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  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
  • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
  • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
  • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
  • H01L21/76808—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving intermediate temporary filling with material
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  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
  • H01L21/3105—After-treatment
  • H01L21/311—Etching the insulating layers by chemical or physical means
  • H01L21/31105—Etching inorganic layers
  • H01L21/31111—Etching inorganic layers by chemical means
  • H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
  • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
  • H01L21/321—After treatment
  • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
  • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
  • H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
  • H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
  • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
  • H01L21/76841—Barrier, adhesion or liner layers
  • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
  • H01L21/76847—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned within the main fill metal
• • H—ELECTRICITY
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  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
  • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
  • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
  • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
  • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
  • H01L21/76883—Post-treatment or after-treatment of the conductive material
• • H—ELECTRICITY
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  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
  • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
  • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
  • H01L23/5226—Via connections in a multilevel interconnection structure
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
  • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
  • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
  • H01L2924/0001—Technical content checked by a classifier
  • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

• the present invention is directed to the manufacture of semiconductor devices and particularly to the manufacture of metallurgy for integrated circuit devices.
• This invention relates to the formation of metallurgical interconnects for semiconductor devices, and particularly to the formation of contacts formed at the semiconductor surface which interface with metallurgy formed of copper-based metals.
• local interconnect trenches are etched into a first insulating layer deposited on top of a substrate having active devices.
• the etched trenches are filled with a liner/tungsten core to make contact with some portions of the substrate devices and polished to be coplanar with the first insulating layer to form the local interconnect (MC) .
• a second insulating layer is deposited and stud contact holes etched into it.
• the etched stud contact holes are filled with a liner/tungsten core and polished to be coplanar with a second insulating layer forming the stud contacts (CA) imbedded in the insulating layer which make contact with the local interconnect (MC) and also with additional portions of the devices.
• the first wiring level (Ml) is then formed by either a deposition and subtractive etch or by a damascene process requiring a third layer. This Ml wiring level makes contact with the stud contacts (CA) .
• a first aspect of the present invention provides a method of making an electronic device comprising the steps of providing a substrate on which contacts are to be formed; providing a conductive via comprised of a first conductive material formed in an oxide on the substrate; providing a dielectric layer on the conductive via; providing an oxide layer on the dielectric layer; providing a photoresist layer on the oxide layer; forming openings in the photoresist layer; removing the photoresist layer and removing in the openings the dielectric layer and the oxide layer and at least a portion of the first conductive material with a fluorine containing gas; and depositing a second conductive material in the openings to form a composite conductive via comprising the first conductive material and the second conductive material.
• the present invention can ameliorate the problem of increasing CA
• the invention can also provide a more reliable contact than in some known devices.
• the fluorine containing gas is preferably NF 3 , F 2 or SF 6 .
• the dielectric layer is a low-K SiCOH material.
• the low-K SiCOH material may be a porous ultra low-K material.
• the first conductive material is Tungsten and the second conductive material is Copper.
• the fluorine containing gas comprises approximately 500 seem of Argon and approximately 50 seem of NF 3 .
• the fluorine containing gas may further comprise approximately 10 seem O 2 and 50 seem of CH 2 F 2 or CH 3 F at a pressure of approximately 100 mTorr to approximately 200 mTorr.
• a second aspect of the invention provides a method of making an electronic device comprising the steps of: providing a substrate on which contacts are to be formed; providing a conductive via comprised of a first conductive material formed in an oxide on the substrate; providing a dielectric layer on the conductive via; providing an oxide layer on the dielectric layer; providing a photoresist layer on the oxide layer; forming openings in the photoresist layer; removing in the openings the dielectric layer and the oxide layer with a fluorocarbon containing gas; removing the photoresist layer; removing at least a portion of the first conductive material in the openings with a fluorine containing gas; and depositing a second conductive material in the openings to form a composite conductive via comprising the first conductive material and the second conductive material .
• Another aspect of the invention provides a method of making an electronic device comprising the steps of: providing a substrate on which contacts are to be formed; providing a conductive via comprised of a first conductive material formed in an oxide on the substrate; providing a dielectric layer on the conductive via; providing an oxide layer on the dielectric layer; providing a photoresist layer on the oxide layer; forming openings in the photoresist layer; removing in the openings the dielectric layer and the oxide layer with a fluorocarbon containing gas; removing the photoresist layer and removing in the openings a portion of the first conductive material with a fluorine containing gas; depositing a second conductive material in the openings to form a composite conductive via comprising the first conductive material and the second conductive material.
• the invention further provides, in another aspect, an electronic device comprising: a poly-silicon gate formed on a substrate; a composite stud via structure in contact with the poly-silicon gate, the composite stud via structure having a first portion and a second portion.
• the first portion is comprised of Tungsten and the second portion is comprised of Copper.
• the composite stud via structure is approximately 100 nanometers in width and approximately 2,000 angstroms in height. The first portion is approximately 500 angstroms in height.
• Figures 1 - 5 illustrate a conventional process for forming a stud contact interconnect
• Figures 6 - 9 illustrate a method for forming a stud contact interconnect according to the present invention.
• the present invention reduces the CA contact resistance by partially dry-etching back the tungsten CA contact after or during the Ml RIE process. The recessed CA contact is then subsequently metalized during the Ml liner/plating process. The present invention reduces the tungsten CA height after it has been fully formed. Reducing the CA height will have a significant impact on the CA contact resistance.
• SiCOH material with a TEOS (Tetraethyl Orthosilicate, Si (OC 2 H 5 ) 4 ) hard mask (HM).
• TEOS Tetraethyl Orthosilicate, Si (OC 2 H 5 ) 4
• HM hard mask
• SiCOH etch chemistry is NF3 based which is expected to readily etch W.
• the present invention discloses the etchback in the dielectric etch of Ml in order to lower the resistance of the tungsten contact.
• the recess of the tungsten is not a problem for subsequent metallization since the invention uses conventional liner/seed/plating processes that can reliably fill high aspect ratio features.
• a conductive via (CA) 15 in an oxide 20 there is shown a conductive via (CA) 15 in an oxide 20.
• the conductive material will be Tungsten (W) .
• the next level metal wires can now be created by a conventional damascene process which starts out with the deposition of a low-k dielectric film (Ml dielectric) 30 followed by the deposition of an oxide hardmask (Ml Hardmask) 40 and Ml photoresist 50.
• FIG. 3 there is shown the transfer of the Ml line pattern 60 into the dielectric 30 by Reactive Ion Etching (RIE) including a resist strip.
• RIE Reactive Ion Etching
• Figure 4 there is shown the conventional processing step of liner/seed/plating to form liner 70 and Ml wiring metal 80.
• Figure 5 there is shown the last conventional processing step of CMP to form the Ml wiring 90.
• the present invention can be used with the same dielectric deposition steps of the low-k material 30 and oxide hardmask 40, followed by the same lithography step as illustrated in Figure 2.
• the present invention deviates from the known art either during or after the RIE step.
• a first embodiment of the present invention is to use a fluorine containing gas (but not a fluorocarbon based gas) such as NF3, F2 or SF6 to selectively etch the low-k dielectric 30 to oxide 20.
• a fluorine containing gas such as NF3, F2 or SF6
• the low-k dielectric 30 is a SiCOH-like material, and could be a porous-ULK material.
• the resist selectivity during this RIE step will be low and the critical dimension (CD) control in this case is provided by the oxide hardmask 40 which exhibits a low etch rate in these fluorine-based chemistries.
• the fluorine based chemistry can also etch the CA tungsten 15 as well as the CA liner 10. Therefore, the low-k over etch can be used to recess the CA tungsten via to the desired depth. Since the etch rate of resist is high in these chemistries, it can be completely consumed before or during the low-k over etch and no additional resist strip is required.
• This selective Ml RIE process is compatible with conventional etch tools such as parallel plate and medium density plasma RIE tools.
• the etch gases comprise approximately 500 seem of Ar and approximately 50 seem of NF 3 .
• small amounts of O2 and CH 2 F 2 or CH 3 F may be added.
• the latter additions can help maintain the critical dimensions or increase the selectivity to the oxide hardmask or resist.
• the pressure is approximately 100 to 200 mTorr with a power of about 500W for both 27 and 2 MHz frequencies.
• Another embodiment of the present invention is to follow known art after the lithography step.
• fluorine-based chemistry NF3, F2, SF6
• the known art is followed after the lithography step.
• the next step would be to recess the CA tungsten 15 and liner 10 which also strips the remaining photoresist materials 50.
• Figure 6 shows the final results in cross section.
• Figure 7 shows a top-down view for these three embodiments illustrating the partially exposed CA tungsten 15 and liner 10 in the recessed trench formed in the low-k dielectric 30 and oxide hardmask 40.
• the metallization of this structure is achieved by the known art discussed above.
• the CA stud interconnect is now a composite structure of two conductive materials.
• the conductive materials are Tungsten and Copper.
• the composite stud structure is approximately 100 nanometers in width and approximately 2,000 angstroms in height and the Tungsten portion is approximately 500 angstroms in height.
• This composite CA stud contact will have a lower contact resistance than a conventional contact.
• a 2,000 angstrom high and 95nm wide conventional Tungsten CA stud has an estimated contact resistance of 19 ohms. Approximately a third of this resistance is from W conductivity. If the Tungsten CA is etch backed to a 500 angstrom height, the contact resistance will drop from 19 to 13 ohms.
• Another advantage is that the contact area between any misaligned (and recessed) CA stud and the Ml line is increased. Besides a lower contact resistance between the copper line and the CA stud, this also provides a more reliable contact.

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• Engineering & Computer Science (AREA)
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• Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
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• Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
• Connections Arranged To Contact A Plurality Of Conductors (AREA)

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