WO2007058037A1 - Dispositif de montage pour inspecter des substrats et sonde d'inspection - Google Patents

Dispositif de montage pour inspecter des substrats et sonde d'inspection Download PDF

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Publication number
WO2007058037A1
WO2007058037A1 PCT/JP2006/320514 JP2006320514W WO2007058037A1 WO 2007058037 A1 WO2007058037 A1 WO 2007058037A1 JP 2006320514 W JP2006320514 W JP 2006320514W WO 2007058037 A1 WO2007058037 A1 WO 2007058037A1
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WO
WIPO (PCT)
Prior art keywords
inspection
substrate
guide hole
inspected
inspection probe
Prior art date
Application number
PCT/JP2006/320514
Other languages
English (en)
Japanese (ja)
Inventor
Minoru Kato
Makoto Fujino
Tadakazu Miyatake
Original Assignee
Nidec-Read Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec-Read Corporation filed Critical Nidec-Read Corporation
Priority to CN2006800429241A priority Critical patent/CN101310190B/zh
Publication of WO2007058037A1 publication Critical patent/WO2007058037A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

Definitions

  • the present invention relates to a substrate inspection jig and an inspection probe used for inspecting the electrical characteristics of a substrate to be inspected.
  • the present invention is not limited to a printed wiring board, and for example, a flexible board, a multilayer wiring board, an electrode board for a liquid crystal display or a plasma display, and various substrates such as a package board or a film carrier for a semiconductor package.
  • these various wiring boards are collectively referred to as “substrates”.
  • a circuit board is formed with a plurality of wiring patterns, and various circuit board inspection apparatuses have conventionally been used to inspect whether or not the wiring pattern is finished as designed. Proposed and put into practical use.
  • inspection positions on any two sets of wirings are selected from a plurality of wirings constituting a wiring pattern, and these inspection positions are electrically disconnected from each other, or are electrically conductive.
  • a device for inspecting electrical characteristics such as squirrel.
  • a substrate inspection jig holding a plurality of inspection probes is used, one end of the inspection probe is brought into contact with the inspection point of the inspected substrate, and the other end is connected.
  • One having a structure in which an inspection apparatus and a substrate to be inspected are electrically connected by being brought into contact with an electrode portion is known.
  • a substrate inspection jig for holding such an inspection probe is used to pivot the inspection probe in order to eliminate the problem of contact between the inspection probe and the electrode portion of the substrate to be inspected or the substrate inspection jig.
  • a panel that expands and contracts in the axial direction of the inspection probe is attached, or the inspection probe itself has elasticity, or is configured to hold in the axial direction of the inspection probe force. It was.
  • a substrate inspection jig J as shown in FIG. 6 has an inspection probe by holding a flexible inspection probe P so as to be sandwiched between the substrate to be inspected 100 and the electrode part E. An urging force acts outward in the axial direction of P, and a contact pressure is generated with respect to the inspection position 101 and the electrode portion E of the inspected substrate 100.
  • the contact pressure is used to solve the contact problem of the inspection probe P with the substrate 100 to be inspected or the electrode part E (see, for example, Patent Document 1 or 2).
  • Patent Document 1 Japanese Patent No. 3690796
  • Patent Document 2 Japanese Patent No. 3690801
  • the present invention has been made in view of such circumstances, and in the case where the inspection probe is used for electrically connecting the substrate to be inspected and the electrode portion of the substrate inspection jig, Provided are an inspection probe and a substrate inspection jig capable of providing a stable contact state when a load is applied to an inspection probe to be in a conductive contact state.
  • the invention according to claim 1 is characterized in that the first end of the inspection probe is in conductive contact with a predetermined inspection position of the substrate to be inspected, and the electrode is in conductive contact with the second end of the inspection probe.
  • a substrate inspection jig comprising: a connection electrode body having a portion; and a holding body that is disposed between the substrate to be inspected and the connection electrode body and holds the probe for inspection.
  • a first guide part for guiding the first end of the inspection probe to the inspection position, and a second guide for guiding the second end part of the inspection probe to the electrode part.
  • a second guide portion in which a hole is formed, and the inspection probe includes a linear conductor portion having the first end portion and the second end portion and having flexibility.
  • the invention according to claim 2 is characterized in that the electrode portion is formed so as to be flush with the surface of the connection electrode body. I will provide a.
  • the invention according to claim 3 provides the substrate inspection jig according to claim 1 or 2, wherein the connection electrode body and the second guide portion are arranged in close contact with each other. To do.
  • the invention according to claim 4 is characterized in that a maximum diameter of the inspection probe is formed smaller than a diameter of the second guide portion. Providing jigs for plate inspection.
  • the invention according to claim 5 provides the substrate inspection jig according to any one of claims 1 to 4, wherein the electrode portion is formed of a cylindrical conducting wire.
  • the invention of claim 6 is directed to an inspection probe in conductive contact with a predetermined inspection position of a substrate to be inspected, the first end of which is inspected, and an electrode in conductive contact with the second end of the inspection probe.
  • a substrate inspection jig comprising: a connection electrode body having a portion; and a holding body that is disposed between the substrate to be inspected and the connection electrode body and holds the probe for inspection.
  • a first guide part for guiding the first end of the inspection probe to the inspection position, and a second guide for guiding the second end part of the inspection probe to the electrode part.
  • a hole is formed and a second guide portion is disposed at a predetermined distance from the first guide portion, and the inspection probe has the first end portion and the second end portion, and can be used.
  • a linear conductor having flexibility, the first end and the second end; The outer end of the conductor portion excluding the insulating portion is covered with an insulating coating, and the second end portion is the electrode portion when the first end portion is brought into contact with the test substrate and the inspection probe is bent.
  • the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guide hole, and a portion of the insulating portion is It is inserted into the second guide hole with a small interval, and the length of the inserted insulating portion is longer than the length of the second end portion, and the second end portion is arranged in the major axis direction.
  • Board inspection characterized in that the length is formed to be substantially the same or shorter than the outer diameter of the insulating part of the inspection probe Provide jigs.
  • the invention of claim 7 is directed to an inspection probe in conductive contact with a predetermined inspection position of a substrate to be inspected, the first end of which is inspected, and an electrode in conductive contact with the second end of the inspection probe.
  • a substrate inspection jig comprising: a connection electrode body having a portion; and a holding body that is disposed between the substrate to be inspected and the connection electrode body and holds the probe for inspection.
  • a first guide part for guiding the first end of the inspection probe to the inspection position, and a second guide for guiding the second end part of the inspection probe to the electrode part.
  • a hole is formed and a second guide portion is disposed at a predetermined distance from the first guide portion, and the inspection probe has the first end portion and the second end portion, and can be used.
  • a linear conductor having flexibility, the first end and the second end; The outer end of the conductor portion excluding the insulating portion is covered with an insulating coating, and the second end portion is the electrode portion when the first end portion is brought into contact with the test substrate and the inspection probe is bent.
  • the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guide hole, and a portion of the insulating portion is It is inserted into the second guide hole with a minute interval, the length of the inserted insulating part is longer than the length of the second end part, and the minimum diameter of the second guide hole is Provided is a substrate inspection jig characterized in that it is formed larger than the outer diameter of the insulating portion of the inspection probe.
  • the second guide portion is formed by laminating a plurality of plate-like members each having a guide hole for guiding the second end portion, and the second guide hole is
  • the guide holes of the plate-like member are formed so as to be inclined with respect to the direction perpendicular to the plate surface by being shifted by a predetermined amount in the same direction, and the boundary between the second end portion and the insulating portion is the 8.
  • the invention according to claim 9 is held by a holding body of an inspection substrate jig that electrically connects an inspection substrate to be inspected and an inspection device for inspecting the electrical characteristics of the inspection substrate. And an inspection probe for electrically connecting the substrate to be inspected and an electrode portion of the jig for the inspection substrate, which are in conductive contact with the inspection position of the substrate to be inspected when being held by a holding body.
  • a first end and a second end in conductive contact with the electrode portion of the jig for the substrate to be inspected A linear conductor portion having flexibility and an insulating portion force that insulates the outer periphery of the conductor portion excluding the first end portion and the second end portion, and the second end portion of the inspection probe
  • an inspection probe characterized in that the length is shorter than the length of the guide hole.
  • the invention according to claim 10 is held by a holding body of an inspection substrate jig for electrically connecting an inspection substrate to be inspected and an inspection apparatus for inspecting the electrical characteristics of the inspection substrate.
  • the holder is passed through a first guide hole that guides to an inspection point of the substrate to be inspected and a second guide hole that guides to an electrode portion of the inspection substrate jig, and the substrate to be inspected
  • An inspection probe for electrically connecting the electrode portions of the inspection substrate jig, and when being held by a holder, is in conductive contact with the inspection position of the substrate to be inspected and is connected to the first guide hole.
  • a flexible linear conductor having a first end that is electrically conductively contacted with the electrode portion of the jig for the substrate to be inspected and a second end that is passed through the second guide hole And an insulating portion force for insulatingly covering the outer periphery of the conductor portion excluding the first end portion and the second end portion,
  • the end portion is brought into contact with the substrate to be inspected and the inspection probe is bent, the second end portion and the second end portion are in contact with the electrode portion without lateral displacement.
  • a part of the insulating part adjacent to the end part is located in the second guide hole, and a part of the insulating part is inserted into the second guide hole and has a minute interval and is inserted.
  • the length of the insulating portion is longer than the length of the second end portion, and the length in the major axis direction of the second end portion is substantially the same as or shorter than the outer diameter of the insulating portion of the inspection probe.
  • the invention according to claim 11 is held by a holding body of an inspection substrate jig for electrically connecting an inspection substrate to be inspected and an inspection device for inspecting the electrical characteristics of the inspection substrate.
  • the holder is passed through a first guide hole that guides to an inspection point of the substrate to be inspected and a second guide hole that guides to an electrode portion of the inspection substrate jig, and the substrate to be inspected
  • An inspection probe for electrically connecting the electrode portions of the inspection substrate jig, and when being held by a holder, is in conductive contact with the inspection position of the substrate to be inspected and is connected to the first guide hole.
  • a flexible linear conductor having a first end that is electrically conductively contacted with the electrode portion of the jig for the substrate to be inspected and a second end that is passed through the second guide hole And said When the first end is brought into contact with the substrate to be inspected and the inspection probe is bent, the first end and the second end are insulated.
  • the second end portion and a part of the insulating portion adjacent to the second end portion are located in the second guide hole, and When the part of the insulating part is inserted into the second guide hole, the insulating part has a small interval, and the length of the inserted insulating part is longer than the length of the second end part, and the inspection probe An outer diameter force of the insulating portion of the inspection probe is characterized by being formed smaller than the minimum diameter of the second guide hole.
  • the first end portion of the flexible inspection probe is guided by the first guide hole of the first guide portion of the holding body and contacts the inspection position of the substrate to be inspected.
  • the second end portion of the inspection probe is guided by the second guide hole of the second guide portion of the holding body and contacts the electrode portion of the connection electrode body, and the length of the second end portion of the inspection probe is the first length. Since the inspection guide is held between the substrate to be inspected and the connection electrode body and the inspection probe is pinched, the second end is Provided is a substrate inspection jig that makes contact with a surface of an electrode portion so as to be substantially perpendicular to the surface.
  • tool provides the stable contact condition.
  • the second end portion is substantially perpendicular to the surface of the electrode portion, it is possible to prevent generation of a scar due to sliding on the surface of the electrode portion, and the contact position between the second end portion and the electrode portion. Prevent misalignment.
  • connection electrode body since the electrode portion of the connection electrode body is formed on the same plane as the surface of the connection electrode body, in the manufacturing process! It is possible to use an electrode part that is easily formed, and to form an electrode part that makes contact with the surface of the electrode part so that the second end part is more perpendicular to the surface of the electrode part. It is possible to prevent the inspection probe and the electrode part from contacting each other more stably.
  • connection electrode body and the second guide portion are disposed in close contact with each other, the electrode portion contact surface of the second end portion is in contact with the surface of the second guide portion. Enables contact on substantially the same surface, enabling more stable contact between the inspection probe and the electrode part [0021]
  • the inspection probe since the maximum diameter of the inspection probe is smaller than the diameter of the second guide hole, the inspection probe can be easily removed from the holding body of the substrate inspection jig. The inspection probe can be easily exchanged.
  • the electrode portion is formed of a cylindrical conductive wire !, when the inspection probe comes into contact with the electrode portion, the inspection portion is inserted into the hole portion of the electrode portion. A part of the probe is inserted to enable stable contact between the inspection probe and the electrode part.
  • the first end of the flexible inspection probe is guided by the first guide hole of the first guide portion of the holding body and contacts the inspection position of the substrate to be inspected.
  • the second end portion of the inspection probe is guided by the second guide hole of the second guide portion of the holding body to contact the electrode portion of the connection electrode body, and the first end portion is brought into contact with the substrate to be inspected.
  • the inspection probe is bent, the second end and the insulating portion adjacent to the second end are in contact with the electrode without causing lateral displacement.
  • a part of the insulating part is located in the second guide hole, and a part of the insulating part is inserted into the second guide hole with a minute interval.
  • the length of the second end is longer than the length of the second end, and the length in the longitudinal direction of the second end is substantially the same as or shorter than the outer diameter of the insulating portion of the inspection probe. Even when the inspection probe is held between the substrate to be inspected and the connection electrode body, and the inspection probe is pinched, the second end is substantially perpendicular to the surface of the electrode portion. Contact so as to provide a substrate inspection jig.
  • tool provides the stable contact condition.
  • the second end portion is substantially perpendicular to the surface of the electrode portion, it is possible to prevent generation of a scar due to sliding on the surface of the electrode portion, and the contact position between the second end portion and the electrode portion. Prevent misalignment.
  • the first end portion of the flexible inspection probe is guided by the first guide hole of the first guide portion of the holding body and contacts the inspection position of the substrate to be inspected.
  • the second end portion of the inspection probe is guided by the second guide hole of the second guide portion of the holding body to contact the electrode portion of the connection electrode body, and the first end portion is brought into contact with the substrate to be inspected.
  • the second end abuts against the electrode part without lateral displacement. Therefore, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guide hole, and a portion of the insulating portion has a minute interval with the second end.
  • the length of the insulating part to be inserted is formed longer than the length of the second end, and the minimum diameter of the second guide hole is larger than the outer diameter of the insulating part of the inspection probe. Since the inspection probe is held between the substrate to be inspected and the connection electrode body and the inspection probe is pinched, the second end portion is in contact with the surface of the electrode portion. Providing a substrate inspection jig that makes contact at approximately a right angle.
  • tool provides the stable contact condition.
  • the second end portion is substantially perpendicular to the surface of the electrode portion, it is possible to prevent generation of a scar due to sliding on the surface of the electrode portion, and the contact position between the second end portion and the electrode portion. Prevent misalignment.
  • tool provides the stable contact condition.
  • the second end portion is substantially perpendicular to the surface of the electrode portion, it is possible to prevent generation of a scar due to sliding on the surface of the electrode portion, and the contact position between the second end portion and the electrode portion. Prevent misalignment.
  • the second guide portion is formed by laminating a plurality of plate-like members each having a guide hole for guiding the second end portion, and the second guide hole. Is formed so as to be inclined with respect to the direction perpendicular to the plate surface by arranging the guide holes of the plate-like member shifted by a predetermined amount in the same direction, and the boundary between the second end portion and the insulating portion is Since it is disposed in the guide hole of the plate-shaped member that contacts the connection electrode body, it can be controlled so that the inspection probes are held in substantially the same amount in the same direction when performing inspection.
  • the first end portion of the flexible inspection probe is guided by the first guide hole of the first guide portion of the holding body and contacts the inspection position of the substrate to be inspected.
  • the second end portion of the inspection probe is guided by the second guide hole of the second guide portion of the holding body and contacts the electrode portion of the connection electrode body, and the length of the second end portion of the inspection probe is the first length. Since the inspection guide is held between the substrate to be inspected and the connection electrode body and the inspection probe is pinched, the second end is Provided is an inspection probe that comes into contact with a surface of an electrode portion so as to be substantially perpendicular.
  • the inspection probe provides a stable contact state.
  • the second end is almost perpendicular to the surface of the electrode part, scratches are generated by sliding on the electrode part surface. And the displacement of the contact position between the second end portion and the electrode portion is prevented.
  • the inspection substrate jig to be inspected is electrically connected to the inspection substrate to be inspected and the inspection device for inspecting the electrical characteristics of the inspection substrate.
  • the holding body is passed through a first guide hole that guides to an inspection point of the substrate to be inspected, and a second guide hole that guides to an electrode portion of the jig for the inspection substrate.
  • a flexible linear shape including a first end portion passed through and a second end portion passed through the second guide hole while being in conductive contact with the electrode portion of the jig for the substrate to be inspected.
  • the length of the second end portion of the inspection probe is shorter than the length of the guide hole, and the second end portion is substantially perpendicular to the surface of the electrode portion when in use.
  • the length of the insulating portion inside the second guide hole is longer than the length of the second end portion, and the length of the second end portion in the major axis direction is outside the insulating portion of the inspection probe.
  • an inspection probe characterized by being formed so as to be substantially the same as or shorter than the diameter. For this reason, the inspection probe provides a stable contact state.
  • the second end is substantially perpendicular to the surface of the electrode part, it is possible to prevent the occurrence of a scar due to sliding on the surface of the electrode part and the contact position between the second end part and the electrode part. Prevent misalignment.
  • the substrate for inspection substrate jig for electrically connecting the substrate to be inspected and the inspection device for inspecting the electrical characteristics of the substrate to be inspected is provided.
  • the holding body is passed through a first guide hole that guides to an inspection point of the substrate to be inspected, and a second guide hole that guides to an electrode portion of the jig for the inspection substrate.
  • a flexible linear shape including a first end portion passed through and a second end portion passed through the second guide hole while being in conductive contact with the electrode portion of the jig for the substrate to be inspected. And an insulating portion that covers the outer periphery of the conductor portion excluding the first end portion and the second end portion.
  • the first end is brought into contact with the substrate to be inspected and the inspection probe is bent, the second end is brought into contact with the electrode portion without lateral displacement.
  • a part of the insulating part adjacent to the second end is located in the second guide hole, and a part of the insulating part has a minute interval when inserted into the second guide hole.
  • the length of the insulating portion to be inserted is longer than the length of the second end portion, and the outer diameter of the insulating portion of the inspection probe is smaller than the minimum diameter of the second guide hole.
  • the inspection probe provides a stable contact state.
  • the second end is substantially perpendicular to the surface of the electrode part, it is possible to prevent the occurrence of a scar due to sliding on the surface of the electrode part and the contact position between the second end part and the electrode part. Prevent misalignment.
  • FIG. 1 shows a cross-sectional view of a substrate inspection jig according to an embodiment of the present invention
  • Fig. 1 (a) shows a state before a load is applied to the inspection probe
  • Fig. 1 (b) shows It shows a state in which a load is applied to the inspection probe.
  • FIG. 2 (a) shows a cross-sectional view of the substrate inspection jig holder of the embodiment of the present invention
  • FIG. 2 (b) shows an enlarged state in which the inspection probe is inserted.
  • FIG. 3 shows a side view of the inspection probe of the embodiment of the present invention.
  • FIG. 4 (a) shows a cross-sectional view of the connection electrode body of the substrate inspection jig of the embodiment of the present invention
  • FIG. 4 (b) shows a perspective view of the electrode portion of another embodiment
  • FIG. (c) shows the state where the inspection probe is in contact with the electrode part of (b).
  • Each configuration of the substrate inspection jig described in this specification is described for one inspection probe. However, in actuality, the number of inspection inspections corresponding to the inspection points is not limited. Probes are used and several tens of thousands of inspection probes are provided.
  • the substrate inspection jig 1 includes an inspection probe 2, a holding body 3, and a connection electrode body 4.
  • the inspection probe 2 is in conductive contact with the inspection position 101 of the inspected substrate 100 and is in conductive contact with the electrode portion 41 of the connection electrode body 4.
  • the holder 3 guides and holds the inspection probe 2 to a predetermined inspection position 101 and the electrode portion 41.
  • the connection electrode body 4 transmits the detected signal to an inspection device (not shown).
  • the holding body 3 is disposed between the inspected substrate 100 and the connection electrode body 4 and holds the inspection probe 2.
  • the holding body 3 includes a first guide portion 31 having a first guide hole 311, which guides the first end portion 23 of the inspection probe 2 and makes contact with a predetermined inspection position 101 of the substrate 100 to be inspected.
  • a second guide portion 32 having a second guide hole 321 for guiding the second end portion 24 of the probe 2 to contact the electrode portion 41 is provided.
  • the holding body 3 shown in the embodiment of the present specification is composed of a first guide part 31, a second guide part 32, and a column 33 as shown in FIG.
  • the first guide portion 31 and the second guide portion 32 are also formed with separate members, and these members are fixed so as to be integrated with the support column 33.
  • the number, shape, and length of the columns 33 are determined as necessary. Incidentally, since the thickness of the holding body 3 (the length in the vertical direction shown in FIG. 2) is determined by the length of the support 33, it is set according to the design requirement of the inspection jig.
  • the first guide portion 31 has a first guide hole 311 for guiding the first end portion 23 of the inspection probe 2 as described above to the inspection position 101.
  • the diameter 311W of the first guide hole 311 is formed to be smaller than the maximum diameter of the insulating portion 22 of the inspection probe 2 (diameter 22W of the inspection probe 2). Prevents jumping upwards.
  • the first guide portion 31 shown in FIG. 2 is formed of three plate-like bodies in order to have three types of functions to be described later, but is not limited to this number. It may be formed from, or may be formed from two or more plate-like bodies.
  • the first guide portion 31 shown in FIG. 2 has three plate-like bodies 312, 313, and 314.
  • the plate-like body 312 moves to the inspection position 101 and the inspection probe 2 (the first end portion 23 of the inspection probe 2).
  • the thickness of the first guide portion 31 is shorter than the length 23L of the first end portion 23.
  • the second guide portion 32 has a second guide hole 321 for inserting the second end portion 24 of the inspection probe 2 as described above into the electrode portion 41.
  • the diameter 321W of the second guide hole 321 is formed to be larger than the maximum diameter of the inspection probe 2, and the inspection probe 2 is Can be inserted and removed.
  • the second guide portion 32 shown in FIG. 2 has three types of functions. Therefore, the force that forms three plate-like body forces is not limited to this number.
  • the second guide portion 32 shown in FIG. 2 (a) may be formed from a single plate-like body, or may be formed from two or more plate-like bodies.
  • the plate-like body 322 is a plate-like body for forming a screw hole for fixing the support 33
  • the plate-like body 323 is the second plate-like body 323.
  • a plate-like body for adjusting the thickness of the guide portion 32, and the plate-like body 324 is a plate-like body for guiding the inspection probe 2 (second end portion 24 thereof) to the electrode portion 41.
  • FIG. 2 (b) is an enlarged view of the dotted line portion shown in FIG. 2 (a), and shows a state in which the inspection probe 2 is inserted into the holding body 3.
  • the boundary 26 between the second end 24 and the insulating portion 22 exists in the second guide hole 321, the influence of the stagnation of the inspection probe 2 Can be minimized.
  • the length 24L of the second end 24 (see FIG. 3) is formed shorter than the thickness 32T of the second guide portion 32, so that even when a load is applied to the inspection probe 2, A boundary 26 is present inside the second guide hole 321.
  • the insulating part 22 exists inside the second guide part 321, the gap S between the second guide part 321 and the diameter 321W becomes small, and even when the inspection probe 2 is pinched. Since the second end portion 24 comes into contact with the surface of the electrode portion 41 so as to be substantially at right angles, the detection probe 2 is prevented from slipping and the swinging motion is suppressed. For this reason, this board
  • tool 1 can provide the contact state to the electrode part more stable than the conventional test
  • the diameter 321W of the second guide hole 321 is the maximum diameter of the inspection probe 2 as described above.
  • the diameter 321W is formed to be 1 to 50 m, more preferably 10 to 30 m larger than the diameter 22W of the inspection probe 2.
  • the two guide holes 321 can be formed with a diameter of 0.12 mm, and have a suitable holding force between the inspection probe 2 and the holding body 3.
  • the first guide hole 311 and the second guide hole 321 coincide with each other in a substantially vertical direction, but the first guide part 31 or the second guide part 32 is predetermined in the parallel direction. It may be arranged at a distance. In this case, since the first guide hole 311 and the second guide hole 321 do not coincide with each other in a straight line in the vertical direction, when the inspection probe 2 is inserted, the inspection probe 2 bends and the first guide hole 311 Alternatively, the second guide hole 321 is locked by being brought into frictional contact with the side portion of the second guide hole 321, and the fall can be prevented.
  • the inspection probe 2 includes a linear conductor portion 21 and an insulating portion 22 that covers the outer periphery of the conductor portion 21 (see FIG. 3).
  • the conductor portion 21 is made of a flexible material, and when a load from the axial direction of the conductor portion 21 is applied, the conductor portion 21 squeezes in a direction substantially perpendicular to the axial direction. Is formed. By this stagnation, a contact force is generated for the inspection probe 2 to come into contact with the inspection position and an electrode portion described later.
  • the material of the conductor portion 21 is a flexible material as described above, a force capable of appropriately using a suitable material, for example, beryllium copper (BeCu) or tungsten (W) may be used. it can.
  • a suitable material for example, beryllium copper (BeCu) or tungsten (W) may be used. it can.
  • the length of the inspection probe 2 in the axial direction (the length of the conductor portion 21) is held by the holding body 3 as shown in FIG.
  • a length that satisfies the following conditions is required.
  • the length of the conductor portion 21 (the length in the axial direction) of the inspection probe 2 is a force determined according to the size and length of the holding body 3. It is set appropriately according to the size of the jig 1.
  • the conductor portion 21 of the inspection probe 2 includes a first end portion 23 that contacts an inspection position 101 of the substrate 100 to be inspected, and a second end portion 24 that contacts an electrode portion 41 of a connection electrode body 4 to be described later. Have.
  • the first end portion 23 and the second end portion 24 are formed on the conductor portion 21 exposed from the insulating portion 22 as shown in FIG.
  • the first end portion 23 is arranged so as to protrude outward (upward in the drawing) from the first guide hole 311 of the first guide portion 31 as shown in FIG.
  • a second end portion 24 to be described later is disposed so as to protrude outward (downward in the drawing) from the second guide hole 321 of the second guide portion 32.
  • the inspection probe 2 is arranged so as to penetrate through the first and second guide holes 311 and 321 of the holding body 3.
  • the protruding amounts of the first and second end portions 23 and 24 from the holding body 3 are determined as necessary.
  • the inspection probe 2 needs to be pinched so that the connection electrode body 4 and the substrate to be inspected 100 can be in close contact with and fixed to the holder 3. is there.
  • the boundary 25 between the first end portion 23 and the insulating portion 22 is disposed on the inner side than the first guide portion 31.
  • the length 23L of the first end 23 is appropriately set according to the relationship with the holding body 3 as long as the above conditions are satisfied, but is preferably 10 to 50 mm, more preferably about 20 to 40 mm. Preferably it is formed. By having a length in this range, the inspection position 101 and the first end 23 can generate a stable contact state when the inspection probe 2 is pinched.
  • the second end 24 is in contact with the electrode part 41 of the connection electrode body 4.
  • a boundary 26 with the insulating portion 22 forming the second end portion 24 is disposed in the second guide hole 321 of the second guide portion 32 as shown in FIG.
  • the protrusion amount of the second end portion 24 from the second guide portion 32 as described above is determined according to the degree of stagnation of the inspection probe 2 at the time of inspection.
  • the inspection probe 2 is pinched, and the connection electrode body 4 and the inspected substrate 100 are fixed in close contact with the holding body 3.
  • the second end 24 of the inspection probe 2 can come into contact with the surface of the electrode portion 41 at a substantially right angle. For this reason, when a load is applied to the inspection probe as in the prior art, the inspection probe can be prevented from coming into contact with the electrode portion 41 in an inclined state. This prevents sliding on the surface and generating scratches on the electrode part 41.
  • the length 24L of the second end portion 24 is formed to be shorter than the length (thickness) of the second guide hole 321. With this formation, a load is applied to the inspection probe 2. This is because the boundary 26 is arranged inside the second guide hole 321 even in such a case.
  • the tips of the first end portion 23 and the second end portion 24 are preferably processed to have a hemispherical round shape or a tapered shape.
  • the length of the second end 24 is such that, in use, the insulating portion inside the second guide hole 32 is such that the second end 24 is substantially perpendicular to the surface of the electrode portion 41.
  • the length of 22 is formed longer than the length of the second end 24, and the length of the second end 24 in the long axis direction is formed to be substantially the same as or shorter than the outer diameter of the insulating portion of the inspection probe. I like to be heard.
  • the second end portion 24 is disposed on the second guide portion 32 and the inspection probe 2 is pinched. This is because it can be erected at a substantially right angle.
  • the insulating portion 22 forming the inspection probe 2 is covered with the conductor portion 21 so that the first end portion 23 and the second end portion 24 are exposed as described above.
  • the material forming the film is an insulating material and is preferably a material excellent in workability.
  • a suitable material is appropriately selected according to the processability.
  • PTFE polytetrafluoroethylene
  • Teflon registered trademark
  • polyurethane resin is used. be able to.
  • a polyurethane resin excellent in microfabrication the boundaries 25 and 26 shown in FIG.
  • the inspection probe 2 described in this specification and the drawings is formed in a cylindrical shape, and the diameter of the conductor portion 21 and the insulating portion 22 depends on the size of the inspection position 101 of the substrate 100 to be inspected.
  • the diameter is such that it can pass through the second guide hole 321 so that the inspection probe 2 can be inserted into and removed from the board inspection jig 1.
  • connection electrode body 4 includes an electrode part 41, a base part 42, and a fixing part 43.
  • the connection electrode body 4 receives electrical signals such as current and voltage obtained from the inspection probe 2.
  • the electrode portion 41 is formed so as to be flush with the surface of the connection electrode body 4 as shown in FIG. By being formed in this way, the second end portion 24 inside the second guide hole 321 can come into stable contact with the electrode portion 41.
  • the electrode portion 41 is formed of a conducting wire as shown in FIG. 4, one end of the conducting wire is located on the surface of the connection electrode body 4, and the other end of the conducting wire is connected to the inspection device.
  • the base part 42 is a base material that holds the electrode part 41.
  • the fixing portion 43 is a fixing material for arranging the electrode portion 41.
  • connection electrode body 4 In the method of forming the connection electrode body 4, for example, a hole for forming the electrode part 41 in a desired position in advance in the base part 42 is formed. Next, a conductive wire to be the electrode portion 41 is disposed, and an adhesive that forms the fixing portion 43 is filled in order to fix the conductive wire. After the fixing portion 43 is formed, the conductive wire protruding from the surface of the connection electrode body 4 (the surface in contact with the inspection probe 2) is removed. In this way, the connection electrode body 4 is formed.
  • the electrode part 41 can also use a cylindrical conducting wire as shown in FIG. 4 (b).
  • a cylindrical conducting wire As shown in FIG. 4 (b).
  • the conductors of the cylindrical electrode portion 4 1 when the inspection probe 2 in contact with the electrode portion 41, the internal part of the electrode portion 41 of the tip of the second end 24 of the testing probe 2 The peripheral edge of the inner diameter 41W2 of the electrode part 41 comes into contact with the second end part 24 to provide a stable contact state (see FIG. 4 (c)).
  • the inner diameter 41W2 of the electrode part 41 is formed to be smaller than at least the diameter 21W of the second end part 24 (conductor part 21).
  • the outer diameter 41 W1 of the electrode portion 41 is preferably substantially the same length as the diameter 21 W of the conductor portion 21 of the inspection probe 2.
  • connection electrode body 4 Since the connection electrode body 4 is disposed in close contact with the second guide portion 32 of the holding body 3 in use, the holding body 3 and the connection electrode body 4 are in contact with each other without a gap. The contact state between the second end portion 24 and the electrode portion 41 can be further stabilized.
  • FIG. 1 A specific example of the inspection substrate jig 1 and the inspection probe 2 according to the embodiment of the present invention will be described below.
  • the present invention is not limited to the dimensions and shapes shown in this specific example. An outline of one specific example is shown in FIG.
  • the conductor part 21 of the inspection probe 2 is formed by processing tungsten into a columnar shape or cylindrical shape (linear shape) having a length of about 30 mm and a diameter of 0.07 mm. At this time, it is processed so that both ends of the conductor portion 21 are rounded.
  • the insulating part 22 is formed of polyurethane resin so as to cover the outer periphery of the conductor part 21. At this time, the first end 23 is formed to 3 mm, and the second end 24 is formed to 0.05 mm. Insulation 22 diameter 22W is formed to 0.09mm.
  • the insulating portion 22 is formed of a polyurethane resin that can be easily formed, the boundaries 25 and 26 can be finely processed at a substantially right angle to the conductor portion 21.
  • the first guide hole 311 and the second guide hole 321 are formed as described above.
  • the first guide portion 31 is formed of two plate-like bodies 312 and 313.
  • the first guide hole 311 is formed by a side portion of a plate-like body having two steps. This is because when the first guide hole 311 is formed, the first guide hole 311 having a desired length is obtained by forming the upper end portion and the lower end portion of the first proposed inner hole 311 so as to have a desired diameter. Because it can.
  • the second guide portion 32 is formed of three plate-like bodies 322, 323, and 324 having steps.
  • these three plate-like bodies are used to form the second guide hole 321. Further, in this embodiment, these three plate-like bodies 322, 323, 324 are arranged at a predetermined interval. As a result, the second guide hole 321 is formed as a slanted hole, and when the inspection probe 2 is inserted into the inspection board jig 1, it is arranged with a certain degree of sag. Will be. For this reason, all the inspection probes 2 inserted into the substrate inspection jig 1 are held in substantially the same amount in substantially the same direction.
  • the first guide hole 311 is formed with a diameter of about 0.08 mm, which is larger than the diameter 21W of the conductor portion 21 of the inspection probe 2 and smaller than the diameter 22W of the insulating portion 22.
  • 321 is formed to have a diameter of about 0.12 mm when the inspection probe 2 as described above is prepared.
  • the electrode portion 41 of the connection electrode body 4 is formed of a conductive wire having a diameter of approximately 0.09 mm and approximately the same diameter as the inspection probe 2. .
  • the diameter of the surface side of the connection electrode body 4 of the fixing portion 43 is formed to be about 0.10 mm.
  • the substrate inspection jig 1 created under these conditions is such that the second end 24 is substantially perpendicular to the electrode portion 41 even when a load is applied to the inspection probe 2 from the axial direction for each inspection. Therefore, it is possible to maintain a good contact state.
  • the substrate inspection jig and the inspection probe of the embodiment of the present invention can provide a stable contact state by preventing the contact position of the inspection probe from being moved by a plurality of load loads. It is effective in board inspection.
  • FIG. 1 A cross-sectional view of a substrate inspection jig of an embodiment of the present invention, (a) showing a state before a load is applied to the inspection probe, and (b) an inspection probe. Shows a state where a load is applied.
  • FIG. 2 (a) is a cross-sectional view of the substrate inspection jig holder of the embodiment of the present invention, and (b) is an enlarged view of the state in which the inspection probe is inserted into the holder. Show me!
  • FIG. 3 shows a side view of an inspection probe according to an embodiment of the present invention.
  • FIG. 4 (a) is a cross-sectional view of a connection electrode body of a substrate inspection jig of an embodiment of the present invention, (b) is a perspective view of an electrode portion of another embodiment, (c) Shows the state where the inspection probe is in contact with the electrode part of (b).
  • FIG. 5 shows an embodiment of a substrate inspection jig according to a specific example of the present invention.
  • FIG. 6 A conventional board inspection jig and inspection probe are shown.
  • Electrode part 100 Substrate to be inspected 101 ... Inspection position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

La présente invention concerne un dispositif de montage pour inspecter les substrats et une sonde d’inspection pour inspecter les caractéristiques électriques des substrats à inspecter. Ledit dispositif de montage (1) pour inspecter les substrats est composé d’une sonde d’inspection (2) dont une première section d’extrémité (23) est en contact électrique avec une position d'inspection (101) prédéterminée d'un substrat (100) à inspecter ; d’une électrode de connexion (4) comportant une section d’électrode (41) en contact électrique avec une seconde section d’extrémité (24) de la sonde d’inspection (2) ; et un support (3) servant à maintenir la sonde d’inspection (2). Le support (3) comporte une première section de guidage (31) comportant un premier trou de guidage (311) pour guider la première section d'extrémité (23) vers la position d'inspection (101) et une seconde section de guidage (32) dans laquelle un second trou de guidage (321) est percé pour guider la seconde section d'extrémité (24) vers la section d'électrode (41). La sonde d’inspection (2) est composée d’une section conductrice (21) linéaire flexible comportant la première section d’extrémité (23) et la seconde section d’extrémité (24), et une section isolante (22) appliquée pour l'isolation sur une circonférence externe de la section conductrice (21) à l'exception de la première section d'extrémité (23) et de la seconde section d’extrémité (24). La longueur de la seconde section d’extrémité (24) est inférieure à celle du second trou de guidage (321).
PCT/JP2006/320514 2005-11-16 2006-10-14 Dispositif de montage pour inspecter des substrats et sonde d'inspection WO2007058037A1 (fr)

Priority Applications (1)

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CN2006800429241A CN101310190B (zh) 2005-11-16 2006-10-14 基板检查用夹具和检查用探头

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JP2005332172A JP3849948B1 (ja) 2005-11-16 2005-11-16 基板検査用治具及び検査用プローブ
JP2005-332172 2005-11-16

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WO2007058037A1 true WO2007058037A1 (fr) 2007-05-24

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KR (1) KR100989300B1 (fr)
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CN101907642A (zh) * 2009-06-02 2010-12-08 日本电产理德株式会社 检查用夹具及检查用触头
JP4974311B1 (ja) * 2011-02-10 2012-07-11 日本電産リード株式会社 検査治具
TWI728665B (zh) * 2020-01-21 2021-05-21 中華精測科技股份有限公司 具有指向性探針的探針卡裝置

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JP5098339B2 (ja) * 2007-01-11 2012-12-12 日本電産リード株式会社 基板検査治具の製造方法
JP2009008516A (ja) * 2007-06-28 2009-01-15 Nidec-Read Corp 基板検査治具及び基板検査方法
KR200468277Y1 (ko) * 2009-12-04 2013-08-06 주식회사 오리온 기판 전극 단선 검사기
JP2013137281A (ja) * 2011-12-28 2013-07-11 Seiko Epson Corp プローブ装置
KR101363367B1 (ko) * 2012-09-04 2014-02-25 주식회사 에스피에스테크 인쇄회로기판 검사장치
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KR101398550B1 (ko) * 2013-04-22 2014-05-27 리노공업주식회사 컨택트 프로브 및 그 제조방법
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TWI416114B (zh) 2013-11-21
CN101310190B (zh) 2011-05-18
TW200720665A (en) 2007-06-01
JP2007139524A (ja) 2007-06-07
KR100989300B1 (ko) 2010-10-22
JP3849948B1 (ja) 2006-11-22
CN101310190A (zh) 2008-11-19

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