WO2007125716A1 - 光学装置及び光学装置の製造方法 - Google Patents
光学装置及び光学装置の製造方法 Download PDFInfo
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- WO2007125716A1 WO2007125716A1 PCT/JP2007/056779 JP2007056779W WO2007125716A1 WO 2007125716 A1 WO2007125716 A1 WO 2007125716A1 JP 2007056779 W JP2007056779 W JP 2007056779W WO 2007125716 A1 WO2007125716 A1 WO 2007125716A1
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- Prior art keywords
- optical
- optical waveguide
- light
- waveguide cable
- core
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4212—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
Definitions
- the present invention relates to an optical device and a method for manufacturing an optical device.
- an optical device including an optical path conversion unit for bending (converting) an optical path of laser light has been considered.
- an optical path conversion unit for bending (converting) an optical path of laser light.
- a configuration in which a mirror surface is formed on an optical waveguide such as an optical fiber, a planar lightwave circuit (PLC) or an optical waveguide cap! / Speak.
- PLC planar lightwave circuit
- FIG. 12 shows a cross-sectional configuration of an optical waveguide cable 2B of a conventional optical cable.
- an optical waveguide cable 2B as an optical signal transmission path includes cladding layers 21 and 22 and a core layer 231.
- the mirror surface portion 24B is formed on the end face and has an angle of 45 ° with respect to the optical path.
- the mirror surface portion 24B has a dicing surface 241 in which the clad layers 21 and 22 and the core layer 231 are cut by dicing with a 45 ° blade.
- Laser light emitted from a VCSEL (Vertical Cavity Surface Emitting Laser) 311 is reflected by the dicing surface 241 and transmitted through the core layer 231. That is, optical path conversion is performed by reflection using the refractive index difference between air and the core layer 231 on the dicing surface 241.
- the laser light propagated in the core layer is reflected by the dicing surface and is incident on a PD (Photo Diode) (not shown).
- PD Photo Diode
- Patent Document 1 JP-A-1 312514
- Patent Document 2 JP-A 63-191111
- Patent Document 3 Japanese Patent Laid-Open No. 10-300961
- the mirror surface In order to prevent the above scattering loss, it is desired to smooth the mirror surface.
- a method of producing a mirror surface with laser light can be considered.
- the laser beam method has been unable to increase the accuracy of the mirror surface tilt angle.
- a dicing method may be considered in which dicing blades have a fine eye and the surface unevenness is reduced.
- fine dicing there is a risk of clogging of the blade when the optical waveguide material is a polymer or the like.
- scattering loss there is a demand for reduction of scattering loss in the processed surface on the light transmission surface (incident surface or output surface) in the optical waveguide other than the mirror surface of the optical waveguide, and in optical means other than the optical waveguide.
- An object of the present invention is to reduce scattering loss at an end face for reflection or transmission of optical means and to make the end face easily and at low cost.
- the optical means has a working surface for reflection or transmission of light
- a smooth coating is provided on the processed surface.
- a core as an optical waveguide
- the invention described in claim 3 is the optical device according to claim 2,
- the smoothing film has a refractive index that is the same as or substantially the same as the refractive index of the core.
- the invention described in claim 4 is an optical device according to claim 2 or claim 3;
- the core has a plurality of layers.
- the invention according to claim 5 is the optical waveguide device according to any one of claims 1 to 4, and the optical waveguide device according to claim 4,
- a light emitting means for emitting light to the smoothing film there are at least a light emitting means for emitting light to the smoothing film, a light receiving means for receiving light reflected by the smoothing film, and an optical transmission means for emitting or receiving light to the smoothing film. Both have one.
- a smoothing film forming step of forming an optical device by forming a smoothing film on the processed surface It is characterized by including.
- the invention described in claim 7 is the method of manufacturing an optical device according to claim 6,
- the optical means forming step is a step of forming a core as an optical waveguide and a clad covering the core as the optical means.
- the invention according to claim 8 is the method of manufacturing an optical device according to claim 7,
- the smoothing film is formed of a material having the same or substantially the same refractive index as that of the core.
- the invention described in claim 9 is the method for manufacturing an optical device according to claim 7 or 8,
- a plurality of cores are formed in the optical means forming step.
- the liquid material of the smoothing film is formed by any one of dripping on the processed surface, coating and spraying.
- the smoothing film has the same or substantially the same refractive index as that of the core, so that the scattering loss of the end face can be further reduced.
- the smoothing film can be easily and easily formed by either applying the liquid material of the smooth coating film to the processed surface, or applying or spraying. It can be formed with high accuracy.
- FIG. 1 is an external view of an optical cable 1 according to an embodiment of the present invention.
- FIG. 2 is a perspective view of a connection portion between the optical waveguide cable 2 and the transmission / reception subassembly 3 a in the connector 3.
- FIG. 3 is a cross-sectional view taken along the line ⁇ - ⁇ of the transmission / reception subassembly 3a of FIG.
- FIG. 4A is a cross-sectional view of the optical transmission portion of the optical waveguide cable 2.
- FIG. 4B is a cross-sectional view of the optical receiving portion of the optical waveguide cable 2.
- FIG. 5A is a view showing an optical waveguide cable in which the mirror surface portion 24 is not formed.
- FIG. 5B is a diagram showing the optical waveguide cable after the dicing surface 241 is formed.
- FIG. 5C is a diagram showing the optical waveguide cable after the mirror surface portion 24 is formed.
- FIG. 6A is a view showing an SEM image of a mirror surface portion on which only a dicing surface is formed.
- FIG. 6B is a view showing an SEM image of the mirror surface portion 24 on which the smooth film 242 is formed.
- FIG. 1 A first figure.
- FIG. 8 is a diagram showing the amount of incident light on the PD 312 in an optical waveguide cable having a mirror surface portion on which only a dicing surface is formed and an optical waveguide cable 2 having a mirror surface portion 24 on which a smooth coating 242 is formed.
- FIG. 9 is a cross-sectional view of an optical waveguide cable 2 using an optical fiber 7.
- FIG. 10 is a cross-sectional view of the optical waveguide cable 8.
- FIG. 11 is a cross-sectional view of the reflecting portion 9 and the optical waveguide cable 2A.
- FIG. 12 is a cross-sectional view of an optical waveguide cable 2B of a conventional optical cable.
- FIG. 1 shows the configuration of the optical cable 1 in the present embodiment.
- an optical cable 1 connects two printed wiring boards 5 and is configured to include connectors 3 at both ends of an optical waveguide cable 2 as an optical waveguide device.
- Connector 3 is attached to socket 6 mounted on printed circuit board 5, and IC (Integrated Circuit) 4 is mounted on printed circuit board 5!
- the optical waveguide cable 2 is formed in a film shape, and the optical waveguides provided in the optical waveguide cable 2 function as a transmission path for light exchanged between the connectors 3 provided at both ends.
- the connector 3 includes a transmission / reception subassembly 3a that performs photoelectric conversion.
- the transmission / reception subassembly 3a converts an electrical signal input from the printed wiring board 5 into light, and the other end side of the optical signal is transmitted through the optical waveguide cable 2. Sends light to connector 3 located at. Alternatively, light transmitted from the connector 3 at the other end via the optical waveguide cable 2 is received, converted into an electrical signal, and output to the printed wiring board 5.
- FIG. 2 shows a perspective configuration of a connection portion between the optical waveguide cable 2 and the transmission / reception subassembly 3 a in the connector 3.
- FIG. 3 shows a cross-sectional configuration of the transmission / reception subassembly 3a in FIG.
- the end portion of the optical waveguide cable 2 is between the mounting surface of the sub-board 32 and the light emitting element 31a as the light emitting means or the light receiving element 31b as the light receiving means. Is arranged.
- the optical waveguide cable 2 is bonded along the mounting surface so that the film surface on the clad layer 21 side contacts the sub-substrate 32.
- the optical waveguide cable 2 is formed of clad layers (cladding) 21 and 22 and a core layer (core) 23, and a mirror surface portion 24 is provided at an end thereof. .
- the outer peripheral surface is covered with a non-illustrated resin film.
- the resin film acts as equipment and a force bar, and is made of a flexible material such as polyimide or PET (Poly Ethylene Terepthalate).
- the clad layers 21 and 22 and the core layer 23 are made of polyimide, polysilane, epoxy, or acrylic. It is made up of the system's grease.
- the core layer 23 is formed linearly between the cladding layers 21 and 22 and constitutes an optical waveguide.
- the material of the core layer 23 is adjusted to have a refractive index different from that of the cladding layers 21 and 22.
- the core layer as the transmission path of the light emitted from the light emitting element 3la is the core layer 231 and the core layer as the transmission path of the light received by the light receiving element 31b is the core layer 232. To do.
- the mirror surface portion 24 reflects the light transmitted through the core layer 23 and guides it to the light receiving element 31b located above the optical waveguide cable 2, or reflects the light emitted from the light emitting element 31a.
- This is an optical path changing means that leads to the core layer 23.
- the optical waveguide of the optical waveguide cable 2 refers to a light transmission path including the optical path of the core layer 23 and the cladding layer 22 guided by the mirror surface portion 24.
- the mirror surface portion 24 is formed by cutting the end surface of the optical waveguide cable 2 with a blade at an inclination angle such as 45 degrees to form a smooth film 242.
- the transmission / reception subassembly 3a includes a light emitting element 31a, a light receiving element 31b, and an IC 33 mounted on a sub board 32. Mutual conversion of signal and light input / output via optical waveguide cable 2 is performed.
- the light emitting element 3 la includes a VCSEL 311 as a photoelectric conversion element that converts an electrical signal into an optical signal. As shown in FIG. 3, the light emitting element 3 la emits light corresponding to the electrical signal input from the printed wiring board 5 as Z ⁇ Flashes in the Y direction. The light emitted from the light emitting element 31a is converted in the optical path by the mirror surface portion 24 and transmitted in the W ⁇ X direction.
- the photoelectric conversion element in the light emitting element 3 la is not limited to VCSEL, but may be another photoelectric conversion element that converts an electrical signal into an optical signal.
- the light receiving element 3 lb includes a PD 312 as a photoelectric conversion element that converts an optical signal into an electric signal, and is transmitted in the X ⁇ W direction in the core layer 23 of the optical waveguide cable 2 and passes through the mirror surface portion 24. Light that has undergone optical path conversion in the Y ⁇ Z direction is received and an electrical signal is generated according to the amount of light received.
- the photoelectric conversion element in the light receiving element 31b is not limited to the PD, but may be another photoelectric conversion element that converts an electrical signal into an optical signal. In the present embodiment, an example will be described in which one light transmission / reception subassembly 3a includes one light emitting element 31a and one light receiving element 31b to perform bidirectional optical transmission.
- a configuration may be adopted in which a plurality of elements 31b are provided and bidirectional transmission is performed on a plurality of paths, or only the light emitting element 31a is received by the transmission / reception subassembly 3a at one end of the optical cable 1, and the transmission / reception subassembly 3a at the other end receives light. It may be configured to transmit light in one direction with only element 31b.
- the height position of the photoelectric conversion element 31 is determined according to the height from the mounting surface of the optical waveguide cable 2. That is, the photoelectric conversion element 31 is arranged with a space between the mounting surface of the sub-substrate 32 via the bump 34, and the height of the photoelectric conversion element 31 is the height of the optical waveguide cable 2. The height is adjusted to be higher than the thickness. Further, the positions of the light emitting element 31a and the light receiving element 31b on the board mounting surface are based on the installation position of the optical waveguide cable 2 on the sub board 32 on the mounting surface of the optical waveguide cable 2 and the light emitting element 31a. The optical axes of light transmitted between the VCSEL 311 and the PD 312 of the light receiving element 3 lb are determined so as to coincide with each other.
- the height position of the photoelectric conversion element 31 can be adjusted by changing the size of the bump 34. That is, by adjusting the bumps 34, it becomes possible to control the optical path distance between the optical waveguide cable 2, the light emitting element 31a, and the light receiving element 31b, and the optical waveguide cable 2, the light emitting element 31a, and the light receiving element 31b.
- the distance can be determined so as to maximize the optical coupling efficiency between the two.
- the bump 34 is formed of a conductor, and electrically connects the electrode of the photoelectric conversion element 31 and the electrode (each electrode is not shown) provided on the sub-substrate 32.
- a metal such as Au is applicable as the bump 34.
- a gap formed at the interface between the optical waveguide cable 2, the light emitting element 31a, and the light receiving element 31b is filled with an optical path forming material 35.
- the optical path forming material 35 is made of a photorefractive medium such as a photocured resin, and is relatively large and has a refractive index with respect to air, such as a refractive index similar to that of the cladding layer 22 of the optical waveguide cable 2. The material is selected.
- the optical path forming member 35 can be controlled so as to suppress the spread of the emission diameter of light passing through the optical path between the optical waveguide cable 2 and the light emitting element 31a and the light receiving element 31b. Separation between sub-board 32 and optical waveguide cable 2
- the reinforcing member 36 for supporting the optical waveguide cable 2 is provided for the part.
- FIG. 4A shows a cross-sectional configuration of the optical transmission portion of the optical waveguide cable 2.
- FIG. 4B shows a cross-sectional configuration of the optical receiving portion of the optical waveguide cable 2.
- a mirror surface portion 24 is formed on the end faces of the clad layers 21 and 22 and the core layer 231 as optical means over the optical transmission portion of the optical waveguide cable 2.
- the mirror surface 24 is angled 45 ° with respect to the optical path.
- the mirror surface portion 24 has a dicing surface 241 and a smooth coating 242 formed on the dicing surface 241.
- the dicing surface 241 as a processed surface is a surface formed by dicing, and has a rough surface with irregularities on the surface.
- the smoothing film 242 is a film that smooths the rough surface of the dicing surface 241.
- the smoothing film 242 is made of, for example, a refractive index adjusting agent, a polyimide resin (for example, fluorinated polyimide), a polysilane resin, or an epoxy resin (for example, an ultraviolet curable resin).
- the material of the smooth coating 242 is a liquid material having viscosity as will be described later.
- the smoothing film 242 has a refractive index comparable to that of the core layer 23 (231, 232) optically. This is to eliminate the refractive index difference between the dicing surface 241 and the smooth coating film and to reduce scattering on the dicing surface 241.
- the refractive index of the smooth film 242 is the same as the refractive index of the core layer or the refractive index. Set to about 1.51.
- the laser light L11 emitted from the VCSEL 311 is reflected at a right angle by the smoothing film 242 on the mirror surface, and then guided into the core layer 231 as reflected light L12. Is transmitted.
- a mirror surface is formed on the end faces of the cladding layers 21, 22 and the core layer 232. Part 24 is formed.
- the laser beam L21 propagated in the core layer 232 is reflected at a right angle by the smooth coating 242 on the mirror surface, and then guided to the PD 312 as the reflected beam L22. Is done.
- FIG. 5A shows an optical waveguide cable in which the mirror surface portion 24 is not formed.
- Figure 5B shows the dicing surface 24 1 shows an optical waveguide cable after formation.
- FIG. 5C shows the optical waveguide cable after the mirror surface portion 24 is formed.
- an optical waveguide cable having cladding layers 21 and 22 and core layers 23 (231 and 232) is produced.
- the clad layer 22 is formed on a substrate such as silicon by spin coating and heat treatment.
- a core film on the entire surface is formed on the clad layer 22 by spin coating and baking, and a core layer 23 having a waveguide pattern is formed by photolithography.
- the clad layer 21 is formed on the clad layer 22 and the core layer 23 by spin coating, baking, or the like.
- the clad layers 21 and 22 and the core layer 23 are peeled off as a substrate for the optical waveguide cable.
- This optical waveguide cable is formed into a flexible film.
- the formed optical waveguide cable is cut by dicing with a blade having an end face force of 45 ° to form a dicing surface 241.
- the dicing surface 241 has a rough surface force having an inclination of 45 ° with respect to the optical path (core layer 23).
- the liquid material of the smooth coating 242 is put on the dicing surface 241.
- the position of the dicing surface 241 is adjusted so as to be perpendicular or oblique to the direction in which the material of the smoothing film 242 is drawn, and the liquid material of the smoothing film 242 is drawn up.
- the dicing surface 241 is covered.
- the liquid material of the smooth film 242 is an ultraviolet curable resin
- the liquid material covering the dicing surface 241 is cured by being irradiated with ultraviolet light, and further subjected to heat treatment to be stabilized, thereby being smooth.
- the optical film 242 is formed to form the optical waveguide cable 2.
- the formed optical waveguide cable 2 is attached to the transmission / reception subassembly 3a of the connector 3 to form the optical cable 1.
- the material of the smooth coating 242 is a liquid material having viscosity and adhesiveness, and preferably has a low viscosity. For example, if the material has a high viscosity such as 770 [cP], the material (smooth coating 242) rises on the dicing surface 241 and the function of the mirror surface is reduced.
- the smoothing film 242 is formed before or after the optical waveguide cable is mounted on the optical cable 1. However, in order to mount the optical waveguide cable at the optimum position, it is desirable to do it during the mounting.
- the smooth coating 242 may be formed by other methods such as a coating method (for example, spin coating method) or a spraying method, which is not limited to the formation by dropping the material.
- FIGS. 6A and 6B show a comparison result of SEM (Scanning Electron Microscope) images on the surface of the mirror surface.
- Figure 6A shows a SEM image of the mirror surface where only the dicing surface is formed.
- Figure 6B shows the mirror surface with smooth coating 242
- FIG. 7 shows the roughness of the mirror surface portion on which only the dicing surface is formed and the mirror surface portion 24 on which the smooth coating 242 is formed.
- FIG. 8 shows the amount of incident light on the PD 312 in the optical waveguide cable having the mirror surface portion forming only the dicing surface and the optical waveguide cable 2 having the mirror surface portion 24 in which the smoothing film 242 is formed.
- the intensity from the VCSEL 311 + The reflected light that was transmitted through the core layer 23 by emitting a laser beam of 2.7 [dBm] and reflecting the mirror surface was measured with a PD.
- Loss of light quantity due to reflection on the mirror surface part where the incident light quantity to the PD of the optical waveguide cable 2 of the mirror surface part 24 where the smooth film 242 is formed is larger than the optical waveguide cable of the mirror face part where only the dicing surface is formed
- the quantity is improved by 5.3 [dB].
- the optical waveguide cable 2 has the smooth coating 242 on the dicing surface 241 of the core layer 23 and the cladding layers 21 and 22, thereby reducing the scattering loss of the mirror surface portion 24.
- the mirror surface portion 24 can be easily and inexpensively produced.
- the smooth coating 242 has a refractive index comparable to that of the core layer 23, the scattering loss of the mirror surface portion 24 can be further reduced.
- optical cable 1 since the optical cable 1 includes the VCSEL 311 and the PD 312, optical transmission with reduced scattering loss of the mirror surface portion 24 can be easily realized.
- the smooth coating 242 can be easily and highly accurately formed by any one of the method of applying the material of the smooth coating 242 to the dicing surface, coating, and spraying (spraying).
- the force using the VCSEL 311 as the configuration in which the laser light is incident on the optical waveguide cable 2 and the force using the PD 312 as the configuration for receiving the laser light from the optical waveguide cable 2 is not limited thereto. Is not to be done.
- an optical fiber 7 as an optical transmission means may be used.
- FIG. 9 shows a cross-sectional configuration of the optical waveguide cable 2 using the optical fiber 7.
- the optical fiber 7 includes a core wire-shaped core 71 and an annular shape that covers the core 71 as a center.
- the clad 72 formed on the cover 72 and a coating layer (not shown) covering the clad 72 are used, and the coating layer is peeled off at the tip portion.
- Laser light L3 emitted from a light source (not shown) at the end of the optical fiber 7 is incident on the optical waveguide cable 2 via the core 71 of the optical fiber 7, reflected by the smooth film 242 of the mirror surface portion 24, and core layer. 23 is transmitted.
- the laser light emitted from the light source (not shown) of the optical waveguide cable 2 is transmitted through the core layer 23 and the smooth film 242 on the mirror surface portion 24.
- the light is reflected by the light and incident on the core 71 of the optical fiber 7 to be transmitted.
- the optical waveguide cable 2 has a structure in which one core layer is provided.
- the present invention is not limited to this.
- the optical waveguide cable may be provided with two core layers.
- FIG. 10 shows a cross-sectional configuration of the optical waveguide cable 8.
- the optical waveguide cable 8 includes clad layers 81, 82, 83, a core layer 84 provided between the clad layers 81 and 82, and a core layer 85 provided between the clad layers 82 and 83.
- a mirror surface portion 86 having an angle of 45 ° with respect to the optical path is formed.
- the mirror surface portion 86 has a dicing surface 861 and a smooth film 862 formed on the dicing surface 861.
- the laser light L 4 emitted from the VCSEL 311 is reflected by the smoothing film 862 of the mirror surface portion 86, and the reflected light is transmitted through the core layer 84.
- the laser beam L5 from which the VCSEL 313 force is also emitted is reflected by the smooth film 862 of the mirror surface portion 86, and the reflected light is guided into the core layer 85 and transmitted.
- the core layer is formed of two layers, optical transmission can be performed with two optical waveguides.
- the optical waveguide cable may have three or more core layers.
- the mirror surface portion 24 having the dicing surface 241 and the smooth coating 242 is provided on the optical waveguide cable 2, but the present invention is not limited to this.
- the optical waveguide cable 2 having the mirror surface portion 24 having the dicing surface 241 and the smooth coating 242 is applied to the optical cable 1 as an optical transceiver.
- the present invention is not limited to this. Applicable to all optical devices that use the reflection of the core layer and air.
- the force in which the mirror surface portion 24 is configured to have a 45 ° angle with respect to the optical path is not limited to this.
- the mirror surface portion may have an angle other than 45 ° (for example, 0 °, 10 °, 30 °, 90 °) with respect to the optical path.
- FIG. 11 shows a cross-sectional configuration of the reflecting portion 9 and the optical waveguide cable 2A.
- the reflection part 9 as an optical means includes a reflection part main body 91 and a mirror surface part 92.
- the reflector main body 91 is made of quartz, polymer, or the like.
- the material of the reflecting portion main body 91 is appropriately set to have a refractive index that reflects light incident from the air.
- the mirror surface portion 92 has a dicing surface 921 having an angle of 45 ° with respect to the optical path, and a smooth film 922 formed on the dicing surface 921.
- the optical waveguide cable 2B includes clad layers 21 and 22 and a core layer 23, and has end face portions 24A on the end faces of the clad layers 21 and 22 and the core layer 231.
- the end surface portion 24A has a dicing surface 241A having an angle of 90 ° with the optical path, and a smoothing film 242A formed on the dicing surface 241A.
- the laser light L61 emitted from the VCSEL 314 is reflected on the surface of the smoothing film 922 of the reflecting section 9 and becomes reflected light L62.
- the reflected light L62 is incident through the end face portion 24A of the optical waveguide cable 2A and transmitted through the core layer 23. For this reason, the scattering loss at the dicing surfaces 921 and 241A is reduced.
- the light transmitted through the core layer of the optical waveguide cable 2A is emitted through the end face portion 24A.
- the emitted light is reflected by the surface of the smooth film 922 of the reflecting portion 9 and received by the PD. For this reason, the scattering loss at the dicing surfaces 921 and 241A is reduced.
- the optical waveguide cable 2 has the mirror surface portion 24
- the present invention is not limited to this.
- a mirror surface portion in which a metal film (eg, gold, silver, aluminum) is vapor-deposited may be further provided on the smooth film 242 formed on the surface 241.
- the scattering loss can be further reduced as compared with the configuration having the mirror surface portion 24 having the dicing surface 241 and the smooth coating 242.
- the clad layers 21 and 22 and the core layer 23 of the optical waveguide cable 2 are used as the optical means having the dicing surface and the smoothing film thereof is described, but the present invention is not limited to this. It is not something.
- an optical fiber, a planar lightwave circuit, or the like may be used as an optical means having a dicing surface and a smooth coating film.
- the force described for the optical waveguide cable 2 having the dicing surface 241 as the processing surface is not limited to this.
- a surface that has been cut with a laser, microtome, or the like may be used as a carved surface!
- the optical device and the manufacturing method of the optical device according to the present invention are suitable for the device used for optical communication and the manufacturing method thereof.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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US12/225,629 US20090067799A1 (en) | 2006-04-26 | 2006-04-26 | Optical Device and Optical Device Manufacturing Method |
EP07740217A EP2012154A1 (en) | 2006-04-26 | 2007-03-29 | Optical device and optical device manufacturing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006-122102 | 2006-04-26 | ||
JP2006122102A JP2007293108A (ja) | 2006-04-26 | 2006-04-26 | 光学装置及び光学装置の製造方法 |
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WO2007125716A1 true WO2007125716A1 (ja) | 2007-11-08 |
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PCT/JP2007/056779 WO2007125716A1 (ja) | 2006-04-26 | 2007-03-29 | 光学装置及び光学装置の製造方法 |
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US (1) | US20090067799A1 (ja) |
EP (1) | EP2012154A1 (ja) |
JP (1) | JP2007293108A (ja) |
KR (1) | KR100973050B1 (ja) |
CN (1) | CN101410741A (ja) |
WO (1) | WO2007125716A1 (ja) |
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US8090266B2 (en) * | 2007-11-26 | 2012-01-03 | Fujitsu Limited | Optically coupling components of a transceiver |
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JP5109982B2 (ja) | 2008-10-09 | 2012-12-26 | 日立電線株式会社 | ミラー付き光伝送体の製造方法 |
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Also Published As
Publication number | Publication date |
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CN101410741A (zh) | 2009-04-15 |
KR20080094939A (ko) | 2008-10-27 |
US20090067799A1 (en) | 2009-03-12 |
JP2007293108A (ja) | 2007-11-08 |
KR100973050B1 (ko) | 2010-07-29 |
EP2012154A1 (en) | 2009-01-07 |
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