S5 depending on the type of conductive metal used in the dry plating. As long as the adhesion between the dry plating film and the electric plating film can be secured, the method is not limited.
  • Electrical plating process S6 to S10 are normal resin plating such as bright copper sulfate plating or metal plating
  • the electric mesh used in the can be adapted.
  • bright copper sulfate plating S6, semi-bright nickel plating S7, bright nickel plating S8, MP nickel plating (microporous nickel plating) S9 are applied in this order.
  • plating finish S10 with trivalent chromium plating, tin Z nickel alloy plating, ruthenium or gold plating, and finish the plating process.
  • This electric plating process S6 to S10 is an example, and it is needless to say that other metals can be bonded.
  • Fig. 4 is a table showing "Table 1. Plate adhesion measurement results”.
  • Figure 5 is a table showing “Table 2.
  • Fig. 6 is a table showing "Table 3. Results of actual product adhesion measurement (Ni-Cr) Nol”.
  • Fig. 7 is a table showing "Table 4. Actual product adhesion measurement results (Ni-Cr) No2”.
  • Fig. 8 is a table showing "Table 5. Actual product adhesion measurement results (Cr)”.
  • Figures 6 to 8 show the results for nickel and chromium alloys in Table 3. Actual product adhesion measurement results (Ni—Cr) Nol and Table 4. Actual product adhesion measurement results (Ni—Cr) No2. Table 5. Actual product adhesion measurement results (Cr) ”shows the results for chromium.
  • PCZABS resin plating prototype product of NiZCr experimental condition 10
  • PA / ABS resin plating prototype standard condition 30 ° C / 0.5Hr ⁇ 80 ° C / 0.5Hr, 120 cycles
  • the thermal shock test was conducted, but the buoyancy phenomenon due to the peeling of the thin resin layer film at the part was not confirmed. Therefore, it has been proved that the use of the method of the present invention makes it possible to mass-produce safe resin-plated parts.
  • the method for producing a decorative garnish using the resin conductive material by sputtering according to the present invention uses the dry galvanization method for the pretreatment of the resin plating, and thus, using conventional chromic acid. Unlike the conductive wrinkle treatment method, various types of resin can be targeted.
  • AB S resin acrylonitrile / butadiene / styrene
  • PCZABS resin polycarbonate Z acrylonitrile / butadiene / styrene
  • PC / PET resin polycarbonate / polyethylene terephthalate
  • PCZPBT resin polycarbonate Z polybutylene terephthalate
  • LCP resin liquid crystal polymer
  • PA resin polyamide
  • PA / ABS polyamide Z atari port-tolyl / butadiene / styrene
  • PPE resin polyphenylene ether
  • PP resin polypropylene
  • PPS resin polyphenylene sulfide
  • SPS resin crystalline polystyrene
  • PS resin polystyrene
  • MMA resin methyl methacrylate
  • epoxy resin urethane resin
  • PET resin polyethylene terephthalate
  • PBT oil polybutylene terephthalate
  • the adhesion between the nylon-based resin and the dry-type adhesive film is good.
  • Nylon-based resin is difficult to obtain a beautiful plating appearance due to etching treatment with hydrochloric acid or the like when wet-coated, and it is difficult to obtain a beautiful plating appearance. A beautiful appearance like a messy product can be obtained.
  • ABS resin generally used for resin plating a plating adhesion strength of 1 kgfZcm (9.8 N / cm) or more was obtained.
  • the test was conducted with a plating adhesion strength of 0.5 kgf / cm (4.9 NZcm) as a passing target value. I did it.
  • 1. OKgf / cm (9.8 NZcm) is set as an effort target value, but it can be used at 0.5 kgf / cm (4.9 NZcm) in actual use.
  • Adhesion can be improved by performing oxygen plasma treatment (including plasma treatment with air) together with resin cleaning prior to dry plating.
  • oxygen plasma treatment including plasma treatment with air
  • the conditions need to be changed depending on the resin and molding conditions.
  • the present invention provides a resin surface on a resin molded article by a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in a conventional etching process and a conductive plating process, that is, a dry method.
  • a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in a conventional etching process and a conductive plating process, that is, a dry method.
  • chemicals such as a mixed acid of chromic acid and sulfuric acid in a conventional etching process and a conductive plating process, that is, a dry method.
  • the present invention provides a conductive process by a dry method, thereby enabling the plating of a resin material that has been difficult to fit by a wet process, and a pretreatment process for various types of resin molded products. If it can carry out easily, it will not be limited to the above-mentioned fat.
  • a method for producing a decorative garment using the resin conductive material by sputtering according to the present invention includes: High-corrosion and heat-cycle resistant parts such as radiator grille, door regulator handle, knock door gauze, molding parts, etc., oil-resisting parts for automobiles such as handles and knobs that do not require high corrosion resistance It can be used for various applications such as metal fittings, products such as laptop casings, camera casings, and mobile phone casings that require high corrosion resistance.
  • the method for producing a decorative garnish using a resin conductive material by sputtering is a method for producing an automobile greaves component such as an automobile interior door handle, an exterior door handle, an exterior handle cover part, etc. It is suitable for products such as shower heads, faucet parts, etc. that are directly touched by people such as housing-related grease plated parts and mobile phone parts.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

In the process of the invention, surface roughening of a molded resin article and impartation of electroconductivity to the article are conducted by a dry process without conventional chemicals such as chromic acid, which brings about protection of the article from surface deterioration by chemicals, environment load reduction due to nonuse of chemicals having large environment load, inhibition of plated resin articles from exfoliation, and secure safety of the articles. The process comprises the surface cleaning/activation step (S1) of conducting the surface cleaning and surface modification /activation of a molded resin article by gas sputtering, the metal thin film formation step (S2) of forming a metal thin film on the surface of the resulting resin article by metal sputtering, the electroconductive film formation step (S4) of forming an electroconductive film of nickel, copper or the like on the metal thin film by sputtering, and the final electroplating step of electroplating the resulting resin article.

Description

明 細 書  Specification
スパッタリングによる樹脂導電ィ匕を利用した装飾めつき品の製造方法 技術分野  Manufacturing method for decorative products using resin conductive material by sputtering
[0001] 本発明は、榭脂成形品に金属めつきを施す榭脂めっき技術に係り、特に榭脂めつ きの表面調整工程、エッチング工程力 導電ィ匕処理工程までの榭脂めっきの前処理 について、六価クロム酸を用いずにスパッタリング処理により実施するスパッタリング による榭脂導電ィ匕を利用した装飾めつき品の製造方法に関するものである。  TECHNICAL FIELD [0001] The present invention relates to a resin plating technique for applying metal plating to a resin molded product, and in particular, before the resin plating until the surface adjustment process of the resin resin plating, the etching process power, and the conductive metal treatment process. Regarding the treatment, the present invention relates to a method for producing a decorative adhesive product using a resin conductive material by sputtering, which is carried out by sputtering treatment without using hexavalent chromic acid.
背景技術  Background art
[0002] 従来の一般的な榭脂めっき成膜方法は、図 9に示すように、めっきする榭脂成形品 に、その榭脂成形品の表面粗ィ匕するエッチング工程、エッチング中和工程、触媒付 与工程、導電化工程 (又は無電解めつき)等のダイレクトめっき前処理工程ゃィ匕学め つき工程を施し、前処理した榭脂成形品に、光沢銅めつき、半光沢ニッケルめっき、 光沢ニッケルめっき、 MPニッケルめっき(マイクロポーラスニッケルめっき)の j噴で各 めっき処理を施し、最後にクロムめつきを施して終了するめつき方法である。このよう に榭脂成形品は非導電性のため、電気めつきの前処理として樹脂に導電性を付与 する導電化工程 (ダイレクトめっき前処理又は無電解めつき)が必要である。  [0002] As shown in Fig. 9, a conventional general resin plating film forming method includes: an etching process for roughening the surface of the resin molded article, an etching neutralization process, Direct plating pretreatment process such as catalyst application process, conductive process (or electroless plating), etc. This is a plating method in which bright nickel plating and MP nickel plating (microporous nickel plating) are used for each plating treatment, and finally chromium plating is applied to finish. Thus, since the resin molded product is non-conductive, a conductive step (direct plating pretreatment or electroless plating) is required to impart conductivity to the resin as a pretreatment for electroplating.
[0003] 一般的な湿式法による榭脂めっきをする榭脂成形品の導電化工程 (又は無電解め つき)は、図 10に示すように、高濃度のクロム酸 (6価クロム)と硫酸の混酸を使用して エッチング処理し、水洗して力 クロム酸中和し、水洗して力 PdZSn等の触媒付与 し、水洗してカゝら活性ィ匕して水洗した後に無電解めつきをする。  [0003] As shown in Fig. 10, the conductive process (or electroless plating) of a resin molded product that uses a general wet method for resin plating is performed with high concentrations of chromic acid (hexavalent chromium) and sulfuric acid. Etching treatment using mixed acid, washing with water, neutralizing with chromic acid, washing with water, applying a catalyst such as PdZSn, washing with water, activating the water and washing with water. To do.
[0004] 榭脂成形品に無電解めつきを施す際のめっき前処理技術としては、例えば特許文 献 1の特開平 5— 132785公報「無電解めつき前処理方法」のように、ガラス繊維を含 有するポリイミド榭脂からなる絶縁物質の表面に無電解めつきを施すに際し前処理と して行なわれる該絶縁物質のエッチング処理にぉ 、て、該絶縁物質の表面を無水ク ロム酸および硫酸を含有する溶液を用いてエッチング処理した後、ヒドラジンを含有 する溶液でエッチング処理する二段エッチング処理を行なう無電解めつき前処理方 法が提案されている。 特許文献 1:特開平 5— 132785号公報 [0004] As a pretreatment technique for plating when electroless plating is applied to a resin molded product, for example, as disclosed in Japanese Patent Application Laid-Open No. 5-132785, “Electroless plating pretreatment method”, a glass fiber is used. The surface of the insulating material is treated with chromic anhydride and sulfuric acid in the etching treatment of the insulating material, which is performed as a pretreatment when the surface of the insulating material made of polyimide resin containing An electroless plating pretreatment method has been proposed in which a two-stage etching process is performed in which etching is performed using a solution containing hydrazine and then etching is performed using a solution containing hydrazine. Patent Document 1: Japanese Patent Laid-Open No. 5-132785
[0005] この榭脂めっきの基本である樹脂の表面粗ィ匕する榭脂のエッチング工程は、現在 でも高濃度のクロム酸 (6価クロム)と硫酸の混酸が使用されている。このクロム酸を使 つたエッチング工程はその廃液処理だけでなぐ処理工程中の作業にも人体に悪影 響を及ぼすおそれがあった。現在は、このクロム酸を使ったエッチング工程を榭脂め つき工程カゝら廃止すべく様々な技術が提案されている。しかし、榭脂めっきの基本性 能であるめつき密着性規格、例えば自動車部品規格の様な厳格な条件を充足する 前処理が提案されて!ヽなかった。 [0005] The resin etching process that roughens the resin surface, which is the basis of this resin plating, still uses a mixed acid of high-concentration chromic acid (hexavalent chromium) and sulfuric acid. This etching process using chromic acid has the potential to adversely affect the human body even during work in the process that requires only waste liquid treatment. At present, various technologies have been proposed to eliminate the etching process using chromic acid. However, a pretreatment has been proposed that satisfies the stringent adhesion standards that are the basic performance of resin plating, such as automotive parts standards! I did not hesitate.
[0006] 例えば、 PA榭脂(ポリアミド榭脂、 6—ナイロン)の榭脂成形品は、塩酸系エツチン グ液を用いて榭脂の表面粗ィ匕をすることができる。 POM榭脂(ポリアセタール)は、 塩酸 Z硫酸混酸もしくはリン酸 Z硫酸混酸を用いてエッチングすることができる。 LC P榭脂 (液晶ポリマー)は、苛性カリエッチングを用いてエッチングすることができる。こ のように榭脂材料によっては、クロム酸系のエッチング液を使わな 、でエッチングする ことが可能である。 [0006] For example, a PA resin (polyamide resin, 6-nylon) resin molded product can be surface-roughened using a hydrochloric acid-based etching solution. POM resin (polyacetal) can be etched using hydrochloric acid Z sulfuric acid mixed acid or phosphoric acid Z sulfuric acid mixed acid. LC P resin (liquid crystal polymer) can be etched using caustic potash etching. As described above, some resin materials can be etched without using a chromic acid-based etching solution.
[0007] PPE榭脂(ポリフエニルエーテル)のように比較的酸ィ匕に弱い樹脂の樹脂成形品に ついては、過マンガン酸系のエッチング液を用いて表面粗ィ匕することが可能である。  [0007] A resin molded product of a resin that is relatively weak in acidity, such as PPE resin (polyphenyl ether), can be surface-roughened using a permanganic acid-based etching solution.
[0008] ABS榭脂(アクリロニトリル Zブタジエン Zスチレン榭脂)のような汎用榭脂の樹脂 成形品は、マンガン酸系エッチング液を用いてエッチングすることができる。溶剤プリ エッチング工程等を付カ卩して過マンガン酸系エッチングのような弱いエッチング液で もエッチングすることができる。 発明の開示  [0008] A resin molded product of a general-purpose resin such as ABS resin (acrylonitrile Z butadiene Z styrene resin) can be etched using a manganic acid-based etchant. Etching can be performed with a weak etchant such as permanganate etching by adding a solvent pre-etching process. Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0009] しかし、上述した湿式法のエッチング工程では、高濃度のクロム酸と硫酸との混酸 のように様々な化学薬品を使用して導電ィ匕を行うため、榭脂成形品がこれらの薬品 によって劣化することがあり、更に榭脂成形品の表面に薬品が残留するおそれがあ つた。その結果、榭脂めっきした製品の一部には榭脂成形品の表層薄膜が剥離し、 その上のめっき膜と共に浮き上がり、めっき膜に亀裂が入ることがあった。この浮き上 力 Sつためつき膜は 30〜50 m程度の金属膜で、その榭脂めっきした製品を使用した ときにユーザーが指を切るなどの不具合が発生することがあった。 [0009] However, in the above-described wet etching process, various chemicals such as a mixed acid of chromic acid and sulfuric acid with a high concentration are used to conduct conductive resin. In some cases, chemicals may remain on the surface of the resin molded product. As a result, the surface layer thin film of the resin molded product peeled off on some of the products plated with resin, and floated together with the plating film thereon, and the plating film sometimes cracked. This floating force S sag film is a metal film of about 30-50 m, and its resin-plated product was used. Occasionally, there were problems such as the user's finger cutting.
[0010] また、榭脂成形品の榭脂素材によっては、上述したような湿式法による導電化処理 できないか、あるいは困難な場合があった。例えば、自動車用ドアハンドルのめっき には、 PCZABS榭脂が主に用いられている。同じ製品の塗装用榭脂材料には、 PC [0010] Further, depending on the resin material of the resin molded product, there are cases where the conductive treatment by the wet method as described above cannot be performed or is difficult. For example, PCZABS resin is mainly used for plating automotive door handles. PC for the same type of resin
ZPBTや PCZPETなどの PCZポリエステル系の材料が使われており、用途別に 材料が使い分けられている。これは、ドアハンドル用の榭脂材料としては PCZポリエ ステル系材料の方が適しているが、めっきが難しぐ自動車仕様を満足できる樹脂め つきドアハンドルが作れな 、からである。 PCZ polyester-based materials such as ZPBT and PCZPET are used. This is because PCZ polyester-based materials are more suitable as a resin material for door handles, but it is not possible to make resin-handled door handles that can meet automotive specifications that are difficult to plate.
[0011] エッチング工程で、高濃度のクロム酸と硫酸との混酸を使用するため作業環境が悪 ぐ取り扱いも危険であった。無電解めつき工程で、発ガン性物質のホルマリンやアン モ-ァを使用するため作業環境が悪力 た。また強い錯化剤を必要とするため,廃 水処理が困難であった。各処理工程後に水洗工程を必要とするため、水の使用量が 冬、、と 、う問題を有して 、た。  [0011] In the etching process, a mixed acid of high concentration chromic acid and sulfuric acid is used. The work environment was bad because formalin and ammonia, which are carcinogenic substances, were used in the electroless plating process. In addition, it requires a complexing agent, making it difficult to treat wastewater. Since a water washing step is required after each treatment step, the amount of water used has problems such as winter.
[0012] 一方、マグネトロン'スパッタリングなどの加速度を付けて榭脂に金属を叩き込むェ ツチング工程も創案されて 、るが、アルゴンで榭脂表面が叩かれて処理表面温度が 高くなる可能性があり、 ABS榭脂などのような低融点の材料は熱変形しやすいという 問題を有していた。  [0012] On the other hand, an etching process in which metal is struck into the resin with acceleration such as magnetron sputtering has been devised. However, the surface of the resin may be struck with argon and the surface temperature of the process may be increased. However, low melting point materials such as ABS resin have the problem of being easily deformed by heat.
[0013] グロ一放電プラズマ法によるエッチング工程では、イオン化率が低ぐ十分な金属 の加速ができな 、ので榭脂めっき規格のピーリング密着強度は得られな 、と 、う問 題を有していた。  [0013] In the etching process by the glow discharge plasma method, sufficient metal with a low ionization rate cannot be accelerated, and therefore, peeling adhesion strength according to the resin plating standard cannot be obtained. It was.
[0014] 本発明は、カゝかる問題点を解決するために創案されたものである。すなわち、本発 明の目的は、従来のエッチング工程と導電ィ匕工程におけるクロム酸と硫酸との混酸 のような化学薬品を使用しない処理法、即ち乾式法により榭脂成形品に榭脂表面粗 化をすると共に導電性を付与することで、このような化学薬品によって榭脂の表層が 劣化することがなくなり、榭脂間剥離によるめつき浮き'割れが防止でき、榭脂めっき 品の安全性は確保できるスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の 製造方法を提供することにある。  [0014] The present invention has been devised in order to solve the problem. That is, the object of the present invention is to provide a resin surface roughening to a resin molded product by a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in the conventional etching process and conductive process, that is, a dry method. By adding conductivity and imparting conductivity, the surface layer of the resin does not deteriorate due to such chemicals, and it is possible to prevent cracking due to peeling between the oils and prevent cracking, and the safety of the resin-plated product Is to provide a method for producing a decorative product using a resin conductive material by sputtering.
更に、本発明の目的は、榭脂成形品の変形抑制や低温でハイレートにスパッタリン グができるように改良したスパッタリング装置を使用することで、乾式法で榭脂成形品 に導電性を付与することにより、湿式法ではめつきが難し力つた榭脂材料のめっきを 可能にして、多種類の榭脂成形品の前処理工程を容易に実施することができる装飾 めっき品の製造方法を提供することにもある。 Furthermore, the object of the present invention is to suppress the deformation of the resin molded product and to sputter By using a sputtering device that has been improved so that it can be coated, by imparting conductivity to the resin molded product by the dry method, it is possible to plate a strong resin material that is difficult to fit by the wet method, Another object of the present invention is to provide a method for producing a decorative plated product, which can easily carry out a pretreatment process for various types of resin molded products.
課題を解決するための手段  Means for solving the problem
[0015] 本発明によれば、スパッタリング装置内において、真空雰囲気状態で榭脂成形品 の表面をスパッタリングによりガスで洗浄及び表面改質活性ィ匕する榭脂表面洗浄'活 性ィ匕工程 (S1)と、次に、同じくスパッタリング装置内において、前記榭脂成形品の表 面に、金属をスパッタリングにより樹脂との密着性を確保するために成膜する金属薄 膜成膜工程 (S2)と、続いて、前記金属薄膜成膜工程 (S2)により榭脂成形品に成膜 した金属薄膜上に、スパッタリングにより導電ィ匕膜を成膜する導電ィ匕膜成膜工程 (S4 )と、前記導電化膜成膜工程 (S4)が終了した榭脂成形品を電気めつきする電気めつ き工程と、力も成る、ことを特徴とするスパッタリングによる榭脂導電ィ匕を利用した装飾 めっき品の製造方法が提供される。  [0015] According to the present invention, in the sputtering apparatus, the surface of the resin molded product is cleaned with a gas by sputtering and the surface modification activity is performed in a vacuum atmosphere state. Next, in the same sputtering apparatus, a metal thin film forming step (S2) for forming a metal film on the surface of the resin molded product to ensure adhesion to the resin by sputtering, Subsequently, a conductive film forming step (S4) for forming a conductive film on the metal thin film formed on the resin molded product by the metal thin film forming step (S2) by sputtering, and the conductive Production of decorative plating products using resin conductive material by sputtering, which is characterized by the fact that it has an electric plating process for electroplating the resin molded product after the chemical film formation process (S4) is completed. A method is provided.
前記金属薄膜成膜工程 (S2)の次に、榭脂成形品に成膜した金属薄膜をアルゴン イオンソース処理で活性ィ匕する活性ィ匕処理工程 (S3)を備えることが好ま 、。  Following the metal thin film forming step (S2), it is preferable to include an active treatment step (S3) in which the metal thin film formed on the resin molded product is activated by an argon ion source treatment.
[0016] 前記榭脂表面洗浄'活性化工程 (S1)では、真空雰囲気内において、マグネトロン  [0016] In the resin surface cleaning 'activation step (S1), a magnetron is formed in a vacuum atmosphere.
'スパッタ法により前記榭脂成形品の表面に、空気を微量残留させた状態でアルゴン ガス照射することが好まし 、。  'It is preferable to irradiate argon gas with a small amount of air remaining on the surface of the resin molded product by sputtering.
前記榭脂表面洗浄'活性化工程 (S1)では、真空雰囲気内において、マグネトロン 'スパッタ法により前記榭脂成形品の表面に、アルゴンと微量酸素を注入してイオンソ ース照射することが好まし 、。  In the resin surface cleaning 'activation step (S1), it is preferable to irradiate ion source by injecting argon and trace oxygen into the surface of the resin molded product by a magnetron sputtering method in a vacuum atmosphere. ,.
[0017] 例えば、前記金属薄膜成膜工程 (S2)では、真空雰囲気内において、前記榭脂成 形品の表面に、酸素との結合力が強い金属の単一又は酸素との結合力の強い金属 を含む合金を、あるいは磁性金属又は磁性金属を含む合金をスパッタリングにより成 膜することができる。  [0017] For example, in the metal thin film forming step (S2), a single metal having a strong binding force with oxygen or a strong binding force with oxygen is formed on the surface of the resin molded product in a vacuum atmosphere. An alloy containing a metal, or a magnetic metal or an alloy containing a magnetic metal can be formed by sputtering.
前記金属薄膜成膜工程 (S2)では、真空雰囲気内において、 0. 01〜50%にィォ ン化された磁性金属を、前記榭脂成形品の表面に成膜することができる。 例えば、前記金属薄膜成膜工程 (S2)では、膜厚が 0. O /z m程度に なるように成膜する。 In the metal thin film forming step (S2), a magnetic metal ionized to 0.01 to 50% can be formed on the surface of the resin molded article in a vacuum atmosphere. For example, in the metal thin film forming step (S2), the film is formed so as to have a film thickness of about 0. O / zm.
[0018] 前記導電化膜成膜工程 (S4)は、ニッケル又は銅を成膜することが好ま ヽ。  [0018] In the conductive film forming step (S4), it is preferable to form nickel or copper.
例えば、前記導電ィ匕膜成膜工程 (S4)では、膜厚が 0. 1 μ m〜5. 0 m程度にな るように成膜する。  For example, in the conductive film forming step (S4), the film is formed so that the film thickness is about 0.1 μm to 5.0 m.
[0019] 前記電気めつき工程は、光沢硫酸銅めつき(S6)、半光沢ニッケルめっき(S7)、光 沢-ッケルめっき(S8)、 MPニッケルめっき(マイクロポーラスニッケルめっき)(S9) の順で各めつき処理を施し、最後に装飾仕上げめつき(S 10)を施してめっき処理を 終了することが好ましい。  [0019] The electroplating process is performed in the order of bright copper sulfate plating (S6), semi-bright nickel plating (S7), Mitsuzawa-Neckel plating (S8), MP nickel plating (microporous nickel plating) (S9). It is preferable that each plating process is performed in step (b), and the plating process is completed by applying a decorative finish plating (S10).
例えば、前記装飾仕上げめつき(S10)では、 3価クロムめつき、錫 Zニッケル合金 めっき、ルテニウム又は金めつきなどのめつき処理を施す。  For example, in the decorative finish plating (S10), a plating process such as trivalent chromium plating, tin Z nickel alloy plating, ruthenium or gold plating is performed.
発明の効果  The invention's effect
[0020] 上述したように、本発明では、榭脂表面洗浄'活性ィ匕工程 (S1)でスパッタリング装 置内で、榭脂成形品の表面を、スパッタリングによりガスで洗浄及び表面改質活性ィ匕 し、次に、金属薄膜成膜工程 (S2)で同じくスパッタリング装置内で、酸素との結合力 の強い金属の単一、又は酸素との結合力の強い金属を含む合金を、あるいは磁性 金属又は磁性金属を含む合金を成膜し、続いて、導電ィ匕膜成膜工程 (S4)でこの榭 脂成形品に成膜した金属薄膜上に、所定の金属をスパッタリングにより導電化膜を成 膜することで、乾式法により榭脂成形品に成膜を行い導電性を付与することができる 。そこで、従来の湿式法では不可能であった新素材特殊材料に低温で成膜できるの で、従来のように加熱により榭脂成形品が軟ィ匕し、更に変形するといつた不具合を防 止することができる  [0020] As described above, in the present invention, the surface of the resin molded product is cleaned with gas by sputtering and the surface modification activity in the sputtering apparatus in the resin surface cleaning 'activity process (S1). Next, in the metal thin film deposition step (S2), in the same sputtering apparatus, a single metal having a strong binding force with oxygen or an alloy containing a metal having a strong binding force with oxygen, or a magnetic metal Alternatively, an alloy containing a magnetic metal is formed, and then a conductive film is formed by sputtering a predetermined metal on the metal thin film formed on the resin molded product in the conductive film forming step (S4). By forming a film, it is possible to impart conductivity by forming a film on the resin molded product by a dry method. Therefore, it is possible to form a film on a new special material, which was impossible with the conventional wet method, at a low temperature, so that the resin molded product softens as a result of heating as in the past, and prevents defects when it is further deformed. can do
[0021] 更に、電気めつき後あるいは乾式法めつき後の最外層に高付加 ·高機能膜 (透明 性保護膜,高硬度膜など)を付与することができるため、乾式法を利用しためっき前 処理技術以外の表面処理技術としての応用が可能である。  [0021] Further, since it is possible to impart a high addition / high function film (transparent protective film, high hardness film, etc.) to the outermost layer after electric plating or after dry plating, plating using a dry method is possible. Application as surface treatment technology other than pretreatment technology is possible.
榭脂との密着性を得る目的で処理する金属薄膜成膜工程 (S2)の次に活性化処理 工程 (S3)を付け加えることで、導電化膜成膜工程 (S4)の際に処理する導電化膜の 密着力が強固になる。 導電ィ匕膜成膜工程 (S4)の次に通常の榭脂めっきと同様な電気めつきを施すだけ で、最終の榭脂めっき製品を生産することができる。 Conductive film processing step (S4) is performed by adding an activation processing step (S3) after the metal thin film deposition step (S2), which is processed for the purpose of obtaining adhesion to the resin. The adhesion of the chemical film becomes stronger. After the conductive film formation step (S4), the final resin-plated product can be produced simply by applying the same electrical plating as in normal resin-plating.
[0022] また、榭脂めっきの前処理、即ち榭脂成形品の導電化処理につ!、て、従来のような 6価クロムを用いる湿式法から乾式法に変更することにより、榭脂めっき製造における 環境負荷が大きいィ匕学薬品を使用する湿式導電ィ匕処理ではないため、環境負荷物 質を激減することができる。従来のように、 6価クロム等の廃液処理が不必要又は激 減することができる。 [0022] Further, the pretreatment of the resin plating, that is, the conductive treatment of the resin molded product! By changing from the conventional wet method using hexavalent chromium to the dry method, the resin plating is performed. Because it is not a wet conductive process that uses chemicals that have a large environmental impact in production, environmental impact substances can be drastically reduced. As before, waste liquid treatment such as hexavalent chromium can be unnecessary or drastically reduced.
図面の簡単な説明  Brief Description of Drawings
[0023] [図 1]実施例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方 法を示す工程図である。  [0023] FIG. 1 is a process diagram showing a method for producing a decorative garnish using a resin conductive material obtained by sputtering in Example 1.
[図 2]光沢ニッケルめっき方法を示すものであり、(a)は榭脂導電化処理の工程図、 ( b)は湿式電気めつき工程図である。  [FIG. 2] A bright nickel plating method is shown, (a) is a process diagram of a resin conductive treatment, and (b) is a wet electroplating process diagram.
[図 3]実施例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方 法によりめつきしためっき被膜の断面図である。  FIG. 3 is a cross-sectional view of a plating film attached by the method for producing a decorative garment using the resin conductive material obtained by sputtering in Example 1.
[図 4]「表 1.プレート密着測定結果」を示す表である。  [Fig. 4] A table showing "Table 1. Plate adhesion measurement results".
[図 5]「表 2.スパッタリング実験条件」を示す表である。  FIG. 5 is a table showing “Table 2. Sputtering experimental conditions”.
[図 6]「表 3.実製品密着測定結果 (Ni— Cr) Nol」を示す表である。  [Fig. 6] This is a table showing “Table 3. Results of actual product adhesion measurement (Ni—Cr) Nol”.
[図 7]「表 4.実製品密着測定結果 (Ni— Cr) No2jを示す表である。  [Fig. 7] “Table 4. Actual product adhesion measurement results (Ni—Cr) No2j”.
[図 8]「表 5.実製品密着測定結果 (Cr)」を示す表である。  FIG. 8 is a table showing “Table 5. Actual Product Adhesion Measurement Results (Cr)”.
[図 9]従来の光沢ニッケルめっき方法を示す工程図である。  FIG. 9 is a process diagram showing a conventional bright nickel plating method.
[図 10]従来の榭脂導電化処理方法を示す工程図である。  FIG. 10 is a process chart showing a conventional method for conducting a resin.
符号の説明  Explanation of symbols
[0024] S1 榭脂表面洗浄,活性化工程 [0024] S1 Wax surface cleaning and activation process
S2 金属薄膜成膜工程  S2 Metal thin film deposition process
S3 活性化処理工程  S3 Activation process
S4 導電化膜成膜工程  S4 Conductive film formation process
S5 活性化工程  S5 Activation process
S6 光沢硫酸銅めつき S7 半光沢ニッケルめっき S6 Bright copper sulfate plating S7 Semi-bright nickel plating
S8 光沢ニッケルめっき  S8 Bright nickel plating
S9 MPニッケルめっき(マイクロポーラスニッケルめっき)  S9 MP nickel plating (microporous nickel plating)
S10 装飾仕上げめつき  S10 with decorative finish
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0025] 本発明のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法は、 榭脂めっきの湿式導電化法を乾式導電化法へ変更した前処理方法である。その導 電化後は通常通り湿式電気めつきする。 [0025] The method for producing a decorative garnish using a resin conductive material by sputtering according to the present invention is a pretreatment method in which the wet conductive method of the resin plating is changed to the dry conductive method. After the electrification, wet electroplating is performed as usual.
実施例 1  Example 1
[0026] 以下、本発明の好ましい実施の形態を図面を参照して説明する。  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
図 1は実施例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造 方法を示す工程図である。図 2は光沢ニッケルめっき方法の一例を示すものであり、 (a)は榭脂導電化処理の工程図、(b)は湿式電気めつき工程図である。図 3は実施 例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法によりめ つきしためっき被膜の断面図である。  FIG. 1 is a process diagram showing a method for producing a decorative garment using the resin conductive material by sputtering in Example 1. FIG. 2 shows an example of the bright nickel plating method. (A) is a process diagram of a resin conductive treatment, and (b) is a wet electroplating process diagram. FIG. 3 is a cross-sectional view of the plating film attached by the method for producing a decorative garment using the resin conductive material obtained by sputtering in Example 1.
本発明の実施例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製 造方法は、榭脂成形品を治具にセットし、榭脂表面洗浄'活性ィ匕工程 S1で、スパッタ リング装置内において、真空雰囲気状態で榭脂成形品の表面をスパッタリングにより ガスで洗浄及び表面改質活性化し、次に、金属薄膜成膜工程 S2で、同じくスパッタ リング装置内において、榭脂成形品の表面に、酸素との結合力の強い金属の単一、 又は酸素との結合力の強い金属を含む合金を、あるいは磁性金属又は磁性金属を 含む合金をスパッタリングにより成膜し、続いて、導電化膜成膜工程 S4で、榭脂成形 品に成膜した金属薄膜上に、所定の金属をスパッタリングにより導電ィ匕膜を成膜する 方法である。このように、乾式法のマグネトロン'スパッタ法等により、榭脂成形品の表 面粗化と金属成膜を行い、導電性を付与する。この榭脂導電化処理を施した榭脂成 形品は治具力も取り外し、後述するように電気めつき工程 S5〜S 10で電気めつき処 理を施す装飾めつき品の製造方法である。  In the manufacturing method of the decorative garnish using the resin conductive material by sputtering according to Example 1 of the present invention, the resin molded product is set in a jig, and the resin surface cleaning 'active process step S1 is performed. Inside the sputtering device, the surface of the resin molded product is cleaned with gas and activated by surface modification in a vacuum atmosphere, and then in the metal thin film formation step S2, the resin molding is performed in the same sputtering device. On the surface of the product, a single metal having a strong binding force with oxygen, or an alloy containing a metal having a strong binding force with oxygen, or a magnetic metal or an alloy containing a magnetic metal is deposited by sputtering, In this conductive film forming step S4, a conductive metal film is formed by sputtering a predetermined metal on the metal thin film formed on the resin molded product. In this way, the surface of the resin molded product is roughened and a metal film is formed by a dry-type magnetron sputtering method or the like to impart conductivity. The resin molded product subjected to the resin conductive treatment is a method for producing a decorative swaged product, in which the jig force is also removed and the electric galling process S5 to S10 is performed as described later.
[0027] マグネトロン ·スパッタリングで用いるスパッタリング装置は、真空雰囲気内において アルゴンガスイオン照射により、ターゲットの金属をイオンィ匕して榭脂成形品に蒸着さ せる装置である。このスパッタリング処理により榭脂成形品にターゲットの金属を成膜 し、またはガスを榭脂成形品に照射する。 [0027] Sputtering equipment used in magnetron sputtering is a vacuum atmosphere. This is an apparatus that ionizes the target metal and deposits it on the resin molded product by argon gas ion irradiation. This sputtering process forms a target metal film on the resin molded product or irradiates the resin molded product with gas.
[0028] 本発明の装飾めつき品となる榭脂成形品は、自動車用榭脂めつき部品、シャワー や蛇口部品等の住宅関連榭脂めっき部品等のいわゆる「外観製品」である。従来の 装飾めつき品の製造方法では榭脂成形品の榭脂間剥離でめっき膜が浮き上がり、手 を切るなどの人身致傷の原因なることがあつたので、「外観製品」の外観の仕上がり は重要である。因みに、プリント基板のような「機能製品」であれば、このような装飾め つきを施す必要はない。  [0028] The resin molded product to be used as a decorative product of the present invention is a so-called "appearance product" such as a resin-coated component for automobiles, a housing-related resin-plated component such as a shower or faucet component. With the conventional method of manufacturing decorative garments, the plating film floats due to the separation of the resin-molded products, which may cause personal injury such as cutting hands. is important. Incidentally, if it is a “functional product” such as a printed circuit board, it is not necessary to apply such decoration.
[0029] 榭脂表面洗浄'活性ィ匕工程 S1では、真空度を例えば 10_ 1 (= 10の— 1乗) Pa程 度の真空チャンバ一のような真空雰囲気内でマグネトロン'スパッタ法により、真空中 で榭脂表面を洗浄及び表面改質活性化する。例えば、空気を微量残留させた状態 でのアルゴンガスを照射する。又はアルゴンと微量酸素を注入してのイオンソース照 射をする。 [0029] 'In the active I spoon step S1, the degree of vacuum, for example, 10 _ 1 (= 10 - 1 power) Pa extent of the magnetron in a vacuum atmosphere such as a vacuum chamber one'榭脂surface cleaning by sputtering, Clean and activate the surface of the resin in vacuum. For example, it is irradiated with argon gas with a small amount of air remaining. Or, ion source irradiation with argon and trace oxygen is performed.
この榭脂表面洗浄'活性ィ匕工程 S1は、マグネトロン'スパッタ法の他に、アークブラ ズマ蒸着法でのプラズマ処理法を使用することができる。  This resin surface cleaning 'active step S1 can use a plasma treatment method by an arc plasma deposition method in addition to the magnetron' sputtering method.
[0030] 金属薄膜成膜工程 S2は、真空チャンバ一のような真空雰囲気内でマグネトロン'ス ノ ッタ法により、榭脂とめっき膜との密着性を確保するための工程である。真空度を 例えば 10_23 (10の— 2〜3乗) Pa程度に引き上げ、プラズマによって 0. 01〜50% にイオン化されたクロム、モリブデン、タングステン、チタン、ジルコニウム、アルミ-ゥ ム、インジウム、ニッケル、ノ ラジウムなどの酸素との結合力の強い金属 (親酸素金属 )の単一もしくは、それらの金属を含む合金を榭脂成形品に成膜する。 [0030] The metal thin film forming step S2 is a step for securing the adhesion between the resin and the plating film by the magnetron-sutter method in a vacuum atmosphere such as a vacuum chamber. Vacuum, for example 10 _2 ~ 3 (10 - 2-3 square) pulled about Pa, chromium ionized to 0.01 to 50% by the plasma, molybdenum, tungsten, titanium, zirconium, aluminum - © beam, indium A single metal of a metal having a strong binding force with oxygen, such as nickel, noradium (an oxyphilic metal) or an alloy containing these metals is formed on a resin molded article.
[0031] また、金属薄膜成膜工程 S 2では、イオン濃度を確保しやす!/ヽ磁性金属である-ッ ケルクロム合金 (合金比 = 50: 50)や金属クロムを用いることが好まし 、。榭脂とめつ き膜との密着性を確保するための金属薄膜は、榭脂との密着性が良好なだけではな ぐ次工程の電気めつきを円滑に処理するための導電ィヒ膜との密着性が良好な金属 を使用する必要がある。金属薄膜成膜工程 S 2では、クロム単体、クロム 'ニッケル合 金、アルミニウム、銅合金などを使用することが好ましい。合金比率は特に規定しない 。榭脂の種類や成形条件等によって密着の良い成膜金属材料を選択する。例えば 金属銅を使用することができる。めっき密着力を確保するための膜厚に制限はない 力 めっき応力等を考えると 0. 05 /ζ πι〜0. 5 /z mが適当であった。 [0031] In addition, in the metal thin film forming step S2, it is preferable to use ion-concentrated metal alloy-- nickel chrome alloy (alloy ratio = 50:50) or metal chrome. The metal thin film for ensuring the adhesion between the resin and the plating film is not only a good adhesion with the resin but also a conductive film for smoothly treating the electric plating in the next process. It is necessary to use a metal with good adhesion. In the metal thin film forming step S2, it is preferable to use chromium alone, chromium-nickel alloy, aluminum, copper alloy or the like. Alloy ratio is not specified . A film-forming metal material with good adhesion is selected according to the type of resin and molding conditions. For example, metallic copper can be used. There is no limit on the film thickness to ensure the adhesion of plating. Considering plating stress, 0.05 / ζ πι to 0.5 / zm was appropriate.
[0032] 金属薄膜成膜工程 S2が終了した榭脂成形品に、更に活性ィ匕処理工程 S3で活性 化処理を施すことが好ましい。例えば、榭脂成形品に 0. 01 /ζ πι〜2. O /z mで成膜し た金属薄膜をアルゴンイオンソース処理で活性ィ匕する。これにより榭脂成形品と金属 薄膜との密着力が高くなる。  [0032] It is preferable that the resin molded product that has undergone the metal thin film formation step S2 is further subjected to an activation treatment in an activation treatment step S3. For example, a metal thin film formed on a resin molded product at a ratio of 0.01 / ζ πι to 2. O / z m is activated by an argon ion source treatment. This increases the adhesion between the resin molded product and the metal thin film.
[0033] 導電化膜成膜工程 S4は、榭脂成形品に電気めつき処理するための導電化膜を成 膜する工程である。電気めつき用の導電化膜は、電気めつき処理するための導電ィ匕 膜であるが、乾式めつき法で形成しためっき膜と電気めつき法で成膜する膜とのめつ き密着性を確保するための酸処理や希薄な酸化剤によるソフトエッチングもしくは、 電解活性ィ匕処理に耐えうる金属膜である必要がある。そこで、この導電化膜成膜ェ 程 S4による膜厚は、例えば金属銅の場合は 0. 力ら 2. O /z mが適当であった。 この導電ィ匕膜成膜工程 S4による成膜は、下層金属との密着力が良ぐ更に後工程 である湿式電気めつき (電気銅めつきや電気ニッケルめっき)の前処理 (活性化工程) S5が簡単で密着性も高い金属であれば金属銅以外の金属を成膜することができる。  [0033] Conductive film forming step S4 is a step of forming a conductive film for electroplating the resin molded article. The conductive film for electroplating is a conductive film for electroplating, but the plating film formed by the dry plating method and the film deposited by the electroplating method are closely attached. It is necessary to be a metal film that can withstand acid treatment for ensuring the property, soft etching with a dilute oxidizing agent, or electrolytic activation treatment. Therefore, the appropriate film thickness by the conductive film forming step S4 is, for example, 0. force and 2. O / zm in the case of metallic copper. This conductive film formation process S4 film formation is a pre-process (activation process) of wet electroplating (electrocopper plating and electronickel plating), which is a subsequent process that has good adhesion to the underlying metal. A metal other than metallic copper can be deposited if S5 is simple and has high adhesion.
[0034] 電気めつき工程では、図 2 (a)に示すように、榭脂表面洗浄'活性ィ匕工程 Sl、金属 薄膜成膜工程 S2及び導電ィ匕膜成膜工程 S4が終了した乾式めつきで導電ィ匕処理ま で終わった榭脂成形品は真空チャンバ一から取り出し、電気めつき用の治具に掛け 替えて通常の電気めつき工程で仕上げる。  [0034] In the electroplating process, as shown in Fig. 2 (a), the resin surface cleaning'active process Sl, the metal thin film deposition process S2, and the conductive film deposition process S4 are completed. The resin molded product that has been processed up to the conductive finish is taken out from the vacuum chamber, replaced with a jig for electrical plating, and finished in the usual electrical plating process.
[0035] 湿式電気めつきでは、図 2 (b)に示すように、マグネトロン'スパッタリングにより榭脂 導電化処理を施した榭脂成形品に活性ィ匕工程 S5で乾式めつき膜を活性ィ匕する。こ の活性ィ匕工程 S5は、電気めつきとの密着を確保するための工程である。例えば、乾 式めつきの最終導電ィ匕金属として銅を用いたときは、 20gZLの過硫酸 Na溶液に 30 秒間浸漬するソフトエッチング工程でおこなった。なお、この活性ィ匕工程 S5は、乾式 めっきで使う導電ィ匕金属の種類によって様々な方法がある。乾式めつき膜と電気めつ き膜との密着性が確保できる方法であれば、その方法は限定しな 、。  [0035] In wet electroplating, as shown in Fig. 2 (b), a dry squeeze film is activated in the activation step S5 on a resin molded product that has been subjected to a resin conductivity treatment by magnetron sputtering. To do. This activation process S5 is a process for ensuring close contact with the electric plating. For example, when copper was used as the final conductive metal for dry plating, it was performed in a soft etching process that was immersed for 30 seconds in a 20 gZL sodium persulfate solution. There are various methods for this active process S5 depending on the type of conductive metal used in the dry plating. As long as the adhesion between the dry plating film and the electric plating film can be secured, the method is not limited.
[0036] 電気めつき工程 S6〜S 10は光沢硫酸銅めつき等通常の榭脂めっきや金属めつき に用いられる電気めつきが適応できる。例えば図示するように光沢硫酸銅めつき S6、 半光沢ニッケルめっき S7、光沢ニッケルめっき S8、 MPニッケルめっき(マイクロポー ラスニッケルめっき) S9の順で各めつき処理を施す。 [0036] Electrical plating process S6 to S10 are normal resin plating such as bright copper sulfate plating or metal plating The electric mesh used in the can be adapted. For example, as shown in the figure, bright copper sulfate plating S6, semi-bright nickel plating S7, bright nickel plating S8, MP nickel plating (microporous nickel plating) S9 are applied in this order.
最後に 3価クロムめつき、錫 Zニッケル合金めつき、ルテニウム又は金めつきなどの 装飾仕上げめつき S10を施してめっき処理を終了する。  Finally, apply plating finish S10 with trivalent chromium plating, tin Z nickel alloy plating, ruthenium or gold plating, and finish the plating process.
この電気めつき工程 S6〜S 10は一例であって、これ以外の金属をめつきできること は勿論である。  This electric plating process S6 to S10 is an example, and it is needless to say that other metals can be bonded.
[0037] 光沢硫酸銅めつき 30 m、半光沢ニッケルめっき 10 m、光沢ニッケルめっき 10 μ m、マイクロポーラスニッケルめっき 1. 3 m、クロムめつき 0. 35 μ m程度の電気 めっきを行い、後述するピーリング密着試験や、サーマルサイクル試験等の榭脂めつ き機能試験を実施し、めっき製品の評価を行った。  [0037] Bright copper sulfate plating 30 m, semi-bright nickel plating 10 m, bright nickel plating 10 μm, microporous nickel plating 1.3 m, chromium plating about 0.35 μm. We conducted plating adhesion tests and thermal cycle tests such as thermal cycle tests to evaluate plated products.
[0038] 本発明の実施例 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製 造方法によりめつきした製品のめっきの密着力に関する実験について説明する。図 4 は「表 1.プレート密着測定結果」を示す表である。図 5は「表 2.スパッタリング実験条 件」を示す表である。図 6は「表 3.実製品密着測定結果 (Ni— Cr) Nol」を示す表で ある。図 7は「表 4.実製品密着測定結果 (Ni— Cr) No2」を示す表である。図 8は「表 5.実製品密着測定結果 (Cr)」を示す表である。  [0038] An experiment relating to the adhesion of the product plated by the method for producing a decorative swaged product using the resin conductive material by sputtering in Example 1 of the present invention will be described. Fig. 4 is a table showing "Table 1. Plate adhesion measurement results". Figure 5 is a table showing “Table 2. Sputtering Experiment Conditions”. Fig. 6 is a table showing "Table 3. Results of actual product adhesion measurement (Ni-Cr) Nol". Fig. 7 is a table showing "Table 4. Actual product adhesion measurement results (Ni-Cr) No2". Fig. 8 is a table showing "Table 5. Actual product adhesion measurement results (Cr)".
(1)予備試験 (榭脂プレート)  (1) Preliminary test (grease plate)
榭脂プレートを使って材料別の密着強度、成膜前の樹脂の表面洗浄'活性化に酸 素注入の効果があるか、榭脂材料による差、無機フィラーの影響等を概略的に調べ た結果を図 4の「表 1.プレート密着測定結果」に示した。この表 1の結果のように榭脂 表面洗浄処理時の酸素ガス注入によって密着性が向上することがわ力つた。但し、 A BS榭脂プレートに関しては酸素ガス注入の効果は高くな力つた。 ABS榭脂プレート 試験には榭脂厚みを変えた 3段プレート(ゲート =3mmZ2mmZlmm=下段)を使 つて試験をおこなった。膜厚が厚いところの方が密着力が高ぐ形状や成形条件でも 密着が変化することを予測させる結果となった。材料的には、ナイロン系、 ABS系の 榭脂の密着強度が高 、ことがわ力つた。  Using a resin plate, we examined roughly the adhesion strength by material, whether there was an effect of oxygen injection on the surface cleaning of the resin before film formation, the difference depending on the resin material, the influence of inorganic filler, etc. The results are shown in “Table 1. Plate adhesion measurement results” in FIG. As shown in Table 1, the adhesion was improved by the oxygen gas injection during the surface cleaning of the resin. However, the effect of oxygen gas injection was strong for the ABS resin plate. The ABS resin plate test was conducted using a three-stage plate (gate = 3mmZ2mmZlmm = bottom) with different resin thickness. The thicker the film thickness, the more closely the shape and molding conditions were, and it was predicted that the adhesion would change. In terms of materials, the adhesion strength of nylon-based and ABS-based resins was high, and it proved powerful.
[0039] (2)実成形品での試験結果 試験条件を図 5の「表 2.スパッタリング実験条件」に示した。めっき密着性用成膜金 属はニッケル 'クロム合金 (合金比 = 50 : 50)とクロム(99. 9%)品の 2種類の試験を おこなった。導電化膜は金属銅(99. 9%)をターゲットとして使用した。 [0039] (2) Test results with actual molded products The test conditions are shown in “Table 2. Sputtering Experiment Conditions” in FIG. Two types of metallurgy metal for plating adhesion were tested: nickel 'chromium alloy (alloy ratio = 50:50) and chromium (99.9%). The conductive film used metal copper (99.9%) as a target.
[0040] (3)実製品密着測定結果  [0040] (3) Actual product adhesion measurement results
図 6〜図 8の「表 3.実製品密着測定結果 (Ni— Cr) Nol」、「表 4.実製品密着測定 結果 (Ni— Cr) No2」にニッケル 'クロム合金での結果を、「表 5.実製品密着測定結 果 (Cr)」にクロムでの結果を示した。  Figures 6 to 8 show the results for nickel and chromium alloys in Table 3. Actual product adhesion measurement results (Ni—Cr) Nol and Table 4. Actual product adhesion measurement results (Ni—Cr) No2. Table 5. Actual product adhesion measurement results (Cr) ”shows the results for chromium.
「表 2.スパッタリング実験条件」に示した実験条件 4、実験条件 8、実験条件 10の 条件で密着力の高い榭脂めっきが作れることがゎカゝつた。特に、 PAZABS榭脂は 密着力が max4. 75KgfZcm=約 47NZcmの高い数値を示した。その他の材料で も適正な条件を選択すれば量産化が可能である。  It was found that resin plating with high adhesion could be made under the conditions of experimental conditions 4, 8 and 10 shown in “Table 2. Sputtering experimental conditions”. In particular, PAZABS resin showed a high adhesion value of max 4.75 kgfZcm = about 47 NZcm. Other materials can be mass-produced by selecting appropriate conditions.
[0041] (4)サーマルショック試験結果  [0041] (4) Thermal shock test results
PCZABS榭脂めっき試作品 (NiZCr実験条件 10の製品)及び PA/ABS榭脂 めっき試作品(同じ条件)を 30°C/0. 5Hr→80°C/0. 5Hrを 1サイクルとして、 120 サイクルのサーマルショック試験をおこなったが、パート部分の榭脂層薄膜剥離によ るめつき浮き現象は確認されな力つた。従って、本発明の方法を使えば安全な榭脂 めっき部品を量産化できることがわ力つた。  PCZABS resin plating prototype (product of NiZCr experimental condition 10) and PA / ABS resin plating prototype (same condition) 30 ° C / 0.5Hr → 80 ° C / 0.5Hr, 120 cycles The thermal shock test was conducted, but the buoyancy phenomenon due to the peeling of the thin resin layer film at the part was not confirmed. Therefore, it has been proved that the use of the method of the present invention makes it possible to mass-produce safe resin-plated parts.
[0042] 本発明のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法は、 榭脂めっきの前処理にスパッタリングの乾式めつき法を利用していので、従来のクロ ム酸による導電ィ匕処理法と異なり種々の榭脂を対象とすることができる。例えば、 AB S榭脂(アクリロニトリル/ブタジエン/スチレン)、 PCZABS榭脂(ポリカーボネイト Z アクリロニトリル/ブタジエン/スチレン)、 PC/PET榭脂(ポリカーボネイト/ポリェチ レンテレフタレート)、 PCZPBT榭脂(ポリカーボネイト Zポリブチレンテレフタレート) 、 LCP榭脂 (液晶ポリマー)、 PA榭脂(ポリアミド)、 PA/ABS (ポリアミド Zアタリ口- トリル/ブタジエン/スチレン)、 PPE榭脂(ポリフエ-レンエーテル)、 PP榭脂(ポリプロ ピレン)、 PPS榭脂(ポリフエ-レンサルファイド)、 SPS榭脂(結晶性ポリスチレン)、 P S榭脂(ポリスチレン)、 MMA榭脂 (メタクリル酸メチル)、エポキシ榭脂,ウレタン榭脂 、 PET榭脂(ポリエチレンテレフタレート)、 PBT榭脂(ポリブチレンテレフタレート)、 P c榭脂(ポリカーボネイト)等がある。更にこれらの榭脂のポリマーァロイも対象とするこ とがでさる。 [0042] The method for producing a decorative garnish using the resin conductive material by sputtering according to the present invention uses the dry galvanization method for the pretreatment of the resin plating, and thus, using conventional chromic acid. Unlike the conductive wrinkle treatment method, various types of resin can be targeted. For example, AB S resin (acrylonitrile / butadiene / styrene), PCZABS resin (polycarbonate Z acrylonitrile / butadiene / styrene), PC / PET resin (polycarbonate / polyethylene terephthalate), PCZPBT resin (polycarbonate Z polybutylene terephthalate) , LCP resin (liquid crystal polymer), PA resin (polyamide), PA / ABS (polyamide Z atari port-tolyl / butadiene / styrene), PPE resin (polyphenylene ether), PP resin (polypropylene), PPS resin (polyphenylene sulfide), SPS resin (crystalline polystyrene), PS resin (polystyrene), MMA resin (methyl methacrylate), epoxy resin, urethane resin, PET resin (polyethylene terephthalate) , PBT oil (polybutylene terephthalate), P c There are resin, such as polycarbonate. Furthermore, it is possible to target polymer alloys of these resins.
[0043] 特にナイロン系榭脂と乾式めつき膜との密着性が良い。ナイロン系榭脂は、湿式め つきでは塩酸等のエッチング処理により製品表面が荒れてしまい綺麗なめっき外観 が得ることが難 、材料である力 乾式法では製品外観が悪くなることはなく ABS榭 脂めつき品のような綺麗な外観を得ることができる。  [0043] In particular, the adhesion between the nylon-based resin and the dry-type adhesive film is good. Nylon-based resin is difficult to obtain a beautiful plating appearance due to etching treatment with hydrochloric acid or the like when wet-coated, and it is difficult to obtain a beautiful plating appearance. A beautiful appearance like a messy product can be obtained.
[0044] 一般的に榭脂めっきに使用される ABS榭脂においても lKgfZcm(9. 8N/cm) 以上のめっき密着力が得られた。本発明の乾式めつきを利用した榭脂めっき前処理 工程 (榭脂の導電ィ匕工程)では、めっき密着強度をピーリング強度で 0. 5Kgf/cm( 4. 9NZcm)を合格目標値として試験をおこなった。なお、自動車規格では 1. OKgf /cm(9. 8NZcm)を努力目標値として設定されているが、実使用上 0. 5Kgf/cm (4. 9NZcm)で使用可能である。  [0044] Also in ABS resin generally used for resin plating, a plating adhesion strength of 1 kgfZcm (9.8 N / cm) or more was obtained. In the resin plating pretreatment process using the dry-type metal plating of the present invention (oil conductive process), the test was conducted with a plating adhesion strength of 0.5 kgf / cm (4.9 NZcm) as a passing target value. I did it. In the automotive standard, 1. OKgf / cm (9.8 NZcm) is set as an effort target value, but it can be used at 0.5 kgf / cm (4.9 NZcm) in actual use.
[0045] 乾式めつき前に樹脂のクリーニングと共に、酸素プラズマ (空気によるプラズマ処理 を含む)処理をすることにより、密着性を向上させることができる。但し、その条件は榭 脂や成形条件によって変更する必要がある。  [0045] Adhesion can be improved by performing oxygen plasma treatment (including plasma treatment with air) together with resin cleaning prior to dry plating. However, the conditions need to be changed depending on the resin and molding conditions.
[0046] 榭脂めっきの前処理 (榭脂の導電化処理)を従来の 6価クロムを用いる湿式法から 乾式法に変更することで榭脂めっき製造における環境負荷は激減すると考える。  [0046] By changing the pretreatment of the resin plating (conducting treatment of the resin) from the conventional wet method using hexavalent chromium to the dry method, the environmental load in the production of the resin coating is expected to be drastically reduced.
[0047] なお、本発明は、従来のエッチング工程と導電ィ匕工程におけるクロム酸と硫酸との 混酸のような化学薬品を使用しない処理法、即ち乾式法により榭脂成形品に榭脂表 面粗ィ匕をすると共に導電性を付与することで、このような化学薬品による榭脂成形品 の榭脂表面の薬品劣化を防止し、榭脂の表層剥離を防止して榭脂めっき品の安全 性は確保できれば、上述した発明の実施の形態に限定されず、本発明の要旨を逸 脱しな 、範囲で種々変更できることは勿論である。  [0047] It should be noted that the present invention provides a resin surface on a resin molded article by a processing method that does not use chemicals such as a mixed acid of chromic acid and sulfuric acid in a conventional etching process and a conductive plating process, that is, a dry method. By roughening and imparting conductivity, chemical degradation of the surface of the resin molded product caused by such chemicals can be prevented, and the surface layer of the resin can be prevented from peeling off. As long as the characteristics can be secured, the present invention is not limited to the above-described embodiments, and various changes can be made without departing from the scope of the present invention.
[0048] また、本発明は、乾式法で導電性を付与することにより、湿式法ではめつきが難しか つた榭脂材料のめっきを可能にして、多種類の榭脂成形品の前処理工程を容易に 実施することができれば、上述した榭脂に限定されない。  [0048] Further, the present invention provides a conductive process by a dry method, thereby enabling the plating of a resin material that has been difficult to fit by a wet process, and a pretreatment process for various types of resin molded products. If it can carry out easily, it will not be limited to the above-mentioned fat.
産業上の利用可能性  Industrial applicability
[0049] 本発明のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法は、 高耐食性と耐ヒートサイクル性が要求されるラジェターグリル、ドアレギュレーターハ ンドル、ノ ックドアガー-ッシュ、モール類等の自動車用榭脂めつき部品、高耐食性 は要求されないハンドル、つまみ類の家電用榭脂めつき部品、高耐食性が要求され るノートパソコン筐体,カメラ筐体、携帯電話筐体等の榭脂めっき剛性筐体等の製品 等の様々な用途に利用することができる。 [0049] A method for producing a decorative garment using the resin conductive material by sputtering according to the present invention includes: High-corrosion and heat-cycle resistant parts such as radiator grille, door regulator handle, knock door gauze, molding parts, etc., oil-resisting parts for automobiles such as handles and knobs that do not require high corrosion resistance It can be used for various applications such as metal fittings, products such as laptop casings, camera casings, and mobile phone casings that require high corrosion resistance.
特に、本発明のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方 法は、自動車用内装ドアハンドル、外装ドアハンドル、外装ハンドルカバー部品等の ような自動車用榭脂めつき部品、シャワーヘッド、蛇口部品等のような住宅関連榭脂 めっき部品、更に携帯電話部品のように直接人が手に触れる製品に適している。  In particular, the method for producing a decorative garnish using a resin conductive material by sputtering according to the present invention is a method for producing an automobile greaves component such as an automobile interior door handle, an exterior door handle, an exterior handle cover part, etc. It is suitable for products such as shower heads, faucet parts, etc. that are directly touched by people such as housing-related grease plated parts and mobile phone parts.

Claims

請求の範囲 The scope of the claims
[1] スパッタリング装置内において、真空雰囲気状態で榭脂成形品の表面をスパッタリン グによりガスで洗浄及び表面改質活性化する榭脂表面洗浄'活性化工程 (S1)と、 次に、同じくスパッタリング装置内において、前記榭脂成形品の表面に、金属をス ノ ッタリングにより樹脂との密着性を確保するために成膜する金属薄膜成膜工程 (S2 )と、  [1] In the sputtering apparatus, in the vacuum atmosphere, the surface of the resin molded product is activated with a gas surface cleaning and activation process (S1) in which the surface is cleaned and activated by sputtering, and then the same. In a sputtering apparatus, a metal thin film deposition step (S2) for depositing a metal on the surface of the resin molded product to ensure adhesion to the resin by means of the sputtering,
続いて、前記金属薄膜成膜工程 (S2)により榭脂成形品に成膜した金属薄膜上に 、スパッタリングにより導電化膜を成膜する導電化膜成膜工程 (S4)と、  Subsequently, a conductive film forming step (S4) for forming a conductive film by sputtering on the metal thin film formed on the resin molded product by the metal thin film forming step (S2),
前記導電ィ匕膜成膜工程 (S4)が終了した榭脂成形品を電気めつきする電気めつき 工程と、力も成る、ことを特徴とするスパッタリングによる榭脂導電ィ匕を利用した装飾 めっき品の製造方法。  A decorative plating product using a resin conductive film by sputtering, characterized in that it has an electro-plating process for electroplating the resin-molded product after the conductive film forming step (S4) is completed. Manufacturing method.
[2] 前記金属薄膜成膜工程 (S2)の次に、榭脂成形品に成膜した金属薄膜をアルゴンィ オンソース処理で活性ィ匕する活性ィ匕処理工程 (S3)を備えた、ことを特徴とする請求 項 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法。  [2] After the metal thin film forming step (S2), an active metal treatment step (S3) for activating the metal thin film formed on the resin molded article by argon ion source treatment is provided. The method for producing a decorative garment using the resin conductive material by sputtering according to claim 1.
[3] 前記榭脂表面洗浄'活性化工程 (S1)は、真空雰囲気内において、マグネトロン'ス ノッタ法により前記榭脂成形品の表面に、空気を微量残留させた状態でアルゴンガ ス照射する、ことを特徴とする請求項 1のスパッタリングによる榭脂導電ィ匕を利用した 装飾めつき品の製造方法。  [3] The resin surface cleaning 'activation step (S1) is performed by irradiating argon gas in a vacuum atmosphere with a small amount of air remaining on the surface of the resin molded product by a magnetron' snotter method. The method for producing a decorative garment using the resin conductive material by sputtering according to claim 1.
[4] 前記榭脂表面洗浄'活性化工程 (S1)は、真空雰囲気内において、マグネトロン'ス ノッタ法により前記榭脂成形品の表面に、アルゴンと微量酸素を注入してイオンソー ス照射する、ことを特徴とする請求項 1のスパッタリングによる榭脂導電ィ匕を利用した 装飾めつき品の製造方法。  [4] The resin surface cleaning 'activation step (S1) is performed by injecting argon and a trace amount of oxygen into the surface of the resin molded product by a magnetron'snotter method in a vacuum atmosphere and irradiating with an ion source. The method for producing a decorative garment using the resin conductive material by sputtering according to claim 1.
[5] 前記金属薄膜成膜工程 (S2)は、真空雰囲気内において、前記榭脂成形品の表面 に酸素との結合力が強い金属の単一又は酸素との結合力の強い金属を含む合金を スパッタリングにより成膜する、ことを特徴とする請求項 1のスパッタリングによる榭脂 導電化を利用した装飾めつき品の製造方法。  [5] In the metal thin film forming step (S2), in a vacuum atmosphere, the surface of the resin molded article is a single metal having a strong binding force with oxygen or an alloy containing a metal having a strong binding force with oxygen. The method for producing a decorative garment using the conductive resin according to claim 1, wherein the film is formed by sputtering.
[6] 前記金属薄膜成膜工程 (S2)は、真空雰囲気内において、前記榭脂成形品の表面 に磁性金属又は磁性金属を含む合金をスパッタリングにより成膜する、ことを特徴と する請求項 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法 [6] The metal thin film forming step (S2) is characterized in that a magnetic metal or an alloy containing the magnetic metal is formed on the surface of the resin molded article by sputtering in a vacuum atmosphere. A method for producing a decorative garnish using a resin conductive material by sputtering according to claim 1
[7] 前記金属薄膜成膜工程 (S2)は、真空雰囲気内において、 0. 01〜50%にイオンィ匕 された磁性金属を、前記榭脂成形品の表面に成膜する、ことを特徴とする請求項 1の スパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法。 [7] The metal thin film forming step (S2) is characterized in that a magnetic metal ionized to 0.01 to 50% is formed on the surface of the resin molded article in a vacuum atmosphere. The method for producing a decorative garment using the resin conductive material by sputtering according to claim 1.
[8] 前記金属薄膜成膜工程 (S2)では、膜厚が 0. 01〜2. 0 m程度になるように成膜 する、ことを特徴とする請求項 1又は 7のスパッタリングによる榭脂導電ィ匕を利用した 装飾めつき品の製造方法。  [8] The resin conductivity by sputtering according to claim 1 or 7, wherein in the metal thin film forming step (S2), the film is formed to have a film thickness of about 0.01 to 2.0 m. A manufacturing method for decorative products using 品.
[9] 前記導電化膜成膜工程 (S4)は、ニッケル又は銅を成膜する、ことを特徴とする請求 項 1のスパッタリングによる榭脂導電ィ匕を利用した装飾めつき品の製造方法。  [9] The method for producing a decorative garnish using a resin conductive film by sputtering according to claim 1, wherein the conductive film forming step (S4) forms a film of nickel or copper.
[10] 前記導電ィ匕膜成膜工程 (S4)では、膜厚が 0. 1〜5. 0 m程度になるように成膜す る、ことを特徴とする請求項 1又は 9のスパッタリングによる榭脂導電ィ匕を利用した装 飾めつき品の製造方法。  [10] The method according to claim 1 or 9, wherein in the conductive film forming step (S4), the film is formed to have a film thickness of about 0.1 to 5.0 m. A method of manufacturing a product with a decoration using a resin resin.
[11] 前記電気めつき工程は、光沢硫酸銅めつき(S6)、半光沢ニッケルめっき(S7)、光沢 ニッケルめっき(S8)、 MPニッケルめっき(マイクロポーラスニッケルめっき)(S9)の 順で各めつき処理を施し、最後に装飾仕上げめつき(S 10)を施してめっき処理を終 了する、ことを特徴とする請求項 1のスパッタリングによる榭脂導電ィ匕を利用した装飾 めっき品の製造方法。  [11] The electroplating process consists of bright copper sulfate plating (S6), semi-bright nickel plating (S7), bright nickel plating (S8), MP nickel plating (microporous nickel plating) (S9) in this order. 2. The manufacture of a decorative plated product using a resin conductive material by sputtering according to claim 1, characterized in that the plating process is finished by applying a plating process and finally applying a decorative finish plating (S10). Method.
[12] 前記装飾仕上げめつき(S 10)では、 3価クロムめつき、錫 Zニッケル合金めつき、ル テニゥム又は金めつきなどのめつき処理を施す、ことを特徴とする請求項 11のスパッ タリングによる榭脂導電化を利用した装飾めつき品の製造方法。  [12] The ornamental finish plating (S10) is characterized in that a plating treatment such as trivalent chromium plating, tin Z nickel alloy plating, ruthenium or gold plating is performed. A method for manufacturing decorative garments using conductive resin by spattering.
PCT/JP2006/313968 2006-07-05 2006-07-13 Process for production of decoratively plated articles by utilizing the impartation of electroconductivity to resin by sputtering WO2008004315A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-185652 2006-07-05
JP2006185652 2006-07-05

Publications (1)

Publication Number Publication Date
WO2008004315A1 true WO2008004315A1 (en) 2008-01-10

Family

ID=38894293

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2006/313968 WO2008004315A1 (en) 2006-07-05 2006-07-13 Process for production of decoratively plated articles by utilizing the impartation of electroconductivity to resin by sputtering
PCT/JP2007/063324 WO2008004558A1 (en) 2006-07-05 2007-07-03 Process for producing ornamental plated article with use of conversion of resin to conductive one by sputtering, and hanging jig for fixing of resin molding

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/063324 WO2008004558A1 (en) 2006-07-05 2007-07-03 Process for producing ornamental plated article with use of conversion of resin to conductive one by sputtering, and hanging jig for fixing of resin molding

Country Status (1)

Country Link
WO (2) WO2008004315A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100161359A1 (en) * 2008-12-18 2010-06-24 At&T Intellectual Property I, L.P. Risk Management for Cable Protection Via Dynamic Buffering
JP2014524977A (en) * 2011-06-29 2014-09-25 ヴァレオ セキュリテ アビタクル Selectively metallized plastic parts and corresponding manufacturing processes
CN107326414A (en) * 2017-05-11 2017-11-07 厦门建霖工业有限公司 A kind of plastic basis material chromium-free metal method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6121242B2 (en) * 2013-05-27 2017-04-26 アルプス電気株式会社 Input device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03229890A (en) * 1990-08-31 1991-10-11 Tokyo Pureiteingu Kk Production of product which has aluminum as raw material and is imparted with mirror surface by plating
JPH03257840A (en) * 1990-03-07 1991-11-18 Hitachi Ltd Formation of organic/metal thin film
JPH05311486A (en) * 1982-12-27 1993-11-22 Tokyo Pureiteingu Kk Product of aluminum as stock with specular surface imparted by plating
JPH06212405A (en) * 1991-10-31 1994-08-02 Hoechst Celanese Corp Method of plating copper on polyphenylene sulfide substrate
JP2001104875A (en) * 1999-10-05 2001-04-17 Toyo Terumii Kk Plated resin parts for automobile exterior and its manufacturing method
JP2002293967A (en) * 2001-03-30 2002-10-09 Ichikoh Ind Ltd Method for producing urethane resin plated product

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3458450B2 (en) * 1994-04-26 2003-10-20 三菱化学株式会社 Sputtering method
JP3689465B2 (en) * 1995-11-30 2005-08-31 日本ピストンリング株式会社 Method and apparatus for forming physical vapor deposition film of vane for rotary compressor
JPH11185308A (en) * 1997-12-25 1999-07-09 Nikon Corp Optical disk, manufacturing device therefor and manufacture thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05311486A (en) * 1982-12-27 1993-11-22 Tokyo Pureiteingu Kk Product of aluminum as stock with specular surface imparted by plating
JPH03257840A (en) * 1990-03-07 1991-11-18 Hitachi Ltd Formation of organic/metal thin film
JPH03229890A (en) * 1990-08-31 1991-10-11 Tokyo Pureiteingu Kk Production of product which has aluminum as raw material and is imparted with mirror surface by plating
JPH06212405A (en) * 1991-10-31 1994-08-02 Hoechst Celanese Corp Method of plating copper on polyphenylene sulfide substrate
JP2001104875A (en) * 1999-10-05 2001-04-17 Toyo Terumii Kk Plated resin parts for automobile exterior and its manufacturing method
JP2002293967A (en) * 2001-03-30 2002-10-09 Ichikoh Ind Ltd Method for producing urethane resin plated product

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100161359A1 (en) * 2008-12-18 2010-06-24 At&T Intellectual Property I, L.P. Risk Management for Cable Protection Via Dynamic Buffering
JP2014524977A (en) * 2011-06-29 2014-09-25 ヴァレオ セキュリテ アビタクル Selectively metallized plastic parts and corresponding manufacturing processes
CN107326414A (en) * 2017-05-11 2017-11-07 厦门建霖工业有限公司 A kind of plastic basis material chromium-free metal method
CN107326414B (en) * 2017-05-11 2020-05-15 厦门建霖健康家居股份有限公司 Plastic substrate chromium-free metallization method

Also Published As

Publication number Publication date
WO2008004558A1 (en) 2008-01-10

Similar Documents

Publication Publication Date Title
JP2008031555A5 (en)
JP2008031555A (en) Process for production of decoratively plated article by utilizing the impartation of electroconductivity to resin by sputtering, and hanging jig for fixing of resin molding
JP5177426B2 (en) Composition for etching treatment for resin molding
JP4808374B2 (en) Surface treatment method for metal molded products
EP2182090A1 (en) Housing And Method For Making The Housing
US20060042954A1 (en) Method for plating resin material
US20080003412A1 (en) Cover for a mobile device and method for making the cover
WO2008004315A1 (en) Process for production of decoratively plated articles by utilizing the impartation of electroconductivity to resin by sputtering
EP2108716A2 (en) Method for Electroplating a plastic substrate
JP5495369B2 (en) Resin plating method using ozone water treatment
JP5464749B2 (en) Resin plating method for syndiotactic polystyrene resin using ozone water treatment
CN108642481B (en) Process method for chemically precipitating nickel by plastic
TWI291322B (en) Method for manufacturing an EMI shielding element
JP3925724B2 (en) Surface treatment method for non-conductive materials
JP5875195B2 (en) Resin plating method using ozone water treatment
JPH0741956A (en) Improvement of adhesion of metal coating to article made of resin
JP4494309B2 (en) Method for improving corrosion resistance of copper-free nickel-chromium resin plating
JPH0537172A (en) Production of electromagnetic wave shield products and method for preventing electromagnetic breakage of plastic products
JPH05345987A (en) Treatment of plastic molding for electromagnetic shielding
Ijeri et al. Chromium-free etching and palladium-free plating of plastics
JP2000212792A (en) Production of partially plated plastic molding
CN113584545A (en) Electroplating method for surface of plastic part and product thereof
TW477162B (en) Manufacturing method of electronic product case for separating electromagnetic wave
JP2021172865A (en) Manufacturing method of plated component
JP2005105543A (en) Component around water use place and its manufacturing method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 06768182

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: RU

122 Ep: pct application non-entry in european phase

Ref document number: 06768182

Country of ref document: EP

Kind code of ref document: A1