WO2006129481A1 - Epurateur de gaz ayant une cuve armee - Google Patents

Epurateur de gaz ayant une cuve armee Download PDF

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Publication number
WO2006129481A1
WO2006129481A1 PCT/JP2006/309803 JP2006309803W WO2006129481A1 WO 2006129481 A1 WO2006129481 A1 WO 2006129481A1 JP 2006309803 W JP2006309803 W JP 2006309803W WO 2006129481 A1 WO2006129481 A1 WO 2006129481A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
mantle
sealing plate
purified
fluororesin
Prior art date
Application number
PCT/JP2006/309803
Other languages
English (en)
Japanese (ja)
Inventor
Fumio Nozaki
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Publication of WO2006129481A1 publication Critical patent/WO2006129481A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases

Definitions

  • the present invention relates to a gas purifier, and more particularly to a perfluorinated gas purifier for purifying tallying gas such as halogen gas and ozone gas.
  • a cleaning gas such as fluorine gas or halogen gas such as fluorine or chlorine, or ozone gas is flowed into the semiconductor manufacturing apparatus to clean the semiconductor manufacturing apparatus, so that metal particles and other contaminants adhered to the apparatus. It is done to clean up.
  • gases especially fluorine gas (F) and ozone, have a strong oxidizing action, especially when they contain moisture,
  • a purifier for removing gaseous metal contaminants and moisture has been developed.
  • a purification apparatus is filled with an adsorbent such as high silica zeolite to adsorb and purify contaminated metal particles and the like to produce clean halogen gas (Patent Document 1).
  • an adsorbent such as high silica zeolite to adsorb and purify contaminated metal particles and the like to produce clean halogen gas
  • Patent Document 1 Although stainless steel is known as a material constituting the container of the refining apparatus, a tapping gas such as fluorine gas is not preferable because it can corrode the stainless steel container and cause metal contamination.
  • Patent Document 1 Special Table 2003- 530287 Specification
  • cleaning gas such as fluorine gas is very reactive, and especially when moisture is attached to the piping system, metal pipes corrode to produce contaminants such as metal particles.
  • the purification equipment In order to remove gaseous metal contaminants and moisture, the purification equipment should be filled with an adsorbent such as high silica zeolite to adsorb and purify gaseous contaminated metal particles to produce clean halogen gas, etc. Is effective (Patent Document 1), and contamination of the reaction chamber of the semiconductor manufacturing equipment can be further prevented by configuring the refining device with fluorine-based resin.
  • fluorine-based resin is halogen gas, ozone gas, especially fluorine gas. It is slightly permeable to water, and the nitrogen gas leaks to the outside through the wall of the refining equipment, contaminates the work environment such as clean rooms, corrodes surrounding metals, and causes health problems. That.
  • an object of the present invention is to provide an excellent gas purification apparatus free from environmental pollution.
  • the gas purification apparatus of the present invention includes a cylindrical body made of fluorine resin, an end plate made of fluorine resin integrally provided at both ends of the body, and a raw material gas penetrating the both end plates.
  • a gas purification apparatus comprising a gas inlet member and a purified gas outlet member made of fluorine resin having an inlet and a purified gas outlet, and containing a gas purification material in a space surrounded by the body and both end plates.
  • the gas purification apparatus characterized by airtightly providing a corrosion-resistant metal mantle around the body portion prevents leakage of halogen gas or ozone gas and solves the problem of environmental pollution.
  • the corrosion-resistant metal forming the jacket here is preferably made of stainless steel. More preferably, a space is formed between the cylindrical body and the end plate and the corrosion-resistant metal sheath, and an adsorbent capable of trapping the halogen gas is accommodated therein.
  • the gas purifying apparatus has a cylindrical body made of fluororesin, an end plate made of fluororesin integrally provided at both ends of the body, and a raw material gas inlet penetrating the both end plates.
  • the gas inlet member made of fluorine resin having the purified gas outlet and the purified gas outlet member, and other members that directly contact the gas to be purified such as halogen gas are all made of fluorine resin. Examples of such a fluorine resin include thermoplastic fluorine resins that melt upon heating.
  • tetrafluoroethylene / perfluoroalkyl butyl ether copolymer PFA
  • FEP tetra Fluoropolymerized Tylene Hexafluoropropylene Copolymer
  • EPE Tetrafluorinated Tylene Perfluoroalkyl Bulle Ether Copolymer
  • EPE Hexafluoropropylene Copolymer
  • Patent Document 1 proposes an aluminosilicate zeolite, particularly a silicate zeolite having a high silica Z alumina ratio.
  • zeolite having a silica Z alumina ratio of 10 or more is considered to be sufficiently stable.
  • one type of zeolite having a high silica Z-alumina ratio used for removing trace moisture is UOP's AW-300 type molecular sieve, which is available on the market. For details, see the same document.
  • the outer shell made of corrosion-resistant metal, particularly stainless steel, which is disposed around the container including the cylindrical body and the end plate, has a lower resistance to halogen gas than that of fluorine resin. It has excellent barrier properties against There may be a space between the fluorine resin container and the corrosion-resistant metal jacket to hold the minute halogen gas that leaks out, but use an adsorbent that absorbs and holds the halogen gas. It is preferable to do.
  • the adsorbent is granular white leopard GOC (trade name, manufactured by Nippon Enbiguchi Chemical Co., Ltd.), because there is no risk of powder generation due to activated carbon consumption due to the combination of activated carbon and ceramic for ozone adsorption. It is commercially available.
  • granular white birch XRC (trade name, manufactured by Nippon Environmental Chemical Co., Ltd.), which has higher soot removal efficiency than ordinary activated carbon, is now on the market! RU
  • the refining device further includes a sealing plate that is in contact with the one end plate on the outlet member side, and a lock nut that engages with an outer peripheral portion of the sealing plate and has an internal screw.
  • the outer sleeve has an annular end at one end and an outer screw at the other end, and the inner screw of the lock nut is screwed to the outer screw of the outer jacket via the sealing plate. Thereby, the outer jacket is sealed.
  • the outer peripheral surface of the sealing plate is in contact with the inner surface of the mantle, and the upstream end plate and the annular portion, the downstream end plate and the sealing plate, and the outer periphery of the sealing plate And a seal ring is inserted between the inner surface of the outer jacket and Assembling of the mantle and the sealing plate is facilitated, and a high sealing effect can be achieved.
  • FIG. 1 illustrates a gas purification apparatus 1 for halogen gas or ozone gas according to a preferred embodiment of the present invention.
  • the gas purification apparatus 1 is filled with purified material particles 2 such as zeolite to remove gas-like metal particles to be purified such as halogen gas.
  • the gas refining device 1 is made of a fluorocarbon resin such as PFA, and has a cylindrical body 3 and substantially disc-shaped end plates 5 and 7 provided at both ends of the body, and these end plates.
  • the gas inlet member 9 and the gas outlet member 11 are formed integrally with each other, and the end plate force penetrates these members to form an inlet passage 16 and an outlet passage 17, respectively.
  • the joints 13 and 15 between the body 3 and the end plates 5 and 7 are heat-sealed to form an airtight container.
  • a small cylinder 23 made of fluorine resin such as PFA having a trapezoidal portion provided with a large number of through holes 19 is arranged in the gas inlet member 9, and is fused or screwed to the inner wall of the inlet passage 16 of the inlet member 9. It is bound. This is because the small cylinder 23 enables the introduction of the raw material gas to be purified, such as a norologene gas, while suppressing the adsorbent 2 inside the barrel 3 from falling off. Similarly, a cylinder 27 made of fluorine resin such as PFA having a large number of through holes 25 on the downstream side is connected to the inner end of the outlet member 11 by screw bonding or fusion, and the upstream end of the cylinder 27 is closed. Has been.
  • the upstream small porous cylinder 23 is relatively coarse and has pores, but the downstream porous cylinder 27 has fine particles and pores that do not allow fine powder of purified material to pass through.
  • the inner cylinder 29 is inserted with a smaller number of pores inside the porous cylinder 27 and a filter such as PTFE or a filtration membrane 30 attached to the outside. It prevents fine powder of fine wood (and metal particles adsorbed on it, moisture and other contaminants).
  • the details of the inner cylinder 29 are as follows.
  • a large number of small ribs 32 extend in the circumferential direction to form a small groove 34 therebetween, and the top surface of the small ribs 32 is a filtration membrane 30. Is supported.
  • the inner cylinder 29 is formed with three openings 36 extending in the axial direction and penetrating the cylinder.
  • Reference numeral 38 denotes a reinforcing rib extending in the axial direction.
  • the gas refinement of the present invention filled with the purification material 2 is used. In order to maintain the cleanliness of the manufacturing apparatus 1 until it is actually installed on the site, caps or stoppers are provided on the gas inlet member and outlet member.
  • a cylindrical mantle 31 having a corrosion-resistant metal force such as stainless steel is attached around the body 3 and the end plates 5 and 7.
  • An upstream end of the mantle 31 is an annular end plate 33 having a central opening, and an outer screw 35 is provided on a peripheral portion on the downstream side of the mantle.
  • a similar metal material sealing plate 37 is provided on the downstream side, and a similar metal material lock nut 41 having an inner screw 39 is disposed on the outer periphery of the sealing plate 37, and the inner and outer screws 35, 39.
  • a fluorine resin seal ring 43 is provided between the end plate 5 and the annular end plate 33, and a seal ring 45 is provided between the end plate 7 and the sealing plate 37. Seal rings 47 are respectively provided between the inner surfaces of the outer ends of the mantles.
  • a gap 49 is formed between the outer peripheral surface of the body portion 3 and the end plates 5 and 7 and the inner surface of the outer cannula 31.
  • This space preferably has adsorptivity to purified gas. Store the adsorbent.
  • a fluorine gas (F) containing a halogen gas such as moisture, fine metal powder, or a gaseous metal component is introduced into the raw material gas inlet 16, and is made of an all-fluorine resin.
  • the halogen gas from which fine powder has been removed passes through the porous 25 provided in the cylinder 27, and further passes through a filtration membrane 30 such as PTFE attached to the outside of the inner cylinder, and then goes out to the gas outlet passage 17 as a purified gas flow. come.
  • the purified gas is led to a semiconductor manufacturing apparatus through appropriate piping.
  • FIG. 1 is a sectional view of a gas purification apparatus for halogen gas or ozone gas according to a preferred embodiment of the present invention.
  • FIG. 2 This is an enlarged view of the inner cylinder shown in FIG. 1, and the filtration membrane below the center line is omitted for easy viewing.
  • FIG. 3 is a sectional view taken along line AA ′ of FIG.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Treating Waste Gases (AREA)

Abstract

L'invention porte sur un épurateur de gaz permettant d'enlever par adsorption les particules métalliques d'encrassement gazeux, etc. afin de produire un gaz halogène ou autre propre. Les épurateurs de gaz conventionnels présentent un problème lié à leur constitution en résine fluorée. Dans la mesure où les résines fluorées sont légèrement perméables au gaz halogène et au gaz d'ozone, les gaz halogène fuient à travers la paroi de la cuve dans l'épurateur et contamine l'atmosphère de travail dans par exemple une salle propre, corrode les métaux avoisinants et cause des risques sanitaires, etc. L'invention concerne donc un épurateur de gaz comprenant une partie baril constituée de résine fluorée, des plaques latérales faites en résine fluorée, jointes respectivement aux deux extrémités de la partie baril, et un élément d'entrée de gaz de même qu'un élément de sortie de gaz épuré, tous deux constitués d'une résine fluorée, et possédant respectivement une entrée de gaz d'alimentation et une sortie de gaz épuré qui s'étendent à travers les deux plaques latérales respectivement, où un matériau d'épuration de gaz est logé dans l'espace entouré par la partie baril et les deux plaques latérales. La partie baril possède une gaine métallique résistante à la corrosion, étanche aux gaz et faisant tout le pourtour pour empêcher toute fuite du gaz épuré.
PCT/JP2006/309803 2005-05-30 2006-05-17 Epurateur de gaz ayant une cuve armee WO2006129481A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-156905 2005-05-30
JP2005156905 2005-05-30

Publications (1)

Publication Number Publication Date
WO2006129481A1 true WO2006129481A1 (fr) 2006-12-07

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TW (1) TW200709839A (fr)
WO (1) WO2006129481A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013139607A (ja) * 2012-01-05 2013-07-18 Central Glass Co Ltd ガス生成装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62247294A (ja) * 1986-04-21 1987-10-28 株式会社東芝 トリチウム漏洩防止装置
JPS6351918A (ja) * 1986-08-22 1988-03-05 Tadahiro Omi 半導体製造装置用ガス精製器
JPH0570606U (ja) * 1992-02-28 1993-09-24 鐘紡株式会社 二重構造濾過装置
JPH0641609Y2 (ja) * 1990-04-13 1994-11-02 株式会社ロキテクノ 使い捨て型濾過器
JP2003530287A (ja) * 2000-04-05 2003-10-14 マセソン トリ − ガス、インコーポレイテッド 低金属ゼオライトを使用してガスから金属不純物を除去する方法
JP2004057997A (ja) * 2002-07-31 2004-02-26 Nippon Mykrolis Kk 気体浄化フィルターユニット及びその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62247294A (ja) * 1986-04-21 1987-10-28 株式会社東芝 トリチウム漏洩防止装置
JPS6351918A (ja) * 1986-08-22 1988-03-05 Tadahiro Omi 半導体製造装置用ガス精製器
JPH0641609Y2 (ja) * 1990-04-13 1994-11-02 株式会社ロキテクノ 使い捨て型濾過器
JPH0570606U (ja) * 1992-02-28 1993-09-24 鐘紡株式会社 二重構造濾過装置
JP2003530287A (ja) * 2000-04-05 2003-10-14 マセソン トリ − ガス、インコーポレイテッド 低金属ゼオライトを使用してガスから金属不純物を除去する方法
JP2004057997A (ja) * 2002-07-31 2004-02-26 Nippon Mykrolis Kk 気体浄化フィルターユニット及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013139607A (ja) * 2012-01-05 2013-07-18 Central Glass Co Ltd ガス生成装置
US9708720B2 (en) 2012-01-05 2017-07-18 Central Glass Company, Limited Gas generation device

Also Published As

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TW200709839A (en) 2007-03-16

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