WO2007012472A8 - Verfahren zur herstellung von funktionalen fluor-kohlenstoff-polymerschichten mittels plasmapolymerisation von perfluorocycloalkanen - Google Patents

Verfahren zur herstellung von funktionalen fluor-kohlenstoff-polymerschichten mittels plasmapolymerisation von perfluorocycloalkanen

Info

Publication number
WO2007012472A8
WO2007012472A8 PCT/EP2006/007359 EP2006007359W WO2007012472A8 WO 2007012472 A8 WO2007012472 A8 WO 2007012472A8 EP 2006007359 W EP2006007359 W EP 2006007359W WO 2007012472 A8 WO2007012472 A8 WO 2007012472A8
Authority
WO
WIPO (PCT)
Prior art keywords
perfluorocycloalkanes
polymer layers
plasma polymerization
fluorocarbon polymer
producing functional
Prior art date
Application number
PCT/EP2006/007359
Other languages
English (en)
French (fr)
Other versions
WO2007012472A1 (de
Inventor
Michael Haupt
Jakob Barz
Christian Oehr
Original Assignee
Fraunhofer Ges Forschung
Michael Haupt
Jakob Barz
Christian Oehr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Michael Haupt, Jakob Barz, Christian Oehr filed Critical Fraunhofer Ges Forschung
Priority to US11/995,479 priority Critical patent/US20090130330A1/en
Priority to EP06776416A priority patent/EP1912747A1/de
Publication of WO2007012472A1 publication Critical patent/WO2007012472A1/de
Publication of WO2007012472A8 publication Critical patent/WO2007012472A8/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2506/00—Halogenated polymers
    • B05D2506/10—Fluorinated polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zur Herstellung von Fluor-Kohlenstoffschichten auf einem Substrat, zum Beispiel einem Metall, Polymer, keramisches Material und/oder Textilien mittels eines Niederdruck-Plasmaverfahrens sowie auf diese Weise hergestellte Produkte.
PCT/EP2006/007359 2005-07-26 2006-07-26 Verfahren zur herstellung von funktionalen fluor-kohlenstoff-polymerschichten mittels plasmapolymerisation von perfluorocycloalkanen WO2007012472A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/995,479 US20090130330A1 (en) 2005-07-26 2006-07-26 Method for producing Functional Fluorocarbon Polymer Layers by Means of Plasma Polymerization of Perfluorocycloalkanes
EP06776416A EP1912747A1 (de) 2005-07-26 2006-07-26 Verfahren zur herstellung von funktionalen fluor-kohlenstoff-polymerschichten mittels plasmapolymerisation von perfluorocycloalkanen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005034764A DE102005034764B4 (de) 2005-07-26 2005-07-26 Verfahren zur Herstellung von funktionalen Fluor-Kohlenstoff-Polymerschichten mittels Plasmapolymerisation von Perfluorocycloalkanen und damit beschichtete Substrate
DE102005034764.9 2005-07-26

Publications (2)

Publication Number Publication Date
WO2007012472A1 WO2007012472A1 (de) 2007-02-01
WO2007012472A8 true WO2007012472A8 (de) 2007-05-10

Family

ID=37102966

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/007359 WO2007012472A1 (de) 2005-07-26 2006-07-26 Verfahren zur herstellung von funktionalen fluor-kohlenstoff-polymerschichten mittels plasmapolymerisation von perfluorocycloalkanen

Country Status (5)

Country Link
US (1) US20090130330A1 (de)
EP (1) EP1912747A1 (de)
KR (1) KR20080030621A (de)
DE (1) DE102005034764B4 (de)
WO (1) WO2007012472A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101180497B1 (ko) * 2002-11-29 2012-09-06 안드레아스 야콥 중간층 및 지지층을 갖는 웨이퍼 및 웨이퍼를 처리하기위한 방법 및 장치
DE102007018716A1 (de) 2007-04-20 2008-10-23 Schaeffler Kg Verfahren zum Aufbringen einer verschleißfesten Beschichtung
FR2923494B1 (fr) * 2007-11-09 2010-01-15 Hutchinson Membranes imper-respirantes et leur procede de fabrication
EP2422887A1 (de) * 2010-08-27 2012-02-29 Oticon A/S Verfahren zur Beschichtung einer Oberfläche mit einer wasser- und ölabstoßenden Polymerschicht
DE102012007787B4 (de) 2012-04-20 2016-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wintersportausrüstung, Verfahren zu deren Herstellung und Verwendung einer Beschichtung
DE102012208941A1 (de) 2012-05-29 2013-12-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Eisspeicher mit verbessertem Wärmetauscher
DE102012025087B4 (de) 2012-12-20 2019-05-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Rotorblatt mit einer gefrierpunktserniedrigenden Anti-Eis-Beschichtung, Rotor, Gerät, Verfahren zur Herstellung eines beschichteten Rotorblatts und Verwendung einer Beschichtung
DE102013200272A1 (de) * 2013-01-10 2014-07-10 Kässbohrer Geländefahrzeug AG Hydrophobiertes Kraftfahrzeugbauteil für Pistenpflegefahrzeuge, Verfahren zur Herstellung eines hydrophobierten Kraftfahrzeugbauteils und Pistenpflegefahrzeug mit einem hydrophobierten Kraftfahrzeugbauteil
DE102013209709A1 (de) 2013-05-24 2014-11-27 BSH Bosch und Siemens Hausgeräte GmbH Beschichtung von gebrauchsoberflächen mit plasmapolymeren schichten unter atmosphärendruck zur verbesserung der reinigbarkeit
DE102013219903A1 (de) 2013-10-01 2015-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Oberflächenbeschichtung mit Seltenerdmetalloxiden
DE102014220872A1 (de) 2014-10-15 2016-04-21 Christof Diener Ölanziehendes Lager mit oberflächenmodifiziertem Teil aus nichtrostendem Wälzlagerstahl
CN106868473B (zh) * 2017-01-23 2018-07-13 江苏菲沃泰纳米科技有限公司 一种梯度递减结构防液涂层的制备方法
CN106835075B (zh) * 2017-01-23 2018-04-20 江苏菲沃泰纳米科技有限公司 一种梯度递增结构防液涂层的制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4391843A (en) * 1981-08-14 1983-07-05 Rca Corporation Adherent perfluorinated layers
DE3326376A1 (de) * 1983-07-22 1985-01-31 Siemens AG, 1000 Berlin und 8000 München Verfahren zum erzeugen von glimmpolymerisat-schichten
DE3921652A1 (de) * 1989-06-30 1991-01-17 Siemens Ag Erzeugung von polymerbeschichtungen auf duesenplatten fuer drucker und schreibgeraete
US5773098A (en) * 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
JP3429171B2 (ja) * 1997-11-20 2003-07-22 東京エレクトロン株式会社 プラズマ処理方法及び半導体デバイスの製造方法
US5900290A (en) * 1998-02-13 1999-05-04 Sharp Microelectronics Technology, Inc. Method of making low-k fluorinated amorphous carbon dielectric
US6007588A (en) * 1998-02-17 1999-12-28 Valence Technology, Inc. Methods for coating current collector with polymeric adhesives
EP1260863A1 (de) * 2001-05-23 2002-11-27 Scandinavian Micro Biodevices Mikrostrukturierung von plasma-polymerisierten Beschichtungen
US7335185B2 (en) * 2003-07-18 2008-02-26 Boston Scientific Scimed, Inc. Protective coatings for medical devices

Also Published As

Publication number Publication date
WO2007012472A1 (de) 2007-02-01
US20090130330A1 (en) 2009-05-21
DE102005034764B4 (de) 2012-08-02
EP1912747A1 (de) 2008-04-23
KR20080030621A (ko) 2008-04-04
DE102005034764A1 (de) 2007-02-01

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