Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
  • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
  • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
  • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
  • G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
  • H10P72/0602—Temperature monitoring
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W72/00—Interconnections or connectors in packages
  • H10W72/071—Connecting or disconnecting
  • H10W72/073—Connecting or disconnecting of die-attach connectors
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W72/00—Interconnections or connectors in packages
  • H10W72/071—Connecting or disconnecting
  • H10W72/075—Connecting or disconnecting of bond wires
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W72/00—Interconnections or connectors in packages
  • H10W72/851—Dispositions of multiple connectors or interconnections
  • H10W72/874—On different surfaces
  • H10W72/884—Die-attach connectors and bond wires
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W74/00—Encapsulations, e.g. protective coatings

Definitions

• Wafer-shaped measuring apparatus and method for manufacturing the same Wafer-shaped measuring apparatus and method for manufacturing the same
• the present invention relates to a wafer-like measuring apparatus for measuring the state of a wafer process and the like and a manufacturing method thereof, and more particularly to a temperature measuring apparatus for measuring the temperature of a semiconductor wafer and a manufacturing method thereof.
• a heat treatment for drying after applying a resist solution for example, a heat treatment for drying after applying a resist solution, a heat treatment after exposure (post-exposure baking), and a process for forming a predetermined thin film on a wafer surface
• Processing to heat a semiconductor wafer such as CVD processing is performed.
• wafer a semiconductor wafer
• CVD processing a process for forming a predetermined thin film on a wafer surface
• thermocouples are embedded at several measurement points on the conventional measurement dummy wafer, and the measurement dummy wafer is placed on the hot plate. The temperature distribution of the hot plate is measured (see, for example, Japanese Patent No. 2984060).
• the present invention has been made in view of the above circumstances, and provides a temperature measuring apparatus having a good temperature measuring performance and a method of manufacturing the temperature measuring apparatus, in which heat conduction from the Ueno to the temperature sensor is excellent. With the goal.
• a wafer-shaped measuring apparatus includes:
• a second bonding layer formed on the other main surface of the substrate facing the first bonding layer
• the first bonding layer and the second bonding layer are formed of the same material cover.
• a wafer-like measuring apparatus having good measurement performance by bonding a sensor on a wafer and a wafer using a material having high thermal conductivity, and a method for manufacturing the same. be able to.
• FIG. 1 is a plan view schematically showing a temperature measuring device according to an embodiment of the present invention.
• FIG. 2 is a cross-sectional view taken along line AA of the temperature measuring device shown in FIG.
• FIG. 3 is a diagram schematically showing a temperature sensor installed in the temperature measuring device according to the embodiment of the present invention.
• FIG. 4 is a diagram schematically showing a portion of a wafer on which the temperature sensor of FIG. 3 is installed.
• FIG. 5A is a diagram showing a method of manufacturing a temperature sensor according to an embodiment of the present invention.
• FIG. 5B is a diagram showing the method of manufacturing the temperature sensor according to the embodiment of the present invention.
• FIG. 6A is a diagram showing a method of manufacturing the temperature measuring device according to the embodiment of the present invention.
• FIG. 6B is a diagram showing a method of manufacturing the temperature measuring device according to the embodiment of the present invention.
• FIG. 6C is a diagram showing a method for manufacturing the temperature measuring device according to the embodiment of the present invention.
• FIG. 7 is a diagram showing X-ray diffraction patterns when platinum layers are formed on four types of substrates. Explanation of symbols
• FIG. 1 to FIG. 4 show a temperature measurement device 10 according to an embodiment of the present invention.
• FIG. 1 is a plan view showing the temperature measuring device 10.
• FIG. 2 is a cross-sectional view of the temperature measuring apparatus 10 shown in FIG.
• FIG. 3 (a) is a plan view showing a temperature sensor 11 constituting the temperature measuring device 10
• FIG. 3 (b) is a cross-sectional view taken along the line BB of FIG. 3 (a).
• FIG. 4 (a) is a plan view showing the semiconductor wafer 12 in a region where the temperature sensor 11 is installed
• FIG. 4 (b) is a cross-sectional view taken along the line CC of FIG. 4 (a).
• the temperature measurement apparatus 10 includes a temperature sensor 11, a semiconductor wafer 12, a first bonding layer 14, a protective film 15, and wirings 16. , Wire 17 and flat Cable 18.
• the temperature measuring device 10 is formed on the semiconductor wafer 12 and has the shape of a wafer.
• the temperature measuring apparatus 10 is used in a semiconductor device manufacturing process, for example, heat treatment for drying after resist solution coating, heat treatment after exposure (post-establisher baking), wafer surface It is used for heat treatment such as CVD treatment when forming a predetermined thin film on the substrate. Specifically, for example, in a hot plate unit that is subjected to baking such as post-exposure baking, it is used to verify whether the hot plate has a predetermined temperature distribution uniformity. .
• the temperature sensor 11 includes a substrate 21, a platinum layer 22, a terminal 23, and a second bonding layer 24.
• the temperature sensor 11 is a so-called platinum resistance thermometer that measures the temperature by utilizing the fact that the resistance value of platinum changes linearly with temperature.
• the temperature sensor 11 is connected to four wires 16 via wires 17. In this way, the influence of the resistance value of the wiring 16 can be eliminated by using the four-point probe method.
• the platinum layer 22 is formed on the substrate 21 and then placed on the semiconductor wafer 12.
• a method for measuring the temperature of the semiconductor wafer a method in which a platinum layer 22 that functions as a white metal resistance thermometer is directly formed on the semiconductor wafer 12 can be considered.
• the present embodiment employs a configuration in which a plurality of temperature sensors 11 are formed on the wafer, cut out, and installed on the semiconductor wafer 12.
• the substrate 21 also has, for example, a silicon single crystal substrate force, and a platinum layer 22 is formed on the upper surface of the substrate 21.
• the platinum layer 22 is formed in a twisted manner on the upper surface of the substrate 21, as shown in FIGS. 3 (a) and 3 (b). Further, the ends of the platinum layer 22 are each provided with terminals 23 at two force points. The terminal 23 is electrically connected to the wiring 16 formed on the semiconductor wafer 12 by the wire 17.
• the second bonding layer 24 is made of a material having high thermal conductivity, and is made of, for example, a metal such as gold or copper. Consists of. In the present embodiment, gold is particularly used as the second bonding layer 24.
• the second bonding layer 24 is formed on the bottom surface of the substrate 21 as shown in FIGS. 2 and 3 (b).
• the second bonding layer 24 is formed on the lower surface of the substrate 21 via a second adhesion layer (not shown) that also has chrome isotropic force to improve adhesion to the substrate 21.
• the first bonding layer 14 and the second bonding layer 24 formed on the semiconductor wafer 12 have the same material force. Further, the second bonding layer 24 is bonded to the first bonding layer 14 by pressure contact as will be described in detail later.
• first bonding layer 14 and the second bonding layer 24 are also formed with the same material force, and are bonded by pressure welding as will be described in detail later, so that the second bonding layer 24 and the first bonding layer 24 are bonded.
• the bonding layer 14 is bonded well so as to have a substantially uniform thickness in the surface direction, and therefore, heat conduction from the semiconductor wafer 12 to the temperature sensor 11 occurs uniformly and satisfactorily.
• the semiconductor wafer 12 includes a silicon layer 12a, a SiO layer 12b, and a force.
• the temperature sensor 11 is evenly arranged on the central region and the peripheral region of the semiconductor wafer 12 on the semiconductor substrate 12, and the temperature sensor 11 is provided on the semiconductor wafer 12 as shown in FIG. It is installed in the recessed part 12c. Further, the depth of the concave portion 12c is formed to be substantially the same as the height of the temperature sensor 11, and specifically, about 30 ⁇ to 200 / ⁇ . Therefore, the upper surface of the temperature sensor 11 and the upper surface of the semiconductor wafer 12 are substantially flush with each other as shown in FIG. Further, as shown in FIG. 4 (b), the first bonding layer 14 is formed on the bottom surface of the recess 12c, in other words, the region where the temperature sensor 11 is provided.
• the number and arrangement of the temperature sensors 11 shown in FIG. 1 are merely examples, and it is possible to arrange more or less than five. Further, in the present embodiment, the configuration in which the temperature sensor 11 is installed in the recess 12c provided in the semiconductor wafer 12 is described as an example, but the upper surface of the semiconductor wafer 12 is not provided in the semiconductor wafer 12 without the recess 12c. Alternatively, the first bonding layer 14 may be formed, and the temperature sensor 11 may be installed on the first bonding layer 14. In this case, the temperature sensor 11 is installed so as to protrude as compared with the upper surface of the semiconductor wafer 12.
• the protective film 15 is also composed of, for example, a ceramic protective material, and is provided on the temperature sensor 11, the wire 17, and the semiconductor wafer 12 provided on the semiconductor wafer 12 as shown in FIG.
• the wiring 16 is formed so as to cover it.
• the protective film 15 protects the temperature sensor 11 and the like from external environmental forces and enables stable operation.
• the wiring 16 is made of a conductive material and is formed on the semiconductor wafer 12 as shown in FIG. One end of the wiring 16 is connected to the terminal 23 of the temperature sensor 11 via the wire 17, and the other end is connected to the flat cable 18. As described above, the temperature sensor 11 is connected at four force points in order to measure the resistance value by the four-probe method. Therefore, four wires 16 are formed on one temperature sensor 11 in FIG.
• the four wirings 16 are shown together as one line.
• the change in the resistance value of the platinum layer 22 of the temperature sensor 11 is changed by a measuring unit (not shown) installed outside from the terminal 23 of the platinum layer 22 via the wire 17, the wiring 16, and the flat cable 18. Measured.
• the measurement unit determines the resistance value of the platinum layer 22 and the temperature of the semiconductor wafer 12 in the region where each temperature sensor 11 is provided.
• the wire 17 electrically connects the wiring 16 and the terminal 23 by wire bonding.
• the first bonding layer 14 and the second bonding layer 24 are excellent in the semiconductor wafer 12 and the temperature sensor 11 by using the same material having high thermal conductivity.
• the first bonding layer 14 and the second bonding layer 24 have a substantially uniform thickness because they can be bonded to each other and further bonded by pressure welding. Therefore, the heat conduction from the semiconductor wafer 12 to the temperature sensor 11 is not uneven, and good heat conduction occurs. Therefore, the temperature measuring device 10 has good temperature measuring performance.
• the surfaces are kept stable without being oxidized, so that the first bonding layer 14 and the second bonding layer 24 are firmly bonded, and the thermal conductivity and electric conductivity are improved. Can be kept high. As a result, good characteristics of the temperature sensor 11 can be obtained.
• the recess 12c is formed in the semiconductor wafer 12 and the temperature sensor 11 is inserted so that the surface of the semiconductor wafer 12 and the height of the temperature sensor 11 are the same, the state is the same as that measured on the actual wafer. Because it can simulate, accurate measurement can be performed.
• FIG. 5A is a cross-sectional view showing a state where a plurality of temperature sensors 11 are formed on the wafer W.
• FIG. 5A is a cross-sectional view showing a state where a plurality of temperature sensors 11 are formed on the wafer W.
• a wafer W having an area where a plurality of temperature sensors 11 can be formed is prepared.
• a second adhesion layer (not shown) having a nickel or chrome force is formed on the lower surface of the wafer W by sputtering or the like. Subsequently, on the second adhesion layer, sputtering or plating is performed.
• a material having a high thermal conductivity for example, a second bonding layer 24 having a gold power is formed.
• a twisted platinum layer 22 is formed on the wafer W by sputtering, ion milling, or the like. Also, the terminals 23 are formed simultaneously with the platinum layer 22. Subsequently, the wafer W is cut along a predetermined dicing line d to obtain a plurality of temperature sensors 11 shown in FIG. 5B.
• the temperature measuring device 10 in which the characteristics of the plurality of temperature sensors 11 are uniform can be configured.
• the second bonding layers 24 of the plurality of temperature sensors 11 are formed by the same process, when the plurality of temperature sensors 11 cut out by dicing are bonded to the semiconductor wafer 12, the plurality of temperature sensors 11 are bonded. As a result, the heat conduction characteristic of the joint becomes uniform.
• the height of the temperature sensor 11 is the same, the measurement accuracy is further improved.
• FIG. 6A to 6C are diagrams showing a method for manufacturing the temperature measuring device 10 according to the embodiment of the present invention.
• FIG. 6A is a cross-sectional view showing processing of the wafer 12.
• a recess 12c having substantially the same depth as the thickness of the temperature sensor 11 is formed in the region of the semiconductor wafer 12 where the temperature sensor 11 is installed by photolithography, etching, or the like.
• wiring 16 as shown in FIG. 1 is formed on the semiconductor wafer 12 by sputtering or the like.
• the first bonding layer 14 and the semiconductor wafer 12 on the bottom surface of the recess 12c that is, the surface on which the temperature sensor 11 is installed.
• the adhesion layer (not shown) is formed by plating, sputtering, or the like.
• a material having a high thermal conductivity for example, a first bonding layer 14 having a gold power is formed on the upper surface of the first adhesion layer by sputtering or the like as shown in FIG. 6A. Note that the first bonding layer 14 and the second bonding layer 24 are made of the same material.
• FIG. 6B is a cross-sectional view showing how the temperature sensor 11 is bonded to the semiconductor wafer 12.
• the semiconductor wafer 12 in which the temperature sensor 11 is arranged so that the second bonding layer 24 is in contact with the first bonding layer 14 is placed on a lower plate of a press apparatus (not shown).
• the temperature in the apparatus is raised by a heater installed in the press apparatus, and the first bonding layer 14 and the second bonding layer 24 are softened.
• an almost uniform pressure is applied to the temperature sensor 11 by the part plate in a direction perpendicular to the semiconductor wafer 12 and in the plane direction. Apply pressure, and after a predetermined time has elapsed, stop the heater from heating inside and let it cool naturally to room temperature.
• first bonding layer 14 and the second bonding layer 24 are bonded so as to have a substantially uniform thickness.
• the temperature in the press apparatus, the temperature increasing rate, the descending rate, the pressure, the time during which the pressure is applied, and the like are appropriately changed depending on the thickness, material, and the like of the first bonding layer 14 and the second bonding layer 24.
• the terminal 23 and the wiring 16 provided on the semiconductor wafer 12 are electrically connected by the wire 17. Further, the wiring 16 and the flat cable 18 are also electrically connected. Subsequently, a protective film 15 such as polyimide, oxide film, nitride film, etc. is formed so as to cover the temperature sensor 11, the wiring 16, the wire 17, and the like.
• a protective film 15 such as polyimide, oxide film, nitride film, etc. is formed so as to cover the temperature sensor 11, the wiring 16, the wire 17, and the like.
• the temperature measuring device 10 is formed as shown in FIG. 6C.
• the second bonding layer 24 having high thermal conductivity, for example, gold power is formed on the lower surface of the substrate 21 of the temperature sensor 11 by using a semiconductor.
• the first bonding layer 14 is formed of the same material as that of the second bonding layer 24 on the bottom surface of the recess 12c formed in the wafer 12, and bonded by maintaining a pressurized state at a high pressure at a high temperature.
• the bonding surface of the temperature sensor 11 and the semiconductor wafer 12 is formed in close contact, and the thickness is formed to be substantially uniform, thereby suppressing unevenness in the heat conduction of the temperature sensor 11 to the platinum layer 22. can do. Accordingly, the responsiveness of the platinum layer 22 is improved, and the temperature measuring device 10 has a good temperature measuring performance.
• the temperature sensor 11 is formed by forming a plurality of platinum layers 22 and second bonding layers 24 on the wafer W and cutting them out.
• a plurality of temperature sensors can be formed at the same time, so that the production efficiency can be improved and the manufacturing cost can be further reduced.
• a temperature measurement device is formed by forming a platinum layer that functions as a temperature sensor directly on a semiconductor wafer, for example, in a form different from that of the present embodiment, sputtering of platinum is performed on the entire semiconductor wafer. It is necessary to carry out processes such as patterning.
• the substrate 21 of the temperature sensor 11 by forming the substrate 21 of the temperature sensor 11 to be relatively thin, heat conduction to the platinum layer 22 is further improved, and the responsiveness of the platinum layer 22 is further increased. Is possible.
• the present invention is not limited to the above-described embodiment, and various modifications and applications are possible.
• the case where a silicon substrate is used as the substrate 21 has been described as an example.
• a sapphire substrate can also be used as the substrate 21.
• the sapphire substrate is thinly formed so that heat conduction to the platinum layer 22 occurs well, and the platinum layer 22 responds accurately to the temperature of the semiconductor wafer 12, for example, 30 m to 200 m. It is formed to a thickness of
• Fig. 7 shows the X-ray diffraction patterns when a platinum layer is formed on each of the sapphire single crystal substrates on the A, C, and R planes, and when a platinum layer is formed on a silicon substrate (SiZSi02). Show. In the X-ray diffraction pattern shown in FIG. 7, the platinum layer is not patterned. As is clear from FIG. 7, the Pt (111) peak appears higher when the platinum layer is formed on the silicon substrate than when the platinum layer is formed on the silicon substrate, and the orientation of this surface becomes higher.
• the orientation of the platinum layer 22 is increased and the temperature coefficient of resistance (TCR) is improved.
• TCR temperature coefficient of resistance
• the temperature coefficient of resistance can be increased by performing heat treatment after patterning.
• Pt agglomeration is caused by heat treatment, and disconnection may occur when the pattern size becomes fine.
• a platinum layer is formed on the sapphire substrate.
• the platinum layer 22 has a high (111) plane and orientation, and the temperature coefficient of resistance (TCR) rises well, so that heat treatment after patterning can be omitted, and the platinum layer Disconnection due to Pt aggregation when the pattern size is fine can be avoided.
• the orientation of the platinum layer 22 can be increased by using an A-plane or C-plane single crystal sapphire substrate as the substrate 21 constituting the temperature sensor 11. Accordingly, the temperature coefficient of resistance of the platinum layer 22 is increased, the responsiveness to the temperature of the platinum layer 22 is improved, and the temperature measuring device 10 has a better temperature measuring performance.
• the present invention can be applied to a wafer-like measurement apparatus that uses a sensor other than the temperature sensor 11.
• a flow sensor may be formed of a substrate and bonded to the semiconductor wafer 12.
• the substrate of the flow sensor is inserted into the recess of the semiconductor wafer 12 and the surface is formed almost flat, it can be regarded as the same shape as the wafer actually processed, and the flow in the chamber inserted the wafer. Same as the case.
• the same state as that measured with an actual wafer can be simulated, so accurate measurement can be performed.
• the wafer-like measuring device is not limited to the semiconductor wafer 12, and a wide variety of wafer-like materials can be used.
• the substrate of the liquid crystal device can be used for measurement of the manufacturing process of the liquid crystal device. In that case, it is desirable to have the same shape as the wafer used for manufacturing.

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• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Measuring Temperature Or Quantity Of Heat (AREA)

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• 2007
  • 2007-03-14 WO PCT/JP2007/055084 patent/WO2007119359A1/ja not_active Ceased
  • 2007-03-14 JP JP2008510776A patent/JP4896963B2/ja not_active Expired - Fee Related
  • 2007-03-14 US US12/224,280 patent/US20090085031A1/en not_active Abandoned
  • 2007-03-16 TW TW096109151A patent/TW200741934A/zh not_active IP Right Cessation

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