JP2002318378A - Method for assembling liquid crystal display device and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the production cost of a large liquid crystal display device by enhancing manufacturing efficiency and yield while shortening assembling processes of the display device. SOLUTION: In this method, liquid crystal which is subjected to degassing treatment is dropped onto the substrate of one side of two sheets of substrates which are degassed by being subjected to heat treatment in a void space. A substrate on which the liquid crystal is not dropped, of the two sheets of substrates returned from the void space to the air, is placed on a table having a rotation function while being turned over. Another table on which a substrate the liquid has dropped onto placed is moved horizontally so that the two substrates face to each other. Then, a vacuum chamber is formed by making the upper side table and the lower side table coupled while thrusting the lower side table. After the air in the chamber is evacuated, the two substrates are aligned and stuck, and tentatively fixed. Thereafter, the vacuum is broken and the stuck substrates are returned to the air and a sealant is hardened by irradiating only a sealing part with ultraviolet rays to complete a liquid crystal panel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a low-cost, large-screen active matrix type liquid crystal display device.

[0002]

2. Description of the Related Art Liquid crystal is dropped on one substrate in which a sealant is drawn in a closed pattern so as not to provide an injection port, and the other substrate is placed on one substrate, and the upper and lower substrates are placed in a vacuum. Japanese Patent Laid-Open No. Sho 62
165622. JP-A-2000-284295, JP-A-2001-5401, and JP-A-2001-5405 report on an apparatus used in this liquid crystal dropping method.

[0003] The vacuum container is divided into an upper container and a lower container, and the upper container can move up and down. The lower container can move in the horizontal direction (X, Y directions). The upper container is lowered downward and combined with the lower container to form one vacuum container. The upper vacuum container and the lower vacuum container are joined by an O-ring seal. If the O-ring is crushed too much, the lower container will be moved horizontally (X and Y directions).
The upper container and the lower container are jointed with ball bearings so that the O-ring does not collapse more than a certain amount.

[0004] The upper substrate is sucked by a jig using a pressing plate attached to the upper vacuum container with the surface of the upper substrate facing downward. An electrostatic suction plate made of ceramics and a metal plate is mounted on the pressing plate, and the upper substrate is held on the pressing plate in a vacuum atmosphere by using this.

[0005] Immediately before the upper substrate and the lower substrate are bonded together, liquid crystal is dropped on the lower substrate to draw a pattern of an adhesive (sealant). When two substrates are bonded in a vacuum, the press plate is controlled in the vertical direction by a motor while measuring the applied pressure with a load meter.

The horizontal direction (X,
The lower vacuum vessel and the lower substrate are moved using the drive system (Y, O directions) to align with the upper substrate. When the alignment adjustment and the gap adjustment are completed, the vacuum is broken, the upper and lower vacuum containers are divided, and the two substrates that have been glued together are taken out, irradiated with ultraviolet rays, and then subjected to heat treatment to cure the adhesive (sealant).

[0007] The conventional pressure plate is flat, and the parallelism between the upper substrate and the lower substrate has been adjusted when assembling the apparatus. Adjustment of the cell gap is performed using a load cell attached to the pressing plate. The measurement of the liquid crystal cell gap directly sandwiching the liquid crystal by using an optical method is not performed.

The application of the adhesive is limited to one of the two substrates, and the seal adhesive is usually applied to the lower substrate using a dispenser. JP 2001-051
282 and JP-A-2000-137234, there are proposals for prevention of seepage of a seal adhesive. However, the adhesive used here is of a thermosetting type, and a process of bonding the upper and lower substrates in the air is considered. There is no discussion on the positional relationship between the seal adhesive, the seal adhesive exudation prevention bump, and the light shielding film. These two processes use a method of injecting liquid crystal after curing the seal adhesive in advance, and the pattern shape of the seal adhesive is not completely closed, and an injection port for injecting liquid crystal is provided. I have. The seal adhesive exudation prevention bumps have a broken line shape and are composed of a plurality of rows.

Japanese Patent Laid-Open No. 5-2324 discloses a method of precisely measuring a liquid crystal in a step of bonding two substrates, ie, upper and lower substrates in a vacuum.
81. The required liquid crystal is accurately measured by finely moving the plunger of the micro syringe using a combination of a ball screw and a pulse motor. The tip of the nozzle of the dispenser is in contact with the substrate to apply liquid crystal.

Japanese Patent Laid-Open No. 2000-305058 proposes a method of continuously supplying a liquid by degassing the liquid crystal. A certain amount is put in a vacuum container, the liquid crystal is evacuated, and then pressure is applied to the liquid crystal using a cylinder and a piston installed inside the container, and then the liquid crystal is discharged.

Japanese Patent Application Laid-Open No. Hei 9-61829 proposes a process in which liquid crystal is dropped in a vacuum and a liquid crystal cell is formed by bonding two substrates together using an ultraviolet curable resin as a sealing material. Ultraviolet rays are applied only to the seal portion using a photomask with a light-shielding film so that the effective pixel area is not irradiated with ultraviolet rays. Japanese Patent Application Laid-Open No. 10-333160 proposes a method of using an XY plot ultraviolet irradiation apparatus to irradiate only an ultraviolet-curable sealing resin with ultraviolet rays without using a photomask having a light-shielding film.

[0012]

When the conventional stage for holding the upper substrate as shown in FIG. 4 moves only in the vertical direction (Z direction), some jig is required to attract the upper substrate to this stage. Met. In the board apparatus method using a jig, an operation for removing the jig is required every time,
In mass production, it was very difficult to improve the throughput. When the glass substrate is larger than the metric size, the jig becomes larger, and it is expected that the mounting trouble of the glass substrate will increase due to the deformation of the jig.

In the case of the conventional apparatus shown in FIG. 4, the upper vacuum vessel and the lower vacuum vessel are joined by an O-ring seal. In this case, if the O-ring is crushed too much, the lower vessel is moved in the horizontal direction (X, Y, O directions). Can not move freely. In order to prevent this, the joint between the upper container and the lower container was provided with a ball bearing. However, even if a ball bearing is embedded around the entire periphery of the joint, the load resistance of the ball bearing is limited, and it is impossible to cope with an increase in atmospheric pressure due to an increase in the area of the substrate. That is, when a large glass substrate of a meter size or more is used, problems such as deformation of ball bearings are likely to occur in the alignment mechanism based on the conventional concept, and the alignment operation cannot be performed while maintaining a vacuum.

In the conventional apparatus as shown in FIG. 4, it is difficult to improve the positional accuracy when the upper and lower glass substrates are held on the stage.
(Y, O directions), the moving distance when adjusting the alignment was large. If the amount of movement for alignment adjustment is large, a ball screw or the like must be used, and problems such as backlash occur, and there is a limit to improving the positional accuracy.

In a conventional electrostatic chuck plate made of ceramic, the thickness of the ceramic insulating layer is 100 μm or more, and in the case of a conductive substrate such as a silicon substrate, the distance between the silicon substrate and the electrostatic chuck plate is large. A small amount of current was applied to the substrate, and it was possible to strongly adsorb it in a vacuum using the Johnson-Rahbek effect. However, a liquid crystal uses a glass substrate and cannot use the Johnson-Rahbek effect. Since only the Coulomb force can be used as the electrostatic attraction force, there is a problem that the attraction force is weaker than that of the silicon substrate. Furthermore, in the case of a static adsorption plate made of ceramics, there is a problem that when dust is caught in the gap between the adsorption plate and the glass substrate, the electrostatic adsorption force is significantly reduced.

When the liquid crystal is dropped using the conventional apparatus shown in FIG. 4, and when the degassing process of the liquid crystal is incomplete, air bubbles are generated from the liquid crystal inside the vacuum bonding machine, and the liquid crystal wets the sealing surface and adheres. Failure occurs. If the speed of evacuating the atmosphere of the vacuum coalescing machine is slowed, the generation of air bubbles can be prevented, but the throughput is reduced and the method cannot be applied to mass production.

In the conventional process, the application of the adhesive is limited to only one of the substrates to be bonded. In this case, however, the thickness of the liquid crystal drop is thicker than the thickness of the adhesive applied, so that two sheets of the liquid crystal are applied. When the substrates are bonded in a vacuum, the liquid crystal comes into contact with the upper and lower substrates more quickly.
In this case, when the precision of the parallelism of the substrate is poor, the liquid crystal oozes out on the surface to which the seal adhesive is to be bonded, no longer than the adhesive. To prevent this, the height of the adhesive had to be higher than the liquid level of the liquid crystal. However, when the viscosity of the adhesive is increased to increase the height of the adhesive, there has been a problem that the adhesive draws a thread from the tip of the dispenser and drawing of the seal is not successful.

In the liquid crystal precision measuring method proposed in the conventional Japanese Patent Application Laid-Open No. Hei 5-232481, the dispenser or the substrate is moved in the X and Y directions while the tip of the nozzle of the dispenser is in contact with the lower substrate to make the liquid crystal as large as possible. It was applied so that it would be. In this method, it is impossible to move the tip of the dispenser at high speed, and there is a limit in improving the throughput. Furthermore, it has been impossible to apply spacer beads, photolitho spacers, etc., or to apply liquid crystal to the formed substrate.

In the conventional vacuum bonding apparatus shown in FIG. 4, two substrates are completely pressed once before adjusting the alignment of the two substrates in the X, Y, and O directions, and then the upper substrate is again moved in the Z direction. A lifting action was required. Whether or not the substrate was completely pressed was measured by a pressure gauge and the amount of movement in the Z direction was calculated and adjusted. In this method, the alignment film is locally pressurized by spacer beads or photolitho spacers, and is damaged, resulting in a problem that the alignment in this portion becomes poor.

A conventional method for degassing a liquid crystal is disclosed in JP-A-2000-3
As shown in 05058, the liquid crystal was placed in a vacuum chamber for degassing, and the vessel was evacuated to perform degassing. In this method, a long time is required for the deaeration treatment, and when the liquid crystal in the container runs out and the liquid crystal is turned off, the dropping operation of the drop crystal must be interrupted for a while.

Japanese Patent Application Laid-Open No. 9-61829 proposes a method in which two substrates are bonded together with a liquid crystal in a vacuum, and then only the ultraviolet-curable seal adhesive region is irradiated with ultraviolet light in the air. It was impossible to prevent the chemical change of the liquid crystal due to the ultraviolet light because the ultraviolet-curable seal adhesive was in contact with the liquid crystal when the ultraviolet light was irradiated. In addition, Japanese Patent Application Laid-Open Nos. 2001-051282 and 2000-
With the bump for preventing seepage of the seal adhesive proposed in 137234, diffusion of impurities from the seal adhesive cannot be prevented, and long-term reliability cannot be guaranteed.

An object of the present invention is to solve the above-mentioned problem, and an object of the present invention is to manufacture a large-sized liquid crystal display panel at low cost and with good yield.

[0023]

Means for Solving the Problems In order to solve the above problems and achieve the above object, the present invention uses the following means.

[Means 1] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the substrates are fixed and held on a table that performs a rotation inversion operation, and then the table is rotated and inverted to turn the substrate downward. Let Next, the other substrate on which the liquid crystal is dropped is placed so as to face the substrate facing downward, and then the two substrates are bonded together in a vacuum by narrowing the distance between the two substrates.

[Means 2] An adhesive is applied to both the substrate placed on the table which performs the reversing operation in the means 1 and the other substrate arranged so as to face the substrate facing downward.

[Means 3] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the substrate is fixed and held on a table which performs a rotation inversion operation, and then the table is rotated and the substrate is turned downward. To Next, the substrate facing downward is opposed to a table made of air-permeable porous ceramics. Next, air is blown out of the permeable porous ceramics, and the downward facing substrate is received in a non-contact state, that is, in a floating state while being held horizontally, and the substrate faces a downward facing pressure table. Move it up to the surface. Next, the suction and electrostatic functions of the downwardly directed pressure table are operated to lower the pressure table to hold the floating downwardly directed substrate by suction. Next, the other substrate on which the liquid crystal is dropped is arranged so as to face the substrate fixed and held downward, and then the two substrates are bonded together in a vacuum with the distance between the two substrates reduced.

[Means 4] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, one substrate is placed and fixedly held on two tables symmetrically arranged with respect to a rotation axis. After turning the table clockwise 1
The substrate is turned downward by 80 degrees and turned downward. Next, a substrate on which liquid crystal is dropped is placed so as to face the substrate facing down, and then the two substrates are bonded together in a vacuum with the distance between the two substrates reduced. After the vacuum bonding operation is completed and the vacuum-exfoliated substrate moves to the outside of the rotary reversing table, one substrate is placed and fixedly held on the other of the rotary reversing tables. Next, the substrate is turned downward by rotating the rotation reversing table 180 degrees counterclockwise. Next, the other substrate on which the liquid crystal is dropped is arranged so as to face the substrate facing down, and then the two substrates are bonded together in a vacuum with the distance between the two substrates reduced. This series of operations is repeated.

[Means 5] An adhesive is applied to both the substrate placed on the table which performs the rotation reversing operation in the means 4 and the other substrate arranged so as to face the substrate.

[Means 6] In the means 1 or the means 3 or 4, when the two substrates are opposed to each other to reduce the distance between the substrates, the atmosphere of the two substrates is changed before the adhesive comes into contact with another substrate. Apply vacuum. When this vacuum is created, the rotating reversing table and the upper and lower vacuum vessels do not move up and down, but the air pressurized on bellows and elastic tubes created around the joint of the lower vacuum vessel To form a vacuum container.

[Means 7] In the means 1 or the means 3 or 4, when the two substrates are bonded in a vacuum with the distance between the two substrates reduced, the two substrates are incorporated in a vacuum vessel in order to align the two substrates. The horizontal position (X, Y, O directions) of the lower substrate is adjusted using an actuator.

[Means 8] In the means 1 or 4,
When aligning two substrates in a vacuum to reduce the distance between the two substrates and bond them together, the lower side built into the lower vacuum vessel using an actuator built outside the vacuum vessel The entire substrate holding table is moved downward and upward (Z direction) to perform vertical alignment (Z direction).

[Means 9] In the means 1 or 3,
An upper substrate holding table incorporated in an upper vacuum container using an actuator incorporated outside the vacuum container when aligning the two substrates in order to reduce the distance between the two substrates and attach them in a vacuum. In the vertical direction (Z direction)
In the vertical direction (Z direction).

[Means 10] In the means 1 or the means 3 or 4, the two substrates are assembled outside the vacuum vessel when the two substrates are aligned in order to reduce the distance between the two substrates in a vacuum and bond them together. The entire lower substrate holding table incorporated in the lower vacuum vessel is moved in the X, Y, and O directions using the assembled actuator to perform horizontal alignment.

[Means 11] In the means 8 or the means 10, the lower substrate holding table is horizontally moved with vacuum by using an elastic tube or a magnetic fluid seal between the lower substrate holding table and the lower vacuum container. It can be moved in the directions (X, Y, O directions) and the vertical direction (Z direction).

[Means 12] In the means 11, when aligning the two substrates in order to reduce the distance between the two substrates in a vacuum and bond the two substrates together, the entire lower substrate holding table uses an air bearing method. After adjusting the alignment in the horizontal direction (X, Y, O) by non-contact floating, a pressure of 0.4 kg or more per unit area (cm ² ) is applied to the substrate holding table in a vacuum state in the Z direction.

[Means 13] An exhaust port is provided in the lower vacuum vessel in the means 1 or the means 3 or 4, and after the lower vacuum vessel has moved to the side of the upper substrate holding stage, the lower vacuum vessel And the exhaust pipe of the vacuum pump are joined by a magnet. Next, the upper vacuum vessel incorporating the upper substrate holding table and the lower vacuum vessel are joined by bellows or an elastic tube to form a vacuum vessel, and then the vacuum pump exhausts the atmosphere inside the vacuum vessel.

[Means 14] In a method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, a region where an ultraviolet curing type adhesive is applied and a light shielding film region of a color filter are not overlapped, and the adhesive is At least one row of continuous ring-shaped bumps around the outer periphery of the BM (light-shielding film area) of the color filter so that the two substrates are not crushed when they are bonded together in a vacuum and reach the light-shielding film area of the color filter-side substrate. installed.

[Means 15] A continuous ring-shaped bump is formed on the outer periphery of the BM of the color filter described in Means 14 at the same time when the photolitho spacer is formed on the color filter side substrate.

[Means 16] In a method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, when an ultraviolet curable adhesive seal is cured, if liquid crystal is present near the seal, the liquid crystal may be decomposed by ultraviolet light. To prevent the liquid crystal from immediately reaching the vicinity of the seal when irradiating ultraviolet rays, two or more rows of dashed bump rows enclose the effective pixel area between the seal application area and the effective pixel area during color irradiation. Formed on a substrate.

[Means 17] Two or more rows of dashed bumps described in Means 16 are formed simultaneously with the formation of the photolitho spacer on the color filter side substrate.

[Means 18] Two substrates are bonded in a vacuum using a color filter in which the ring-shaped bumps described in Means 14 and 16 and two or more rows of dashed bumps are formed. Only the seal adhesive is irradiated with ultraviolet light to cure the adhesive in a state where the liquid crystal does not spread to a point close to the seal adhesive.

[Means 19] Only the seal adhesive is irradiated with ultraviolet light using the means 18 to cure the adhesive, and then the entire liquid crystal panel is pressed to uniform the liquid crystal cell gap.

[Means 20] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, in a region where liquid crystal is sandwiched between an upper substrate and a lower substrate and upper and lower surfaces are in contact with the liquid crystal. The liquid crystal cell gap is measured while changing the wavelength of light. Horizontal alignment (X, Y, O) of the two substrates is performed in a region where the cell gap between the two substrates is larger than the height of the spacer beads or the photolitho spacer. If the alignment is good, the cell gap is crushed until the cell gap between the two substrates reaches a target value. At the same time, the cell gap is reduced while measuring the pressure using a vertical pressure sensor and confirming the increase in the pressure. When the target pressure is reached, the alignment of the upper and lower substrates is checked again, and if there is no problem, ultraviolet light is applied to the ultraviolet curable resin applied around the substrate to temporarily stop.

[Means 21] After temporarily stopping by means 20, the voltage application to the electrostatic attraction plate is stopped. Thereafter, nitrogen gas or dry air is simultaneously and slightly flowed from above and below through holes formed in the electrostatic suction plate holding the upper substrate and the lower substrate, and the vacuum state is gradually broken. A uniform atmospheric pressure is applied to the upper and lower substrates little by little.

[Means 22] A giant magnetostrictive material or a piezoelectric element (piezo element) was used as an actuator for adjusting the cell gap of the two substrates while measuring the liquid crystal cell gap by an optical method in the means 20.

[Means 23] In a method for assembling a liquid crystal panel by bonding two substrates together in a vacuum,
The surface shape of the table for fixing and holding the substrates is not flat, and the central part of the effective pixel area of the substrate is concavely concave in both the upper and lower tables in a vertically symmetrical manner. After the liquid crystal is dropped on the central region of the ferroelectric region, the operation of bonding the two substrates is performed in a vacuum.

[Means 24] The depth of the concave recess of the table described in Means 23 is set to 20 microns or more.

[Means 25] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the surface shape of a table for fixing and holding the two substrates is not flat but a donut shape in an effective pixel area of the substrate. It is concavely concave, and the area in the center of the effective pixel area is more indented than the area where the seal adhesive is applied outside the effective pixel area,
After fixing and holding the substrates, liquid crystal is dropped on the central region of the effective pixel region, and then the operation of bonding the two substrates is performed in a vacuum.

[Means 26] The depth of the donut-shaped recess of the table described in Means 25 is 20 μm or more, and the depth of the center of the effective pixel area is 10 μm. The above-described table is used in which the concave donut-shaped depression is larger than the center of the pixel.

[Means 27] In a method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, a liquid crystal is discharged as a high-speed droplet in a non-contact manner with respect to the substrate using a jet dispenser dispenser. The liquid crystal required for one cell is evenly divided into 50 or more times and applied to the effective pixel area of one cell.

[Means 28] After the gas dissolved in the liquid crystal is degassed by using a hollow degassing module in the jet dispenser dispenser described in the means 27, the liquid crystal is continuously supplied.

[Means 29] After the gas dissolved in the liquid crystal is degassed by a vacuum spray deaerator in the jet dispenser dispenser described in the means 27, the liquid crystal is continuously supplied.

[Means 30] A laser displacement meter for measuring the height of the liquid crystal is incorporated in the jet dispenser described in the means 27.

[Means 31] When a liquid crystal is applied to a plurality of pixel areas imposed on a substrate by using a jet dispenser dispenser described in Means 30, the amount of liquid crystal applied to each screen is measured by a laser. Measure using a liquid level displacement meter, control the number of liquid crystal drops of the dispenser, and never drop more than the target amount of liquid crystal.

[Means 32] In an apparatus for assembling a liquid crystal panel by bonding two substrates in a vacuum, an upper and lower table for fixing and holding the substrates is provided with electrostatic attraction plates. A flexible type electrostatic attraction plate having a printed electrode formed on a plastic organic film such as polyimide or polyamide is used as the electro attraction plate.

[Means 33] A substrate holding table is used in which the flexible electrostatic attraction plate described in the means 32 is attached to an aluminum plate having a honeycomb structure using an elastic adhesive.

[Means 34] In the aluminum honeycomb plate used in the electrostatic chuck table described in the means 33, the thickness of the aluminum plate on the side where the flexible type electrostatic chuck plate is bonded is determined by the means 24 or 26. Was cut into the concave shape described in (1). A flexible electrostatic attraction plate was attached to the aluminum honeycomb plate using an elastic adhesive.

[Means 35] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, 1
A transparent conductive film is formed on the entire surface of the substrate on the side adsorbed to the electrostatic attraction plate, and the substrate is fixed and held on the electrostatic attraction plate on the table side that rotates and inverted, and the two substrates are evacuated. Perform bonding.

[Means 36] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, when a bipolar electrostatic suction method is used for suction of the upper and lower substrates,
The electrode of the electrostatic attraction plate is divided into two parts so as to have a half area of the substrate according to the state of imposition of the substrate. The electrode patterns of the electrostatic attraction plates of the upper and lower tables are vertically symmetrical, and the polarity and voltage values are applied equally so that the applied voltage is also vertically symmetrical.

[Means 37] In the case where a monopolar electrostatic attraction method is used at the means 35, the transparent conductive film formed on the entire surface of the attraction surface of the substrate is grounded, and the voltage applied to the electrostatic attraction plate is transparent. Shield with a conductive film.

[0061]

By using the means 1, 3, and 4, the upper substrate can be turned over without using a special jig, and the substrate can be accurately mounted on the upper table. Means 4 is particularly suitable for mass production because the throughput can be greatly improved.

By using the means 2 and the means 5, it is possible to make the coating thickness of the sealing adhesive of the liquid crystal cell twice as thick as that in the case of one-side coating. As a result, since the seal can be applied without increasing the viscosity of the seal adhesive, the problem of stringing does not occur. The thickness of the sealing adhesive is doubled, so the thickness of the sealing adhesive is surely thicker than the applied thickness of the liquid crystal dropped. Therefore, if the distance between the upper and lower glass substrates is reduced, the sealing adhesive will move up and down earlier. And the liquid crystal does not seep into the seal contact surface. Significant reduction in seal adhesion failure can be achieved.

By using the means 6, there is no need to move the heavy vacuum vessel in the X, Y, and O directions, so that the entire apparatus can be made compact and inexpensive. In all respects, the weight, reliability and life of the device can be made better than the conventional vacuum bonding device of the structure of FIG. In particular, there is a great difference in the reliability of the vacuum seal.

By combining the means 7 and the means 8 or the means 7 and the means 9, it is possible to make the alignment mechanism of the vacuum bonding apparatus having the upper substrate rotation reversing function compact.

Means 8 and 10 or Means 9 and 10
By combining the above, it is possible to make the alignment mechanism of the vacuum bonding apparatus having the upper substrate rotation reversing function with high reliability. Since there is no burn-in, which is likely to occur in a vacuum, because a machine assembled with complicated precision parts in the atmosphere is operated, there is little trouble.

By using the vacuum sealing method of the means 11 for the alignment mechanism of the means 10, a repetitive operation with high reliability and good reproducibility is possible.

The use of the means 10, 11, and 12 makes it possible to obtain a complete cell gap in a vacuum for vacuum bonding of large substrates, which has been impossible in the past. In particular, since the seal adhesive having an extremely high viscosity can be completely crushed by the means 12, the degree of freedom of the material of the seal adhesive is increased.

Means 1 or means 3 or means 4
The use of 3 eliminates the need to move the evacuation pipe connected to the vacuum vessel, so that the apparatus can be made compact. Since it is easy to take measures against the vibration of the vacuum exhaust pipe, it is easy to solve the problem of the vibration of the vacuum pump which adversely affects the alignment accuracy.

By using the means 14 and the means 15, the non-uniformity of the exudation of the sealing adhesive can be greatly improved, and the spatial volume in the liquid crystal cell can be accurately calculated. This makes it possible to improve the accuracy of the cell gap only by improving the measurement accuracy of the liquid crystal. Further, the bumps for preventing the exudation of the seal adhesive prevent the diffusion of impurities from the seal adhesive, so that the reliability can be greatly improved.

By using the means 16 and the means 17, it is possible to create a situation where the liquid crystal is not in contact immediately after the upper and lower substrates are bonded to the sealing adhesive. The shape of the plurality of dashed bumps used in the means 16 can control the time until the liquid crystal contacts the sealing adhesive.

Means 16, 17, 17, 18 and 19
By using, it is possible to irradiate ultraviolet rays to the ultraviolet-curable seal adhesive in a state where the liquid crystal and the seal adhesive are not in contact with each other. As a result, the liquid crystal is not decomposed or deteriorated by the ultraviolet light, and the occurrence of unevenness around the seal is drastically reduced.

The use of the means 20 and 22 makes it possible to measure the cell gap during the liquid crystal cell joining operation, which has been impossible so far, in real time. It is difficult to measure an empty cell that does not contain liquid crystal, but it is easy to measure the cell gap between substrates if the liquid crystal is interposed between the upper and lower substrates. This is only possible with the vacuum liquid crystal drop lamination process. In the past, it has been common practice to squeeze as much as possible, assuming that the cell gap is accurate between the upper and lower substrates, and then widen the distance between the substrates by a few microns from that position and then adjust the alignment again. For this reason, the alignment film was crushed by the spacer, and poor alignment occurred. However, by directly measuring the cell gap of the present invention, a cell gap that is several microns larger than the diameter of the spacer can be determined before the substrate and the substrate touch each other with the spacer. Image quality is greatly improved.

Since the uniform pressure is applied to the liquid crystal cell by using the means 20 and the means 21, a very uniform cell gap can be formed. This point is the most excellent point in the vacuum liquid crystal dripping and bonding process, and the cell gap defect is drastically reduced.

Means 23, 24, 25, 26
By using the method, it is possible to produce the same effect as that performed by the means 2 and the means 5 even when the seal adhesive is applied to only one substrate. Means 23, 24,
The effect can be further improved by using the devices 25 and 26 and the means 2 and the means 5 at the same time. When the seal adhesive is applied to both the upper and lower substrates, a double seal application device is required and a clean room space is required. However, if the means 23 and 25 are used, the conventional seal application only on one side substrate is sufficient. Only the seal bonding area can be brought into contact with the upper and lower substrates. In this case, the concave shapes of the upper and lower substrates must be accurately formed symmetrically in the vertical direction.
After only the seal portion is fully in vertical contact and the alignment adjustment is completed, the concave deformation of the substrate is corrected by uniformly applying pressure to the upper and lower substrates from above and below using the means 21.
In the case of the means 23, the liquid crystal may be dropped at the center of the concave portion.
In the case of the means 25, it is preferable to drop the liquid crystal not on the recess but on the central area of the screen.

By using the means 27, it becomes possible to drop a drop crystal on the substrate side on which the spacer beads and the photolitho spacer are formed. In the conventional dispensing method in contact with the substrate, it was impossible to drop the drop crystals on the substrate side on which the spacer beads and the photolitho spacer were formed. Even when the substrate has large irregularities, the liquid crystal can be dropped at high speed by using the means 27 without any problem.

By using the means 28 or 29, it is possible to operate continuously without interrupting the mass production line. In the case of a liquid crystal panel of 30 inches or more, the amount of liquid crystal used in one cell increases, so a degassing method as in the present invention is required. The conventional degassing system requires a long time for the dissolved gas to escape due to the small surface of the liquid crystal, but the degassing method of means 28 and 29 requires a short time due to the large surface area of the liquid crystal. The degassing process ends with.

By using the means 27, the means 30, and the means 31, it is possible to measure and control the drop amount of the liquid crystal with good reproducibility. In the vacuum liquid crystal dropping and bonding step, if the liquid crystal is dropped more than the target amount of liquid crystal, the liquid crystal becomes defective.

By using the means 32, means 33, and means 34, a large-area electrostatic suction plate can be manufactured at low cost. Unlike conventional ceramic-type electrostatic chucking plates, flexible-type electrostatic chucking plates do not damage the glass substrate and deform the chucking plate even if foreign matter gets stuck, so the electrostatic chucking force decreases. Nor. Since the deformation on the glass substrate side is less likely to occur, the cell gap defect is less likely to occur, and the electrostatic attraction plate having the concave shape used in the means 23 and 25 can be easily manufactured. The flatness of the plane is also better than that of the ceramic type. It is considered that the flexible type electrostatic attraction plate is most suitable as the attraction plate used in the vacuum liquid crystal drop bonding step. In particular, since the bipolar type can be freely formed in various shapes, it is easy to design the suction plate. Furthermore, the flexible electrostatic attraction plate can be easily formed even if the insulating layer on the surface is as thin as about 50 microns, and has very good reliability. A standard electrostatic chuck plate made of ceramics having a size of 200 μm or more has a drawback that when applied to a glass substrate, the chucking force cannot be increased unless the applied voltage is increased. 5 for polyimide type flexible electrostatic attraction plate
Since a film having a thickness of 0 μm can be used as a standard, the applied voltage is small, and safety is high. By attaching a flexible electrostatic attraction plate to an aluminum honeycomb plate, a very light electrostatic attraction plate can be made, and maintenance of the device becomes easier.

By using the means 35, 36, and 37, the electrostatic attraction force of the glass substrate is greatly improved.
It is possible to completely prevent a change in characteristics of the FT substrate due to an electric field. In order to prevent a change in TFT characteristics, it is sufficient that no electric field is generated in the space where the TFT substrate is placed. Since the electric field is not generated between the upper and lower electrostatic attraction plates by using the design method described in the means 36, TF
No change in T characteristic occurs. In the case of the bipolar type, the method of dividing the electrode into two parts is the lowest in cost and excellent in reliability. In the case of a single electrode, a transparent electrode is formed on the entire surface of the glass in contact with the adsorption plate as used in the means 37, and this transparent electrode is grounded to ground to shield the electric field from acting on the TFT substrate. Otherwise, the characteristics of the TFT will change.

[0080]

Embodiment 1 FIG. 2 shows a first embodiment of the present invention. In the conventional vacuum liquid crystal drop bonding method, as shown in FIG. 1, a seal adhesive is applied to either the lower substrate or the upper substrate. In this case, depending on the magnitude of the wetting angle between the liquid crystal and the alignment film, the liquid level of the liquid crystal is often higher than the seal adhesive. If the liquid crystal oozes out before the seal adhesive comes into contact with the seal adhesive surface when the upper and lower substrates are bonded, defective seal adhesion occurs. By applying the seal adhesive symmetrically to the upper and lower substrates as shown in FIG. 2, it is possible to double the height of the seal adhesive as compared with the conventional case.
As a result, the bonding is completed before the liquid crystal seeps into the seal bonding area to cause a sealing failure.

[Embodiment 2] FIGS. 3 and 5 show a second embodiment of the present invention. The upper substrate is placed on a rotation reversal table and fixedly held on the table by a vacuum suction method or an electrostatic suction method. The table rotates right by 180 degrees and the upper substrate faces downward. Next, after applying a sealing adhesive and liquid crystal to the lower substrate, it is placed on the lower table and fixed and held by vacuum suction or electrostatic suction. The lower table moves horizontally and stops at the upper table. A vacuum exhaust port of the lower vacuum vessel is connected to an exhaust pipe, and a pipe for injecting pressurized air into the bellows coupling is also connected. When the pressurized air is injected into the bellows coupling and the upper and lower vacuum containers are connected, the evacuation is started. After evacuation to about 10 ⁻³ torr, the distance between the upper substrate and the lower substrate is reduced, and when the distance between the substrates becomes about 200 μm, the operation of the air cylinder is stopped and the operation is switched to the fine adjustment operation using the giant magnetostrictive element. In the case of vacuum liquid crystal drop bonding, the liquid crystal is sandwiched between the substrates, so that the cell gap can be measured while changing the wavelength of light. When approached to about 20 microns, the horizontal direction (X, Y, O
Direction), and after correcting the horizontal balance, the cell gap is reduced to about 10 microns. After correcting the balance of the horizontality again, the alignment adjustment in the horizontal direction (X, Y, O) is performed. When the alignment is completed, the cell gap is reduced while balancing the horizontality up to the target cell gap. The alignment is checked again, and if there is no problem, the ultraviolet curing adhesive around the substrate is irradiated with ultraviolet light to perform temporary fixing. Next, the voltage of the electrostatic attraction plate, which fixedly holds the substrate, is turned off, and the same amount of nitrogen gas is simultaneously released from the small holes drilled in the attraction plate to blow the vacuum little by little. After confirming that the air pressure has been reached, the fine adjustment operation of the giant magnetostrictive element is returned to the initial value, and the air cylinder is returned to the initial position. Return the pressurized air of the bellows coupling to atmospheric pressure. Move the lower table horizontally to the initial position.
When the movement of the lower table is completed, the upper table is rotated counterclockwise and returned to the original position after being rotated 180 degrees. This operation is repeated.

[Embodiment 3] FIG. 6 shows a third embodiment of the present invention. As in the case of the second embodiment, the rotation reversing table on which the upper substrate is placed has functions of not only one surface but also a double-sided vacuum suction system and an electrostatic suction system. Operation is in the second embodiment.
Approximately the same as above, but when the lower table returns to its original position, the upper substrate is mounted on one surface of the rotary reversing table to activate vacuum suction and electrostatic suction. The rotation reversing table is rotated 180 degrees to the left and the upper substrate is placed horizontally, and then the lower table is mounted on a new lower substrate and horizontally moved to the side of the rotation reversing table. Thereafter, the same operation as in the second embodiment is repeated, and the vacuum bonding step is advanced.

[Embodiment 4] FIG. 21 shows a fourth embodiment of the present invention. The substrate, which has been turned upside down on the rotation reversing table, is levitated in a non-contact manner, transported to the pressure table (63), and sucked on the pressure table. The difference from the first embodiment is that the upper table has a pressurizing function.
Fine adjustment in the vertical direction (Z direction) is performed by a giant magnetostrictive element provided on the lower table. When the upper substrate is mounted on the upper pressure table, the lower table on which the lower substrate is placed is moved horizontally until the upper pressure table is set. The subsequent operation is the same as in the second embodiment.

[Fifth Embodiment] FIG. 32 shows a fifth embodiment of the present invention. FIG. 32 shows the rotation reversing table of the second embodiment in which the pressurizing function and the fine adjustment operation function in the vertical direction (Z direction) described in the fourth embodiment are added. The working operation is the same as in the second embodiment.

[Embodiment 6] FIG. 35 shows a sixth embodiment of the present invention. In FIG. 5, the horizontal alignment function (X, Y, O) and the fine adjustment operation function in the vertical direction (Z direction) are all operated in vacuum, but in FIG. 35, all these functions are performed. Is designed to work in the atmosphere. By using a tube type packing or a magnetic fluid seal in the gap between the lower substrate table and the lower vacuum vessel, three-dimensional movement and O-direction rotation of the lower table are possible. However, since the movable range of the lower table is very small, about several mm or less, when the upper and lower glass substrates are thick, the lower table may not be used. However, in the case of a liquid crystal panel, the glass plate thickness is as thin as about 1.1 mm to about 0.5 mm. The best point in FIG. 35 is that the volume inside the vacuum vessel can be minimized and that there is no mechanical mechanism causing dust generation inside the vacuum vessel. Further, since the lower table is directly supported by the air slider mechanism, even when a very large pressure is applied to the lower table, the horizontal direction (X,
(Y, O directions) A large pressure is not applied to the alignment mechanism. By using the apparatus of the present invention, it is possible to adjust the pressure and vacuum bonding alignment without any problem even for a polymer liquid crystal having a very high viscosity.

[Embodiment 7] FIG. 36 shows a seventh embodiment of the present invention. The air reversing table using the vertical reversing (Z direction) pressure fine adjustment function used in the fifth embodiment and the tube type packing and the magnetic fluid seal used in the sixth embodiment are employed.

[Embodiment 8] FIG. 12 shows an eighth embodiment of the present invention. The cell gap of the liquid crystal is measured by changing the wavelength of light using an optical fiber. In the case of the vacuum liquid crystal drop bonding process, since the liquid crystal exists in the liquid crystal cell, it is possible to measure the cell gap using light.
It is almost impossible to measure the cell gap in the case of a conventional empty cell where no liquid crystal exists. If the cell gap can be measured correctly, the parallelism between the upper and lower substrates can also be accurately measured. This makes it possible to assemble the liquid crystal cell precisely with a precision that is not comparable to that of conventional coalescing machines. Considering the height of the spacer when approaching the upper and lower substrates, alignment in the horizontal direction (X, Y, O directions) can be adjusted under the condition that the spacer does not contact the substrate. By incorporating the liquid crystal cell gap measurement function into the vacuum liquid crystal dropping and bonding device, the alignment film is not damaged and the yield is greatly improved.

[Embodiment 9] FIGS. 7, 8, 9 and 10 show a ninth embodiment of the present invention. Vacuum suction and electrostatic suction 2
The glass substrate is deformed in a vacuum using the method as shown in Fig. 7 and Fig. 8. The shapes of the upper table and the lower table used in the present invention can be realized as shown in FIGS. The depth of the depression in the recess must be 20 microns or more, and a depression of about 100 microns to 500 microns is practically used. Liquid crystal is applied to the area of this depression. The hollow area is at the center of the effective pixel area as shown in Figs. The purpose is to bring the seal adhesive part into contact with the opposing substrate before the liquid crystal contacts the upper substrate. The shape of the concave recesses on the upper and lower substrates must be vertically symmetric.

[Embodiment 10] FIGS. 29, 30 and 31
Is a tenth embodiment of the present invention. The basic concept is the same as in the ninth embodiment. FIG. 2 shows the shape of the table so that donut-shaped concave cavities are formed for each screen.
5 and the method of FIG. The depth of the depression in the recess must be at least 20 microns as in the example. Usually, a depth of the depression of about 100 μm to 500 μm is used. In the tenth embodiment, the central portion of the effective screen is recessed from the area of the seal adhesive, but the amount of the recess is not as large as that of the donut-shaped recessed area. It is sufficient if the amount of the depression is about half to about 1/4 of the concave depression.

[Embodiment 11] FIG. 11 shows an eleventh embodiment of the present invention.
This is an embodiment of the present invention. FIG. 11 is a sectional view showing the principle structure of the monopolar electrostatic attraction plate. In FIG. 11, a color filter substrate used in the in-plane switching mode liquid crystal mode is attracted by an electrostatic attraction method. The surface in contact with the suction plate is coated with about 200 Å of a transparent conductive film. The potential of this conductive film is set to ground, and the electrode of the electrostatic attraction plate is set to a positive potential. The polarity can be either positive or negative. All electric fields are generated between the transparent conductive film and the electrostatic attraction plate, so that the TFT substrate side is not affected by the electrostatic attraction plate. In the present invention, a flexible electrostatic attraction plate using an organic film such as polyimide is used as the electrostatic attraction plate. The metal table and the flexible electrostatic attraction plate are adhered through an elastic adhesive layer having a thickness of about 100 to 300 microns. By employing this elastic adhesive layer, the electrostatic attraction force does not decrease even if a foreign substance is interposed, and the amount of local deformation of the glass substrate is reduced, so that the occurrence of cell gap defects and alignment film damage is drastically reduced.

[Twelfth Embodiment] FIGS. 24, 37 and 39 show a twelfth embodiment of the present invention. FIGS. 37 and 39 are plan views of the principle structure of the bipolar electrostatic attraction plate, and FIG.
9 As shown in FIG. 37 and FIG.
It is particularly important that the divided effective screens are arranged so as to be embedded in either of the electrodes. An arrangement in which two electrodes straddle one effective screen should be avoided because the characteristics of the TFT are likely to change. It is also important to arrange the electrode patterns of the upper and lower tables and the polarities and potentials of the electrodes so as to be vertically symmetric as shown in FIG. By arranging vertically symmetrically in this way, the internal electric field can be made zero and the TFT within the effective screen
Changes in characteristics can be prevented.

[Thirteenth Embodiment] FIGS. 13, 14 and 15 show a thirteenth embodiment of the present invention. This is a jet dispensing type dispenser used for dropping liquid crystal. This type of dispenser can repeatedly discharge a precise amount of liquid crystal without contact. In FIG. 13, the liquid level of the liquid crystal is accurately measured using a laser height measuring device. This function is necessary to correct the cumulative error of the jet dispenser. By accurately measuring and correcting the amount of liquid crystal dropped for each cell, it is possible to completely prevent the occurrence of defects due to errors in the amount of dropped liquid crystal. FIG. 14, FIG.
Reference numeral 5 denotes a degassing system for continuously supplying liquid crystal to the jet dispenser. By adopting this system, it is not necessary to stop the line for exchanging the syringe, and the operating rate of the line is improved. In the conventional type of deaeration system, the deaeration process requires a long time, and the line cannot be stopped. FIG. 22 is a plan view of the vacuum liquid crystal dropping apparatus of the present invention. The substrate is heated (120 ° C. or higher) and degassed, liquid crystal is dropped by a jet dispenser, and then degassed in a vacuum for about 20 to 30 minutes. FIG.
Reference numeral 3 denotes the entire process flow of the vacuum liquid crystal drop bonding step of the present invention. A degassing vacuum treatment step from the organic material used is indispensable.

[Embodiment 14] FIG. 16, FIG. 17, FIG.
FIGS. 27, 28, 29 and 33 show a fourteenth embodiment of the present invention. FIGS. 16, 17 and 18 show ring-shaped bumps for preventing the seal adhesive from seeping out to the region of the light-shielding film. The seal adhesive coin of the present invention is shown in FIG.
And irradiate ultraviolet light from the color filter substrate side as shown in Fig. 20. When the seal adhesive seeps into the light-shielding film area of the color filter, no curing reaction occurs even if ultraviolet light is irradiated because the ultraviolet light does not reach the seal adhesive. In this case, the seal adhesive elutes in the liquid crystal, causing display failure. This protrusion ring-shaped bump has the effect of accurately determining the volume of space inside the liquid crystal cell, so it is absolutely necessary for precise cell gap control. Even after the liquid crystal cell is completed, it has the effect of preventing impurities and water from diffusing from the sealing adhesive, which can greatly improve reliability. In the case of a double seal structure as shown in FIGS. 27 and 28, it is also effective to use two rows of ring-shaped bumps.
Furthermore, as shown in FIG. 33, it is possible to increase the liquid crystal diffusion speed by forming a plurality of broken line bumps.
By using these dashed bumps, it is possible to create a situation where the liquid crystal is not in contact with the sealing adhesive when irradiating ultraviolet rays as shown in FIG. By delaying the diffusion of the liquid crystal by the broken-line bumps, no ultraviolet light is applied to the liquid crystal, so that deterioration of the liquid crystal does not occur. As a result, impurities in the seal adhesive are not eluted, and the occurrence of display defects around the seal can be drastically reduced.

[0094]

According to the present invention, it is possible to assemble a very large liquid crystal panel in a short time without depending on the liquid crystal mode, and it is possible to greatly reduce the number of steps. By using the rotation reversing table structure of the present invention, even if a large-sized substrate is used, glass transport trouble does not occur, so that it is not necessary to increase the thickness of the glass. As a result, an increase in weight of the large liquid crystal panel can be suppressed, so that a light product can be developed. By using the concave depression table or the jet dispenser liquid crystal dropping method of the present invention, accurate cell gap control becomes possible, the occurrence of defects can be suppressed, and the yield is greatly improved. The use of the seal protrusion prevention ring-shaped bumps and broken line-shaped bumps of the present invention makes it possible to completely prevent the occurrence of unevenness around the seal and improve long-term reliability. As a result, mass production of an ultra-large liquid crystal panel can be realized.

[Brief description of the drawings]

FIG. 1 shows a conventional vacuum liquid crystal cell bonding process in which an adhesive is applied to a lower substrate.

FIG. 2 is a vacuum liquid crystal cell bonding process in which an adhesive is applied to upper and lower substrates according to the present invention.

FIG. 3 is a vacuum liquid crystal cell bonding apparatus for reversing the upper substrate of the present invention.

FIG. 4 is a jointing apparatus for performing alignment by moving a conventional lower vacuum vessel in X and Y directions.

FIG. 5 is a bonding apparatus for forming a vacuum container by only moving the bellows coupling up and down without moving the upper and lower vacuum containers according to the present invention.

FIG. 6 is a bonding apparatus that holds two upper substrates of the present invention and rotates and reverses the rotation;

FIG. 7 is a vacuum bonding apparatus according to the present invention in which the upper stage and the lower stage are symmetrically concavely recessed at the center of the effective pixel area.

FIG. 8 is a vacuum bonding apparatus of the present invention in which the upper stage and the lower stage are symmetrically concavely recessed at the center of the effective pixel area.

FIG. 9 shows UV used in the vacuum liquid crystal cell bonding step of the present invention.
Plan layout of temporary bonding position, main seal position and cell gap measurement position

FIG. 10 shows U used in the vacuum liquid crystal cell bonding step of the present invention.
Planar layout of V temporary bonding position, main seal position and cell gap measurement position

FIG. 11 is a diagram in which a color filter substrate is electrostatically adsorbed by a monopolar electrostatic adsorption plate using the elastic adhesive of the present invention and a plastic organic film.

FIG. 12 is a diagram showing the principle of cell gap measurement used in the vacuum cell bonding process of the present invention.

FIG. 13 is a principle diagram of liquid crystal precision measurement of a liquid crystal dropping device used in the vacuum cell bonding process of the present invention.

FIG. 14 is a liquid crystal degassing system diagram of the present invention.

FIG. 15 is a diagram of a liquid crystal degassing system of the present invention.

FIG. 16 shows a bonding process in the case of using a photolitho spacer and a bump for preventing exudation of an adhesive made using the photolitho process of the present invention.

FIG. 17 is a layout view of a ring-shaped bump for preventing exudation of an adhesive and a photolitho spacer according to the present invention.

FIG. 18 is a color filter substrate for a lateral electric field liquid crystal mode in which a ring-shaped bump for preventing exudation of an adhesive and a photolitho spacer according to the present invention are formed.

FIG. 19 is a pressurized ultraviolet curing device after the vacuum liquid crystal cell is attached according to the present invention.

FIG. 20 is a pressurized ultraviolet curing device after the vacuum liquid crystal cell is attached according to the present invention.

FIG. 21 is a vacuum bonding apparatus in which the upper substrate of the present invention is rotated and inverted, and then is attracted to an upper substrate holding stage using a non-contact floating table.

FIG. 22 is a vacuum liquid crystal dropping device of the present invention.

FIG. 23 is a process flow of the vacuum liquid crystal cell bonding process of the present invention.

FIG. 24 is a diagram in which a color filter substrate is electrostatically adsorbed by a bipolar electrostatic adsorbing plate using the elastic adhesive of the present invention and a plastic organic film.

FIG. 25 is a cross-sectional view of the electrostatic suction plate exchange unit of the present invention.

FIG. 26 is a sectional view of the surface shape of the electrostatic suction plate of the present invention.

FIG. 27 is a color filter substrate on which a double ring-shaped bump for preventing exudation of an adhesive, a liquid crystal diffusion delay bump, and a photolitho spacer according to the present invention are formed.

FIG. 28 is a cross-sectional view of a liquid crystal cell assembled using a color filter formed with a double seal and an anti-exuding ring-shaped bump according to the present invention.

FIG. 29 is a process flow when performing joint alignment using the concave stage of the present invention.

FIG. 30 shows U used in the vacuum liquid crystal cell bonding step of the present invention.
Planar layout of V temporary bonding position, main seal position and cell gap measurement position

FIG. 31 shows U used in the vacuum liquid crystal cell bonding step of the present invention.
Planar layout of V temporary bonding position, main seal position and cell gap measurement position

FIG. 32 shows a vacuum liquid crystal cell bonding apparatus for reversing the upper substrate according to the present invention.

FIG. 33 is a plan view of a liquid crystal diffusion delay bump of the present invention and an explanatory view of an ultraviolet irradiation area of a seal adhesive.

FIG. 34 is a cross-sectional view of the electrostatic suction plate exchange unit of the present invention.

FIG. 35 is a sectional view of a vacuum bonding apparatus using the air slider mechanism of the present invention.

FIG. 36 is a sectional view of a vacuum bonding apparatus using the air slider mechanism of the present invention.

FIG. 37 is a plan view showing the structure of the bipolar electrostatic attraction plate of the present invention.

FIG. 38 is a sectional structural view of the bipolar electrostatic chuck plate of the present invention.

FIG. 39 is a plan view showing the structure of the bipolar electrostatic attraction plate of the present invention.

[Explanation of symbols]

1---Upper substrate 2---Lower substrate 3---Adhesive applied to lower substrate 4---Dropped liquid crystal 5---Adhesion applied to upper substrate Material 6 ---- A stage for holding an upper substrate having a rotation inversion function 7 ---- Arm for supporting a rotation inversion stage 8 ---- A bellows coupling capable of operating up and down 9 ---- A lower substrate X, Y, O stage 10 --- --- Actuator that moves up and down (Z direction) (for fine movement adjustment) 11 ------ Lower vacuum vessel 12 ------ Hydraulic cylinder or air cylinder 13 −−−− Rail 14 −−−− Exhaust port 15 −−−− Pipe for bellows coupling control 16 −−−− AC servo motor to move the upper substrate up and down 17 −−− Air cylinder to move the upper vacuum container up and down 18 --- Exhaust port 19 --- --- Upper stage capable of holding upper substrate 20 ---- Dispenser for dropping liquid crystal 21 ----Lower stage 22 holding lower substrate 22 --- X・ Y-direction movable lower vacuum vessel 23 ---- O rotary stage 24--X-direction movable stage 25 --- Y-directional movable stage 26 ---- Elasticity to hold upper electrostatic attraction plate Body layer 27 ------ Electrostatic suction plate for holding upper substrate (single-pole type) 28 --- Rotation reversal stage capable of holding two upper substrates 29 --- Holding lower electrostatic suction plate _{N 2} control holes 32 ---- UV adhesive for or peeling or suction adsorb electrostatic attraction plate 31 ---- substrate holding the elastic adhesive 30 ---- lower substrate Temporary bonding position using a 33 ------ laser Liquid crystal cell gap measurement position in which liquid crystal is sealed 34 --- --- Effective pixel area concaved 35 --- --Cable for applying voltage to electrostatic attraction plate 36 --- Coated on the back surface of upper substrate Cable for grounding the transparent conductive film to ground 37------------------------------------------------------------------------------------------------------------------ --- Sticking type spacer beads 42 ----Light for measuring the cell gap in which the liquid crystal is sealed 43 ----Laser measuring device for measuring the liquid level of the liquid crystal 44 --- --- Pin for extruding liquid crystal 45 --- Magnetic material 46 --- Magnet coil 47 --- Pump for supplying liquid crystal to syringe 48 --- Exhaust gas dissolved in liquid crystal Exhaust port for 9 --- Hollow fiber type degassing module 50 --- Vacuum degassing container 51 --- --Pressure pump 52 --- --- To prevent adhesive from seeping into the area of the light shielding film Bump 53 --- Spacer formed by photolithography process 54 --- Spot ultraviolet rays 55 --- --- Stage having uneven surface for holding coalescent cell glass 56 --- Film for blocking ultraviolet rays by pressing 57 --- A film for forming a vacuum container having an ultraviolet transmitting property 58 ----Linear ultraviolet rays 59 --- Dispenser for dropping liquid crystal in a vacuum container 60 ------ One axis Direction moving table 61 --- Rotation reversal stage 62 --- --- Porous ceramics for non-contact air floating 63 --- --- Upper substrate holding stage 64 --- --- movable in the vertical (Z-axis) direction Fixed upper vacuum vessel 65 --- Lower vacuum vessel movable in one axial direction 66 --- Upper substrate holding stage 67 in which effective pixel area is concaved 67 ------- Effective pixel area is concave Concave lower substrate holding stage 68 --- Spray liquid crystal into fine particle droplets 69 --- Electrostatic suction plate (bipolar type) holding upper substrate 70 --- Aluminum honeycomb plate d --- Depth of recess in effective pixel area of substrate holding stage 71 --- Electrode of electrostatic chuck plate 72 --- Heat resistant film with low coefficient of thermal expansion 73 --- Bellows forming vacuum vessel 74 ---- Magnet splicer 75 ---- Earth ground confirmation sensor 76 ---- Bump for preventing liquid crystal from diffusing in the vicinity of the sealing adhesive A ---- The upper and lower substrates face each other. Gap of adhesive application area when alignment adjustment (X, Y, Z, O) starts B ------ The effective pixel area when alignment adjustment (X, Y, Z, O) starts when the upper and lower substrates face each other Gap in concave area E ---- Gap in central area of effective pixel area when upper and lower substrates face each other and alignment adjustment (X, Y, Z, O) begins a ---- Alignment adjustment is completed The gap of the adhesive application area at the time of the adjustment b ---- The gap of the concave area of the effective pixel area when the alignment adjustment is completed e ---- The center of the effective pixel area when the alignment adjustment is completed Area gap 77 Upper stage rotation axis 78 Pressure cylinder with additional pressure sensor 79 --- Z-direction (vertical direction) fine adjustment giant magnetostrictive element actuator 80 --- Space where liquid crystal does not exist (vacuum air bubbles) 81 --- Optical fiber cable 82 --- X, Y, O stage operating in the atmosphere 83 ------ Upper air slider 84 --- Lower air slider Table 85----------------------------------------------------&-&-&&-- Electrode of bipolar electrostatic chucking plate for use 89 --------- Positive electrode of bipolar electrostatic chucking plate for holding lower substrate 90 -------- Negative electrode of bipolar electrostatic chucking plate for holding lower substrate

Claims (76)

[Claims] In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the substrate is fixed and held on a table that performs a rotation inversion operation, and then the table is rotated and inverted, and the substrate is turned downward. Let A method for assembling a liquid crystal panel, comprising: arranging another substrate on which liquid crystal is dropped so as to face a substrate facing downward, and then bonding the two substrates together in a vacuum by reducing the distance between the two substrates. 2. A method for assembling a liquid crystal panel according to claim 1, wherein an adhesive is applied to a substrate placed on a table which performs a rotation reversing operation. 3. A method for assembling a liquid crystal panel according to claim 1, wherein a liquid crystal and an adhesive are applied to another substrate disposed so as to face the substrate facing downward. 4. The method according to claim 1, wherein an adhesive is applied to both the substrate to be placed on the table for performing the rotation reversing operation and the other substrate arranged to face the substrate. LCD panel assembling method 5. In a device for assembling a liquid crystal panel by bonding two substrates in a vacuum, the substrate is fixed and held on a table for performing a rotation inversion operation, and then the table is rotated and inverted to turn the substrate downward. I do. Next, a liquid crystal panel assembling apparatus is characterized in that the other substrate on which liquid crystal is dropped is disposed so as to face the substrate facing downward, and the two substrates are bonded together in a vacuum by narrowing the distance between the two substrates. 6. A liquid crystal display device which is assembled by using the assembling method according to claim 1 or 2. 7. A method for assembling a liquid crystal panel by bonding two substrates together in a vacuum, wherein the substrates are fixed and held on a table for performing a rotation inversion operation, and then the table is rotated and inverted to turn the substrates downward. . Next, the substrate facing downward is opposed to a table made of air-permeable porous ceramics. Next, air was blown out of the air-permeable porous ceramic, and the downwardly facing substrate was lifted horizontally and held in a non-contact state, that is, in a floating state, and the substrate was raised to a position facing the downwardly facing pressure table. Move in state. Next, the suction and suction functions and the electrostatic suction function of the downwardly directed pressure table are operated to lower the pressure table, and the floating downwardly directed substrate is suctioned and held. Next, after the other substrate on which the liquid crystal is dropped is disposed so as to face the substrate fixed and held downward, the two substrates are bonded together in a vacuum by reducing the distance between the two substrates. How to assemble 8. An apparatus for assembling a liquid crystal panel, comprising bonding two substrates by using the assembling method according to claim 7. 9. A liquid crystal display device which is assembled by using the assembling method according to claim 7. 10. A method of assembling a liquid crystal panel by bonding two substrates in a vacuum, wherein one substrate is fixedly held on two tables arranged symmetrically with respect to a rotation axis. The rear table is rotated 180 degrees clockwise to turn the substrate downward. Next, a substrate on which liquid crystal is dropped is arranged so as to face the substrate facing down, and then the two substrates are bonded together in a vacuum by narrowing the distance between the two substrates. After the vacuum bonding operation is completed, and the vacuum-exfoliated substrate moves to the outside of the rotary reversing table, one substrate is placed on the other of the rotary reversing tables and fixedly held. Next, the substrate is turned downward by rotating the rotation reversing table 180 degrees counterclockwise. Next, the other substrate on which the liquid crystal is dropped is arranged so as to face the substrate facing down, and then the two substrates are bonded together in a vacuum with the distance between the two substrates reduced. The liquid crystal panel assembling method characterized by this series of operations. 11. A method for assembling a liquid crystal panel according to claim 10, wherein an adhesive is applied to a substrate placed on a table which performs a rotation reversal operation. 12. A method for assembling a liquid crystal panel according to claim 10, wherein a liquid crystal and an adhesive are applied to another substrate disposed so as to face the substrate facing downward. 13. An adhesive according to claim 10, wherein an adhesive is applied to both a substrate placed on a table which performs a rotation reversing operation and another substrate arranged so as to face said substrate. LCD panel assembling method 14. An apparatus for assembling a liquid crystal panel by bonding two substrates in a vacuum, wherein one substrate is placed and fixedly held on two tables arranged symmetrically with respect to a rotation axis. The rear table is rotated 180 degrees clockwise to turn the substrate downward. Next, a substrate on which liquid crystal is dropped is arranged so as to face the substrate facing down, and then the two substrates are bonded together in a vacuum by narrowing the distance between the two substrates. After the vacuum bonding operation is completed and the substrate that has been vacuumed and moved to the outside of the rotation reversal table,
One substrate is placed and fixedly held on the other one of the rotation reversing tables. Next, the substrate is turned downward by rotating the rotation reversing table 180 degrees to the left.
Next, the other substrate on which the liquid crystal is dropped is placed so as to face the substrate facing downward, and then the two substrates are bonded together in a vacuum by narrowing the distance between the two substrates. A liquid crystal panel assembling apparatus characterized by this series of operations. 15. A liquid crystal display device assembled by using the assembling method according to claim 10 or claim 11. 16. A method according to claim 1, wherein
At 0, when a vacuum is created, the rotating reversing table and the upper and lower containers do not move up and down, but the air pressurized on the bellows and elastic tube created around the lower container Method for forming a vacuum container, characterized by injecting and inflating 17. A method according to claim 5 or claim 8 or claim 1.
When creating a vacuum in step 5, the rotating table and the upper container and the lower container do not move up and down, but pressurized air is applied to bellows and elastic tubes created around the lower container. A liquid crystal panel assembling apparatus characterized by forming a vacuum container by injecting and inflating. 18. The method according to claim 1, wherein the information is stored in the storage medium.
In order to reduce the distance between the two substrates in a vacuum at 0 and bond them together, when aligning the two substrates, the horizontal alignment of the substrates (X , Y, O directions). 19. The method of claim 5, claim 8, or claim 1.
In step 5, in order to reduce the distance between the two substrates and attach them in a vacuum, when positioning the two substrates, the horizontal alignment of the substrates (X , Y, O directions) 20. The method according to claim 1, wherein the two substrates are bonded in a vacuum so as to reduce the distance between the two substrates.
When aligning two substrates, the entire lower substrate holding table assembled in the lower vacuum container is moved in the vertical Z direction using the actuator incorporated outside the vacuum container, and the vertical position is adjusted. Liquid crystal panel assembling method characterized by performing alignment (Z direction) 21. The method according to claim 5, wherein the two substrates are bonded together in a vacuum by reducing the distance between the two substrates.
When aligning two substrates, the entire lower substrate holding table assembled in the lower vacuum container is joined to the lower vacuum container with a bellows, elastic tube, or magnetic fluid seal, so that the vacuum is not broken. A liquid crystal panel assembling apparatus characterized in that it is vertically movable (Z direction) using an actuator installed outside the vacuum vessel. 22. An actuator according to claim 1 or 7, wherein an actuator installed outside the vacuum vessel is used when positioning the two substrates in order to reduce the distance between the two substrates in a vacuum and to bond the two substrates together. A method of assembling a liquid crystal panel, comprising: moving an upper substrate holding table assembled in an upper vacuum vessel in a vertical direction (Z direction) to perform vertical alignment (Z direction). 23. An upper rotary vacuum container according to claim 5, wherein an actuator installed outside the vacuum container is used when positioning the two substrates in order to reduce the distance between the two substrates in a vacuum and to bond the two substrates together. Characterized in that the upper substrate holding table incorporated therein is moved in the vertical direction (Z direction) to perform vertical alignment (Z direction). 24. Claim 1 or Claim 7 or Claim 1
At 0, when the two substrates are aligned in order to reduce the distance between the two substrates in a vacuum and are bonded to each other, an actuator incorporated outside the vacuum container is used to lower the lower substrate incorporated in the lower vacuum container. X,
A method of assembling a liquid crystal panel, characterized in that horizontal alignment is performed by moving in the Y and O directions. 25. Claim 5 or Claim 8 or Claim 1
In step 5, when positioning the two substrates in order to reduce the distance between the two substrates in a vacuum and bond the two substrates together, the lower substrate incorporated in the lower vacuum container using an actuator incorporated outside the vacuum container X, Y,
A liquid crystal panel assembling apparatus characterized by performing horizontal alignment by moving in an O direction. 26. The method according to claim 24, wherein when the two substrates are aligned in a vacuum to reduce the distance between the two substrates, the entire lower substrate holding table is contactless by an air bearing method. In the horizontal direction (X,
A method of assembling a liquid crystal panel, comprising applying a pressure of 0.4 kg or more per cm ² to the substrate holding table in a Z-direction in a vacuum state after alignment of (Y, O). 27. The method according to claim 25, wherein when the two substrates are aligned in a vacuum so as to reduce the distance between the two substrates, the entire lower substrate holding table is contactless by an air bearing method. In the horizontal direction (X,
A liquid crystal panel assembling apparatus characterized in that after alignment of (Y, O) is performed, a pressure of 0.4 kg or more per unit cm ² is applied to the substrate holding table in the Z direction in a vacuum state. 28. An assembling apparatus according to claim 25 or 27, wherein the lower substrate holding table is kept under vacuum using an elastic tube or a magnetic fluid seal between the lower substrate holding table and the lower vacuum container. A liquid crystal panel assembling apparatus characterized by being movable in X, Y, O and Z directions. 29. A liquid crystal display device assembled by using the assembling method according to claim 18 or claim 20 or claim 22 or claim 24 or claim 26. 30. Claim 5 or Claim 8 or Claim 1
In 5, an exhaust port is provided in the lower vacuum vessel, and after the lower vacuum vessel has moved directly below the upper substrate holding stage, the exhaust port of the lower vacuum vessel and the exhaust pipe of the vacuum pump are joined by a magnet. Next, an upper substrate holding stage and a lower vacuum container are joined by a rosette or an elastic tube to form a vacuum container, and then the atmosphere inside the container is exhausted by a vacuum pump. 31. A method for assembling a liquid crystal panel by bonding two substrates in a vacuum so that the light-shielding film region of the color filter substrate is not covered by an ultraviolet-curable adhesive, and the adhesive application region is a vacuum. (1) At least one continuous ring-shaped bump is provided on the outer periphery of the BM of the color filter so that the two substrates are not crushed when they are bonded to each other and do not reach the light-shielding film region of the color filter-side substrate. Color filter 32. A liquid crystal display device assembled using the color filter according to claim 31. 33. A method of assembling a liquid crystal panel by bonding two substrates in a vacuum, wherein an ultraviolet-curable adhesive application region is crushed when the two substrates are bonded in a vacuum, and a color filter side is formed. A continuous ring-shaped bump is formed simultaneously between the adhesive coating area and the light-shielding film of the color filter so as not to reach the light-shielding film area of the substrate when the photolitho spacer is formed to prevent the adhesive from seeping out. Method for producing a color filter 34. A method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, wherein when a UV-curable adhesive seal is cured, if the liquid crystal is present near the seal, the liquid crystal may be decomposed by the UV light. Two or more rows of dashed bumps are formed between the seal application area and the effective pixel area so as to enclose the effective pixel area so that the liquid crystal does not reach the seal immediately when irradiating ultraviolet rays. Color filter 35. A liquid crystal display device assembled using the color filter according to claim 34. 36. In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, a seal application area and an effective pixel area so that the liquid crystal does not immediately reach the seal when the ultraviolet-curable seal adhesive is cured. Wherein two or more rows of dashed bumps are formed at the same time as the photolitho spacer is formed so as to enclose the effective pixel area between them. 37. A method of assembling a liquid crystal cell using the color filter according to claim 34, wherein only the seal adhesive is irradiated with ultraviolet light in a state where no liquid crystal is present near the seal adhesive to cure the adhesive. 38. In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, a liquid crystal cell gap is measured while changing the wavelength of light in a region where liquid crystal is sandwiched between an upper substrate and a lower substrate. . Horizontal alignment adjustment of the two substrates is performed in a region where the cell gap between the two substrates is larger than the spacer beads or the photolitho spacer. If the alignment is good, the cell gap between the two substrates is crushed to the target cell gap. Checking the alignment again and, if there is no problem, assembling the liquid crystal panel by irradiating the ultraviolet curing adhesive applied to the periphery of the substrate with ultraviolet light and temporarily stopping it 39. A method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, and applying a plurality of ultraviolet rays to the peripheral portions of the upper substrate and the lower substrate after the alignment adjustment in a vacuum state. After temporarily irradiating the adhesive with ultraviolet light, the application of voltage to the electrostatic attraction plate used to hold the upper and lower substrates in a vacuum is stopped.
Thereafter, nitrogen gas or dry air is simultaneously flowed through the holes formed in the electrostatic attraction plate holding the upper substrate and the lower substrate slightly upwards and downwards, and a vacuum is gradually applied to the upper substrate and the lower substrate. A method for pressurizing a liquid crystal panel, characterized by applying an atmospheric pressure little by little. 40. A liquid crystal panel assembling apparatus characterized by using the assembling method according to claim 38 or 39. 41. A liquid crystal display device assembled by using the assembling method according to claim 38. 42. An apparatus for assembling a liquid crystal panel by bonding two substrates in a vacuum to measure a liquid crystal cell gap while changing the wavelength of light in a region where liquid crystal is sandwiched between an upper substrate and a lower substrate. Liquid crystal panel assembling apparatus for performing alignment adjustment of two substrates while performing the adjustment 43. A liquid crystal panel assembling apparatus according to claim 42, wherein a giant magnetostrictive material is used for an actuator for adjusting the cell gap between the two substrates while measuring the liquid crystal cell gap. 44. After assembling the liquid crystal panel by using the assembling method according to claim 38, irradiating ultraviolet rays only to a region of the ultraviolet curing adhesive while pressurizing the liquid crystal panel using atmospheric pressure to cure the adhesive. Liquid crystal panel adhesive curing device characterized by the following: 45. An assembling apparatus according to claim 44, wherein the surface of the table for holding the bonded substrate has a triangular prism, triangular pyramid or quadrangular pyramid surface shape in order to reduce the contact area between the substrate and the table. Liquid crystal panel adhesive curing device 46. In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the shape of the table for fixing and holding the two substrates is such that the center of the effective pixel area of the substrate is both up and down. An assembling of a liquid crystal panel characterized in that the substrate is fixed and held symmetrically, a liquid crystal is dripped into a region depressed in the concave shape, and then the two substrates are bonded together in a vacuum. Method 47. In a device for assembling a liquid crystal panel by bonding two substrates in a vacuum, the shape of a table for fixing and holding the two substrates is such that the center of the effective pixel area of the substrates is concavely concave. A device for assembling a liquid crystal panel, wherein the shape of the recess is symmetrical with respect to the upper and lower substrates. 48. The liquid crystal panel assembling apparatus according to claim 47, wherein the depth of the concave recess is 20 microns or more. 49. A method for assembling a liquid crystal panel by bonding two substrates in a vacuum, wherein the shape of a table for fixing and holding the two substrates is recessed in a donut shape in an effective pixel area of the substrates. And the central area of the effective pixel area is more concave than the area where the seal adhesive is applied outside the effective pixel area, and after fixing and holding the substrate, liquid crystal is dropped on the central area of the effective pixel area. From 2
A method of assembling a liquid crystal panel, characterized in that the bonding of two substrates proceeds in a vacuum. 50. In an apparatus for assembling a liquid crystal panel by bonding two substrates in a vacuum, the shape of a table for fixing and holding the two substrates is a concave shape in a donut shape in an effective pixel area of the substrates. The liquid crystal panel is characterized in that the central area of the effective pixel area is more concave than the area outside the effective pixel area where the seal adhesive is applied, and the shape of the depression is symmetrical with respect to the upper and lower substrates. Assembly equipment 51. The concave depression according to claim 50, wherein the depth of the concave depression is 20 μm or more, and the depth of the central depression of the effective pixel area is 10 μm or more. The liquid crystal panel assembling device characterized in that the side is larger than the center of the pixel. 52. The method according to claim 47 or 51,
Using a honeycomb plate on the surface of the table so that it is easy to change the shape of the table that holds and holds the substrate according to the number of chamfers on the substrate, the thickness of the honeycomb plate facing the substrate is recessed and concaved Liquid crystal panel assembling apparatus characterized by the above-mentioned. 53. In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, the substrates are heated and degassed, vacuum degassed, and then returned to room temperature in a vacuum. Thereafter, the liquid crystal is dropped in a vacuum to degas the gas contained in the liquid crystal, and then returned to the atmosphere. The other substrate is also heated and degassed, vacuum degassed, and then returned to the atmosphere. After drawing the main seal in the air or vacuum, vacuum degassing processing is performed again, and then the air is returned to the atmosphere. A manufacturing method for assembling a liquid crystal panel by the assembling method according to claim 1, using the two substrates subjected to the above processing. 54. Claim 46 or Claim 49 and Claim 5
3. A liquid crystal display device assembled using the manufacturing method of item 3. 55. A method for assembling a liquid crystal panel by bonding two substrates together in a vacuum, wherein the liquid crystal is discharged as non-contact high-speed liquid droplets onto the substrate by using a jet dispenser type dispenser. A liquid crystal necessary for the liquid crystal is divided evenly 50 or more times and applied to an effective pixel area of one cell. 56. An assembling method for a liquid crystal panel, comprising: applying a liquid crystal to a recessed area of a substrate by using the method of claim 46 and 55; Method 57. A liquid crystal panel according to claim 49, wherein a liquid crystal is applied to the center of the effective pixel area of the substrate by using the method of claim 49, and then the two substrates are bonded together. Assembly method 58. A liquid crystal display device assembled by using the method according to claim 56 or 57. 59. A liquid dispenser according to claim 55, wherein the liquid crystal is continuously supplied after the gas dissolved in the liquid crystal is degassed by using a hollow fiber degassing module in the dispenser of the jet dispensing method. Liquid crystal supply device 60. A liquid dispenser according to claim 55, wherein the liquid crystal is continuously supplied after the gas dissolved in the liquid crystal is degassed by using a vacuum spray deaerator for the jet dispenser type dispenser. Liquid crystal supply device 61. A liquid crystal dispenser device comprising a jet displacement type dispenser according to claim 55 and a laser displacement meter incorporated therein for measuring the liquid level of the liquid crystal. 62. When applying liquid crystal to a plurality of pixel areas imposed on a substrate by using the jet dispensing type dispenser according to claim 61, the amount of liquid crystal applied to each screen is determined by laser. A liquid crystal coating method characterized by controlling the number of liquid crystal drops of a dispenser by measuring using a liquid level displacement meter. 63. The liquid crystal device according to claim 62, wherein the liquid level of the liquid crystal is measured with a laser before the liquid crystal is dropped, and then the liquid crystal is dropped continuously in an amount of about 5% to about 3% less than a target drop amount. Then, the liquid level of the liquid crystal is measured again by laser, the liquid level drop amount of the liquid crystal is measured, the amount of the dropped liquid crystal is accurately calculated, and an amount smaller than the target amount is dropped again. After the dropping of the additional liquid crystal is completed, the liquid crystal of the liquid crystal is measured again by the laser, and it is confirmed whether or not the target drop amount is exceeded. If the target value is exceeded, use a micropipette to remove more liquid crystal. If there is no problem, the liquid crystal degassed to the liquid level of the liquid crystal set first is supplied into the syringe, and then the operation for dropping the liquid crystal on the next screen is started. A liquid crystal dropping method characterized by repeating the above process 64. A liquid crystal display device assembled using the liquid crystal dropping method according to claim 63. 65. An apparatus for assembling a liquid crystal panel by bonding two substrates together in a vacuum, wherein upper and lower tables for fixing and holding the substrates are provided with electrostatic attraction plates. A liquid crystal panel assembling device, wherein the plate is a flexible type electrostatic chuck plate in which printed electrodes are formed on a plastic organic film such as polyimide or polyamide. 66. An apparatus for assembling a liquid crystal panel according to claim 65, wherein an elastic layer such as silicon rubber or urethane rubber is provided between the flexible type electrostatic attraction plate and the stage. 67. A honeycomb plate according to claim 47 or 51, wherein a honeycomb plate is used on the surface of the table so that the shape of the table for fixing and holding the substrate is easily changed according to the number of chamfers of the substrate. A device for assembling a liquid crystal panel, characterized in that an elastic layer is provided between electroadhesive plates, and the thickness of the elastic body is changed so that the surface shape of the electrostatic attractive plate is concavely concave. 68. An apparatus for assembling a liquid crystal panel, wherein a flexible-type polyimide electrostatic attraction plate is attached on the honeycomb plate according to claim 52 through an elastic layer. 69. An assembling apparatus wherein the electrostatic attraction plate according to claim 68 or 67 is attached to a table of the assembling apparatus according to claim 5, 8, or 15. 70. In a method of assembling a liquid crystal panel by bonding two substrates in a vacuum, a transparent conductive film is formed on the entire surface of one of the substrates on the side to be attracted to the electrostatic attraction plate. A method of assembling a liquid crystal panel, wherein two substrates are vacuum-bonded by being fixedly held on a table-side electrostatic suction plate for reversing the substrates. 71. The method according to claim 70, wherein the potential of the transparent conductive film formed entirely on the back surface of the substrate is grounded before applying a voltage for electrostatic attraction, and is reliably grounded. Characterized by applying a voltage for electrostatic attraction after confirming the condition 72. In a method of assembling a liquid crystal panel by bonding two substrates together in a vacuum, when a monopolar electrostatic attraction method is used to attract the upper and lower substrates, the entire surface of the upper and lower substrates is made of a transparent conductive film. Forming a liquid crystal panel, grounding them to ground, and then applying a voltage for electrostatic attraction. 73. A method for assembling a liquid crystal panel by bonding two substrates together in a vacuum, wherein a bipolar electrostatic attraction method is used to attract the upper and lower substrates. The electrodes of the electrostatic attraction plate are divided so as to have a half area. A method for adsorbing a liquid crystal panel, characterized in that the electrode patterns of the electrostatic chucking plates on the upper and lower tables are vertically symmetrical, and the polarity and voltage values are applied equally so that the applied voltage is also vertically symmetrical. 74. In the case where a plurality of impositions are provided on the substrate according to claim 73, one screen is included in a region of one polarity electrode in order to avoid dividing one screen by two electrodes having different polarities. Electrostatic attraction plate characterized by the arrangement of electrodes 75. A method for assembling a liquid crystal panel by bonding two substrates in a vacuum, wherein upper and lower stages for fixing and holding the substrates are provided with electrostatic attraction plates on which alignment marks are formed. When the glass substrate is placed on the electrostatic attraction plate inside, the position of the glass substrate and the electrostatic attraction plate are adjusted to within ± 100μm in both X and Y directions using a CCD camera etc. Liquid crystal panel mounting method characterized by being mounted on a panel 76. A liquid crystal display device assembling by using the apparatus according to claim 69 by the assembling method according to claim 70 or 71 or 72 or 73 or 75.