WO2005121718A1 - 流量計 - Google Patents
流量計 Download PDFInfo
- Publication number
- WO2005121718A1 WO2005121718A1 PCT/JP2005/010708 JP2005010708W WO2005121718A1 WO 2005121718 A1 WO2005121718 A1 WO 2005121718A1 JP 2005010708 W JP2005010708 W JP 2005010708W WO 2005121718 A1 WO2005121718 A1 WO 2005121718A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- flow path
- flow
- sensor
- fluid
- main body
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Definitions
- the present invention relates to a flow meter used for, for example, confirming suction of a minute component in a chip mounter.
- Patent Document 1 JP 2004-3887 A
- the above-mentioned conventional flowmeter has an effect that a small and stable measurement result can be obtained by having the above-described flow path shape.
- a flow meter is attached, there is a strong demand for further miniaturization and weight reduction from the viewpoint of installation space and weight, so that the flow meter is more compact and lightweight. There was a demand for realization.
- the present invention has been made to solve the above-described problems, and has as its object to obtain a flowmeter capable of obtaining a stable measurement result and realizing a small-sized and light-weight flowmeter. Disclosure of the invention
- the flow meter according to the present invention is provided with a bent portion in a flow path between a fluid flow path inlet of the flow meter main body and a sensor flow path in which a sensor for detecting a flow rate of the fluid is located, and the bent portion is provided.
- the fluid collides with the wall to form a constant and reproducible flow velocity distribution.
- a flowmeter detects a flow rate of a fluid and a manifold for taking in the fluid.
- a bent portion is provided in the flow path between the sensor flow path where the output sensor is located, and a fluid flow collides with a wall constituting the bent portion so as to form a reproducible constant flow velocity distribution. This is it.
- a flowmeter according to the present invention forms a flow path so that a sensor flow path in which a sensor for detecting a flow rate of a fluid is located and an upstream flow path located upstream of the sensor flow path are bent.
- the open end of the upstream flow path is brought into contact with the inlet port of the manifold for supplying fluid, and the upstream flow path is bent between the contact surface of the inlet port and the sensor flow path. It has a part.
- the flowmeter according to the present invention is formed to include a contact surface with the bent portion force inlet port.
- the flowmeter according to the present invention is configured such that the first flow path formed substantially at right angles to the flow direction of the bending portion force inlet port is connected to the first flow path at substantially right angles.
- the road is included.
- the cross-sectional area of a portion of the sensor flow path where the sensor is located is reduced.
- a flowmeter includes a main body, and a circuit board holding a sensor provided on an upper surface of the main body, wherein the main body has a main body upper surface force that is directed downward in a vertical direction. It has first and second holes provided, and third and fourth holes provided so as to face upward in the vertical direction of the main body, and the first and fourth holes are substantially parallel to each other.
- the minimum distance between the ends of the first and second holes and the maximum distance between the ends of the third and fourth holes are set to be substantially the same, and the inside of the first hole and the third A bent portion is provided by communicating the outside of the hole and the inside of the second hole with the outside of the fourth hole.
- the flowmeter according to the present invention has a curved surface portion provided on a flow path wall at an intersection of the first and second holes and the linear sensor flow path.
- the flow meter according to the present invention is provided with a bent portion in the flow path between the manifold and the sensor flow path, and the fluid collides with the wall portion of the bent portion to provide a reproducible constant flow rate. Since the distribution is formed, a stable flow rate measurement result can be obtained. This is the The flow with the flow velocity distribution formed inside the flow path changes when it hits the wall of the bend, and the flow velocity distribution in the flow path is reorganized. This is the force that changes the flow velocity distribution formed in this flow path and forms the flow velocity distribution due to the bent part.
- the open end of the upstream flow path located upstream of the sensor flow path is brought into contact with the inlet port of the manifold, and the upstream flow path is in contact with the inlet port. Since a bent portion is provided between the contact surface and the sensor flow path, a compact and lightweight device can be realized, and a stable flow rate measurement result can be obtained.
- the flowmeter of the present invention is configured such that the bent portion is formed to include the contact surface with the inlet port, so that the flow path can be shortened and the flowmeter can be connected to an external flow path. Further, since a connecting portion for performing the connection is not required, a further small-sized and light-weight can be realized.
- the flowmeter of the present invention is configured such that the bent portion includes the first to fourth flow passages whose respective flow directions are bent at substantially right angles from the inlet port.
- a reproducible constant flow velocity distribution can be formed, and as a result, more stable flow measurement results can be obtained.
- the cross-sectional area of the portion where the sensor is located in the sensor flow path is reduced, so that the fluid guided to the sensor flow path is further reduced in the flow path portion having the reduced cross-sectional area.
- the flow is rectified, and the flow rate measurement by the sensor can be performed in a more stable state.
- a flowmeter includes a main body, and a circuit board holding a sensor provided on an upper surface of the main body, and the main body has a main body upper surface force in a vertically downward direction. It has first and second holes provided, and third and fourth holes provided so as to face upward in the vertical direction of the main body, and the first and fourth holes are substantially parallel to each other.
- the minimum distance between the ends of the first and second holes and the maximum distance between the ends of the third and fourth holes are set to be substantially the same, and the inside of the first hole and the third Since the outside of the hole, the inside of the second hole, and the outside of the fourth hole were communicated with each other, the first hole and the third hole were formed by injection molding the main body using two molds. The hole and the second hole and the fourth hole can be communicated with each other, and a flowmeter having a bent portion can be easily formed.
- the flowmeter according to the present invention is characterized in that the first and second holes intersect with the linear sensor flow path. Since the curved surface portion is provided on the flow path wall of the portion, the fluid flows smoothly to the first pore force sensor flow path, so that the linear portion of the sensor flow path can be shortened.
- FIG. 1 is a cross-sectional view of a flow meter according to Embodiment 1 of the present invention.
- FIG. 2 is a top view of the main body of the flow meter according to Embodiment 1 of the present invention.
- FIG. 3 is a bottom view of the main body of the flow meter according to Embodiment 1 of the present invention.
- FIG. 4 is an external view of a flow meter according to Embodiment 1 of the present invention.
- FIG. 5 is a cross-sectional view of another example of the flow meter according to Embodiment 1 of the present invention.
- FIG. 6 is a top view of a main body of another example of the flow meter according to the first embodiment of the present invention.
- FIG. 7 is a cross-sectional view of a mold used for producing a flow meter according to Embodiment 1 of the present invention.
- FIG. 1 is a sectional view of a flow meter according to Embodiment 1 of the present invention.
- FIG. 2 is a top view of the main body in a state where the cover 2, the circuit board 3, and the packing 6 of the flow meter according to Embodiment 1 of the present invention are removed.
- FIG. 3 is a view of the main body in a state where packing 7 of the flow meter according to Embodiment 1 of the present invention is removed, as viewed from below.
- FIG. 4 is an external view of a flow meter according to Embodiment 1 of the present invention, where (a) is a top view, (b) is a side view, and (c) is a bottom view.
- the flow meter includes a main body 1, a cover 2, a circuit board 3, a sensor 4, a lead wire 5, and knocking 6, 7.
- the main body 1 and the cover 2 are each made of a resin such as PBT resin (polybutylene terephthalate), and the main body 1 and the cover 2 are integrally fixed by ultrasonic welding or the like.
- the circuit board 3 is a board provided with a circuit for detecting a flow rate by the sensor 4, and the sensor 4 is mounted on a lower surface of the circuit board 3, and is mounted so as to form a part of a sensor flow channel wall described later. Have been.
- the circuit board 3 is configured so as to be integrally fixed to the main body 1 with screws (not shown) in screw holes 8 (see FIG.
- the sensor 4 is, for example, a flow sensor in which a resistance temperature element is arranged so as to sandwich the heater element, and is provided so as to slightly protrude into the sensor flow path.
- the lead wire 5 is a signal line for extracting flow rate data detected by the sensor 4.
- the packing 6 is a packing for preventing fluid leakage between the circuit board 3 and the main body 1
- the knocking 7 is a packing for preventing fluid leakage between the main body 1 and the manifold 9. is there.
- the main body 1 is provided with a flow path for detecting a flow rate by the sensor 4.
- the flow path includes a sensor flow path 101 where the sensor 4 is located, and a flow path of the sensor flow path 101. It comprises an upstream channel 102 and a downstream channel 103 located on the upstream and downstream sides.
- the sensor flow path 101 is a linear flow path having a rectangular cross section defined by the main body 1 and the circuit board 3, and the sensor 4 is positioned at the center in the flow direction and the direction perpendicular to the flow. It has become.
- the upstream flow path 102 and the downstream flow path 103 are formed so that their flow paths are bent substantially at right angles to the sensor flow path 101.
- the 103 further has bent portions 102a and 103a between itself and the manifold 9.
- the upstream flow path 102 and the downstream flow path 103 are provided symmetrically about the position of the sensor 4.
- the bent portions 102a and 103a are located on the contact surface between the inlet port 9a and the outlet port 9b of the manifold 9, and are substantially perpendicular to the flow direction of the fluid at the inlet port 9a and the outlet port 9b.
- the formed first flow paths 102a-1, 103a-1 and the second flow paths 102a-2 which are provided substantially at right angles to the flow direction of the first flow paths 102a-1, 103a-1.
- 103a-2, third flow paths 102a-3, 103a-3, and third flow path 102a-3 which are provided so as to be substantially perpendicular to the flow direction of the second flow paths 102a-2, 103a-2.
- first flow paths 102a-1 and 103a-1 to the third flow paths 102a-3 and 103a-3 form a bent portion having a U-shaped cross section.
- the flow directions of the fourth flow paths 102a-4 and 103a-4 and the flow directions of the inlet port 9a and the outlet port 9b are formed so as to be parallel and different in the position of the central axis.
- this positional relationship is not particularly limited and may be any positional relationship.
- the shape of the open ends of the bent portions 102a and 103a is As shown in FIGS. 3 and 4 (c), the inlet port 9a and the outlet port 9b side of the manifold 9 are formed to be substantially triangular. In FIG. 3, broken lines indicate the positions of the inlet port 9a and the outlet port 9b.
- the main body 1 and the cover 2 are formed with two screw holes 10 and configured to be attached to the ma- fold 9 by screws 11 (see Figs. 2 to 4).
- these screw holes 10 are also displaced by a linear force connecting the inlet port 9a and the outlet port 9b. By forming them, these distances can be reduced, and therefore, also in this respect, the flow meter can contribute to miniaturization.
- the height dimension a of the sensor channel 101 perpendicular to the flow direction is set smaller than the gap b between the upstream channel 102 and the downstream channel 103. This is achieved by setting the height dimension perpendicular to the flow of the fluid in the flow path portion where the sensor 4 is located to the height dimension rectified by the viscosity of the fluid as described in Patent Document 1 as V. This is also a force that can rectify the flow of the fluid near the sensor 4 and make it laminar. With such a shape, a stable measurement result by the sensor 4 can be obtained.
- a vacuum pump (not shown) is connected to the suction port (not shown) on the inlet port 9a side of the manifold 9 and a suction pump (not shown) on the outlet port 9b side. Connected to.
- the vacuum pump When the vacuum pump is operated in such a state, air as a fluid is sucked into the upstream flow path 102 from the inlet port 9a as shown by the arrow in FIG. The air is sucked into the vacuum pump through the passage 103.
- the flow rate of the air flowing through the sensor flow path 101 is detected by the sensor 4, and the detected value is sent to a controller (not shown) via the lead wire 5, where the flow velocity value, that is, the flow rate is calculated.
- the flow rate becomes maximum when nothing is sucked by the suction nozzle, and the flow rate becomes almost 0 when the chip is sucked by the suction nozzle. Can be determined.
- the flow path from the inlet port 9a is bent four times at a substantially right angle. That is, the air flowing from the inlet port 9a hits the wall of the bent portion 102a four times and changes its flow direction. In this way, the air flow direction It has been experimentally confirmed that a reproducible constant flow velocity distribution can be formed by changing (hitting the wall portion a plurality of times). This is thought to be due to the following reasons.
- the flow force having the flow velocity distribution formed inside the flow path of the mar- ridge 9 changes by hitting the walls of the bent portions 102a and 103a, and the flow velocity distribution in the flow path is reorganized. This flow is repeated in the first flow paths 102a-1 and 103a-1 to the fourth flow paths 102a-4 and 103a-4, so that the flow velocity distribution formed in the manifold 9 changes, and A flow velocity distribution is formed by the portions 102a and 103a.
- the open end of the upstream flow path 102 located on the upstream side of the sensor flow path 101 is brought into contact with the inlet port 9a of the manifold 9, and Since the side flow path 102 has the bent portion 102a which has a large force from the first flow path 102a-1 to the fourth flow path 102a-4 including the contact surface of the inlet port 9a, the size can be reduced. At the same time, stable flow rate measurement results can be obtained.
- connection between the manifold 9 and the flow meter itself is configured as a rectification unit, it is possible to achieve both opposing functions such as downsizing and rectification.
- the flow meter can be directly attached to the manifold 9, a connection part for connecting the flow meter to an external flow path is not required. Can be reduced in size, so that also in this respect, it is possible to realize a small-sized and light-weight.
- the flow path can be formed only by a specific process when resin is injection-molded, and special processing is not required. Necessary force, connection joints, etc. are not required, so it is possible to realize a flow meter that is easy to manufacture and inexpensive. it can.
- this is realized by the bent portions 102a and 103a which are not provided with a means such as a filter in the flow path in order to obtain a fluid rectification effect. Therefore, even if foreign matter is mixed in the fluid, the foreign matter is stored in (the corners of) the bent portions 102a and 103a, and does not block the flow path itself. Therefore, it is possible to avoid a phenomenon in which foreign substances accumulate in the filter and block the flow path, as in the case of using a means such as a filter, and the characteristics of the flowmeter are changed. Even with the use of Stable characteristics can be maintained.
- the shape of the sensor flow path 101 is a straight flow path in the flow direction.
- the sensor flow path 101 is formed such that the cross-sectional area of the flow path in the portion where the sensor 4 is located is reduced.
- Road 101 may be formed.
- FIGS. 5 and 6 are a cross-sectional view and a top view of the main body, respectively, in a case where the flow path in the portion where the sensor 4 is located is narrowed.
- an arcuate surface 12 protruding into the flow path is formed in a portion of the bottom wall of the sensor flow path 101 where the sensor 4 is located. Further, as shown in FIG. 6, an arc-shaped surface 13 projecting into the flow path is formed on each side wall of the sensor flow path 101 at a portion where the sensor 4 is located.
- FIG. 7 shows a cross-sectional view of the first mold 110 and the second mold 111.
- the surfaces of the first mold 110 and the second mold 111 having the depressions are arranged to face each other.
- a first cavity 112 and a second cavity 113 are formed by the first and second molds 110 and 111.
- the first and second cavities 112, 113 are separated in the cross section shown in FIG. 7, and at the force end, the first and second cavities 112, 113 are in communication.
- the first mold 110 is moved in the H direction, and the second mold 111 is moved in the G direction. Then, the main body 1 as shown in FIG. 4B made of resin having the same shape as the cavities 112 and 113 can be produced.
- the first to fourth protrusions 115 to 118 are provided in parallel with each other, and the inner surfaces of the first protrusion 115 and the second protrusion 116 inside the first mold 110 are opposed to each other. And the distance between the outer surface of the third protrusion 117 and the outer surface of the fourth protrusion 118 inside the second mold 111 are made substantially the same.
- the first protrusion 115 and the third protrusion 117, and the second protrusion 116 and the fourth protrusion 118 come into contact with the contact surfaces 120 and 121, and in the prepared resin main body 1,
- the first hole formed by the first protrusion 115 communicates with the third hole formed by the third protrusion 117, and the second hole formed by the second protrusion 116
- the fourth hole formed by the fourth protrusion 118 communicates.
- the flow path having the bent portion can be easily formed simply by inserting the circuit board 3 into the upper surface of the main body 1.
- the maximum width c of the substantially T-shaped portion 131 at the center of the main body 1 shown in FIG. 1 is set to be equal to the opposing width d of the side projection 132 forming the side surface of the main body 1, that is, If the first to fourth holes are provided substantially parallel to each other and the minimum distance between the tips of the first and second holes and the maximum distance between the tips of the third and fourth holes are set to be substantially the same, as described above. In addition, it is possible to easily form a bent portion in the main body 1 and to omit other steps for connecting the first to fourth holes.
- the curved surface portion 130 is provided at the corner of the tube wall, that is, when the curved surface portion 130 is provided at the intersection of the first and second holes and the linear sensor flow path 101 formed on the upper surface of the main body 1, the curved surface portion 130 is formed.
- the turbulent flow can be made into a flow suitable for measuring the flow rate with a shorter straight line part, and the flow meter It can be made compact.
- the force described in the example in which the fluid flow direction of the manifold 9 is perpendicular to the flow direction of the sensor flow path 101 is not limited to this. -The same effect can be obtained even if the holder 9 is installed in a different direction, such as the holder 9 is provided obliquely to the flow meter.
- the suction confirmation is performed in the chip mounter as the flow meter.
- a higher effect can be obtained, but it is not limited to such a usage mode.
- the present invention can be applied to various kinds of gases as long as they are air-only fluids.
- the outlet port 9b of the manifold 9 The flow rate can be measured in the same manner for the flow of the fluid in which the fluid flows in and flows out to the inlet port 9a.
- the manifold 9 is located on the lower side for the sake of consistency with the drawings.
- a flow meter that is not limited to such a positional relationship is installed.
- the positional relationship between the top, bottom, left, and right when doing this may be any.
- the bent portions 102a and 103a are formed to include the contact surfaces with the inlet port 9a and the outlet port 9b, but the upstream channel 102 and the downstream channel 103 If it is formed in the portion of, it can be formed at any position.
- the flow meter according to the present invention is suitable for use in a small-sized flow meter or the like used for a purpose such as confirming suction of a micro component in a chip mounter.
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05749020A EP1754959B1 (en) | 2004-06-10 | 2005-06-10 | Flowmeter |
US11/570,249 US7698938B2 (en) | 2004-06-10 | 2005-06-10 | Flowmeter having a bent inlet passage for constant flow-velocity distribution |
DE602005012090T DE602005012090D1 (de) | 2004-06-10 | 2005-06-10 | Strömungsmesser |
JP2006514589A JP4476287B2 (ja) | 2004-06-10 | 2005-06-10 | 流量計 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004172781 | 2004-06-10 | ||
JP2004-172781 | 2004-06-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005121718A1 true WO2005121718A1 (ja) | 2005-12-22 |
Family
ID=35503181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/010708 WO2005121718A1 (ja) | 2004-06-10 | 2005-06-10 | 流量計 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7698938B2 (ja) |
EP (1) | EP1754959B1 (ja) |
JP (1) | JP4476287B2 (ja) |
DE (1) | DE602005012090D1 (ja) |
WO (1) | WO2005121718A1 (ja) |
Cited By (5)
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JP2008128890A (ja) * | 2006-11-22 | 2008-06-05 | Yamatake Corp | 気体流量計 |
WO2008105197A1 (ja) | 2007-02-28 | 2008-09-04 | Yamatake Corporation | フローセンサ |
WO2008105144A1 (ja) | 2007-02-28 | 2008-09-04 | Yamatake Corporation | センサ、センサの温度制御方法及び異常回復方法 |
WO2008129941A1 (ja) * | 2007-04-16 | 2008-10-30 | Yamatake Corporation | 流量計 |
US7891239B2 (en) | 2008-09-12 | 2011-02-22 | Yamatake Corporation | Flow meter and flow volume controlling device |
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CA2782000C (en) | 2009-12-01 | 2018-04-24 | Nestec S.A. | Flowmeter assembly for a beverage machine |
US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
US8397586B2 (en) * | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
US8113046B2 (en) | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
DE202013005147U1 (de) | 2013-06-07 | 2013-07-01 | Honeywell Technologies Sarl | Strömungsmesser |
US9612146B2 (en) | 2014-02-07 | 2017-04-04 | Honeywell International, Inc. | Airflow sensor with dust reduction |
EP3289319B1 (en) * | 2015-04-30 | 2021-12-29 | Services Pétroliers Schlumberger | Multiphase flow meters and related methods |
US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
JP7005856B2 (ja) * | 2017-11-20 | 2022-01-24 | ミネベアミツミ株式会社 | 気流測定装置、及びこれを用いた環境測定装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2589318Y2 (ja) * | 1993-04-24 | 1999-01-27 | 株式会社エステック | マスフローメータおよびマスフローコントローラ |
JP3091893B2 (ja) * | 1992-05-20 | 2000-09-25 | 株式会社山武 | 流量計 |
JP2001004420A (ja) * | 1999-06-21 | 2001-01-12 | Ngk Spark Plug Co Ltd | 流量及び流速測定装置 |
JP3188597B2 (ja) * | 1994-09-22 | 2001-07-16 | 株式会社山武 | 流量計 |
JP2004003887A (ja) | 2002-05-31 | 2004-01-08 | Yamatake Corp | 流量計 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991019959A1 (en) * | 1990-06-14 | 1991-12-26 | Unit Instruments, Inc. | Thermal mass flow sensor |
US5279155A (en) * | 1993-02-04 | 1994-01-18 | Honeywell, Inc. | Mass airflow sensor |
US6286373B1 (en) * | 1999-02-12 | 2001-09-11 | Micro Motion, Inc. | Coriolis flowmeter having an explosion proof housing |
KR20010039993A (ko) * | 1999-10-06 | 2001-05-15 | 오카무라 가네오 | 유량 및 유속 측정장치 |
US6776052B2 (en) * | 1999-10-29 | 2004-08-17 | Micro Motion, Inc. | Coriolis flowmeter having a reduced flag dimension for handling large mass flows |
JP3716163B2 (ja) * | 2000-06-16 | 2005-11-16 | 株式会社日立製作所 | 空気流量測定装置 |
JP2002122452A (ja) * | 2000-08-11 | 2002-04-26 | Ngk Spark Plug Co Ltd | 分流式流量計 |
US6591674B2 (en) * | 2000-12-21 | 2003-07-15 | Honeywell International Inc. | System for sensing the motion or pressure of a fluid, the system having dimensions less than 1.5 inches, a metal lead frame with a coefficient of thermal expansion that is less than that of the body, or two rtds and a heat source |
JP3782669B2 (ja) * | 2001-02-28 | 2006-06-07 | 株式会社日立製作所 | 熱式流量測定装置 |
JP2002333347A (ja) * | 2001-05-08 | 2002-11-22 | Ngk Spark Plug Co Ltd | 分流式流量計 |
US6802224B2 (en) * | 2001-09-21 | 2004-10-12 | Oval Corporation | Arch-shaped tube type coriolis meter and method for determining shape of the coriolis meter |
JP4168417B2 (ja) * | 2002-11-18 | 2008-10-22 | 株式会社山武 | 流体検出装置 |
-
2005
- 2005-06-10 DE DE602005012090T patent/DE602005012090D1/de active Active
- 2005-06-10 WO PCT/JP2005/010708 patent/WO2005121718A1/ja active Application Filing
- 2005-06-10 JP JP2006514589A patent/JP4476287B2/ja active Active
- 2005-06-10 US US11/570,249 patent/US7698938B2/en active Active
- 2005-06-10 EP EP05749020A patent/EP1754959B1/en not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3091893B2 (ja) * | 1992-05-20 | 2000-09-25 | 株式会社山武 | 流量計 |
JP2589318Y2 (ja) * | 1993-04-24 | 1999-01-27 | 株式会社エステック | マスフローメータおよびマスフローコントローラ |
JP3188597B2 (ja) * | 1994-09-22 | 2001-07-16 | 株式会社山武 | 流量計 |
JP2001004420A (ja) * | 1999-06-21 | 2001-01-12 | Ngk Spark Plug Co Ltd | 流量及び流速測定装置 |
JP2004003887A (ja) | 2002-05-31 | 2004-01-08 | Yamatake Corp | 流量計 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1754959A4 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008128890A (ja) * | 2006-11-22 | 2008-06-05 | Yamatake Corp | 気体流量計 |
WO2008105197A1 (ja) | 2007-02-28 | 2008-09-04 | Yamatake Corporation | フローセンサ |
WO2008105144A1 (ja) | 2007-02-28 | 2008-09-04 | Yamatake Corporation | センサ、センサの温度制御方法及び異常回復方法 |
JPWO2008105197A1 (ja) * | 2007-02-28 | 2010-06-03 | 株式会社山武 | フローセンサ |
WO2008129941A1 (ja) * | 2007-04-16 | 2008-10-30 | Yamatake Corporation | 流量計 |
JP2008267821A (ja) * | 2007-04-16 | 2008-11-06 | Yamatake Corp | 流量計 |
US7891239B2 (en) | 2008-09-12 | 2011-02-22 | Yamatake Corporation | Flow meter and flow volume controlling device |
Also Published As
Publication number | Publication date |
---|---|
JP4476287B2 (ja) | 2010-06-09 |
US7698938B2 (en) | 2010-04-20 |
EP1754959B1 (en) | 2008-12-31 |
EP1754959A4 (en) | 2007-06-20 |
DE602005012090D1 (de) | 2009-02-12 |
US20080034886A1 (en) | 2008-02-14 |
EP1754959A1 (en) | 2007-02-21 |
JPWO2005121718A1 (ja) | 2008-04-10 |
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