WO2006048379A1 - Vakuumpumpen-laufrad - Google Patents
Vakuumpumpen-laufrad Download PDFInfo
- Publication number
- WO2006048379A1 WO2006048379A1 PCT/EP2005/055413 EP2005055413W WO2006048379A1 WO 2006048379 A1 WO2006048379 A1 WO 2006048379A1 EP 2005055413 W EP2005055413 W EP 2005055413W WO 2006048379 A1 WO2006048379 A1 WO 2006048379A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rotor
- shaft
- vacuum pump
- pump impeller
- cavity
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/02—Blade-carrying members, e.g. rotors
- F01D5/025—Fixing blade carrying members on shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F05D2230/21—Manufacture essentially without removing material by casting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F05D2230/25—Manufacture essentially without removing material by forging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/122—Beryllium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/171—Steel alloys
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Definitions
- the invention relates to a vacuum pump impeller with a steel shaft and a shaft-mounted one-piece rotor made of a material other than the shaft steel, and to a method for producing a vacuum pump impeller.
- Vacuum Pumps are known in various designs, for example as screw-type impellers, turbo-impellers, Wälzkolben-impellers, side-channel impellers, among others. Vacuum pump wheels can be designed to be free-flowing, ie. the impeller is supported only at one axial end, so that ) _
- the rotor is arranged to fly.
- the wheels are sometimes operated at high speeds, so that large radial forces can occur.
- the lowest possible weight, in particular of the rotor with the greatest possible strength and rigidity of the shaft is sought for these reasons.
- This is realized in practice in that on the outside of the steel shaft, the rotor is attached, which consists of the lightest possible material, such as aluminum. Since the rotor can expand in operation by high temperatures and centrifugal forces stronger than the shaft, a permanent and backlash-free fixation of the rotor to the shaft is difficult and expensive to produce, for example by welding, soldering, gluing, serrations with axial clamping, by tie rods, Etc.
- the object of the invention is in contrast to provide a vacuum pump impeller and a method for its production, which allows a simple and permanent fixation of the rotor on the shaft.
- the shaft has an axial cavity at one axial end and the rotor has a corresponding axial projection which sits positively and / or non-positively in the axial cavity of the shaft.
- the rotor is thus no longer fixed on the outside of the shaft, but fixed substantially on the inside of a sleeve-shaped portion of the hollow steel shaft.
- the weight of the impeller is kept low, which simplifies storage, especially at high speeds, with which, for example, turbocharged wheels are operated. With the impeller according to the invention therefore higher speeds and / or reduced weight or reduced size of the impeller can be realized.
- the rotor lug and the shaft in the cavity in each case on formations which form a positive engagement with each other in the axial direction and / or in the circumferential direction.
- a safe and easy to produce connection between the rotor and shaft is made.
- the rotor is a casting
- the approach is poured into the shaft cavity.
- the shaft with its part having the cavity is placed in a molding box, and then the liquid rotor material is introduced into the rotor molding box, whereby the liquid rotor material runs into the shaft cavity.
- the formations in the cavity of the shaft are transferred to the rotor approach already during the casting of the rotor.
- Another operation for fixing the rotor to the shaft is eliminated. This in turn reduces the weight and avoids a source of imbalance.
- the formations are formed as grooves and webs.
- the grooves and lands may be arranged in the axial and circumferential directions, but may be arranged to extend in other directions.
- the exact shape and orientation of the webs and grooves depends inter alia on the thermal expansion behavior of the rotor and shaft materials used, the - A -
- the wall thickness of the wave-Hulse decreases towards the opening steadily, so that the stiffness of the shaft end decreases towards the cavity opening and the axial cavity opening is radially relatively elastic.
- the risk of breakage of the rotor approach is significantly reduced in this area, so that a correspondingly small dimensions and thus a reduction in weight of the rotor approach can be realized.
- the area of decreasing wall thickness may be less than 1 / io in relation to the total length of the shaft, but should be at least 3 mm.
- the vacuum pump impeller may have two shafts which are each arranged at an axial end of the rotor. Preferably, however, only a single shaft is provided, which holds an axial end of the rotor. In this way, a floating storable vacuum pump impeller is provided, in which the weight savings achievable by the construction according to the invention are particularly advantageous.
- the rotor material is a light metal or a plastic.
- the rotor material In forming the rotor as a casting, the rotor material must have a melting temperature that allows pouring of the rotor material into the shaft cavity without damaging the steel shaft.
- the rotor In addition to light metal, in particular aluminum, the rotor may also consist of a plastic or of a fiber-reinforced plastic. - ;; -
- the shaft having an axial cavity is loaded in a rotor forging die, the glowing rotor forging material is forged into the rotor forging die and into the cavity of the rotor, and finally becomes the vacuum pump impeller taken from the forge.
- FIG. 1 shows a first embodiment of a vacuum pump impeller with a cast into the shaft and then machined machined rotor in longitudinal section
- FIG 2 shows the shaft of the vacuum pump impeller of Figure 1 in
- Figure 3 shows a second embodiment of a vacuum pump impeller in
- Figure 4 shows a third embodiment of a vacuum pump impeller in
- Figure 5 shows a fourth embodiment of a vacuum pump impeller in
- a vacuum pump impeller 10 which forms one of two impellers of a screw vacuum pump.
- the impeller 10 consists essentially of two parts, namely a one-piece aluminum rotor 12 and a one-piece steel shaft 14 which is formed over its entire length as a hollow shaft. With a broken line in the figure 1, the contour of the shaft 14 'and the rotor 12' is shown, which they have immediately after the casting of the rotor and before a machining operation. _ ⁇ ...
- the rotor 12 has two sections in its longitudinal direction, namely a projection 16 and an active member 18, which has a helical structure 20 radially on the outside.
- the shaft 14 has over its entire length a slightly conical and / or cylindrical cavity 22, in which the projection 16 of the rotor 12 is molded positively.
- longitudinal ridges 24 and transverse webs 26 are arranged as recesses, which engage in corresponding longitudinal groove 28 and transverse grooves 30 of the projection 16 as recesses.
- the shaft end 32 may, as shown, be formed axially toothed, in order to be able to transmit high torques from the shaft 14 to the rotor 12 in this way, provided that the formschiussigen connections via the transverse webs and grooves 24,26,28, 30 are not enough.
- the shaft end 32 is inclined both externally and internally to the axial at an angle of about 5 °.
- the vacuum pump impeller 10 In the manufacture of the vacuum pump impeller 10 is first a blank of the time 14 ', which is shown in Figure 2, placed in a molding box, the mold box closed and filled the rotor material aluminum liquid in the molding box. In this case, the liquid aluminum also flows into the shaft cavity 22 and thereby assumes an outer shape complementary to the shaft-side webs 24, 26. After cooling, the rotor 12 "and - H -
- the hollow shaft 14 may act as a cooling iron when casting the rotor 12, with. a targeted cooling process of the rotor and thus a higher pore purity and a better Gefuge in the rotor material can be realized.
- the impeller can also be produced by a sintering process carried out in an analogous manner.
- FIG 3 shows a second embodiment of a vacuum pump impeller 50, which is formed from a radial compressor rotor 52 and a hollow shaft 54 shown in broken lines.
- the conical rotor lug 56 is cast into the conical shaft cavity 58.
- the form gleichige connection between the rotor 52 and shaft 54 is effected by webs and grooves in the longitudinal and circumferential direction.
- the rotor 52 machined to the rotor rotor blank 52 ' is with. shown by solid lines.
- FIG. 4 likewise shows a radial compressor rotor 60, the rotor 62 of which already has blades 66 by means of casting, and inter alia by lost wax, according to the preamble, on which only the outer contour still has to be machined.
- the shaft 64 has a hollow portion 67 which does not extend over the entire wavelength but only over about one c, _
- a conical or cylindrical axial cavity 65 is provided, in which a conical or cylindrical axial projection 63 of the rotor 62 is seated,
- the positive connection between the rotor 62 and the shaft 64 is produced by at least one eccentric rotor pin 68 which is seated in a corresponding number of eccentric recesses 69 of the shaft 64.
- the pins must be arranged so that sets as far as possible mass balance, z. B. by two over 180 ° offset or offset by three over 120 ° pin, in Figure 4 is shown to the overall understanding, only one pin.
- the shaft blank 64 'and the rotor blank are shown in solid lines, the machined rotor 62 and the machined shaft 64, respectively, are shown in broken lines.
- a vacuum pump impeller 80 having a diagonal compressor rotor 82 and a shaft 84 having an axial cavity 86 extending only about one third of the axial length of the shaft 84.
- the shaft cavity 86 sits a corresponding projection 88 of the rotor 82.
- the unprocessed rotor 82 'and the unprocessed shaft 84' are shown in solid lines, the machined rotor 82 and the machined shaft 84 are shown in broken lines.
- the rotor 82 of the impeller 80 of FIG. 5 is a forging made of, for example, aluminum and hot forged in a die in which the shaft 84 is inserted with its cavity 88.
- the strength of the rotor is improved not only by the forging process, but also by a radial serrated shaft collar 90 which reduces the centrifugal force stresses and balancing - IO -
- a collar 92 may additionally be formed, which performs an axial fixation with the corresponding counter-groove 94 of the shaft.
- the corrosion resistance of an aluminum rotor can basically be improved by anodising or hard anodizing.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/666,980 US20070297907A1 (en) | 2004-11-04 | 2005-10-10 | Vacuum Pump Impeller |
EP05801520A EP1815145A1 (de) | 2004-11-04 | 2005-10-20 | Vakuumpumpen-laufrad |
JP2007538389A JP2008519191A (ja) | 2004-11-04 | 2005-10-20 | 真空ポンプインペラ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004053289A DE102004053289A1 (de) | 2004-11-04 | 2004-11-04 | Vakuumpumpen-Laufrad |
DE102004053289.3 | 2004-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006048379A1 true WO2006048379A1 (de) | 2006-05-11 |
Family
ID=35645593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2005/055413 WO2006048379A1 (de) | 2004-11-04 | 2005-10-20 | Vakuumpumpen-laufrad |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070297907A1 (de) |
EP (1) | EP1815145A1 (de) |
JP (1) | JP2008519191A (de) |
KR (1) | KR20070083878A (de) |
DE (1) | DE102004053289A1 (de) |
WO (1) | WO2006048379A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2096317A1 (de) | 2008-02-27 | 2009-09-02 | VARIAN S.p.A. | Verfahren zur Herstellung der Rotoranordnung einer Rotationsvakuumpumpe |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2462275A (en) * | 2008-07-31 | 2010-02-03 | Cummins Turbo Tech Ltd | A method of connection a turbine shaft to a rotor |
GB2473824B (en) | 2009-09-23 | 2015-12-23 | Edwards Ltd | Preventing pump parts joining by corrosion |
US9127694B2 (en) | 2011-09-09 | 2015-09-08 | Woodward, Inc. | High-flow electro-hydraulic actuator |
JP6111746B2 (ja) * | 2013-03-07 | 2017-04-12 | 株式会社島津製作所 | 真空ポンプ |
DE202013010209U1 (de) * | 2013-11-12 | 2015-02-16 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-Welle |
US10119478B2 (en) | 2015-06-25 | 2018-11-06 | Woodward, Inc. | High reliability high flow redundant trip block |
DE102015224603A1 (de) * | 2015-12-08 | 2017-06-08 | Mahle International Gmbh | Läufer für eine Pumpvorrichtung |
US10295042B2 (en) * | 2016-01-06 | 2019-05-21 | Hamilton Sundstrand Corporation | Tuned RAT driveshaft |
KR102172654B1 (ko) * | 2018-11-27 | 2020-11-02 | 한국가스공사 | Lng펌프용 임펠러의 마모링 어셈블리 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE471417C (de) * | 1929-02-12 | Bbc Brown Boveri & Cie | Fliegend angeordnetes Laufrad fuer Einraddampf- oder Gasturbinen | |
GB536245A (en) * | 1940-04-22 | 1941-05-07 | Frederic Drury Wayre | Improvements in or relating to apparatus comprising a rotary shaft and intended for dealing with corrosive fluids |
GB1422426A (en) * | 1973-06-22 | 1976-01-28 | Penny Turbines Ltd Noel | Compressor rotor |
JPS6278402A (ja) * | 1985-09-30 | 1987-04-10 | Kyocera Corp | セラミツクタ−ボロ−タ |
US4749334A (en) * | 1984-12-06 | 1988-06-07 | Allied-Signal Aerospace Company | Ceramic rotor-shaft attachment |
JPH02173322A (ja) * | 1988-12-23 | 1990-07-04 | Toyota Motor Corp | ターボチャージャ用タービンホイール |
US20040009072A1 (en) * | 2002-03-02 | 2004-01-15 | Daimlerchrysler Ag | Method for manufacturing a turbine wheel rotor |
US6754954B1 (en) * | 2003-07-08 | 2004-06-29 | Borgwarner Inc. | Process for manufacturing forged titanium compressor wheel |
Family Cites Families (21)
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US1549218A (en) * | 1924-06-06 | 1925-08-11 | Raym Willibald | Casting process for incorporating shafts, journals, or the like |
US2669938A (en) * | 1953-02-19 | 1954-02-23 | Bour Company Inc | Impeller and shaft construction |
US3063743A (en) * | 1959-02-19 | 1962-11-13 | Skf Svenska Kullagerfab Ab | Press fitting joint |
GB1112406A (en) * | 1963-11-13 | 1968-05-08 | Minister Of Aviation Uk Government | Improvements in or relating to stirring devices |
FR1405340A (fr) * | 1964-05-27 | 1965-07-09 | Commissariat Energie Atomique | Jonction étanche |
DE2527498A1 (de) * | 1975-06-20 | 1976-12-30 | Daimler Benz Ag | Radialturbinenrad fuer eine gasturbine |
DE2728823C2 (de) * | 1977-06-27 | 1982-09-09 | Aktiengesellschaft Kühnle, Kopp & Kausch, 6710 Frankenthal | Gasturbine |
JPS55117552A (en) * | 1979-03-03 | 1980-09-09 | Nissan Motor Co Ltd | Insert bonding method and insert bonding device of object to be bonded by die-casting |
US4719074A (en) * | 1984-03-29 | 1988-01-12 | Ngk Insulators, Ltd. | Metal-ceramic composite article and a method of producing the same |
US4639194A (en) * | 1984-05-02 | 1987-01-27 | General Motors Corporation | Hybrid gas turbine rotor |
CA1235375A (en) * | 1984-10-18 | 1988-04-19 | Nobuo Tsuno | Turbine rotor units and method of producing the same |
GB2169058B (en) * | 1984-12-19 | 1989-01-05 | Honda Motor Co Ltd | Fitting assembly |
JPS61215270A (ja) * | 1985-03-15 | 1986-09-25 | 日本特殊陶業株式会社 | タ−ビンロ−ター |
JPH037367Y2 (de) * | 1985-05-31 | 1991-02-25 | ||
JPS61286501A (ja) * | 1985-06-12 | 1986-12-17 | Ngk Insulators Ltd | タ−ビンロ−タ−およびその製造法 |
US4798320A (en) * | 1985-09-20 | 1989-01-17 | Allied-Signal Inc. | Ceramic-metal brazed joint for turbochargers |
US4942999A (en) * | 1987-08-31 | 1990-07-24 | Ngk Insulators, Inc. | Metal-ceramic joined composite bodies and joining process therefor |
US5365661A (en) * | 1988-02-25 | 1994-11-22 | Ngk Insulators, Ltd. | Ceramic-metal composite joint body |
US5456818A (en) * | 1993-11-03 | 1995-10-10 | Ingersoll-Rand Company | Method for preventing fretting and galling in a polygon coupling |
US6499958B2 (en) * | 1999-07-02 | 2002-12-31 | Ingersoll-Rand Company | Device and method for detachably connecting an impeller to a pinion shaft in a high speed fluid compressor |
US6254349B1 (en) * | 1999-07-02 | 2001-07-03 | Ingersoll-Rand Company | Device and method for detachably connecting an impeller to a pinion shaft in a high speed fluid compressor |
-
2004
- 2004-11-04 DE DE102004053289A patent/DE102004053289A1/de not_active Withdrawn
-
2005
- 2005-10-10 US US11/666,980 patent/US20070297907A1/en not_active Abandoned
- 2005-10-20 EP EP05801520A patent/EP1815145A1/de not_active Withdrawn
- 2005-10-20 WO PCT/EP2005/055413 patent/WO2006048379A1/de active Application Filing
- 2005-10-20 KR KR1020077009876A patent/KR20070083878A/ko not_active Application Discontinuation
- 2005-10-20 JP JP2007538389A patent/JP2008519191A/ja not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE471417C (de) * | 1929-02-12 | Bbc Brown Boveri & Cie | Fliegend angeordnetes Laufrad fuer Einraddampf- oder Gasturbinen | |
GB536245A (en) * | 1940-04-22 | 1941-05-07 | Frederic Drury Wayre | Improvements in or relating to apparatus comprising a rotary shaft and intended for dealing with corrosive fluids |
GB1422426A (en) * | 1973-06-22 | 1976-01-28 | Penny Turbines Ltd Noel | Compressor rotor |
US4749334A (en) * | 1984-12-06 | 1988-06-07 | Allied-Signal Aerospace Company | Ceramic rotor-shaft attachment |
JPS6278402A (ja) * | 1985-09-30 | 1987-04-10 | Kyocera Corp | セラミツクタ−ボロ−タ |
JPH02173322A (ja) * | 1988-12-23 | 1990-07-04 | Toyota Motor Corp | ターボチャージャ用タービンホイール |
US20040009072A1 (en) * | 2002-03-02 | 2004-01-15 | Daimlerchrysler Ag | Method for manufacturing a turbine wheel rotor |
US6754954B1 (en) * | 2003-07-08 | 2004-06-29 | Borgwarner Inc. | Process for manufacturing forged titanium compressor wheel |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 011, no. 278 (M - 623) 9 September 1987 (1987-09-09) * |
PATENT ABSTRACTS OF JAPAN vol. 014, no. 436 (M - 1027) 18 September 1990 (1990-09-18) * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2096317A1 (de) | 2008-02-27 | 2009-09-02 | VARIAN S.p.A. | Verfahren zur Herstellung der Rotoranordnung einer Rotationsvakuumpumpe |
US8167576B2 (en) | 2008-02-27 | 2012-05-01 | Agilent Technologies, Inc. | Method for manufacturing the rotor assembly of a rotating vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
DE102004053289A1 (de) | 2006-05-11 |
EP1815145A1 (de) | 2007-08-08 |
US20070297907A1 (en) | 2007-12-27 |
JP2008519191A (ja) | 2008-06-05 |
KR20070083878A (ko) | 2007-08-24 |
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