JP2002361151A - Method and device for discharge coating of liquid body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device for photoresist used when a color filter substrate and a thin film transistor substrate composing an active matrix liquid crystal display device are manufactured, low in the device cost, having a simple device configuration enabling easy maintenance, and minimizing the amount of the photoresist thereby significantly improving the running cost. SOLUTION: In this discharge coating method, a liquid body is discharged from a flat slit discharge nozzle and applied to the surface of a substrate by using a liquid body discharge coating device constituted so that the flat slit discharge nozzle having a valve system and the substrate are relatively moved. Pulsed switching operation of the valve system of the flat slit discharge nozzle performs continuous band-like, substantially planar, discharge coating of the liquid body on the substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for discharging a processing liquid onto various substrates such as a glass substrate for a liquid crystal display panel, a substrate for an organic EL, a substrate for a plasma display, a substrate for a semiconductor, a ceramic substrate, and a printed substrate. The present invention relates to an apparatus for applying a liquid to the surface of the substrate, and particularly to a configuration of the discharge nozzle body.

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open Nos. 9-164357 and 9-271705 disclose apparatuses for applying a processing liquid to a substrate surface by moving a discharge nozzle body while discharging a coating liquid from the discharge port of the discharge nozzle to the substrate surface. It has been proposed in JP-A-11-135006 and JP-A-11-188301. 1, 3 and 4 are cross sections of the above-discussed ejection nozzle. A slit nozzle is used, and a shim member as shown in FIG. 2 is installed in FIG. 1 to make the thickness and flow velocity of the application fluid uniform in the flow path of the opening. In FIG. 3, a pressurizing piston and a check valve are built in the discharge nozzle body. FIG. 4 shows a nozzle in which a comb-shaped tip member is attached to a slit portion, so that a plurality of line-shaped inorganic paste layers can be formed in one application step.

[0003] In a conventional liquid crystal panel liquid crystal injection port sealing step, the ultraviolet curable resin is applied to the injection port portion by using a roll-shaped applicator having a shape of a solo bang as shown in FIG. As shown in FIG. 27, the method of applying the ultraviolet curable resin to the tip of the solo ban ball was to apply the ultraviolet curable resin glued to the dish to the tip of the roll while rotating the roll. The roll was made of stainless steel metal.

A conventional method of forming a spacer of a liquid crystal panel uses a method of forming a spacer at a target location by using a photolithography process as proposed in JP-A-10-048636.

[0005] As a conventional method for producing minute metal spheres, Japanese Unexamined Patent Publication No.
117724 and JP-A-7-224305 have been proposed. An atomizing method in which the molten metal is sprayed using an inert gas, and a method in which the molten metal is caused to flow down on a rotating disk to be dispersed and atomized by centrifugal force. After making metal spheres using these micro metal sphere manufacturing methods, using a particle size separator,
Metal spheres of uniform particle size were collected.

A conventional DNA chip manufacturing method is disclosed in
There is a spotting method proposed in Japanese Patent Publication No. 0-503841. This is a method in which DNA is applied to a substrate in a matrix using a fine nozzle.

[0007]

Problems to be Solved by the Invention
7, JP-A-9-271705, JP-A-11-13500
6, a conventional slit coater proposed in Japanese Patent Application Laid-Open No. 11-188301 discloses a method in which a nozzle and a substrate are in contact with each other through a liquid as shown in FIGS. Distance has become a very important parameter. At the start of coating, the conventional slit coater does not discharge the liquid uniformly, so that the nozzle and the substrate are stationary until the space between the tip of the nozzle and the substrate is completely connected by the liquid. After the space between the nozzle and the substrate is completely connected with the liquid, either the nozzle or the substrate starts to move. For this reason, there was a tendency that the nonuniformity of the coating film thickness at the start of coating was large. Liquid coating thickness is 10
In the case of 0 μm or more, the uniformity did not become a serious problem even in the conventional method, but when the thickness of the photoresist or the like is 5 μm or less, it is very difficult to obtain a uniform coating film pressure. Difficultly, after coating with a slit coater, the substrate was rotated to obtain a uniform coating film thickness. However, in this method, when the substrate size is equal to or larger than the metric size, the size of the device, the price of the device, the running cost, and the like have been problems.

[0008] In a roll-shaped coating device in the form of a solo ban ball used in a conventional liquid crystal panel liquid crystal injection port sealing step, as shown in FIG. 30, when the cut surfaces of two substrates are not aligned, Unable to apply sufficient amount of UV curable resin to substrate. Furthermore, the edge of one of the protruding substrates was broken by the roll tip in the shape of a soloban ball, and cullet was easily generated. This glass cullet adheres to the tip of the roll and causes a problem of re-adhering to the injection port of the liquid crystal panel in the next sealing step. As shown in FIG. 27, a conventional method of supplying an ultraviolet curable resin to a roll-shaped coating apparatus has been to use a method in which an ultraviolet curable resin is glued to a tray and the tip of the roll is brought into contact with the ultraviolet curable resin. In this method, when the tip of the roll is contaminated with liquid crystal or glass cullet, there is a problem that these contaminants spread over the entire tray. Further, there is also a problem that the ultraviolet curable resin easily absorbs moisture and deteriorates because it is attached to the entire surface of the tray.

In the conventional method of forming a spacer using a photolithography process, it is difficult to reduce the manufacturing cost.
Further, the photolitho spacer has a problem that a space change due to an external pressure is small and low-temperature emission is easy.

[0010] As a conventional method for producing minute metal spheres, Japanese Unexamined Patent Publication No.
Although 117724 and JP-A-7-224305 have been proposed, these production methods have a large particle size distribution and a low yield of producing metal spheres of a target size. It is not possible to control the particle size by giving feedback in real time while measuring the particle size of the metal sphere.

[0011] As a conventional DNA chip production,
A spotting method is proposed in -503841. However, when a fine nozzle is brought into contact with a substrate, the distance between the tip of the nozzle and the substrate must be accurately measured using a laser or the like. The amount of application also changes depending on the surface condition of the substrate, and if the tip of the nozzle is deformed, the amount of application also changes greatly. In the conventional method, problems tend to occur in the uniformity and reproducibility of the coating amount, the coating time is long, and the price of the DNA chip cannot be reduced.

A conventional jig for irradiating an ultraviolet curable resin with ultraviolet rays in a liquid crystal injection port sealing step has a shape as shown in FIG. 52, and pitches of liquid crystal panels are not uniform. Therefore, as shown in FIG. 52, in the case of a substrate closed on one side, there has been a problem that ultraviolet light is irradiated to a display area of a liquid crystal panel through a gap between the substrate and a jig.

The present invention provides means for solving these problems, and in particular, solves the problems associated with liquid shortage and leakage at a glance, and achieves high-precision liquid micro-discharge and stop. It is an object of the present invention to provide a nozzle for a liquid fixed-rate discharge device which can be performed by using the above method.

[0014]

Means for Solving the Problems In order to solve the above problems and achieve the above object, the present invention uses the following means.

[Means 1] The valve mechanism of the discharge mechanism is opened and closed in a pulse-like manner by using a liquid material discharge coating apparatus configured so that the discharge mechanism having a valve mechanism and the substrate are relatively moved. Thus, the liquid material was discharged and applied to the substrate surface in a continuous band shape, so that the liquid material was applied substantially in a planar shape.

[Means 2] With respect to the nozzle for discharging the pressurized liquid introduced into the liquid container, a valve mechanism in the form of a flat blade is installed in the nozzle body communicating with the liquid container.

[Means 3] The nozzle body described in the means 2 is
It has a slit-shaped discharge port, and a flat blade-shaped valve mechanism is provided near the slit-shaped discharge port.

[Means 4] The nozzle body according to the means 2 has a plurality of slot-shaped discharge ports, and a valve mechanism in the form of a flat blade is provided near the plurality of slot-shaped discharge ports.

[Means 5] The nozzle body described in the means 2 is
It has a plurality of circular discharge ports, and a plate mechanism in the form of a plate blade is provided near the plurality of slot-shaped discharge ports.

[Means 6] With respect to the nozzle for discharging the pressurized liquid introduced into the liquid container, a plurality of needle-shaped valve mechanisms are provided in the nozzle body communicating with the liquid container.

[Means 7] The nozzle body described in the means 6 is
It has a plurality of circular discharge ports, and a plurality of needle-shaped valve mechanisms are provided near the plurality of circular discharge ports.

[Means 8] With respect to the nozzle described in Means 2, a plurality of grooves are formed at the tip of the flat blade of the flat blade-shaped valve mechanism provided near the discharge port.

[Means 9] With respect to the nozzle described in Means 2, among the flat blade-shaped valve mechanisms provided in the vicinity of the discharge port, a plurality of grooves are formed inside the discharge port in contact with the tip of the flat blade. Formed.

[Means 10] With respect to a nozzle for a liquid metering device for discharging and stopping the pressurized liquid introduced into the liquid storage section, the nozzle body is in contact with the circular liquid discharge hole and the discharge hole. The needle-shaped valve mechanism is movable, and a plurality of grooves are formed at the tip of the needle-shaped valve.

[Means 11] With respect to a nozzle for a liquid metering device for discharging and stopping the pressurized liquid introduced into the liquid storage section, the nozzle body has a circular liquid discharge hole and is in contact with the discharge hole. And a movable needle-shaped valve mechanism, and a plurality of grooves are formed inside a circular discharge hole in contact with the needle-shaped valve.

[Means 12] With respect to a nozzle for a liquid metering device for discharging and stopping discharge of the pressurized liquid introduced into the liquid container, a nozzle main body communicating with the liquid container is provided with:
A valve mechanism in the form of a closed loop flat blade was installed.

[Means 13] The nozzle body according to the means 12 has a closed-loop slit-shaped discharge port.
A valve mechanism in the form of a flat blade was provided in the vicinity of the discharge opening in the form of a closed loop slit.

[Means 14] For each of the liquid application apparatuses using the nozzles described in Means 2 to 13, the liquid degassed by a vacuum degassing module using a fluorinated hollow fiber is pressurized by a pressure pump. Thereby, the liquid can be continuously supplied to the liquid storage section of the coating apparatus.

[Means 15] A discharge mechanism having a valve mechanism,
In a method of discharging and applying a liquid material from a nozzle of a discharging mechanism to a substrate surface using a liquid material discharging and applying apparatus configured to move relatively to a substrate, a valve mechanism of the discharging mechanism is opened and closed in a pulse shape. By operating the liquid material on the surface of the substrate in a continuous band, line, broken line, or dotted line, a single valve opening / closing operation allows the nozzle to apply the liquid without contacting the substrate. I made it.

[Means 16] Using the applicator described in Means 15, after applying a continuous band, linear, broken or dotted line, the discharge mechanism having a valve mechanism and the substrate are relatively fixed. After moving in the uniaxial or biaxial direction by the distance, the valve mechanism of the discharge mechanism is opened and closed again in the form of a pulse, so that the liquid material is applied to the substrate surface once in a strip, linear, dashed, or dotted line. Apply by opening and closing the valve. This operation is repeated to apply the liquid two-dimensionally to the substrate surface.

[Means 17] A valve mechanism is provided in the nozzle body communicating with the liquid container, and a pressure is applied to the liquid container with an inert gas (argon, helium, neon, krypton), nitrogen gas, or the like, and pressure is applied. With respect to the liquid metering device that discharges and stops the liquid, the nozzle body with the liquid container and the valve mechanism is made of high melting point metal or quartz or carbon or glassy carbon, and around the liquid container and the nozzle, A heater for heating liquid and a high-frequency coil were installed.

[Means 18] The metal is liquefied using the liquid dispensing apparatus described in the means 17 and a needle valve is opened and closed in a pulsed manner to discharge a fixed amount of metal to the outside of the nozzle in a liquid state. . The discharged liquid metal is cooled in an atmosphere of oil or an inert gas (argon, helium, neon, krypton) or nitrogen gas to produce a solid metal ball.

[Means 19] The apparatus for manufacturing metal spheres described in Means 17 and 18 is connected to a device for separating metal spheres by rotating two rolls in opposite directions, and the number of metals of a desired size is connected. Feedback was applied to the liquid metal metering device so that the size of the metal sphere could be controlled.

[Means 20] Using the coating method described in the means 15, simultaneously drop a liquid ultraviolet curable resin, a thermosetting resin, or a polymer resin dissolved in a solvent onto a plurality of rotating molds, A plurality of lenses can be formed simultaneously.

[Means 21] By repeating the method described in Means 20, a plurality of lenses made of a plurality of layers made of different materials can be simultaneously manufactured.

[Means 22] Regarding the liquid crystal injection step of the liquid crystal panel, the liquid crystal injection state of the empty cell whose inside is evacuated is measured using polarized visible light / optical fiber. The liquid crystal cell gap is measured in real time using a single-wavelength optical fiber that can change the wavelength of light, and the increase in the cell gap is measured. Next, after a certain period of time from when the cell gap began to increase, the liquid crystal panel was separated from the liquid crystal dish, and a liquid crystal injection port sealing step was started.

[Means 23] A plurality of wheel-shaped rolls having two peaks at the arranged tip are arranged in accordance with the pitch at which the liquid crystal panels are arranged in the step of sealing the liquid crystal filling port of the liquid crystal panel. After simultaneously applying the UV curable resin for sealing the injection port using the fixed amount discharge nozzle described in 6, 7, 8, and 9, the plurality of rolls are simultaneously applied to the liquid crystal injection port of the liquid crystal panel. Then, an ultraviolet curable resin was applied to the injection port.

[Means 24] In the step of sealing the liquid crystal filling port of the liquid crystal panel, a dispenser is used for a plurality of wheel-shaped rolls each having two peaks at the tip arranged in accordance with the arranged pitch of the liquid crystal panel. After applying the UV curable resin for filling the injection port to the tip of the roll, apply the rolls simultaneously to the liquid crystal injection port within 5 minutes after the liquid crystal panel is peeled off from the liquid crystal dish, and then UV cured. Apply resin to inlet.

[Means 25] The peak-to-peak widths of the two peaks at the tip of the wheel-shaped roll described in Means 23 and 24 are set to be 1/1 / th of the total thickness of the two glass substrates which are separated from each other. The range was from 4 to 3/4.

[Means 26] The material of the wheel-shaped roll described in the means 25 is an elastic body such as rubber or polymer plastic.

[Means 27] In the step of sealing the liquid crystal injection port of the liquid crystal panel, means 2, 5, 6, 7, and 2 having a plurality of circular ejection holes in accordance with the arranged pitch of the liquid crystal panel.
Using the nozzles described in 8 and 9, an ultraviolet curable resin is applied to the injection ports of a plurality of liquid crystal panels simultaneously without contact.

[Means 28] After applying an ultraviolet curable resin to the injection port of the liquid crystal panel by using the coating method described in the means 23, 24, and 27, the liquid crystal is controlled so that ultraviolet rays are not irradiated to the liquid crystal panel other than the injection port. The panel was sandwiched from both sides, and a mechanism was installed to attach the shielding plate to both sides of the liquid crystal panel.

[0043]

In the conventional slit coater, as shown in FIGS. 1 and 3, since the liquid is not uniformly discharged from the slit nozzle at the start of coating, the space between the tip of the nozzle and the substrate is liquid. The nozzle and substrate must remain stationary until fully connected. Although a member having a shim structure is introduced into the inside as shown in FIG. 2 so that the liquid is discharged uniformly over the entire slit,
Not perfect yet. By using the means 1, 2, and 3, the liquid is applied under the same conditions at the beginning, the middle, and the end of the liquid discharge, so that the control of the liquid discharge can be easily performed and the coating unevenness does not occur. Further, since it is not necessary to make the tip of the nozzle and the substrate come into contact with each other by liquid, it is possible to increase the distance between the substrate and the tip of the nozzle. This eliminates the need for precise control of the substrate and the tip of the nozzle, thereby simplifying the structure of the apparatus. Since there is no need to scan by inserting a liquid into the space between the tip of the nozzle and the substrate, the scanning speed can be greatly improved. When a conventional slit coater is used in the coating process of a plasma display panel (PDP) or a large liquid crystal panel, it is difficult to shorten the tact time and productivity cannot be improved. Sex can be significantly improved.

By using the means 1, 2 and 3, a high-viscosity liquid, which could not be applied conventionally, can be applied freely, so that a high-speed and uniform thick-film application becomes possible. Was. In the conventional slit coater, it was necessary to improve the uniformity of the film thickness by rotating the substrate again after coating, so it was difficult to improve the utilization efficiency of the coating liquid. Is no longer necessary, and it is possible to improve the use efficiency of the application liquid. The coating device is small and investment efficiency is greatly improved.

Means 1, 2, 4, 5, 6, 7 and means 15,
The combination of No. 16 allows the phosphor layer of the plasma display, the color filter layer of the liquid crystal display device, and the organic EL layer of the organic EL display device to be directly striped, slot-striped, or dot-striped without using photolithography technology. And the effective utilization rate of the applied material can be greatly improved, and the cost can be reduced.

By using the means 5, 6, 7 and the means 15, 16, it is possible to arrange spacer beads for determining the cell gap of the liquid crystal display device at fixed points. As a result, all light leakage due to liquid crystal alignment bleeding around the spacer beads can be captured in the light shielding film region. Since a good black level can be formed, the contrast can be greatly improved. Further, since the distribution of the spacers can be made uniform, the uniformity of the cell gap can be improved. Thereby, gap unevenness can be reduced and the yield can be greatly improved. The spacer beads according to the present invention can be freely determined for the material differently from those using photolithography, so that they can be used for various types of liquid crystal panels. Since the amount of change due to the compression pressure can be increased and the reproducibility is good, it is possible to prevent low-temperature phenomena. Since the movement phenomenon of the spacer beads due to the vibration does not occur, the liquid crystal display panel can be used for all uses such as a bus and a railway.

The use of the means 8, 9, 10, 11 makes it possible to carry out more precise quantitative discharge application. Since the valve and the valve seat are in constant contact with each other, there is no collision damage or noise between the valve and the valve seat which occurs in a type in which the valve and the valve seat are separated, so that the coating can be performed quietly and smoothly.

By using the nozzles of the means 12 and 13, the liquid application in a closed loop can be easily performed.
Since the threading phenomenon does not occur even with a liquid having a high viscosity, closed loop drawing can be performed with good yield. Since a closed loop can be drawn at high speed even in the packaging of a semiconductor IC, productivity can be greatly improved. A closed loop drawing of a seal is required in a vacuum sealing step of a liquid crystal display panel or an organic EL display panel. However, by using the present invention, a high-viscosity solventless seal can be simply and quickly closed loop coated.

Degassing the liquid by the degassing module using a fluorine-based hollow fiber described in the means 14 in the pressurized liquid discharging apparatus of the present invention prevents wrinkles from occurring and performs good uniform liquid application. Can be. In particular, in the case of a liquid having a low viscosity, the deaeration effect is large, and the yield can be improved.

The production of fine metal spheres using the means 17, 18, and 19 makes it possible to produce metal spheres having a uniform particle size with good yield. In the conventional manufacturing method, since the liquid metal is not discharged in a fixed amount one by one, it is very difficult to produce a target particle diameter with a large particle diameter distribution with a high yield. By using the pressurized liquid metal discharge nozzle of the present invention, the discharge amount per discharge can be accurately controlled. Thereby, the particle size can be made uniform. Further, by connecting the metal sphere production of the present invention and a device for separating the metal spheres by rotating two rolls in the opposite direction, and applying feedback to the pressurized liquid metal fixed-quantity discharge device, the metal can be more accurately formed. The particle diameters of the spheres can be made uniform, and the incidence of defects can be reduced.

By means 20 and 21, a plurality of lenses can be formed simultaneously by simultaneously dropping a liquid ultraviolet curable resin, a thermosetting resin, or a polymer resin dissolved in a solvent into a plurality of rotating molds. By arranging two or three of these devices in-line, it is possible to mass-produce a large number of contact lenses in which two or three layers of materials having different functions are laminated. By applying feedback to the pressurized fixed-quantity discharge device in conjunction with the non-contact thickness measuring device, a contact lens with higher accuracy can be manufactured with a high yield.

Using the means 15 and 16, it is possible to uniformly apply a fixed amount of DNA to the substrate in a two-dimensional dot matrix without bringing the nozzle into contact with the substrate. Non-contact high-speed discharge enables high-speed coating and expensive DN
A chip can be manufactured at low cost. It has excellent uniformity and reproducibility of the coating amount, and does not require any maintenance because there is no deformation or contamination of the nozzle. The pressurized liquid metering nozzle of the present invention can be used in a vacuum because it has a valve mechanism. This is particularly effective when a chemical solution affected by oxygen or moisture is applied at high speed in a two-dimensional dot matrix in a vacuum. In the production of DNA chips and organic EL display devices, expensive materials must be applied without deteriorating, so using the nozzle of the present invention makes it easier to control the coating atmosphere and improves the stability of quality. can do.

By using the means 22, the time until the liquid crystal is completely injected into the empty liquid crystal cell can be measured, and the liquid crystal injection step when the cell gap, the alignment film and the liquid crystal are different can be fully automated. By managing each liquid crystal cell using a measuring sensor, it is possible to prevent the occurrence of a defect due to insufficient liquid crystal injection. By measuring the liquid crystal cell gap, the amount of injected liquid crystal can be optimized. As a result, the pressurizing time for adjusting the cell gap can be shortened, and the production efficiency can be greatly improved.

By using the means 23, 25, 26 and 27, breakage of the glass at the liquid crystal injection port does not occur. The UV curable resin for sealing the inlet is not deteriorated by absorbing moisture in the atmosphere, and the problem of contamination in the inlet sealing step can be reduced. Even if a step occurs due to a cutting error of the glass, a sufficient amount of the ultraviolet curable resin can be applied, so that there is no variation in reliability and the quality is stabilized.

By using the means 22, 23, 24 and 27, the time from the completion of the liquid crystal injection to the sealing of the injection port can be accurately controlled. This eliminates the need for a pressurizing step for correcting the cell gap after the completion of the implantation, and makes it possible to greatly reduce the time. Feedback upon occurrence of a defect can be promptly given, so that the occurrence rate of defective products can be reduced. By shortening the time from the completion of the injection to the sealing to within 5 minutes, it is possible to prevent the contamination of the injection port portion, so that there is almost no unevenness due to contaminants around the injection port, and the yield can be greatly improved.

By using the means 28, it is possible to completely solve the irradiation problem that occurs when the injection port sealing resin is subjected to the ultraviolet curing treatment. Irradiation with strong ultraviolet rays causes a change in the surface state of the alignment film and a decrease in the pretilt angle of liquid crystal molecules. The use of the irradiation device of the present invention makes it possible to completely prevent the effective pixel region from being irradiated with ultraviolet rays.

[0057]

FIG. 5, FIG. 6, FIG. 7, FIG. 8, and FIG. 9 are explanatory views of a pressurized liquid fixed-quantity discharging apparatus according to a first embodiment of the present invention. FIG. 5 shows an example in which a flat blade-shaped valve element for opening and closing the valve is operated by an air cylinder. FIG. 9 shows an example in which a flat blade-shaped valve element for opening and closing the valve is operated by an electromagnetic driving means.
A liquid discharge port is provided at the lower end of the pressurized liquid fixed-rate discharge device. FIGS. 7 and 8 are enlarged views of this discharge port. It has a slit-shaped nozzle shape. In FIG. 8, a plurality of rectifying plates are provided inside the slit discharge port. A flat blade-shaped valve element (10) that can move in the vertical direction is disposed inside the nozzle.
0 ▼ and a slit nozzle having the function of a valve seat form a valve mechanism. That is, a part of the inner wall surface near the discharge port of the slit nozzle is provided with a function as a valve seat, and the peripheral surface of the distal end portion of the valve element {10} comes into line contact or surface contact, thereby closing the valve. Therefore, the discharge of the liquid is stopped, and when such a contact is released, the valve is opened and the discharge of the liquid is started. In the nozzle according to the present invention, the contact position between the flat blade-shaped valve element (10) and the valve seat, that is, the opening / closing position of the valve is formed near the liquid discharge port. It can be formed such that the position and the discharge port position are substantially the same.

The flat blade-shaped valve element (10) of the present invention comprises:
Its tip is located near the discharge port of the slit nozzle, and its rear end is the piston (11) of the cylinder (12).
, So that it can be moved up and down in the vertical direction. When pressurized air is supplied to the lower port of the cylinder, the flat blade-shaped valve element (10) separates from the valve seat to open the slit-shaped discharge port, and at the same time, the liquid pressurized to the required pressure. Is discharged from the slit-shaped discharge port for a certain period of time specified in relation to the opening area thereof,
A fixed amount of liquid can be discharged with high accuracy without a time lag. On the other hand, at the end of the quantitative discharge, by supplying pressurized air to the upper port of the cylinder, the flat blade-shaped valve element (10) immediately descends and comes into contact with the valve seat, and the slit-shaped discharge is performed. The outlet is securely closed mechanically by a flat bladed valve. Therefore, the discharge of the liquid from the slit-shaped discharge port is caused by the flat blade-shaped valve element {10}.
Will be completely stopped by contact with the valve seat,
The risk of liquid leakage during closing of the slit nozzle is sufficiently removed.

As described above, the pressurized liquid discharge apparatus of the present invention always smoothly and rapidly retracts (ups) and advances (downs) the valve body regardless of the magnitude of the liquid pressure to open and close the discharge port. Therefore, excellent responsiveness can be realized in addition to the certainty of valve opening and closing. FIG. 6 is an explanatory diagram when a liquid is discharged in a line (band) using the pressurized liquid discharge device of the present invention. FIG. 5 is an explanatory diagram of a case where the liquid is applied in a planar shape by continuously moving the discharge position in a line (band) and moving the discharge position little by little.

FIG. 56 shows a case where a photoresist is actually applied to a meter-sized substrate by using the liquid ejection apparatus of the present invention.
After discharging the photoresist in the form of a line (band) as shown in (1) and moving the substrate a certain distance in the uniaxial direction,
The photoresist is discharged in a shape. By repeating this, a photoresist can be applied in a planar manner on the substrate. In particular, when a periodic pattern is formed like an active matrix substrate, it is important to set the photoresist discharge interval to the same pitch as the pattern repetition pitch as shown in FIG. In FIG. 57, the scanning line -9
The case where a photoresist is applied in accordance with the pitch of 9 ▼ is shown. In the case of a video signal line, it is preferable to apply in a direction intersecting 90 degrees with the application direction in FIG. 57, and to apply a photoresist in accordance with the pitch of the video signal line.

Embodiment 2 FIGS. 12, 13, 14, and 15 show a second embodiment of the present invention. The pressurized liquid fixed-quantity discharge nozzle of the present invention has a flat blade-shaped valve body at the discharge port,
The discharge port is always in contact with the flat blade-shaped valve element. The pressurized liquid is discharged to the outside of the nozzle through a vertical groove formed at the tip of the flat blade or a vertical groove formed at the discharge port. The vertical streak groove has a rectifying action, and uniform line (band) discharge can be realized by adjusting the width and pitch of the groove. FIG. 58, FIG.
Is an example in which the nozzle structure of the present invention is applied to a single discharge port device. In FIG. 58, two vertical grooves are formed at the tip of the needle valve body. In FIG. 59, four vertical grooves are formed inside the circular discharge port.

[Embodiment 3] FIGS. 22 and 23 show a third embodiment of the present invention. The discharge port of the pressurized liquid is formed in a dotted line or a broken line. The diameter of the circular minute hole may be an optimum one from several microns to several hundred microns depending on the application. The same applies to the discharge holes in the form of broken lines. The effect of the nozzle shown in FIG. 22 is great when it is used for the fixed point arrangement of the spacer beads of the liquid crystal panel. Since the spacer beads usually have a diameter of about 3 to 5 microns, the hole diameter is preferably two to three times as large as the beads. The pitch of the holes is adjusted to the pixel pitch or set to several times the pixel pitch. FIG. 21 is an arrangement diagram when spacer beads are arranged on a color filter substrate. FIG. 50 and FIG. 51 are enlarged views of spacer beads arranged at fixed points. In this figure, two spacer beads are arranged in one dropping area, but the number is not limited. Even in the case of the vertical alignment mode or the twisted nematic (TN) mode, there is no problem even if the coating is applied uniformly over the entire surface of the substrate as shown in FIG. In the case of the horizontal electric field mode, it is preferable to dispose spacer beads in the region of the light shielding film (black mask) as shown in FIGS. The nozzle of FIG. 23 has a large effect when used for forming a color filter layer of a liquid crystal panel. Since the width of the color filter layer is usually about 60 to 200 microns, the slit width of the dashed nozzle is narrower than these. In the case of 60 microns, coating is performed using a slit width of about 1/3 to 1/2. After applying all of R, G and B, they are squeezed by a press roller or an air press to fill the gap and then cured by heat or ultraviolet. In the TN mode or the vertical alignment mode, a transparent conductive material may be formed on the cured color filter layer. In the horizontal electric field mode, a flattening film may be applied on the color filter layer. FIG. 63 is an explanatory view of the process of the color filter substrate of the present invention. When the present invention is used, the waste of the material of the color filter is completely eliminated, and the manufacturing process can be omitted and simplified to less than half that of the conventional photolithography process. The pressurized fixed-quantity discharge nozzle of the present invention can also be applied to a phosphor application step for a plasma display panel (PDP). The present invention can be similarly applied to formation of an electron transfer layer, a hole transfer layer, and a light emitting layer of an organic EL. In particular, in the case of an organic EL, the effect of the present invention is enormous since the conventional photolithography process cannot be used. If the nozzle of the present invention uses a solvent-free liquid, it can be used even in a vacuum, which is effective for mass production of organic EL. (The conventional ink-jet coating method cannot be used in a vacuum, and the viscosity is limited so that a solvent must be used.) In the present invention, the viscosity is hardly limited and the freedom of materials is greatly increased.

Embodiment 4 FIG. 37 shows a fourth embodiment of the present invention. The reaction reagent can be simultaneously dropped at a plurality of quantitative points. When applied to the pharmaceutical analysis field, the analysis speed efficiency can be greatly improved. The effect is particularly great when the present invention is applied to a DNA chip manufacturing process. In FIG. 37, a needle valve type is used. However, by using the discharge nozzle of FIG. 23, a large number of minute spots of about 10 μm can be simultaneously formed at high speed. In the conventional method, the limit is about 100 microns, but by using the present invention, the spot diameter can be reduced to 1/10 and the area can be reduced to 1/100.
In particular, when a minute spot is formed, a piezoelectric element or a giant magnetostrictive element is preferably used for the actuator, as shown in FIG. In particular, when a minute discharge port is used, it is necessary to perform a fluorine-based surface treatment on the inside of the discharge port and the outside of the discharge port in order to improve liquid leakage.

Fifth Embodiment FIGS. 38 and 39 show a fifth embodiment of the present invention. This is a method in which a liquid resin is dropped on a rotating mold to simultaneously form a plurality of lenses. FIG. 40 is an explanatory diagram of a process of forming a multilayer lens by repeating different liquid resins a plurality of times as shown in FIG. 39. Although an ultraviolet curable liquid resin is used, a thermosetting liquid resin or a liquid resin dissolved in a solvent may be used. A contact lens made using the present invention is shown in FIGS. This is particularly effective when a plurality of resins having different functions are laminated.
Since a large number can be processed at the same time, cost can be reduced. A multilayer structure can be easily formed by applying a fluorine-based resin, which is difficult to laminate, after performing an excimer UV treatment or a corona discharge treatment (plasma surface treatment). By using a pressurized liquid fixed-quantity discharge nozzle in which a plurality of circular discharge ports are arranged in series as shown in FIGS. 10, 11, and 64, a highly accurate contact lens having no variation can be manufactured at low cost.

Sixth Embodiment FIGS. 16, 17, 18, 19 and 20 show a sixth embodiment of the present invention. It is explanatory drawing of a closed loop slit-shaped pressurized liquid fixed-quantity discharge nozzle.
FIG. 20 shows a nozzle for forming a potting / bump of a semiconductor IC chip. FIG. 18 shows nozzles used for applying a frit seal for a cathode ray tube, applying a closed loop seal for use in a liquid crystal dropping and joining process for a large liquid crystal panel, and applying a closed loop seal for a large plasma display panel or an organic EL panel. By using the present invention, closed loop coating, which was conventionally required from several seconds to about 10 seconds, can be reduced to 1/1000, from several milliseconds to about 10 milliseconds. In particular, in the case of multi-screening of large screens, processing can be performed in less than half the time required for one substrate for one minute or more. Closed-loop drawing, in which many problems are likely to occur at the beginning and end of application, ends very easily in one ejection operation. Production efficiency and yield can be greatly improved.

Embodiment 7 FIGS. 31, 32, and 33 show
It is a seventh embodiment of the present invention. FIG. 4 is an explanatory diagram of an optical system for measuring completion of liquid crystal injection in a process of injecting liquid crystal by vacuuming the inside of a liquid crystal cell. In FIG. 31, whether or not the liquid crystal has risen to the measurement point in the liquid crystal cell is measured using linearly polarized light. In FIG. 32, the liquid crystal cell gap is measured in real time after the liquid crystal has risen to the measurement point, and the measurement optical system is used to determine when the cell gap starts to increase. To measure the cell gap, the wavelength of light is changed, and the cell gap is estimated from a curve of a change in light amount depending on the wavelength of light. FIG. 61 is a diagram showing the relationship between the implantation time and the cell gap. It is preferable to install these two measurement optical systems for all the liquid crystal cells. However, only two or three cells may be measured in one batch due to cost. By using the optical system of the present invention, the problem of insufficient liquid crystal injection into the liquid crystal cell or excessive liquid crystal injection can be solved.

[Embodiment 8] FIGS. 25, 26, 29 and 62 show an eighth embodiment of the present invention. This is an apparatus for removing excess liquid crystal adhered to the liquid crystal injection port within 5 minutes after the liquid crystal injection into the liquid crystal cell is completely completed, and immediately applying an ultraviolet curable resin to the injection port. 2 at the outermost part
FIGS. 25 and 26 show that a plurality of wheels having three peaks are arranged, and an ultraviolet curable resin is applied to these two peaks.
It is. A plurality of rolls (wheel-shaped rotating bodies) are configured to apply an ultraviolet curable resin in a non-contact manner using the pressurized liquid fixed-quantity discharge device of the present invention. In a conventional rotary roll coating machine, as shown in FIGS. 28 and 27, the tip of the roll is formed by a single peak, and the ultraviolet curable resin is glued to a dish, and the rotary roll is brought into direct contact with the ultraviolet curable resin. And then applied to the liquid crystal injection port to apply an ultraviolet curable resin. For this reason, as shown in FIG. 30, when a step occurs in the cutting of the glass, the conventional roll is made of metal (stainless steel), and when the tip of the roll comes into contact with the injection port, the edge of the glass is damaged. Occurred frequently. Further, since the ultraviolet curable resin is exposed to the air for a long time, the ultraviolet curable resin attached to the dish absorbs moisture in the air or is exposed to indoor illumination light, thereby causing a problem. In the coating machine of the present invention, since the ultraviolet curable resin is supplied from the pressurized liquid metering and discharging device in a required amount only when necessary, the problem of deterioration is eliminated. Further, the material was changed from metal to elastic plastic, and the end of the roll was processed into two peaks, so that the breakage of the glass was completely eliminated.

Embodiment 9 FIGS. 24 and 25 show a ninth embodiment of the present invention. This is a method of applying an ultraviolet curable resin to an injection port in a non-contact manner by using a nozzle having a plurality of circular discharge ports shown in FIGS. 11, 12, 22, and 64. Unlike the eighth embodiment, since the UV curable resin is applied to the injection port in a non-contact manner, there is no fear of contamination and almost no maintenance is required. Because of the non-contact, the application speed is high, and the productivity is greatly improved.

[Embodiment 10] FIGS. 54 and 55 show a tenth embodiment of the present invention. This is an ultraviolet irradiation jig for irradiating ultraviolet rays from below after correcting a liquid crystal panel having a shifted pitch to a correct pitch. By using the pitch correcting jig of the present invention, it is possible to completely prevent the effective pixel region from being irradiated with ultraviolet rays. By using this jig, the occurrence of unevenness due to ultraviolet rays near the injection port can be drastically reduced. In FIG. 54, the panel pitch is corrected by a light-shielding jig that slides left and right.
In FIG. 55, the pitch is corrected using a rubber-like jig bulging like a balloon. The method of irradiating ultraviolet rays is not to irradiate a large amount of ultraviolet light at one time, but to cure the ultraviolet curable resin applied to the injection port gradually in plural times. It is possible to moderate the internal stress when the resin is cured. The shorter the time from when the liquid crystal is completely injected into the liquid crystal cell to when the injection port sealing resin is applied and cured by ultraviolet rays, the shorter the better, but within about 5 minutes, the cell gap No problem. By precisely controlling this time, the step of setting the pressure gap after liquid crystal injection, which has been conventionally performed, can be omitted. This shortens the process of about 2 to 3 hours, and greatly improves productivity. The problem of contamination near the inlet is reduced and the yield is improved.

Embodiment 11 FIGS. 42, 43, 44, and
FIGS. 45 and 46 show an eleventh embodiment of the present invention. This is a nozzle structure of a pressurized liquid metering and discharging apparatus for moving a needle valve element back and forth several times to several hundred times per second to discharge a cleaning liquid pressurized to a high pressure by a plunger pump discontinuously and at a high speed. FIG. 44 shows a ceramic tip member in which the nozzle and the valve seat are integrated. FIGS. 42 and 43 show a case where one of the tip members is attached, and FIGS. 45 and 46 show a case where a plurality of the end members are arranged. By discharging the cleaning liquid discontinuously, a constant pressure is always applied to the liquid without reducing the pressure applied to the liquid. For this reason, it is possible to discharge the liquid at a high speed without reducing the flow velocity of the discharged liquid. An extremely high cleaning ability can be obtained by performing cleaning using this nozzle.

[Twelfth Embodiment] FIGS. 47 and 48 show a twelfth embodiment of the present invention. This is a coating device for a photoresist or a flattening film used in a manufacturing process of a liquid crystal panel or an organic EL panel. A photoresist is applied to a substrate using the pressurized liquid metering nozzle of the present invention. At this time, it is better to supply the liquid to the nozzle after deaeration by the deaerator using hollow fibers shown in FIG. If not sufficiently degassed, there is a phenomenon that occurs during application. After applying the liquid on the substrate, a lid for deaeration treatment comes in, a vacuum container is formed by the lid and the substrate holding table, and the atmosphere and the solvent in the vacuum container are exhausted. If the substrate is conveyed without degassing after the application, there is a possibility that the thickness of the applied film becomes uneven after the pins for lifting the substrate and the suction pad of the robot arm, and the remaining screen may be uneven. In order to prevent this phenomenon, the present invention adopts a structure in which the deaeration process can be performed while the application substrate and the substrate holder are kept in close contact with each other. The concept of this device is not limited to the process of manufacturing a liquid crystal panel and the process of manufacturing an organic EL, but can be applied to any use such as a process of manufacturing a plasma display or a DNA chip.

Embodiment 13 FIGS. 49 and 60 show a thirteenth embodiment of the present invention. This is a device for discharging molten liquid metal using the pressurized liquid dispensing device of the present invention to produce spherical solid metal of uniform size. When a silicon micro metal sphere is made, a syringe made of high-purity quartz is used for the internal syringe. A quartz syringe is encased in graphite, and the graphite is heated by a high-frequency heating coil to melt the silicon. A fine silicon sphere can be obtained by opening and closing a quartz needle nozzle to discharge liquid metal silicon. When making a copper metal sphere, a graphite syringe or an amorphous carbon syringe is used for the internal syringe. The graphite syringe is heated by the high-frequency heating coil to melt the copper. By opening and closing the carbon-coated high melting point metal nozzle, liquid metal copper can be discharged to obtain fine metal copper spheres. When melting, the inside of the syringe is evacuated to a vacuum to prevent metal oxidation. When discharging, pressure is applied to the molten metal with nitrogen gas, argon gas, or the like. As shown in FIG. 60, the diameter of the metal sphere can be measured by using a device for rotating the two rolls to separate the metal sphere. The diameter of the metal sphere can be set to a desired value by adjusting the temperature of the molten metal, the applied pressure, and the opening / closing time of the valve. It is also possible to use a high melting point metal for the syringe. In this case, the inner surface is preferably subjected to a carbon coating treatment in order to improve the liquid drainage of the liquid metal.

[Embodiment 14] In the case of producing minute metal spheres of a low melting point metal such as aluminum or solder, it is inexpensive to use resistance heating instead of high frequency heating used in FIGS. 49 and 60. Can be made. In this case,
By using a plurality of fixed discharge nozzles as shown in FIG. 64, it is possible to manufacture a large amount of minute metal spheres at low cost.

[0074]

According to the present invention, it is possible to provide a method and apparatus for discharging or applying a small amount of liquid at a high speed and precisely to a desired application shape without depending on the viscosity of the liquid. In particular, even when a highly viscous liquid is used or applied at a high speed, the line shapes at the start point and end point of the line can be controlled very easily. In the case of planar coating, the starting point
The adjustment of the film thickness at the end point is extremely easy. Application of a uniform line shape can instantaneously form a uniform line without thickening or thinning of the line. Even with a mixture of liquid and solid, it is possible to provide a liquid discharging method and apparatus which can enhance liquid drainage at the time of stopping discharge and completely prevent liquid from leaking out, without fear of destruction of solids.

By using the liquid coating method and the liquid coating apparatus of the present invention, the manufacturing cost of a large liquid crystal panel, a plasma display panel, and an organic EL panel can be reduced, and the yield can be improved. In particular, a large number of steps can be reduced in the step of applying a color filter or a phosphor. In the manufacturing process of the organic EL, a significant improvement in reliability and cost reduction can be realized by a coating process in a vacuum.

By using the liquid coating method and the liquid coating apparatus of the present invention, a contact lens having a multilayer structure can be produced at low cost. Also in the field of medical analysis, DNA chips can be produced inexpensively and with good yield. By applying the present invention to the injection port sealing step of the liquid crystal panel, it is possible to significantly shorten the production process, and to create an injection port sealing step with high yield that does not cause contamination.

In the case of producing the fine metal spheres using the pressurized liquid fixed-quantity discharging apparatus of the present invention, the particle diameters can be made uniform, so that the yield can be greatly improved and the cost can be reduced.

By arranging spacer beads at fixed points using the pressurized liquid fixed-quantity discharge device of the present invention, a high-contrast horizontal electric field liquid crystal panel free from light leakage can be manufactured at low cost. Since the distribution density of the spacer beads is uniform, a uniform cell gap can be formed, so that cell gap unevenness can be drastically reduced. According to the present invention, a liquid crystal panel having a metric size can be manufactured with high yield.

By using the liquid crystal injection measurement method of the present invention,
Anyone can easily know the completion of injection anytime, anywhere, so that failure such as insufficient liquid crystal injection can be prevented. Furthermore, by using this measurement method, the time management injection port sealing method can be easily performed, and the process can be greatly reduced. Significant improvement in productivity can be realized. In the time-managed inlet sealing method, the time during which the inlet is exposed to the air is extremely short, about 5 minutes, and the possibility of contamination is drastically reduced. I do.

By using the liquid crystal injection port sealing method of the present invention, breakage of the glass at the injection port does not occur at all, and the occurrence of injection port sealing failure is drastically reduced. The deterioration of the ultraviolet curable resin due to the moisture in the air is eliminated, so that the occurrence of unevenness near the injection port is drastically reduced. Ultraviolet irradiation can be accurately applied only to the injection port, so that deterioration of the alignment film surface due to ultraviolet light can be prevented. This makes it possible to almost completely prevent the occurrence of unevenness near the injection port.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a conventional slit coater.

FIG. 2 shows the internal structure of a conventional slit coater.

FIG. 3 is a sectional view of a conventional slit coater with a check valve.

FIG. 4 shows the structure of a comb-shaped tip of a conventional slit coater.

FIG. 5 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 6 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 7 is a sectional view and a plan view of a nozzle of the slit coater of the present invention.

FIG. 8 is a sectional view and a plan view of a nozzle of the slot coater of the present invention.

FIG. 9 is a sectional view of a slit coater with a flat blade valve according to the present invention.

FIG. 10 is a sectional view of a multi-cone nozzle coater of the present invention.

FIG. 11 is a sectional view of a multi-needle nozzle coater according to the present invention.

FIG. 12 is a sectional view and a plan view of a slit coater with a flat blade valve of the present invention.

FIG. 13 is an internal structural view of a slit coater with a flat blade valve of the present invention.

FIG. 14 is a sectional view and a plan view of a slit coater with a flat blade valve according to the present invention.

FIG. 15 is an internal structural view of a slit coater with a flat blade valve of the present invention.

FIG. 16 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 17 is an internal structural view of a slit coater with a flat blade valve of the present invention.

FIG. 18 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 19 is a plan view of the closed loop slit nozzle of the present invention.

FIG. 20 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 21 is a spacer gap on a color filter formed by the multi-nozzle coater with a flat blade valve of the present invention.

FIG. 22 is a sectional view and a plan view of a multi-nozzle coater with a flat blade valve of the present invention.

FIG. 23 is a plan view of a slot nozzle coater with a flat blade valve of the present invention.

FIG. 24 is an internal structural view of a multi-nozzle coater for sealing a liquid crystal injection port of the present invention.

FIG. 25 is a multi-nozzle dispenser and a roll coater for sealing a liquid crystal injection port of the present invention.

FIG. 26 is a sectional view of a multi-nozzle dispenser for sealing a liquid crystal injection port and a roll coater according to the present invention.

FIG. 27 is a cross-sectional view of a conventional roll coater for sealing a liquid crystal injection port.

FIG. 28 is a conventional roll coater for sealing a liquid crystal injection port.

FIG. 29 is a roll coater for sealing a liquid crystal injection port of the present invention.

FIG. 30 is a comparison diagram between a conventional roll coater and the roll coater of the present invention.

FIG. 31 is an optical system diagram for measuring a liquid crystal injection time according to the present invention.

FIG. 32 is an optical system diagram for measuring a cell gap after liquid crystal injection according to the present invention.

FIG. 33 is an optical system diagram for controlling the liquid crystal injection time of the present invention.

FIG. 34 is a sectional view of a slit coater with a flat blade valve of the present invention.

FIG. 35 is a sectional view of a multi-nozzle dispenser with a needle valve of the present invention.

FIG. 36 is a sectional view of a degassing module used in the coater system of the present invention.

FIG. 37 is an internal structural view of the multi-nozzle dispenser with a needle valve of the present invention.

FIG. 38 is a multi-nozzle dispenser with a needle valve and a spin casting device of the present invention.

FIG. 39 is a manufacturing process diagram of the multi-layer contact lens of the present invention.

FIG. 40 is a sectional view of a two-layer contact lens according to the present invention.

FIG. 41 is a sectional view of a three-layer contact lens according to the present invention.

FIG. 42 is a sectional view of a multi-nozzle spray with a needle valve of the present invention.

FIG. 43 is a sectional view of a multi-nozzle spray with a needle valve of the present invention.

FIG. 44 shows a nozzle used in the multi-nozzle spray with a needle valve of the present invention.

FIG. 45 is an internal structure of a multi-nozzle spray with a needle valve according to the present invention.

FIG. 46 is an internal structure of a multi-nozzle spray with a needle valve of the present invention.

FIG. 47: Slit coater and vacuum solvent drying device of the present invention

FIG. 48 shows a slit coater and a vacuum solvent drying apparatus of the present invention.

FIG. 49 is an apparatus for producing a fine metal sphere according to the present invention.

FIG. 50 is a plan view of spacer beads applied on a color filter substrate by the dispenser of the present invention.

FIG. 51 is a cross-sectional view of spacer beads applied on a color filter substrate by the dispenser of the present invention.

FIG. 52 is a conventional UV curing jig for a liquid crystal inlet sealing agent.

FIG. 53 is a multi-nozzle dispenser for sealing a liquid crystal injection port of the present invention.

FIG. 54 is an explanatory view of the operation of the jig for curing the liquid crystal injection port sealant of the present invention with ultraviolet rays.

FIG. 55 is a view for explaining the operation of the jig for curing the liquid crystal injection port sealant of the present invention with ultraviolet rays.

FIG. 56 is a plan view of a liquid discharged linearly onto a substrate and applied in a plane.

FIG. 57 is a view showing a state of application to an active matrix substrate by the linear discharge application apparatus of the present invention.

FIG. 58 is a cross-sectional view and a plan view of a liquid ejecting apparatus having the valve mechanism of the present invention.

FIG. 59 is a cross-sectional view and a plan view of a liquid ejection apparatus having a valve mechanism according to the present invention.

FIG. 60 is a micro-metal sphere production apparatus and a sphere separation apparatus of the present invention.

FIG. 61 is a relationship diagram between a liquid crystal cell gap and an injection time.

FIG. 62 is a roll coater for sealing a liquid crystal injection port of the present invention.

FIG. 63 is a manufacturing process diagram of the color filter of the present invention.

FIG. 64 is an internal structural view of the multi-needle nozzle coating machine of the present invention.

FIG. 65 shows a liquid discharged in a broken line shape on a substrate.

FIG. 66: Liquid discharged in a dot pattern on a substrate

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Slit nozzle 2 ... Liquid 3 ... Shim member 4 ... Discharge port check valve 5 ... Press plate part 6 ... Gear head 7 ... Motor 8 ... Injection port check valve 9 ... Comb tooth Shaped tip member 10 Flat blade valve 11 Piston 12 Cylinder 13 Liquid application object discharged in a linear (band) shape 14 Slot nozzle 15 Pressurized liquid injection port 16 Spring 17 ... magnet 18 ... coil 19 ... conical nozzle 20 ... conical valve 21 ... needle 22 ... slit-shaped hole 23 ... slot-shaped hole 24 ... grooved flat blade valve 25 ... grooved slit nozzle 26: Groove formed in flat blade valve 27: Groove formed in slit nozzle 28: Closed loop slit nozzle 29: Closed loop blade valve 30: Closed loop slit hole 31 … Color filter for liquid crystal display device 32… UV curable resin containing spacer beads 33… spacer beads 34… light shielding film (black mask) 35… flattening film 36… pinhole nozzle 37… pinhole 38 … Valve seat 39… UV curable resin for sealing the liquid crystal injection port 40… Injected liquid crystal 41… Cell filled with liquid crystal 42… Rotary coating machine with a groove in the projection 43… Rotating coating machine 44 which is rounded ... Cells whose glass end faces are not aligned at the inlet 45 ... Optical fiber 46 ... Prism 47 ... Polarizer 48 ... Analyzer 49 ... Liquid crystal 50 ... Liquid crystal plate 51 ... Cell during liquid crystal injection 52 Variable wavelength optical fiber 53 Main seal 54 Bellows 55 Piezoelectric element or giant magnetostrictive element 56 Liquid injection port ( 57) Liquid outlet (after degassing) 58 Vacuum exhaust port 59 Hollow fiber (fluorine) 60 DNA chip 61 Chemical solution (reagent) 62 Rotary mold 63 Motor 64 UV optical fiber 65 UV light 66 Oxygen-permeable UV-curable resin (first layer) 67 Oxygen-permeable UV-curable resin (second layer) 68 Water-soluble polymer resin 69 Ceramic nozzle 70: Ceramic nozzle with integrated valve seat and nozzle 71: V-shaped cut groove 72: Ceramic nozzle with V-shaped groove 73: Substrate 74: Slit nozzle dispenser with flat blade valve 75 … Liquid supply pump with pressure adjustment function 76… Degassing module 77… Liquid squeeze pump with pressure adjustment function 78… Tank 79… Air slider 80… Solvent Vacuum chamber for air 81 ... Elevator table 82 ... Cooling pipe 83 ... Tungsten needle (Surface carbon coating) 84 ... High melting point metal syringe (Surface carbon coating) 85 ... High frequency heating coil 86 ... Molten metal 87 Vacuum container 88 Cooling oil 89 Ultraviolet light 90 Ultraviolet light shielding jig 91 Slide ultraviolet light shielding jig 92 Rubber fixed ultraviolet light shielding jig 93 Rubber 94 Puffy rubber 95... (N-1) th liquid object discharged 96... Nth liquid object discharged 97... (N + 1) th liquid object discharged 98. Line 99: Scanning line 100: Cylindrical discharge port 101: Needle with a groove at the tip 102: Discharge port with a groove inside 03: inert gas container for cooling 104: rotating two rolls for spheroid 105: inert gas for cooling 106: sphere box 107: high-pressure inert gas (argon gas) ▲ A ▼: liquid crystal Injection completed B: Separation of liquid crystal panel and liquid crystal dish C: Liquid crystal injection port sealing 108 Fluorine-based O-ring 109 Liquid application object discharged in broken line 110 Discharge in dot form Liquid coated object 111 ... Rectifier plate inside slit discharge port 112 ... Rubber-like joined body 113 ... Transparent conductive film

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B05D 1/28 B05D 1/28 4F042 3/00 3/00 D 5C027 7/00 7/00 H 5C028 N 5C040 7/02 7/02 7/24 301 7/24 301T G02F 1/13 101 G02F 1/13 101 1/1339 500 1/1339 500 505 505 1/1341 1/1341 H01J 9/02 H01J 9/02 F 9 / 20 9/20 A 9/227 9/227 E 11/02 11/02 BZ F term (reference) 2H088 FA02 FA03 FA04 FA28 FA30 HA01 HA08 HA12 MA20 2H089 LA09 MA03X MA03Y MA03Z NA05 NA12 NA25 NA33 NA42 NA44 NA55 NA60 QA12 QA13 TA01 TA09 TA12 4D075 AC02 AC04 AC07 AC08 AC09 AC15 AC16 AC21 AC29 AC88 AC92 AC93 BB18Z BB22X BB32X BB35X BB36X BB46Z BB56Z DA06 DA31 DA34 DA36 DB13 DB14 DB31 DB35 DC18 DC22 DC24 EA01 EA05 EA14 EA45 EB07 4F040 AA02 AA05 AA12 AA31 AA33 AB04 AB06 AC01 BA12 BA16 BA35 BA36 CB03 CB06 CB23 DA12 DB16 4F041 AA05 AA06 AB01 BA11 BA13 BA15 BA17 BA36 BA48 CA02 CA11 CA17 4F042 AA01 AA03 DBA01 CB08 5C027 AA09 5C028 AA10 FF01 5C040 GF19 GG09 GH03 JA31 MA23

Claims (60)

[Claims] A liquid material is applied to a surface of a substrate from a nozzle of the discharge mechanism by using a discharge mechanism having a valve mechanism and a liquid material applying apparatus configured to relatively move the substrate. A method of discharging and applying a liquid material to a substrate surface in a continuous band by applying a pulse to a valve mechanism of a discharge mechanism, and applying the liquid material substantially in a planar shape. And a discharge coating device. 2. A liquid material is applied to the surface of a substrate from a nozzle of the discharge mechanism by using a discharge mechanism having a valve mechanism and a liquid material applying apparatus configured to relatively move the substrate. In the method, the valve mechanism of the discharge mechanism is opened and closed in a pulsed manner within a range of 1 to 12,000,000 cycles per minute in proportion to the relative speed between the discharge mechanism and the substrate, so that the liquid material is formed into a continuous band on the substrate surface. A method and apparatus for discharging and applying a liquid material, wherein the method is performed by discharging and applying in a substantially planar shape. 3. A nozzle for a liquid dispensing device for discharging and stopping discharge of a pressurized liquid introduced into a liquid storage portion, wherein a flat plate blade valve mechanism is provided in a nozzle body communicating with the liquid storage portion. A nozzle characterized in that: 4. The nozzle according to claim 3, wherein the nozzle body has a slit-shaped liquid discharge port, and the flat plate-shaped valve mechanism is provided near the slit-shaped discharge port. Features nozzle. 5. The valve mechanism according to claim 3, wherein the valve mechanism is provided with a flat blade-shaped valve body movably provided in the nozzle body, and a valve formed on an inner wall surface near a slit-shaped discharge port. And a nozzle comprising a seat. 6. The flat blade-shaped valve element according to claim 3,
A nozzle characterized in that its tip is formed in a triangular prism shape, and the periphery of the tip is formed so as to be in close contact with a linear contact line substantially parallel to the inner wall surface of the nozzle. 7. A nozzle according to claim 3, wherein the nozzle body has a plurality of slot-shaped liquid ejection holes, and the flat plate-shaped valve mechanism is provided near the slot-shaped ejection holes. A nozzle characterized in that: 8. The valve mechanism according to claim 3, wherein the valve mechanism is formed on a flat blade-shaped valve body movably provided in the nozzle body and on an inner wall surface near a plurality of slot-shaped discharge holes. A nozzle comprising a valve seat. 9. The nozzle according to claim 3, wherein the nozzle body has a plurality of circular liquid discharge holes, and the flat plate-shaped valve mechanism is provided near the circular discharge hole. Nozzle. 10. A valve mechanism according to claim 3,
A nozzle characterized in that a valve mechanism includes a flat blade-shaped valve body movably provided in a nozzle body and a valve seat formed on an inner wall surface near a plurality of circular discharge holes. 11. A nozzle for a liquid dispensing apparatus for discharging and stopping discharge of a pressurized liquid introduced into a liquid container, comprising a plurality of needle-shaped valve mechanisms in a nozzle body communicating with the liquid container. A nozzle characterized in that: 12. The nozzle according to claim 11, wherein the nozzle body has a plurality of circular liquid discharge holes, and the plurality of needle-shaped valve mechanisms are provided near the plurality of circular discharge holes. A nozzle characterized in that the nozzle is provided. 13. A valve mechanism according to claim 11, wherein the valve mechanism has a plurality of needle-like valve bodies movably provided in the nozzle body and a plurality of circular discharge holes on the inner wall surface. A nozzle comprising a plurality of formed valve seats. 14. A plurality of needle-shaped valve elements according to claim 11, the tips of which are formed in a conical shape, and the periphery of the tips is in close contact with the inner wall surface of the nozzle on a substantially circular contact line. A nozzle characterized by being formed in. 15. The nozzle according to claim 3, wherein the nozzle body has a slit-shaped liquid discharge port, and a flat plate-shaped valve mechanism provided in the vicinity of the slit-shaped discharge port. A nozzle having a plurality of grooves formed in a tip portion of a blade in a direction perpendicular to a slit. 16. A nozzle mechanism according to claim 3, wherein the nozzle body has a plurality of slot-like liquid ejection holes, and a plate-shaped blade mechanism provided near the plurality of slot-like ejection holes. A plurality of grooves in a direction perpendicular to the arrangement of the slots are formed in a tip portion of the flat blade. 17. A nozzle mechanism according to claim 3, wherein the nozzle body has a plurality of circular liquid discharge holes, and a valve mechanism in the form of a flat blade provided near the plurality of circular discharge holes. A nozzle having a plurality of grooves formed in a tip portion of a flat blade in a direction perpendicular to an array of circular holes. 18. The nozzle according to claim 3, wherein the nozzle body has a slit-shaped liquid discharge port, and a flat plate-shaped valve mechanism provided in the vicinity of the slit-shaped discharge port. A nozzle, characterized in that a plurality of grooves are formed in a direction perpendicular to a slit inside an ejection port in contact with a tip portion of a blade. 19. A nozzle mechanism according to claim 3, wherein the nozzle body has a plurality of slot-shaped liquid ejection holes, and a flat blade-shaped valve mechanism provided in the vicinity of the plurality of slot-shaped ejection holes. A nozzle, wherein a plurality of grooves are formed in a direction perpendicular to the arrangement of the slots inside the discharge port which is in contact with the tip portion of the flat blade. 20. A nozzle mechanism according to claim 3, wherein the nozzle body has a plurality of circular liquid discharge holes, and a plate blade-shaped valve mechanism provided in the vicinity of the plurality of circular discharge holes. A nozzle, wherein a plurality of grooves are formed in a direction perpendicular to an array of circular discharge holes inside a discharge port in contact with a tip portion of a flat blade. 21. A nozzle for a liquid fixed-rate discharge device for discharging and stopping discharge of a pressurized liquid introduced into a liquid storage portion, wherein a nozzle body is always in contact with a circular liquid discharge hole and the discharge hole. A nozzle comprising a movable needle-shaped valve mechanism, wherein a plurality of grooves are formed at the tip of the needle-shaped valve. 22. A nozzle for a liquid dispensing device for discharging and stopping discharge of a pressurized liquid introduced into a liquid storage portion, wherein a nozzle body is always in contact with a circular liquid discharge hole and the discharge hole. A nozzle having a movable needle-shaped valve mechanism, wherein a plurality of grooves are formed inside a circular discharge hole in contact with the needle-shaped valve. 23. A nozzle for a liquid metering device for discharging and stopping discharge of pressurized liquid introduced into a liquid container, a closed-loop flat plate blade-shaped valve mechanism is provided in a nozzle body communicating with the liquid container. A nozzle comprising: a nozzle; 24. The nozzle according to claim 23, wherein the nozzle body has a closed loop slit-shaped liquid discharge port, and the closed loop flat plate blade-shaped valve mechanism is provided near a closed loop slit-shaped discharge port. A nozzle characterized in that the nozzle is provided. 25. The valve mechanism according to claim 23, wherein the valve mechanism is formed on a closed-loop, flat blade-shaped valve body movably provided in the nozzle body, and on an inner wall surface near the closed-loop, slit-shaped discharge port. And a nozzle seat. 26. The closed-loop flat plate-shaped valve element according to claim 23, wherein the tip is formed in a triangular prism shape, and the periphery of the tip is on a contact line of a closed loop line substantially parallel to the inner wall surface of the nozzle. A nozzle characterized by being formed so as to be in close contact with each other. 27. With respect to each of the liquid applying apparatuses using the nozzles according to claim 3 to claim 26, the liquid degassed by a vacuum degassing module using hollow fibers is pressurized by a pressure pump. A liquid coating apparatus, wherein the liquid is continuously supplied to a liquid storage section of the coating apparatus. 28. A liquid material is applied to a surface of a substrate from a nozzle of the discharge mechanism by using a discharge mechanism having a valve mechanism and a liquid material applying apparatus configured to relatively move the substrate. In the method, the valve mechanism of the discharge mechanism is opened and closed in a pulse shape, and the liquid material is continuously strip-shaped or linearly or dashedly or dotted along the surface of the substrate, and the nozzle opens and closes the substrate by one opening and closing operation of the valve. A method for discharging and applying a liquid material, wherein the liquid is applied in a non-contact manner. 29. A method for discharging and applying a liquid material according to claim 28, wherein the liquid is applied in a continuous band, linear, broken or dotted line, and then the discharge mechanism having a valve mechanism and the substrate are relatively moved. After moving in the uniaxial or biaxial direction by a fixed distance, the valve mechanism of the discharge mechanism is opened and closed again in a pulsed manner, and the liquid material is applied once to the substrate surface in a linear, broken or dotted line. Is applied by the opening and closing operation of the valve. A method of applying the liquid two-dimensionally to the substrate surface by repeating this operation. 30. A plasma display device having barrier ribs formed by using the coating method according to claim 28. 31. A plasma display device coated with a phosphor using the coating method according to claim 28. 32. A liquid crystal display device in which spacer beads are arranged at fixed points using the coating method according to claim 28. 33. An organic EL display device wherein an organic EL light emitting layer is applied in a vacuum or in a nitrogen gas atmosphere by using the coating method according to claim 28 or 29. 34. A liquid crystal display device or an organic EL device coated with a color filter layer using the coating method according to claim 28 or 29.
L display device or plasma display device. 35. A coating apparatus having at least one set of nozzles according to claim 3 mounted thereon and capable of moving a table on which a substrate is sucked in a uniaxial or biaxial direction relative to the nozzles. . 36. An IC package, an organic EL display device or a liquid crystal display device in which a closed loop-shaped bump or an adhesive seal layer is formed using the nozzle according to claim 23. 37. A valve mechanism is provided in a nozzle main body communicating with the liquid container, and a pressure is applied to the liquid container by an inert gas (argon, helium, neon, krypton, etc.), nitrogen gas, or the like, and the pressurized liquid is applied. For the liquid metering device that discharges and stops discharging, the nozzle body with the liquid container and the valve mechanism is made of high melting point metal, and a heater for liquid heating and a high-frequency coil are installed around the liquid container and the nozzle. A liquid ejecting apparatus characterized in that: 38. A valve mechanism is provided in a nozzle body communicating with the liquid container, and a pressure is applied to the liquid container by an inert gas (argon, lithium, neon, krypton, etc.) or a nitrogen gas to pressurize the liquid. For the liquid dispensing device that discharges and stops the discharge, the nozzle body with the liquid container and the valve mechanism is made of quartz, and a heater and a high-frequency coil for heating the liquid are installed around the liquid container and the nozzle. A liquid ejecting apparatus characterized in that: 39. A valve mechanism is provided in a nozzle main body communicating with the liquid container, and a pressure is applied to the liquid container by an inert gas (argon, helium, neon, krypton, etc.), nitrogen gas, etc. Regarding the liquid dispensing device that discharges and stops discharging, the nozzle body including the liquid storage unit and the valve mechanism is made of carbon or glassy carbon, and a heater or a high-frequency coil for heating the liquid is provided around the liquid storage unit and the nozzle. Is provided, wherein the liquid ejection device is provided. 40. The nozzle body according to claim 37, 38 or 39, comprising a circular liquid discharge hole and a needle-shaped valve, wherein the valve mechanism is provided near the discharge hole. A liquid ejection device, which is provided. 41. A liquid discharge apparatus according to claim 37, wherein the inner wall surface of the discharge hole of the nozzle, the surface of the needle valve, and the inner wall surface of the liquid container are formed of diamond carbon, titanium carbide (TiC) or silicon carbide. A liquid ejection device characterized by being filled with carbon or a carbon-based compound such as (SiC). The metal is liquefied by using the liquid metering device according to any one of claims 37 to 41, and a needle valve is opened and closed in a pulsed manner, so that a certain amount of the metal is discharged outside the nozzle in a liquid state. To discharge. A method and apparatus for manufacturing a solid metal ball by cooling the discharged liquid metal in an atmosphere of oil or an inert gas (eg, argon, neon, helium) or nitrogen gas. 43. The apparatus for manufacturing a metal ball according to claim 42,
Rotate the book roll in the opposite direction to connect the device that separates the metal spheres, and feed back the liquid metal metering device to control the size of the metal sphere so that the metal sphere of the desired size can be manufactured. A metal sphere manufacturing apparatus. 44. The method of claim 9, 10, 11, 12, 13, 1.
Using the nozzles described in 4,17,20,21,22,
29. A method and a method for simultaneously forming a plurality of lenses by simultaneously dropping a liquid ultraviolet curable resin, a thermosetting resin, or a polymer resin dissolved in a solvent onto a plurality of rotating molds by the method according to claim 28. apparatus. 45. A method and apparatus for simultaneously manufacturing a plurality of lenses comprising a plurality of layers made of different materials by repeatedly using the method according to claim 44. 46. Siloxane methacrylate (SMA) or fluoromethacrylate (FMA) which is an oxygen-permeable hard contact lens material on the front curve side
A contact lens characterized by a two-layer structure using a non-hydrous soft contact lens material such as silicon rubber, butyl acrylate or dimethylsiloxane on the base curve side. 47. An oxygen-permeable hard contact lens material, siloxane methacrylate (SMA) or fluoromethacrylate (FMA), on the front curve side
Hydroxyl ethyl methacrylate (HE, a water-containing soft contact lens material)
MA) or N-vinylpyrrolidone (N-VP) or dimethylacrylamide (DMAA) or glycerol methacrylate (GMA). 48. A non-hydrous soft contact lens material such as silicon rubber or butyl acrylate or dimethylsiloxane is used on the front curve side, and a hydrous soft contact lens material such as hydroxyethyl methacrylate (HEMA) or N is used on the base curve side. −
A two-layer contact lens using vinylpyrrolidone (N-VP), dimethylacrylamide (DMAA), or glycerol methacrylate (GMA). 49. In the liquid crystal injection step of a liquid crystal panel, the liquid crystal injection state of an empty cell whose inside is evacuated is measured using a polarized visible light / optical fiber. The liquid crystal cell gap is measured in real time using a single wavelength optical fiber whose wavelength can be changed, and the increase in the cell gap is measured. Next, after a certain period of time from when the cell gap starts to increase, the liquid crystal panel is removed from the liquid crystal dish, and a liquid crystal injection port sealing step is started. 50. A plurality of wheel-shaped rolls having two peaks at the tip arranged in accordance with the arranged pitch of the liquid crystal panel in the step of sealing the liquid crystal injection port of the liquid crystal panel. After simultaneously applying the UV curable resin for filling the injection port using the fixed-rate discharge nozzle described in 11, 12, 13, 14, 17, and 20, the plurality of rolls are simultaneously pushed into the liquid crystal injection port of the liquid crystal panel. A manufacturing method and a manufacturing apparatus, wherein an ultraviolet curing resin is applied to an injection port. 51. In a step of sealing a liquid crystal injection port of a liquid crystal panel, a plurality of wheel-shaped rolls each having two peaks at the end arranged in accordance with the arranged pitch of the liquid crystal panel using a dispenser. After applying the UV curable resin for sealing to the tip of the roll, apply the UV curable resin simultaneously to the liquid crystal injection port within 5 minutes after the liquid crystal panel is separated from the liquid crystal dish. A manufacturing method and a manufacturing apparatus, which are applied to a liquid crystal injection port. 52. The peak of two peaks at the tip of the wheel-shaped roll according to claim 50 or 51, and the width of the peak is:
A roll characterized in that the thickness is in the range of 1/4 to 3/4 of the total thickness of the two glass substrates which are bonded to each other on the liquid crystal panel. 53. A coating roll for sealing a liquid crystal injection port, wherein the material of the wheel-shaped roll according to claim 52 is made of an elastic material such as rubber or polymer plastic. 54. The liquid crystal panel according to claim 9, wherein in the step of sealing the liquid crystal injection port, a plurality of circular discharge holes are provided in accordance with the arranged pitch of the liquid crystal panel.
An injection port sealing method and an injection port sealing apparatus, wherein an ultraviolet curing resin is applied to the injection ports of a plurality of liquid crystal panels at the same time in a non-contact manner using the nozzles described in 3, 14, 17, and 20. . 55. An ultraviolet curable resin is applied to an injection port of a liquid crystal panel by using the coating method according to claim 50, 51 or 54, so that ultraviolet rays are not irradiated to liquid crystal panels other than the injection port. An ultraviolet irradiation device characterized by a mechanism in which a liquid crystal panel is sandwiched from both sides and a shielding plate is brought into close contact with both side surfaces of the liquid crystal panel. 56. A plasma display device, a liquid crystal display device, or an organic EL display device manufactured by using the coating method according to claim 1 or 2. 57. A color filter substrate or an active matrix substrate manufactured by using the coating method according to claim 1 or 2. 58. A DNA chip in which DNA prepared using the coating method according to claim 28 or 29 is coated on a substrate. 59. Claim 1 or Claim 2 or Claim 2
A semiconductor element or a circuit board manufactured using the coating method according to claim 8 or 29. 60. The method according to claim 28, wherein
A coating apparatus, comprising: applying a liquid to a substrate in a two-dimensional manner; and performing a vacuum degassing process on a solvent of the coating liquid while keeping the substrate in close contact with the substrate holding table.