WO2007125663A1 - Antivibrateur de type ressort a gaz et procede de commande du dispositif - Google Patents

Antivibrateur de type ressort a gaz et procede de commande du dispositif Download PDF

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Publication number
WO2007125663A1
WO2007125663A1 PCT/JP2007/052300 JP2007052300W WO2007125663A1 WO 2007125663 A1 WO2007125663 A1 WO 2007125663A1 JP 2007052300 W JP2007052300 W JP 2007052300W WO 2007125663 A1 WO2007125663 A1 WO 2007125663A1
Authority
WO
WIPO (PCT)
Prior art keywords
control
vibration isolation
flow rate
valve
output
Prior art date
Application number
PCT/JP2007/052300
Other languages
English (en)
Japanese (ja)
Inventor
Kenji Kawashima
Toshiharu Kagawa
Original Assignee
Tokyo Institute Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Institute Of Technology filed Critical Tokyo Institute Of Technology
Publication of WO2007125663A1 publication Critical patent/WO2007125663A1/fr

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means

Definitions

  • the present invention relates to a gas panel type vibration isolator and a vibration isolation method using the vibration isolation device.
  • the gas panel type vibration isolator is used for vibration control of a semiconductor manufacturing apparatus or an inspection apparatus for measuring a semiconductor line width.
  • a conventional gas panel type vibration isolator has a pressure control type valve such as a nozzle flapper type pneumatic servo valve to control the internal pressure of a gas panel such as an air panel, and feeds back the displacement and acceleration of the air panel. Controlled.
  • a method of feeding back the pressure in the air panel has been proposed.
  • Japanese Laid-Open Patent Publication No. 2 005-2 8 2 6 96 discloses a vibration isolation mount device intended to improve pressure control resolution.
  • Pressure control type valves such as nozzle flapper valves have a high linearity of the valve opening with respect to the input voltage, and when used in a vibration isolator, the pressure in the air spring has a first-order lag relationship with the input 1 Next delay system can be constructed. Therefore, although the pressure control type valve is said to be suitable for pressure control in the air spring of the vibration isolator, there is a problem that running cost is increased due to a large exhaust flow rate.
  • the applicant of the present application is a pressure differential meter that has been developed and publicly known.
  • Japanese Patent Laid-Open No. 2000-098 991 is proposed to construct a cascade control system. Thereby, even if a flow rate control type valve such as a spool type servo valve is used, the vibration isolation table of the vibration isolation device can be lifted and the exhaust flow rate can be suppressed.
  • a configuration and control method are the same as those of the present application.
  • Japanese Patent Application No. 2 0 0 4-3 3 3 6 3 8 by the applicant Japanese Patent Laid-Open No. 2 0 0 6-1 4 4 8 5 9) It is also described in.
  • the pressure differential meter described in Japanese Patent Laid-Open No. 2 0 0 5-9 8 9 9 1 can measure the pressure change in the container to be measured with low noise and high resolution.
  • the output (flow rate) relative to the input voltage is not linear (linear graph shown in Fig. 9), as shown by the multiple black dot plots in Fig. 9.
  • a so-called “dead zone” region Z in which the output change with respect to the input change is zero or very small around the origin (input and output are zero).
  • This dead zone is a region that is difficult to control because the change in output is small when the input is greatly changed compared to other regions.
  • the output fluency of the spool valve when it is used in a vibration isolator is usually included in this dead zone. Therefore, when the spool valve is used, the dead zone is sufficiently compensated for by cascade control using a pressure differential meter. However, the anti-vibration performance remained at the same level as when a pressure-controlled valve was used, and further improvement of the anti-vibration performance was desired. In addition, when the load fluctuation due to environmental changes of the vibration isolator is severe, specifically when the speed of the vibration isolation table cannot be ignored, the cascade control that feeds back the displacement and acceleration may not be sufficient. . Therefore, from this point, a vibration isolation device that uses a flow control valve and has a higher vibration isolation performance than before is desired. Summary of the Invention
  • the present invention maintains a merit that the exhaust flow rate is suppressed by using a flow control type valve, and a gas panel type vibration isolator capable of highly accurate control with higher responsiveness than the conventional one and a control method therefor.
  • the purpose is to provide
  • the present invention provides an anti-vibration table, a gas panel that supports the anti-vibration table, a flow control valve that supplies and exhausts air to the gas panel, and the anti-vibration table
  • the control device performs cascade control including a position feedback loop that uses the output of the position detection means, and an acceleration feedback loop that uses the output of the acceleration detection means.
  • the present invention provides a vibration isolator that performs model following control that follows a reference model that compensates for nonlinearity of the flow control valve.
  • an output flow rate of the flow control type valve has a linear relationship with an input voltage.
  • the vibration isolation device may further include a pressure differential meter that detects a pressure change in the gas panel, and in that case, the control device may include a pressure differential measured by the pressure differential meter in the model following control. Value Control is performed to follow the pressure differential value obtained by multiplying the output flow rate of the reference model by a predetermined coefficient.
  • the vibration isolation device may further include a flow rate detection unit that detects an output flow rate of the flow rate control type valve. In that case, the control device is measured by the flow rate detection unit in the model following control. Control the output flow rate to follow the output flow rate of the reference model.
  • the follow-up control includes speed feedback control for feeding back the speed of the vibration isolation table.
  • the flow control type valve is a spool valve.
  • an anti-vibration table a gas panel that supports the anti-vibration table, a flow control valve that supplies and exhausts gas to the gas panel, Position detecting means for detecting a position, acceleration detecting means for detecting the acceleration of the vibration isolation table, and a control device for controlling the flow control valve based on outputs of the position detecting means and the acceleration detecting means; And a cascade control including a position feedback loop using an output of the position detection means and an acceleration feedback loop using an output of the acceleration detection means, and the flow rate
  • a control method for a vibration isolator characterized by performing model following control that follows a reference model that compensates for nonlinearity of a control valve.
  • an output flow rate of the flow control type valve has a linear relationship with an input voltage.
  • the follow-up control includes speed feedback control for feeding back the speed of the vibration isolation table.
  • FIG. 1 is a diagram showing a preferred configuration example of the vibration isolator according to the first embodiment of the present invention.
  • Fig. 2 is a diagram showing the detailed structure of the pressure differential meter shown in Fig. 1.
  • Fig. 3 is a control block diagram of a conventional vibration isolator using a nozzle flapper valve.
  • FIG. 4 is a control block diagram of the vibration isolator of the first embodiment, but does not include tracking control.
  • FIG. 5 is a control block diagram of the vibration isolator according to the first embodiment, including tracking control.
  • FIG. 6 is a diagram illustrating a preferred configuration example of the vibration isolation device according to the first embodiment of the present invention.
  • FIG. 7 is a control block diagram of the vibration isolator of the second embodiment
  • FIG. 8 shows the acceleration waveform of the vibration isolator during steady operation with the vibration isolator of the first embodiment and the conventional vibration isolator. It is a graph to compare with the vibration device,
  • Fig. 9 is a graph showing the relationship of the output flow rate to the input voltage in a normal spool valve. Detailed description
  • FIG. 1 is a diagram schematically showing a schematic configuration of a gas panel type vibration isolator 10 according to the first embodiment of the present invention.
  • the vibration isolator 10 is a typical gas spring, an air spring 1 '2 having a buffer tank 1 2 a and a bellows portion 1 2 b, and a vibration isolation table disposed on the air spring 1 2.
  • 1 4 ⁇ Vibration isolation table 14 Position detection means to detect displacement and acceleration of 4 respectively, ie position sensor 1 6 and acceleration detection means, ie acceleration sensor 1 8 To do.
  • the vibration isolator 10 includes an air supply source 2 0 that supplies air to the air panel 1 2, and a flow control valve 2 that controls the flow of air from the air supply source 20 and sends it to the air spring 12. 2 and.
  • a suitable flow control valve is a spool valve.
  • the vibration isolator 10 has a pressure differential meter 24 developed by the same applicant as the present application in order to measure the pressure in the buffer tank portion 12 a of the
  • the vibration isolator 10 has a control device 26 that performs feedback control, which will be described later, and the control device 26 has an appropriate amplification degree and time constant.
  • the output of the acceleration sensor 1 8 passes through the filter 2 8 b and is used to adjust the valve opening of the spool valve 2 2.
  • the output of the position sensor 16 is compared with the set displacement in the comparator 30 through the filter 28a, and the result, that is, the deviation signal passes through the PI compensator 32 to adjust the valve opening of the spool valve. used.
  • the output of the pressure differential meter 24 is used for adjusting the valve opening of the spool valve through the filter 28 c and the I compensator 34, which will be described later.
  • the basic structure of the pressure differentiator 2 is the same as that described in Japanese Patent Laid-Open No. 2 0 0 5-9 8 9 9 1.
  • an isothermal pressure vessel 2 4 a Measured air spring 1 2 Buffer tank part 1 2 of the tank 1 2 a and the isothermal pressure vessel 2 4 a are connected to the communication path (in the example shown, multiple slits) 2 4 b and the isothermal pressure vessel 2 4 c and a differential pressure gauge (diaphragm type differential pressure gauge in the illustrated example) 2 4 c for detecting the pressure difference between the inside of the buffer tank 1 2 a and the inside of the buffer tank 1 2 a.
  • a differential pressure gauge diaphragm type differential pressure gauge in the illustrated example
  • the pressure differential value in the buffer tank 1 2 a can be obtained with low noise and high resolution.
  • An example in which a pressure differential meter is applied to an air panel type vibration isolator is shown in Japanese Patent Application No. 2 0 0 4-3 It is also described in the specification of 3 3 6 3 8 (Japanese Patent Laid-Open No. 2 0 06-1 4 4 8 5 9).
  • FIG. 1 a control block diagram of an air spring type vibration isolator using a conventional nozzle flapper type suppo valve is shown in FIG.
  • a pressure control type valve such as a nozzle flapper valve
  • the pressure P in the air panel has a first-order lag relationship with the input voltage u
  • the pressure P and the vibration isolation table displacement X are as shown in Fig. 3.
  • the displacement X and acceleration d 2 x / dt 2 of the vibration isolation table are measured using a displacement meter and an accelerometer, respectively, and for displacement X, PI control with respect to the target value, acceleration d 2 x / dt
  • the feedback control is performed by the signal multiplied by the acceleration feedback gain Ka.
  • K and T are the nozzle flapper output gain and time constant, respectively, and m, A, k and b are the mass of the load on the air panel, the cross-sectional area of the part in the air panel that supports the load, and the air Panel spring constant and viscosity coefficient.
  • FIG. 4 shows a spool valve proposed by the applicant of the present application in Japanese Patent Application No. 2 0 0 4-3 3 3 6 3 8 (Japanese Patent Laid-Open No. 2 0 0 6 1 4 4 8 5 9).
  • a control block diagram of an air panel vibration isolator using a pressure differential meter. 4 differs from FIG. 3 in the part surrounded by a broken line, and the other parts may be the same as in FIG. R, 0 and V are the gas constant, the absolute temperature of the gas and the volume of the air panel, respectively.
  • the feature of Fig. 4 is that it has a pressure differential feedback loop in addition to the conventional acceleration and position feedback loop.
  • FIG. 5 is a diagram showing a control block of the vibration isolator 10 according to the first embodiment of the present invention using a spool valve and a pressure differential meter.
  • FIG. 5 differs from FIG. 3 or FIG. 4 in the portion surrounded by the alternate long and short dash line, and the other portions may be the same as in FIG. 3 or FIG.
  • the feature of the first embodiment is that, in addition to having a pressure differential value feedback loop as in FIG. 4, the reference model following control is performed in the feedback of the pressure differential value.
  • the output flow rate G with respect to the input voltage u of the spool valve 2 2 exhibits non-linearity, in other words, the output change with respect to the input change does not substantially exist or there is a minute “dead zone”. . Therefore, in the present invention, in order to improve the dynamic characteristics of the spool valve in this dead zone, the feedback value (signal) of the pressure differential value The relationship between the input voltage and the output flow rate has a linearity that passes through the zero point ( Reference model G re This is controlled to follow the value multiplied by a predetermined coefficient to compensate for the nonlinearity of the spool valve.
  • G KV ⁇ u
  • the fine pressure fluctuation in the buffer tank 1 2 a of the air spring 1 2 is detected by a high-resolution pressure differential meter, and the feedback value of the tracking control system is applied to the obtained value (signal). Therefore, highly accurate and highly responsive pressure control can be realized, and as a result, a vibration isolator having high vibration isolation performance can be obtained while suppressing the exhaust gas flow rate.
  • K ad , Kadl, and T ad are the proportional gain, integral gain, and time constant of the tracking control, respectively.
  • the value (signal) obtained by multiplying the vibration isolation table speed dx / dt by a coefficient is used as a feedback value differential pressure value.
  • the speed signal can be obtained by integrating the acceleration signal, differentiating the displacement signal, or by a speed sensor (not shown) provided separately.
  • the differential value of the pressure in the air panel is measured using a pressure differential meter and the pressure differential value is fed back.
  • the pressure differential meter is used.
  • the output flow rate of the spool valve is used for feedback instead of the pressure differential value.
  • the gas panel type vibration isolator 10 0 ′ according to the second embodiment shown in FIG. 6 has a flow rate of the spool valve 2 2 instead of the pressure differential meter 2 4 of the vibration isolator 10 according to the first embodiment. It has a flow meter 3 6 to measure
  • the other components of the vibration isolator 1 0 ′ shown in FIG. 6 may be the same as those of the first vibration isolator 1 0, and thus description thereof is omitted.
  • FIG. 7 is a control block diagram of the second vibration isolator 1 0 ′.
  • the flow rate G measured by the flow meter 36 is compared with the flow rate model G re e i having ideal linearity as the reference model described above. Except that the value to be compared is replaced with the flow rate from the pressure differential value, the other concepts may be the same as described with reference to FIG. Therefore, in the second embodiment, control is performed to control the flow rate G to suppress the displacement and acceleration changes of the vibration isolation table 14 to a minimum.
  • the flow meter 3 6 for example, there is a highly responsive flow meter capable of measuring the flow rate of an unsteady flow fluid as described in Japanese Patent Laid-Open No. 2000-077 3 27. I like it.
  • This example relates to a vibration isolator using a spool valve and a pressure differential meter corresponding to the first embodiment described above.
  • the main specifications of the vibration isolator were as follows.
  • the steady-state exhaust flow rate was 0.75 N 1 / min in the vibration isolator according to the first embodiment.
  • the steady exhaust flow rate was 16.7 N1 / min, so the consumption flow rate can be significantly reduced to approximately 1/22.
  • FIG. 8 is a graph comparing acceleration waveforms of the vibration isolation table during steady operation between the vibration isolation device using the spool valve and the vibration isolation device using the nozzle flapper valve according to the first embodiment of the present invention.
  • the solid line L 1 shows the former acceleration waveform
  • the broken line L 2 shows the latter acceleration waveform.
  • the fluctuation range of the acceleration is generally smaller than that using the conventional nozzle flapper valve, and exhibits excellent vibration isolation performance. I understand that.
  • the flow control type valve The exhaust flow rate can be remarkably reduced using conventional and the non-linearity of the flow control type valve can be compensated by applying a control system that follows the reference model. Therefore, a vibration isolator having a low running cost and a high vibration isolation performance can be obtained.
  • the follow-up control is advantageously performed on the pressure differential value in the air spring detected using a pressure differential meter capable of high resolution measurement. Alternatively, follow-up control can be performed on the output flow rate of the flow control type valve.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Feedback Control In General (AREA)

Abstract

La présente invention concerne un oscillateur à vibrations qui comprend un distributeur à tiroir cylindrique et un différentiateur de pression. Afin d'améliorer les caractéristiques dynamiques du distributeur à tiroir cylindrique dans la zone morte, l'antivibrateur est commandé de manière à ce que la valeur de retour de la valeur du différentiel de pression suive un modèle de référence possédant une linéarité telle que la relation entre une tension d'entrée et un écoulement de sortie passe par un point zéro afin de compenser la non linéarité du distributeur à tiroir cylindrique.
PCT/JP2007/052300 2006-04-28 2007-02-02 Antivibrateur de type ressort a gaz et procede de commande du dispositif WO2007125663A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-126082 2006-04-28
JP2006126082A JP4113960B2 (ja) 2006-04-28 2006-04-28 気体バネ式除振装置及び該装置の制御方法

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WO2007125663A1 true WO2007125663A1 (fr) 2007-11-08

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102979850A (zh) * 2011-09-07 2013-03-20 纬创资通股份有限公司 制备隔振系统的方法及其电子装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5051450B2 (ja) * 2007-12-03 2012-10-17 特許機器株式会社 空気圧式除振装置
JP5064316B2 (ja) * 2008-07-01 2012-10-31 特許機器株式会社 除振装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000154843A (ja) * 1998-11-18 2000-06-06 Canon Inc 除振装置
JP2000284832A (ja) * 1999-03-31 2000-10-13 Komatsu Ltd 温度制御装置及び同装置のバルブ制御部
JP2002364702A (ja) * 2001-06-12 2002-12-18 Canon Inc 除振装置およびそれを有する半導体製造装置
JP2005147318A (ja) * 2003-11-18 2005-06-09 Tokkyokiki Corp アクティブ振動制御装置及びシステム
JP2005172135A (ja) * 2003-12-11 2005-06-30 Canon Inc 除振マウント装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000154843A (ja) * 1998-11-18 2000-06-06 Canon Inc 除振装置
JP2000284832A (ja) * 1999-03-31 2000-10-13 Komatsu Ltd 温度制御装置及び同装置のバルブ制御部
JP2002364702A (ja) * 2001-06-12 2002-12-18 Canon Inc 除振装置およびそれを有する半導体製造装置
JP2005147318A (ja) * 2003-11-18 2005-06-09 Tokkyokiki Corp アクティブ振動制御装置及びシステム
JP2005172135A (ja) * 2003-12-11 2005-06-30 Canon Inc 除振マウント装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102979850A (zh) * 2011-09-07 2013-03-20 纬创资通股份有限公司 制备隔振系统的方法及其电子装置

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JP4113960B2 (ja) 2008-07-09
JP2007298102A (ja) 2007-11-15

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