WO2006025280A1 - Dispenser and method for correcting defect - Google Patents

Dispenser and method for correcting defect Download PDF

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Publication number
WO2006025280A1
WO2006025280A1 PCT/JP2005/015543 JP2005015543W WO2006025280A1 WO 2006025280 A1 WO2006025280 A1 WO 2006025280A1 JP 2005015543 W JP2005015543 W JP 2005015543W WO 2006025280 A1 WO2006025280 A1 WO 2006025280A1
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WO
WIPO (PCT)
Prior art keywords
discharge
needle
defective portion
container
defect
Prior art date
Application number
PCT/JP2005/015543
Other languages
French (fr)
Japanese (ja)
Inventor
Koichi Kajiyama
Michinobu Mizumura
Original Assignee
V Technology Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co., Ltd. filed Critical V Technology Co., Ltd.
Priority to KR1020077005050A priority Critical patent/KR101184431B1/en
Publication of WO2006025280A1 publication Critical patent/WO2006025280A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065After-treatment
    • B05D3/067Curing or cross-linking the coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/005Repairing damaged coatings

Definitions

  • the present invention relates to a dispenser and a defect correction method for discharging a discharge material onto a discharge target and correcting the defect of the discharge target.
  • the discharge needle is obtained by stretching a softened glass pipe.
  • This is a dispenser and a defect correcting method for forming a fine needle tip thinner than the needle main body and filling the discharge material into a minute defect portion of the discharge target to correct the defect portion. is there.
  • a conventional defect correction method of this type is, for example, a defect correction method for a color filter for a liquid crystal display device.
  • the defect portion on the color filter is irradiated with a YAG laser and trimmed to enlarge the defect portion.
  • the trimmed defective portion is filled with a color ultraviolet curable resin for correction by a dispenser, and the defective portion is corrected by irradiating ultraviolet rays to cure the color ultraviolet curable resin (for example, And Patent Document 1).
  • Patent Document 1 JP-A-6-10991-9
  • the dispenser used in such a conventional defect correction method generally uses a stainless steel discharge needle
  • the minimum inner diameter of the needle that can be formed is about 100 ⁇ .
  • the minimum discharge amount was about IL.
  • the amount of colored UV curable resin required to correct the finely trimmed defective portion of the color filter is as small as about 5 pL to 20 pL. Therefore, when a conventional stainless steel discharge needle is used.
  • the color ultraviolet curable resin overflowed from the trimmed defect. Therefore, a defect correction method using a dispenser has not been put into practical use.
  • the present invention provides a dispenser and a defect correction method for addressing such problems and filling a discharge material into a minute defect portion of an object to be discharged to correct the defect portion.
  • a dispenser is a container that contains a discharge material for correcting a defective portion of a discharge target, and a discharge material attached to the tip of the container.
  • a dispenser comprising: a discharge needle that discharges to the defective portion; and a discharge control unit that applies a positive pressure to the discharge material in the container and discharges the discharge material from the discharge needle.
  • the softened glass pipe is stretched to make the needle tip thinner than the needle body.
  • a discharge material for correcting a defective portion of a discharge object is accommodated in the container, a positive pressure is applied to the discharge material in the container by the discharge control means, and the container is attached to the tip of the container. Then, the glass pipe whose tip is heated and softened is stretched, and the discharge material is discharged from the discharge needle formed in a shape thinner than the needle body to the defective portion. As a result, it is possible to fill the discharge object into the minute defect portion of the discharge object.
  • the defect correction method according to the second invention is a container for storing a discharge material for correcting a defective portion of a discharge target object, and discharges the discharge material attached to the tip of the container to the defective portion.
  • a dispenser comprising a discharge needle to be discharged and a discharge control means for applying a positive pressure to the discharge material in the container to discharge the discharge material from the discharge needle
  • the defective portion of the discharge target is corrected
  • a defect correction method wherein the defective portion is trimmed with a preset trimming size based on a discharge amount and a coating thickness of a discharge material discharged from the dispenser, and a predetermined amount of discharge is applied to the trimmed defect portion. The material is discharged.
  • the defect correction method includes a container for storing a discharge material for correcting a defective portion of a discharge target object, and discharging the discharge material attached to the tip of the container to the defective portion.
  • a dispenser comprising a discharge needle to be discharged and a discharge control means for applying a positive pressure to the discharge material in the container to discharge the discharge material from the discharge needle, the defective portion of the discharge target is corrected
  • a defect correction method wherein one of a plurality of trimming sizes set in advance for trimming the defective portion is selected according to the size of the defective portion, the defective portion is trimmed, and the trimming is performed.
  • the ejection material is ejected to the defective portion by the number of ejections set in advance according to the selected trimming size.
  • the discharge needle of the dispenser stretches the heat-softened glass pipe.
  • the needle tip is formed in a shape thinner than the needle main body.
  • the glass pipe with the needle tip heated and softened is stretched to discharge the dispenser needle force of the dispenser formed in a shape thinner than the needle main body, and the discharge material is discharged to the minute defect portion of the discharge target object.
  • the discharge material is an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.
  • the defective part is filled and corrected with an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.
  • the discharge object is a color filter substrate. As a result, the defect of the color filter on the color filter substrate is corrected.
  • the discharge pipe having an inner diameter D of several ⁇ ⁇ to several tens of ⁇ ⁇ ⁇ ⁇ is obtained by extending the glass pipe obtained by heating and softening the discharge needle to form a thin needle tip.
  • the needle can be easily formed. Accordingly, it is possible to discharge a small amount of the discharge material, and it is possible to correct a minute defect portion of the discharge object using the dispenser.
  • the defect portion is trimmed with a preset size based on the ejection amount and the coating thickness of the ejection material ejected from the dispenser.
  • one of a plurality of trimming sizes set in advance for trimming the defective portion is selected according to the size of the defective portion, and the defective portion is selected. Trimming is performed, and the ejection material is ejected to the trimmed defect portion by the number of ejections set in accordance with the selected trimming size. It is possible to reduce the discharge amount of the discharge material by reducing the above. Accordingly, it is possible to suppress the amount of the discharge material used for defect correction. Further, when the defect portion is large, the trimming size can be increased and the number of discharges can be increased to fill the discharge material. As a result, it is possible to cope with trimming parts of different sizes with a single discharge needle.
  • the discharge material is cured by irradiation with ultraviolet rays.
  • an ultraviolet curable resin By using an ultraviolet curable resin, the volume change during curing can be suppressed to a few percent, and the coating thickness can be easily controlled.
  • the color filter substrate of the liquid crystal display device can be corrected by using the discharge target as a color filter substrate.
  • FIG. 1 is a conceptual diagram showing an embodiment of a dispenser according to the present invention.
  • FIG. 2 is a longitudinal sectional view showing a discharge needle of the dispenser.
  • FIG. 3 is a diagram showing the relationship between the inner diameter of a discharge needle, the discharge amount per discharge, and the number of discharges necessary to fill three different sizes of trimming portions.
  • FIG. 4 is a cross-sectional view of a color filter substrate for explaining a defect correcting method according to the present invention.
  • FIG. 5 is a plan view of a color filter substrate for explaining a defect correcting method according to the present invention. Explanation of symbols
  • FIG. 1 is a conceptual diagram showing an embodiment of a dispenser according to the present invention. This dispenser is used to discharge a discharge material to a discharge target and correct a minute defect portion of the discharge target.
  • the container 1 is a tank for storing a discharge material for correcting a defective portion of a discharge target.
  • a discharge material for correcting a defective portion of a discharge target.
  • the discharge target is a color filter substrate
  • a color filter is used as the discharge material.
  • the color UV curable resin 4 is stored.
  • the color ultraviolet curable resin 4 is cured by irradiation with ultraviolet rays, and the volume change upon curing is several percent, so that the coating thickness can be easily controlled.
  • a thermosetting resin can also be used as the discharge material, but this thermosetting resin has a volume change upon curing of about 50%. About two times the coating thickness of the thermosetting resin must be discharged, and the thermosetting resin may overflow from the trimmed defect. Therefore, in the following description, a case where a color filter substrate is used as the discharge target and a color ultraviolet curable resin 4 is used as the discharge material will be described.
  • a discharge needle 2 is provided at the tip of the container 1.
  • the discharge needle 2 is made of a glass pipe that discharges the color ultraviolet ray curable resin 4 to the defective portion 11 (see FIG. 4) of the color filter substrate.
  • the amount of the color UV curable resin 4 necessary for correcting the defect of the color filter is 5 when the film thickness of the color filter is 2 ⁇ m and the trimming size is 50 ⁇ m 50/1 111, for example. / 1 111 100/1 Since it is a very small amount of 20 at 111, the discharge needle 2 stretches the glass pipe heated and softened as shown in Fig. 2, and the needle tip 2a is moved from the needle body 2b. Is also formed into a thin shape. When a glass pipe is softened by heating and stretched thinly, the inner diameter of the pipe decreases accordingly, and a thin needle tip 2a having an inner diameter D of several ⁇ m to several tens of ⁇ m can be easily formed.
  • FIG. 3 shows, for reference, the relationship between the inner diameter D of the discharge needle 2, the discharge amount V per discharge, and the number of discharges required to fill the three different size trimming parts. It is.
  • the discharge amount V depends on the air pressure, discharge time, viscosity of the color UV curable resin 4, etc.
  • the color UV curable resin 4 at the length L of the needle tip 2a shown in FIG. This is calculated as that discharged in the discharge operation.
  • the trimming size can be selected according to the size of the defect portion 11, when the selectable trimming size is, for example, 50 ⁇ m square, 70 ⁇ m square, and 100 ⁇ m square, the trim of each size is selected.
  • the number of discharges that can be filled in the ming part is 3 ⁇ ⁇ inside diameter D!
  • Fig. 3 shows the discharge needle 2 of ⁇ 19 ⁇ m.
  • the area A indicated by hatching in the figure is an area that cannot be applied because the color UV curable resin 4 overflows from the trimming part because the amount of discharge per one time is too large compared to the volume of the trimming part of the corresponding size. It is.
  • Region B is also trimmed It is necessary to repeat the discharge 11 times or more to fill the part, which is an unfavorable region with a long tact.
  • one discharge needle 2 can correspond to the trimming portions of the above three sizes.
  • the discharge needle having an inner diameter D force of ⁇ m to 9 ⁇ m surrounded by a thick broken line in FIG. 2. Therefore, in this case, the discharge needle 2 is formed to have an inner diameter D force S6 x m to 9 x m of the needle tip 2a.
  • the trimming size is, for example, 50 ⁇ m square when the size of the defect 11 is 30 xm ⁇ S ⁇ 50 xm, and 70 ⁇ m square when 50 ⁇ m ⁇ S ⁇ 70 xm.
  • 70 ⁇ m ⁇ S ⁇ 100 zm the 100 zm angle is selected.
  • a discharge control means 3 is connected to the container 1 via a piping tube 6.
  • the discharge control means 3 applies a positive pressure to the color ultraviolet curable resin 4 stored in the container 1 and includes an air tank 7, a timer 8, an electromagnetic valve 9, and a flow control valve 10. Yes.
  • the air tank 7 temporarily stores air supplied from, for example, an air pump, and is connected to the electromagnetic valve 9 via the flow rate control valve 10.
  • the timer 8 turns on the switch for a preset time to energize the solenoid valve 9, and the solenoid valve 9 opens and closes the valve when the energization is turned on or off.
  • the discharge control means 3 opens the electromagnetic valve 9 for the time set in the timer 8, and the air temporarily stored in the air tank 7 is controlled through the pipe tube 6 while controlling the flow rate by the flow control valve 10.
  • the color UV curable resin 4 is supplied to the container 1 by the positive pressure of the air introduced into the container 1 and operates to discharge an appropriate amount of the discharge needle 2 force of the container 1.
  • the discharge needle 2 is made of glass pipe, and the heat-softened glass pipe is stretched to form the needle tip 2a to be thin, so that the inner diameter D is several ⁇ m.
  • a discharge needle 2 of ⁇ several tens of xm can be easily formed. Accordingly, a small amount of the color ultraviolet curable resin 4 can be discharged, and a fine defect portion of the color filter can be corrected using the dispenser.
  • the defective portion is detected on the color filter, and the size of the defective portion is measured by, for example, a gauge provided in the objective lens.
  • the trimming size is selected according to the size of the defective portion of the color filter 5. This selection is performed by selecting a slit through which the trimming laser beam passes. For example, when the defect size S is 30 ⁇ m ⁇ S ⁇ 50 xm, a 50 ⁇ m square slit, and when 50 111 ⁇ 3 ⁇ 70 111, a 70 xm square slit is added, and an additional 70 ⁇ m ⁇ S. When ⁇ 100 ⁇ m, a 100 ⁇ m square slit is selected.
  • a laser beam 12 of, for example, 532 nm or 355 nm for trimming is irradiated for a predetermined time through the selected slit,
  • the defective part 11 is trimmed and enlarged (see FIG. 5 (a)).
  • This trimming is performed once in order to remove protrusions such as foreign matters adhering to the color filter 5 or to prevent the color UV curable resin 4 injected into the defective part 11 from overflowing from the defective part 11.
  • This is performed in order to intentionally enlarge the defect portion 11 in consideration of the discharge amount of the color ultraviolet curable resin 4 discharged from the discharge needle 2.
  • the needle tip 2 a of the discharge needle 2 is positioned on the defective portion 11.
  • a discharge start switch (not shown) is pressed in this state
  • the timer 8 of the discharge control means 3 shown in FIG. 1 operates and opens the electromagnetic valve 9 for a preset time.
  • the compressed air is supplied from the air tank 7 to the container 1 through the piping tube 6 while the flow rate is adjusted by the flow control valve 10.
  • a positive pressure by air is applied to the color ultraviolet curable resin 4 in the container 1, and the color ultraviolet curable resin 4 is discharged from the discharge needle 2 to the trimmed defect portion 11 (see FIG. 5 (b)).
  • a laser beam 13 of, eg, 355 nm (ultraviolet) is irradiated for a predetermined time through the objective lens, and the power error discharged to the defect portion 11 is emitted.
  • the UV curable resin 4 is cured (see Fig. 5 (c)).
  • the defect 11 is corrected (see Fig. 5 (d)).
  • the trimming size calculated based on the discharge amount and the coating thickness may be always set regardless of the size of the defective portion 11. Specifically, for example, when a discharge needle 2 having an inner diameter D of 19 zm is used and the discharge volume per stroke is 19.8 pL as shown in FIG. 3, it depends on the size of the defect 11. You should always set the trimming size to 100 zm square. In this case, the trimming portion can be substantially filled with the color UV curable resin 4 by one discharge operation.
  • one of a plurality of sizes set in advance for trimming the defective portion 11 can be selected according to the size of the defective portion 11.
  • the trimming size can be reduced and the discharge amount of the color ultraviolet curable resin 4 can be reduced. Accordingly, the amount of the color ultraviolet curable resin 4 used for correcting the defect of the color filter 5 can be suppressed.
  • the color ultraviolet curable resin 4 is ejected as many times as the number of ejections set according to the trimming size, a single ejection needle 2 can cope with trimming parts of different sizes. it can.
  • the trimming size calculated based on the discharge amount and the coating thickness is always set regardless of the size of the defect portion 11. In this case, the defect correction work that does not require measurement of the size of the defect portion 11 is simplified. Therefore, it is possible to shorten the time for defect correction work.
  • the force described in the case where the color filter substrate is used as the discharge target is not limited to this, and the present invention can be applied to defect correction of a film such as a wiring circuit.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Wood Science & Technology (AREA)
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Abstract

A dispenser comprising a container (1) containing color UV-curing resin (4) for correcting the defective part of a color filter substrate, an ejection needle (2) fixed to the forward end of the container (1) and ejecting the color UV-curing resin (4) to the defective part, and an ejection control means (3) for ejecting the color UV-curing resin (4) from the ejection needle (2) by imparting a positive pressure to the color UV-curing resin (4) in the container (1), wherein the ejection needle (2) is shaped thinner at the tip end than at the needle body part by drawing a thermally softened glass pipe. A very small defective part of an ejection object can be corrected by filling that defective part with ejected material.

Description

明 細 書  Specification
デイスペンサ及び欠陥修正方法  Dispenser and defect correction method
技術分野  Technical field
[0001] 本発明は、吐出材を吐出対象物に対して吐出して該吐出対象物の欠陥を修正す るデイスペンサ及び欠陥修正方法に関し、詳しくは、軟化させたガラスパイプを引き 伸ばして吐出針の針先を針本体部よりも細く形成することによって、吐出対象物の微 小な欠陥部へ吐出材を充填して該欠陥部の修正をしょうとするデイスペンサ及び欠 陥修正方法に係るものである。  TECHNICAL FIELD [0001] The present invention relates to a dispenser and a defect correction method for discharging a discharge material onto a discharge target and correcting the defect of the discharge target. Specifically, the discharge needle is obtained by stretching a softened glass pipe. This is a dispenser and a defect correcting method for forming a fine needle tip thinner than the needle main body and filling the discharge material into a minute defect portion of the discharge target to correct the defect portion. is there.
背景技術  Background art
[0002] 従来のこの種の欠陥修正方法は、例えば液晶表示装置用カラーフィルタの欠陥修 正方法として、カラーフィルタ上の欠陥部に対して YAGレーザを照射して欠陥部をト リミングして拡大し、該トリミングされた欠陥部にディスペンサにより修正用のカラー紫 外線硬化樹脂を充填し、紫外線を照射してカラー紫外線硬化樹脂を硬化して欠陥 部を修正するものとなってレ、る(例えば、特許文献 1参照)。  A conventional defect correction method of this type is, for example, a defect correction method for a color filter for a liquid crystal display device. The defect portion on the color filter is irradiated with a YAG laser and trimmed to enlarge the defect portion. Then, the trimmed defective portion is filled with a color ultraviolet curable resin for correction by a dispenser, and the defective portion is corrected by irradiating ultraviolet rays to cure the color ultraviolet curable resin (for example, And Patent Document 1).
特許文献 1 :特開平 6— 10991 9号公報  Patent Document 1: JP-A-6-10991-9
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0003] しかし、このような従来の欠陥修正方法において使用されるデイスペンサは、一般 にステンレス製の吐出針を使用するものであったため、形成することができる針の最 小内径は 100 μ ΐη程度であり、最小吐出量は I L程度となっていた。これに対して、 カラーフィルタのトリミングされた微小な欠陥部の修正に必要なカラー紫外線硬化樹 脂の量は、約 5pL〜20pLと微量であるため、従来のステンレス製吐出針を用いた場 合には、トリミングされた欠陥部からカラー紫外線硬化樹脂が溢れ出てしまう問題が あった。したがって、デイスペンサを使用する欠陥修正方法は実用になっていない。  However, since the dispenser used in such a conventional defect correction method generally uses a stainless steel discharge needle, the minimum inner diameter of the needle that can be formed is about 100 μΐη. The minimum discharge amount was about IL. On the other hand, the amount of colored UV curable resin required to correct the finely trimmed defective portion of the color filter is as small as about 5 pL to 20 pL. Therefore, when a conventional stainless steel discharge needle is used. However, there was a problem that the color ultraviolet curable resin overflowed from the trimmed defect. Therefore, a defect correction method using a dispenser has not been put into practical use.
[0004] そこで、本発明は、このような問題点に対処し、吐出対象物の微小な欠陥部へ吐出 材を充填して該欠陥部の修正をしょうとするデイスペンサ及び欠陥修正方法を提供 することを目的とする。 課題を解決するための手段 [0004] Accordingly, the present invention provides a dispenser and a defect correction method for addressing such problems and filling a discharge material into a minute defect portion of an object to be discharged to correct the defect portion. For the purpose. Means for solving the problem
[0005] 上記目的を達成するために、第 1の発明によるディスペンサは、吐出対象物の欠陥 部を修正するための吐出材を収容する容器と、該容器の先端に取り付けられ前記吐 出材を前記欠陥部に吐出させる吐出針と、前記容器内の吐出材に正圧を付与して 該吐出材を前記吐出針から吐出させる吐出制御手段とを備えるデイスペンサであつ て、前記吐出針は、加熱軟化させたガラスパイプを引き伸ばして針先を針本体部より も細レ、形状に形成したものである。  [0005] In order to achieve the above object, a dispenser according to a first aspect of the present invention is a container that contains a discharge material for correcting a defective portion of a discharge target, and a discharge material attached to the tip of the container. A dispenser comprising: a discharge needle that discharges to the defective portion; and a discharge control unit that applies a positive pressure to the discharge material in the container and discharges the discharge material from the discharge needle. The softened glass pipe is stretched to make the needle tip thinner than the needle body.
[0006] このような構成により、容器に吐出対象物の欠陥部を修正するための吐出材を収容 し、吐出制御手段で容器内の吐出材に正圧を付与し、上記容器の先端に取り付けら れ、針先が加熱軟化されたガラスパイプを引き伸ばして針本体部よりも細い形状に形 成された吐出針から上記欠陥部に吐出材を吐出する。これにより、吐出対象物の微 小な欠陥部への吐出材の充填を可能にする。  With such a configuration, a discharge material for correcting a defective portion of a discharge object is accommodated in the container, a positive pressure is applied to the discharge material in the container by the discharge control means, and the container is attached to the tip of the container. Then, the glass pipe whose tip is heated and softened is stretched, and the discharge material is discharged from the discharge needle formed in a shape thinner than the needle body to the defective portion. As a result, it is possible to fill the discharge object into the minute defect portion of the discharge object.
[0007] また、第 2の発明による欠陥修正方法は、吐出対象物の欠陥部を修正するための 吐出材を収容する容器と、該容器の先端に取り付けられ前記吐出材を前記欠陥部 に吐出させる吐出針と、前記容器内の吐出材に正圧を付与して該吐出材を前記吐 出針から吐出させる吐出制御手段とを備えるデイスペンサを使用して、吐出対象物の 欠陥部を修正する欠陥修正方法であって、前記ディスペンザから吐出される吐出材 の吐出量及び塗布厚に基づいて予め設定されたトリミングサイズで前記欠陥部をトリ ミングし、該トリミングされた欠陥部に所定量の吐出材を吐出するものである。  [0007] Further, the defect correction method according to the second invention is a container for storing a discharge material for correcting a defective portion of a discharge target object, and discharges the discharge material attached to the tip of the container to the defective portion. Using a dispenser comprising a discharge needle to be discharged and a discharge control means for applying a positive pressure to the discharge material in the container to discharge the discharge material from the discharge needle, the defective portion of the discharge target is corrected A defect correction method, wherein the defective portion is trimmed with a preset trimming size based on a discharge amount and a coating thickness of a discharge material discharged from the dispenser, and a predetermined amount of discharge is applied to the trimmed defect portion. The material is discharged.
[0008] さらに、第 3の発明による欠陥修正方法は、吐出対象物の欠陥部を修正するための 吐出材を収容する容器と、該容器の先端に取り付けられ前記吐出材を前記欠陥部 に吐出させる吐出針と、前記容器内の吐出材に正圧を付与して該吐出材を前記吐 出針から吐出させる吐出制御手段とを備えるデイスペンサを使用して、吐出対象物の 欠陥部を修正する欠陥修正方法であって、前記欠陥部をトリミングするために予め設 定された複数のトリミングサイズからその一つを前記欠陥部の大きさに応じて選択し て該欠陥部をトリミングし、該トリミングされた欠陥部に対して前記選択されたトリミング サイズに応じて予め設定された吐出回数だけ前記吐出材を吐出するものである。  [0008] Further, the defect correction method according to the third aspect of the invention includes a container for storing a discharge material for correcting a defective portion of a discharge target object, and discharging the discharge material attached to the tip of the container to the defective portion. Using a dispenser comprising a discharge needle to be discharged and a discharge control means for applying a positive pressure to the discharge material in the container to discharge the discharge material from the discharge needle, the defective portion of the discharge target is corrected A defect correction method, wherein one of a plurality of trimming sizes set in advance for trimming the defective portion is selected according to the size of the defective portion, the defective portion is trimmed, and the trimming is performed. The ejection material is ejected to the defective portion by the number of ejections set in advance according to the selected trimming size.
[0009] また、前記ディスペンザの吐出針は、加熱軟化させたガラスパイプを引き伸ばして 針先を針本体部よりも細い形状に形成したものである。これにより、針先が加熱軟ィ匕 されたガラスパイプを引き伸ばして針本体部よりも細い形状に形成されたデイスペン サの吐出針力 被吐出対象物の微小な欠陥部に吐出材を吐出する。 [0009] In addition, the discharge needle of the dispenser stretches the heat-softened glass pipe. The needle tip is formed in a shape thinner than the needle main body. As a result, the glass pipe with the needle tip heated and softened is stretched to discharge the dispenser needle force of the dispenser formed in a shape thinner than the needle main body, and the discharge material is discharged to the minute defect portion of the discharge target object.
[0010] さらに、前記吐出材は、紫外線の照射により硬化する紫外線硬化樹脂である。これ により、紫外線の照射により硬化する紫外線硬化樹脂で欠陥部を充填して修正する  [0010] Further, the discharge material is an ultraviolet curable resin that is cured by irradiation with ultraviolet rays. As a result, the defective part is filled and corrected with an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.
[0011] そして、前記吐出対象物は、カラーフィルタ基板である。これにより、カラーフィルタ 基板のカラーフィルタの欠陥を修正する。 [0011] The discharge object is a color filter substrate. As a result, the defect of the color filter on the color filter substrate is corrected.
発明の効果  The invention's effect
[0012] 請求項 1及び 4に係る発明によれば、吐出針を加熱軟化させたガラスパイプを引き 伸ばして針先を細く形成したことにより、内径 Dが数 μ ΐη〜数 10 μ ΐηの吐出針を容易 に形成することができる。したがって、微量の吐出材の吐出が可能となり、デイスペン サを使用して吐出対象物の微小な欠陥部の修正を行うことができる。  [0012] According to the inventions according to claims 1 and 4, the discharge pipe having an inner diameter D of several μ ΐη to several tens of μ に よ り η is obtained by extending the glass pipe obtained by heating and softening the discharge needle to form a thin needle tip. The needle can be easily formed. Accordingly, it is possible to discharge a small amount of the discharge material, and it is possible to correct a minute defect portion of the discharge object using the dispenser.
[0013] また、請求項 2に係る発明によれば、デイスペンザから吐出される吐出材の吐出量 及び塗布厚に基づレ、て予め設定されたサイズで欠陥部をトリミングし、該トリミングさ れた欠陥部に所定量の吐出材を吐出するようにしたことにより、欠陥部の大きさに拘 わらず常に一定のサイズでトリミングし、吐出材を充填することができる。したがって、 欠陥修正作業が簡便となり、修正作業の時間を短縮することができる。  [0013] Further, according to the invention of claim 2, the defect portion is trimmed with a preset size based on the ejection amount and the coating thickness of the ejection material ejected from the dispenser. By discharging a predetermined amount of the discharge material to the defective portion, it is possible to always perform trimming with a constant size regardless of the size of the defect portion and to fill the discharge material. Therefore, the defect correction work becomes simple and the time for the correction work can be shortened.
[0014] さらに、請求項 3に係る発明によれば、欠陥部をトリミングするために予め設定され た複数のトリミングサイズからその一つを欠陥部の大きさに応じて選択して該欠陥部 をトリミングし、該トリミングされた欠陥部に対して上記選択されたトリミングサイズに応 じて設定された吐出回数だけ吐出材を吐出するようにしたことにより、欠陥部が小さ い場合には、トリミングサイズを小さくして吐出材の吐出量を少なくすることができる。 したがって、欠陥修正に使用する吐出材の使用量を抑制することができる。また、欠 陥部が大きい場合には、トリミングサイズを大きくすると共に吐出回数を多くして吐出 材を充填することができる。これにより、 1本の吐出針で異なるサイズのトリミング部に 対しても対応すること力 Sできる。  [0014] Further, according to the invention of claim 3, one of a plurality of trimming sizes set in advance for trimming the defective portion is selected according to the size of the defective portion, and the defective portion is selected. Trimming is performed, and the ejection material is ejected to the trimmed defect portion by the number of ejections set in accordance with the selected trimming size. It is possible to reduce the discharge amount of the discharge material by reducing the above. Accordingly, it is possible to suppress the amount of the discharge material used for defect correction. Further, when the defect portion is large, the trimming size can be increased and the number of discharges can be increased to fill the discharge material. As a result, it is possible to cope with trimming parts of different sizes with a single discharge needle.
[0015] さらにまた、請求項 5に係る発明によれば、吐出材として紫外線の照射により硬化 する紫外線硬化樹脂を用いたことにより、硬化時の体積変化を数%に抑えることがで き、塗布厚のコントロールが容易になる。 [0015] Further, according to the invention of claim 5, the discharge material is cured by irradiation with ultraviolet rays. By using an ultraviolet curable resin, the volume change during curing can be suppressed to a few percent, and the coating thickness can be easily controlled.
[0016] そして、請求項 6に係る発明によれば、吐出対象物をカラーフィルタ基板としたこと により、液晶表示装置のカラーフィルタの欠陥修正を行うことができる。  [0016] According to the invention of claim 6, the color filter substrate of the liquid crystal display device can be corrected by using the discharge target as a color filter substrate.
図面の簡単な説明  Brief Description of Drawings
[0017] [図 1]本発明によるディスペンザの実施形態を示す概念図である。  FIG. 1 is a conceptual diagram showing an embodiment of a dispenser according to the present invention.
[図 2]上記ディスペンザの吐出針を示す縦断面図である。  FIG. 2 is a longitudinal sectional view showing a discharge needle of the dispenser.
[図 3]吐出針の内径と 1回当たりの吐出量及び異なる三つのサイズのトリミング部を充 填するのに必要な吐出回数との関係を示す図である。  FIG. 3 is a diagram showing the relationship between the inner diameter of a discharge needle, the discharge amount per discharge, and the number of discharges necessary to fill three different sizes of trimming portions.
[図 4]本発明による欠陥修正方法を説明するためのカラーフィルタ基板の断面図であ る。  FIG. 4 is a cross-sectional view of a color filter substrate for explaining a defect correcting method according to the present invention.
[図 5]本発明による欠陥修正方法を説明するカラーフィルタ基板の平面図である。 符号の説明  FIG. 5 is a plan view of a color filter substrate for explaining a defect correcting method according to the present invention. Explanation of symbols
[0018] 1…容器 [0018] 1 ... Container
2…吐出針  2… Discharge needle
2a…針先  2a ... Needle tip
2b…針本体部  2b ... Needle body
3· · ·吐出制御手段  3 ··· Discharge control means
4…カラー紫外線硬化樹脂(吐出材)  4… Color UV curable resin (discharge material)
5…カラーフィノレタ  5… Colorfinoleta
11…欠陥部  11 ... Defects
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0019] 以下、本発明の実施形態を添付図面に基づいて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
図 1は本発明によるデイスペンザの実施形態を示す概念図である。このディスペン サは、吐出材を吐出対象物に対して吐出して該吐出対象物の微小な欠陥部を修正 するために使用するもので、容器 1と、吐出針 2と、吐出制御手段 3とを備えている。  FIG. 1 is a conceptual diagram showing an embodiment of a dispenser according to the present invention. This dispenser is used to discharge a discharge material to a discharge target and correct a minute defect portion of the discharge target. The dispenser 1, the discharge needle 2, the discharge control means 3, It has.
[0020] 上記容器 1は、吐出対象物の欠陥部を修正する吐出材を貯留するタンクであり、例 えば吐出対象物がカラーフィルタ基板である場合には、吐出材としてカラーフィルタ のカラー紫外線硬化樹脂 4を貯留する。このカラー紫外線硬化樹脂 4は、紫外線の 照射により硬化するものであり、硬化時の体積変化は数%であるため塗布厚のコント ロールが容易である。これに対して、吐出材として熱硬化性樹脂も使用することがで きるが、この熱硬化性樹脂は、硬化時の体積変化が約 50%であるため所定の塗布厚 を得るためには、塗布厚の約 2倍の熱硬化性樹脂を吐出しなければならず、熱硬化 性樹脂がトリミングされた欠陥部から溢れ出る虞がある。そこで、以下の説明では、吐 出対象物としてカラーフィルタ基板を使用し、吐出材としてカラー紫外線硬化樹脂 4 を使用する場合にっレ、て述べる。 [0020] The container 1 is a tank for storing a discharge material for correcting a defective portion of a discharge target. For example, when the discharge target is a color filter substrate, a color filter is used as the discharge material. The color UV curable resin 4 is stored. The color ultraviolet curable resin 4 is cured by irradiation with ultraviolet rays, and the volume change upon curing is several percent, so that the coating thickness can be easily controlled. In contrast, a thermosetting resin can also be used as the discharge material, but this thermosetting resin has a volume change upon curing of about 50%. About two times the coating thickness of the thermosetting resin must be discharged, and the thermosetting resin may overflow from the trimmed defect. Therefore, in the following description, a case where a color filter substrate is used as the discharge target and a color ultraviolet curable resin 4 is used as the discharge material will be described.
[0021] 上記容器 1の先端部には、吐出針 2が設けられている。この吐出針 2は、カラー紫外 線硬化樹脂 4をカラーフィルタ基板の欠陥部 11 (図 4参照)に吐出させるガラスパイプ 製のものである。この場合、カラーフィルタの欠陥修正に必要なカラー紫外線硬化樹 脂 4の量は、カラーフィルタの膜厚を 2 μ mとすると、トリミングサイズが例えば 50 μ m 50 /1 111のときには5 し、 100 /1 111 100 /1 111のときには20 しと微量でぁるため、吐出 針 2は、図 2に示すように加熱軟ィ匕させたガラスパイプを引き伸ばして針先 2aを針本 体部 2bよりも細い形状に形成している。ガラスパイプは、加熱軟化させて細く引き伸 ばすとそれに伴ってパイプの内径も小さくなり、内径 Dが数/ i m〜数 10 μ mの細い 針先 2aも容易に形成することができる。  A discharge needle 2 is provided at the tip of the container 1. The discharge needle 2 is made of a glass pipe that discharges the color ultraviolet ray curable resin 4 to the defective portion 11 (see FIG. 4) of the color filter substrate. In this case, the amount of the color UV curable resin 4 necessary for correcting the defect of the color filter is 5 when the film thickness of the color filter is 2 μm and the trimming size is 50 μm 50/1 111, for example. / 1 111 100/1 Since it is a very small amount of 20 at 111, the discharge needle 2 stretches the glass pipe heated and softened as shown in Fig. 2, and the needle tip 2a is moved from the needle body 2b. Is also formed into a thin shape. When a glass pipe is softened by heating and stretched thinly, the inner diameter of the pipe decreases accordingly, and a thin needle tip 2a having an inner diameter D of several μm to several tens of μm can be easily formed.
[0022] 図 3は、吐出針 2の内径 Dと 1回当たりの吐出量 V及び異なる三つのサイズのトリミン グ部を充填するのに必要な吐出回数との関係を参考のために示したものである。吐 出量 Vは、エア圧力、吐出時間及びカラー紫外線硬化樹脂 4の粘度等によって異な る力 ここでは、図 2に示す針先 2aの長さ Lの部分にあるカラー紫外線硬化樹脂 4が 1回の吐出動作で吐出されるものとして計算したものである。  [0022] FIG. 3 shows, for reference, the relationship between the inner diameter D of the discharge needle 2, the discharge amount V per discharge, and the number of discharges required to fill the three different size trimming parts. It is. The discharge amount V depends on the air pressure, discharge time, viscosity of the color UV curable resin 4, etc. Here, the color UV curable resin 4 at the length L of the needle tip 2a shown in FIG. This is calculated as that discharged in the discharge operation.
[0023] 上記トリミングのサイズが欠陥部 11の大きさに応じて選択できる場合に、選択可能 なトリミングサイズが例えば 50 μ m角、 70 μ m角及び 100 μ m角のとき、各サイズのトリ ミング部を充填可能な吐出回数は、内径 Dが 3 μ π!〜 19 μ mの吐出針 2について図 3 に示すものとなる。なお、同図において斜線で示す領域 Aは、対応サイズのトリミング 部の体積に比して 1回の吐出量が多すぎるため、上記トリミング部からカラー紫外線 硬化樹脂 4が溢れ出るために適用できない領域である。また、領域 Bは、各トリミング 部を充填するのに 11回以上の吐出を繰り返す必要があり、タクトが長くて好ましくない 領域である。 [0023] When the trimming size can be selected according to the size of the defect portion 11, when the selectable trimming size is, for example, 50 μm square, 70 μm square, and 100 μm square, the trim of each size is selected. The number of discharges that can be filled in the ming part is 3 µ π inside diameter D! Fig. 3 shows the discharge needle 2 of ~ 19 µm. In addition, the area A indicated by hatching in the figure is an area that cannot be applied because the color UV curable resin 4 overflows from the trimming part because the amount of discharge per one time is too large compared to the volume of the trimming part of the corresponding size. It is. Region B is also trimmed It is necessary to repeat the discharge 11 times or more to fill the part, which is an unfavorable region with a long tact.
[0024] 図 3によれば、 1本の吐出針 2で上記三つのサイズのトリミング部に対応できるのは、 同図において太い破線で囲まれた内径 D力 μ m〜9 μ mの吐出針 2である。したが つて、この場合、吐出針 2は針先 2aの内径 D力 S6 x m〜9 x mとなるように形成する。 なお、上記トリミングサイズは、例えば、欠陥部 1 1の大きさが 30 x m≤S < 50 x mのと きには 50 μ m角を、また 50 μ m≤S < 70 x mのときには 70 μ m角を、さらに 70 μ m≤ S < 100 z mのときには 100 z m角を選択するようにする。  [0024] According to FIG. 3, one discharge needle 2 can correspond to the trimming portions of the above three sizes. The discharge needle having an inner diameter D force of μm to 9 μm surrounded by a thick broken line in FIG. 2. Therefore, in this case, the discharge needle 2 is formed to have an inner diameter D force S6 x m to 9 x m of the needle tip 2a. The trimming size is, for example, 50 μm square when the size of the defect 11 is 30 xm ≤ S <50 xm, and 70 μm square when 50 μm ≤ S <70 xm. In addition, when 70 μm ≤ S <100 zm, the 100 zm angle is selected.
[0025] 上記容器 1には、図 1に示すように、配管チューブ 6を介して吐出制御手段 3が接続 されている。この吐出制御手段 3は、上記容器 1に貯留したカラー紫外線硬化樹脂 4 に正圧を作用させるものであり、エアタンク 7と、タイマー 8と、電磁バルブ 9と、流量制 御バルブ 10とを備えている。ここで、エアタンク 7は、例えばエアポンプから供給され たエアを一時的に貯留するものであり、流量制御バルブ 10を介して電磁バルブ 9に 接続されている。また、タイマー 8は予め設定された時間だけスィッチを ONして電磁 バルブ 9に通電させるものであり、電磁バルブ 9は通電の ON又は OFFによりバルブ の開閉動作をするものである。これにより、吐出制御手段 3は、タイマー 8に設定され た時間だけ電磁バルブ 9を開かせ、エアタンク 7に一時的に貯留されたエアを流量制 御バルブ 10によって流量制御しながら配管チューブ 6を介して上記容器 1に供給し、 容器 1内に導入されたエアの正圧によりカラー紫外線硬化樹脂 4を容器 1の吐出針 2 力 適量吐出させるように動作する。  As shown in FIG. 1, a discharge control means 3 is connected to the container 1 via a piping tube 6. The discharge control means 3 applies a positive pressure to the color ultraviolet curable resin 4 stored in the container 1 and includes an air tank 7, a timer 8, an electromagnetic valve 9, and a flow control valve 10. Yes. Here, the air tank 7 temporarily stores air supplied from, for example, an air pump, and is connected to the electromagnetic valve 9 via the flow rate control valve 10. The timer 8 turns on the switch for a preset time to energize the solenoid valve 9, and the solenoid valve 9 opens and closes the valve when the energization is turned on or off. Thus, the discharge control means 3 opens the electromagnetic valve 9 for the time set in the timer 8, and the air temporarily stored in the air tank 7 is controlled through the pipe tube 6 while controlling the flow rate by the flow control valve 10. The color UV curable resin 4 is supplied to the container 1 by the positive pressure of the air introduced into the container 1 and operates to discharge an appropriate amount of the discharge needle 2 force of the container 1.
[0026] このように、本発明のデイスペンサによれば、吐出針 2をガラスパイプ製とし、加熱軟 化させたガラスパイプを引き伸ばして針先 2aを細く形成したことにより、内径 Dが数 μ m〜数 10 x mの吐出針 2を容易に形成することができる。したがって、微量のカラー 紫外線硬化樹脂 4の吐出が可能となり、デイスペンサを使用してカラーフィルタの微 小な欠陥部の修正を行うことができる。  [0026] Thus, according to the dispenser of the present invention, the discharge needle 2 is made of glass pipe, and the heat-softened glass pipe is stretched to form the needle tip 2a to be thin, so that the inner diameter D is several μm. A discharge needle 2 of ˜several tens of xm can be easily formed. Accordingly, a small amount of the color ultraviolet curable resin 4 can be discharged, and a fine defect portion of the color filter can be corrected using the dispenser.
[0027] 次に、上記ディスペンサを使用してカラーフィルタの欠陥部を修正する欠陥修正方 法を、図 4及び図 5を参照して説明する。  Next, a defect correcting method for correcting a defective portion of the color filter using the dispenser will be described with reference to FIG. 4 and FIG.
先ず、第 1ステップにおいては、図示省略の例えば観察用 CCDカメラの対物レンズ を通して、カラーフィルタ上に欠陥部を検出し、例えば対物レンズに備えたゲージに より欠陥部の大きさを計測する。 First, in the first step, for example, an objective lens of an observation CCD camera (not shown). Then, the defective portion is detected on the color filter, and the size of the defective portion is measured by, for example, a gauge provided in the objective lens.
[0028] 第 2ステップにおいては、カラーフィルタ 5の欠陥部の大きさに応じてトリミングサイズ が選択される。この選択は、トリミング用レーザ光線の通過するスリットを選択すること によって行われる。例えば、欠陥部の大きさ Sが 30 μ m≤S < 50 x mのときには 50 μ m角のスリットが、また 50 111≤3 < 70 111のときには 70 x m角のスリットが、さらに 70 μ m≤S < 100 μ mのときには 100 μ m角のスリットが選択されることになる。  In the second step, the trimming size is selected according to the size of the defective portion of the color filter 5. This selection is performed by selecting a slit through which the trimming laser beam passes. For example, when the defect size S is 30 μm ≤ S <50 xm, a 50 μm square slit, and when 50 111 ≤ 3 <70 111, a 70 xm square slit is added, and an additional 70 μm ≤ S. When <100 μm, a 100 μm square slit is selected.
[0029] 第 3ステップにおいては、上記選択されたスリットを通して図 4 (a)に示すように、欠 陥部 11に対してトリミング用の例えば 532nm又は 355nmのレーザ光線 12が所定時間 だけ照射され、欠陥部 11がトリミングされて大きくされる(図 5 (a)参照)。このトリミング は、カラーフィルタ 5上に付着した異物等の突起物を除去するためや、欠陥部 11へ 注入されるカラー紫外線硬化樹脂 4が欠陥部 11から溢れないように、 1回の吐出動 作で吐出針 2から吐出されるカラー紫外線硬化樹脂 4の吐出量を考慮して欠陥部 11 を意図的に大きくするために行うものである。  [0029] In the third step, as shown in FIG. 4 (a), a laser beam 12 of, for example, 532 nm or 355 nm for trimming is irradiated for a predetermined time through the selected slit, The defective part 11 is trimmed and enlarged (see FIG. 5 (a)). This trimming is performed once in order to remove protrusions such as foreign matters adhering to the color filter 5 or to prevent the color UV curable resin 4 injected into the defective part 11 from overflowing from the defective part 11. This is performed in order to intentionally enlarge the defect portion 11 in consideration of the discharge amount of the color ultraviolet curable resin 4 discharged from the discharge needle 2.
[0030] 第 4ステップにおいては、図 4 (b)に示すように吐出針 2の針先 2aが欠陥部 11に位 置付けられる。この状態で図示省略の吐出開始スィッチを押下すると、図 1に示す吐 出制御手段 3のタイマー 8が動作し、予め設定した時間だけ電磁バルブ 9を開く。こ れにより、圧縮エアがエアタンク 7から流量制御バルブ 10で流量調整されながら配管 チューブ 6を介して容器 1に供給される。そして、容器 1内のカラー紫外線硬化樹脂 4 にエアによる正圧が付与され、カラー紫外線硬化樹脂 4は吐出針 2からトリミングされ た欠陥部 11に吐出される(図 5 (b)を参照)。この場合、例えば内径 Dが 6 /i mの吐出 針 2を使用し、欠陥部 11の大きさ Sに応じてトリミングサイズとして 50 x m角が選択さ れたときには、図 3に示すように 1回の吐出動作が実行され、 70 z m角が選択された ときには 4回の吐出動作が実行され、 100 a m角が選択されたときには 10回の吐出動 作が実行される。  In the fourth step, as shown in FIG. 4 (b), the needle tip 2 a of the discharge needle 2 is positioned on the defective portion 11. When a discharge start switch (not shown) is pressed in this state, the timer 8 of the discharge control means 3 shown in FIG. 1 operates and opens the electromagnetic valve 9 for a preset time. As a result, the compressed air is supplied from the air tank 7 to the container 1 through the piping tube 6 while the flow rate is adjusted by the flow control valve 10. Then, a positive pressure by air is applied to the color ultraviolet curable resin 4 in the container 1, and the color ultraviolet curable resin 4 is discharged from the discharge needle 2 to the trimmed defect portion 11 (see FIG. 5 (b)). In this case, for example, when a discharge needle 2 having an inner diameter D of 6 / im is used and a 50 xm square is selected as a trimming size in accordance with the size S of the defect portion 11, a single time as shown in FIG. When the 70 zm angle is selected, four discharge operations are performed, and when the 100 am angle is selected, ten discharge operations are performed.
[0031] 第 5ステップにおいては、上記対物レンズを通して、図 4 (c)に示すように、例えば 35 5nm (紫外線)のレーザ光線 13が所定時間だけ照射され、欠陥部 11に吐出された力 ラー紫外線硬化樹脂 4を硬化させる(図 5 (c)を参照)。これにより、図 4 (d)に示すよう に欠陥部 11の修正が完了する(図 5 (d)を参照)。 In the fifth step, as shown in FIG. 4 (c), a laser beam 13 of, eg, 355 nm (ultraviolet) is irradiated for a predetermined time through the objective lens, and the power error discharged to the defect portion 11 is emitted. The UV curable resin 4 is cured (see Fig. 5 (c)). As a result, as shown in Fig. 4 (d) Then, the defect 11 is corrected (see Fig. 5 (d)).
[0032] なお、上記第 2ステップにおいて、予め設定された三つのトリミングサイズから欠陥 部 11の大きさに応じて一つを選択するのではなぐ 1回の吐出量及び塗布厚が予め 分かっている場合には、欠陥部 11の大きさに拘わらず上記吐出量及び塗布厚に基 づいて算出されたトリミングサイズを常時設定するようにしてもよい。具体的には、例 えば内径 Dが 19 z mの吐出針 2を使用したとき、 1回の吐出量が図 3に示すように 19. 8pLである場合には、欠陥部 11の大きさに拘わらずトリミングサイズを 100 z m角に常 時設定してトリミングすればよい。この場合、 1回の吐出動作によりトリミング部をカラ 一紫外線硬化樹脂 4で略満たすことができる。  [0032] In the second step, it is not necessary to select one of the three trimming sizes set in advance according to the size of the defective portion 11, and the discharge amount and the coating thickness for one time are known in advance. In this case, the trimming size calculated based on the discharge amount and the coating thickness may be always set regardless of the size of the defective portion 11. Specifically, for example, when a discharge needle 2 having an inner diameter D of 19 zm is used and the discharge volume per stroke is 19.8 pL as shown in FIG. 3, it depends on the size of the defect 11. You should always set the trimming size to 100 zm square. In this case, the trimming portion can be substantially filled with the color UV curable resin 4 by one discharge operation.
[0033] このように、本発明の欠陥修正方法によれば、欠陥部 11をトリミングするために予め 設定された複数のサイズからその一つを欠陥部 11の大きさに応じて選択可能にした ことにより、欠陥部 11が小さい場合にはトリミングサイズを小さくしてカラー紫外線硬 化樹脂 4の吐出量を少なくすることができる。したがって、カラーフィルタ 5の欠陥修正 に使用するカラー紫外線硬化樹脂 4の使用量を抑制することができる。  As described above, according to the defect correcting method of the present invention, one of a plurality of sizes set in advance for trimming the defective portion 11 can be selected according to the size of the defective portion 11. Thus, when the defect portion 11 is small, the trimming size can be reduced and the discharge amount of the color ultraviolet curable resin 4 can be reduced. Accordingly, the amount of the color ultraviolet curable resin 4 used for correcting the defect of the color filter 5 can be suppressed.
[0034] また、トリミングサイズに応じて設定された吐出回数だけカラー紫外線硬化樹脂 4を 吐出するようにしたことにより、 1本の吐出針 2で異なるサイズのトリミング部に対しても 対応すること力できる。  [0034] Further, since the color ultraviolet curable resin 4 is ejected as many times as the number of ejections set according to the trimming size, a single ejection needle 2 can cope with trimming parts of different sizes. it can.
[0035] さらに、 1回の吐出量及び塗布厚が予め分かっている場合には、欠陥部 11の大き さに拘わらず上記吐出量及び塗布厚に基づいて算出されたトリミングサイズを常時設 定すれば、欠陥部 11の大きさを計測する必要が無ぐ欠陥修正作業が簡便となる。 したがって、欠陥修正作業の時間を短縮することができる。  [0035] Further, when the discharge amount and the coating thickness for one time are known in advance, the trimming size calculated based on the discharge amount and the coating thickness is always set regardless of the size of the defect portion 11. In this case, the defect correction work that does not require measurement of the size of the defect portion 11 is simplified. Therefore, it is possible to shorten the time for defect correction work.
[0036] 以上、吐出対象物としてカラーフィルタ基板を用いた場合について説明した力 こ れに限られず、例えば配線回路等の膜の欠陥修正にも適用することができる。  As described above, the force described in the case where the color filter substrate is used as the discharge target is not limited to this, and the present invention can be applied to defect correction of a film such as a wiring circuit.

Claims

請求の範囲 The scope of the claims
[1] 吐出対象物の欠陥部を修正するための吐出材を収容する容器と、該容器の先端 に取り付けられ前記吐出材を前記欠陥部に吐出させる吐出針と、前記容器内の吐出 材に正圧を付与して該吐出材を前記吐出針から吐出させる吐出制御手段とを備える デイスペンザであって 前記吐出針は、加熱軟化させたガラスパイプを引き伸ばして針先を針本体部よりも 細い形状に形成したことを特徴とするディスペンサ。  [1] A container for containing a discharge material for correcting a defective portion of a discharge target, a discharge needle attached to a tip of the container and discharging the discharge material to the defective portion, and a discharge material in the container A dispenser provided with a discharge control means for applying a positive pressure to discharge the discharge material from the discharge needle, wherein the discharge needle is formed by extending a heat-softened glass pipe so that the needle tip is narrower than the needle body A dispenser characterized in that it is formed.
[2] 吐出対象物の欠陥部を修正するための吐出材を収容する容器と、該容器の先端 に取り付けられ前記吐出材を前記欠陥部に吐出させる吐出針と、前記容器内の吐出 材に正圧を付与して該吐出材を前記吐出針力 吐出させる吐出制御手段とを備える デイスペンサを使用して、吐出対象物の欠陥部を修正する欠陥修正方法であって、 前記ディスペンザから吐出される吐出材の吐出量及び塗布厚に基づいて予め設定 されたトリミングサイズで前記欠陥部をトリミングし、  [2] A container for containing a discharge material for correcting a defective portion of a discharge target, a discharge needle attached to a tip of the container and discharging the discharge material to the defective portion, and a discharge material in the container A defect correction method for correcting a defective portion of an object to be discharged using a dispenser that includes a discharge control unit that applies a positive pressure to discharge the discharge material with the discharge needle force, and is discharged from the dispenser Trimming the defective portion with a preset trimming size based on the discharge amount and coating thickness of the discharge material,
該トリミングされた欠陥部に所定量の吐出材を吐出する、  Discharging a predetermined amount of the discharge material to the trimmed defect,
ことを特徴とする欠陥修正方法。  The defect correction method characterized by the above-mentioned.
[3] 吐出対象物の欠陥部を修正するための吐出材を収容する容器と、該容器の先端 に取り付けられ前記吐出材を前記欠陥部に吐出させる吐出針と、前記容器内の吐出 材に正圧を付与して該吐出材を前記吐出針から吐出させる吐出制御手段とを備える デイスペンサを使用して、吐出対象物の欠陥部を修正する欠陥修正方法であって、 前記欠陥部をトリミングするために予め設定された複数のトリミングサイズからその 一つを前記欠陥部の大きさに応じて選択して該欠陥部をトリミングし、 [3] A container for containing a discharge material for correcting a defective portion of a discharge target, a discharge needle attached to the tip of the container and discharging the discharge material to the defective portion, and a discharge material in the container A defect correction method for correcting a defective portion of a discharge target object using a dispenser that includes a discharge control unit that applies a positive pressure to discharge the discharge material from the discharge needle, and trims the defective portion Therefore, one of a plurality of trimming sizes set in advance is selected according to the size of the defective portion, and the defective portion is trimmed.
該トリミングされた欠陥部に対して前記選択されたトリミングサイズに応じて予め設定 された吐出回数だけ前記吐出材を吐出する、  The ejection material is ejected to the trimmed defect portion by the number of ejections set in advance according to the selected trimming size.
ことを特徴とする欠陥修正方法。  The defect correction method characterized by the above-mentioned.
[4] 前記ディスペンザの吐出針は、加熱軟化させたガラスパイプを引き伸ばして針先を 針本体部よりも細い形状に形成したことを特徴とする請求項 2又は 3記載の欠陥修正 方法。 前記吐出材は、紫外線の照射により硬化する紫外線硬化樹脂であることを特徴と する請求項 2〜4のいずれか 1項に記載の欠陥修正方法。 4. The defect correcting method according to claim 2, wherein the discharge needle of the dispenser is formed by extending a heat-softened glass pipe so that the tip of the needle is thinner than the needle body. 5. The defect correcting method according to claim 2, wherein the discharge material is an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.
前記吐出対象物は、カラーフィルタ基板であることを特徴とする請求項 2〜5のいず れか 1項に記載の欠陥修正方法。  6. The defect correcting method according to claim 2, wherein the discharge target is a color filter substrate.
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