WO2005101434A2 - Microcommutateur a faible tension d’actionnement et faible consommation - Google Patents
Microcommutateur a faible tension d’actionnement et faible consommation Download PDFInfo
- Publication number
- WO2005101434A2 WO2005101434A2 PCT/FR2005/000815 FR2005000815W WO2005101434A2 WO 2005101434 A2 WO2005101434 A2 WO 2005101434A2 FR 2005000815 W FR2005000815 W FR 2005000815W WO 2005101434 A2 WO2005101434 A2 WO 2005101434A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microswitch
- branches
- substrate
- membrane
- bending
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/01—Details
- H01H61/0107—Details making use of shape memory materials
Definitions
- the invention relates to a microswitch comprising:
- actuation means intended, from a first stable position of the microswitch, to deform the membrane so as to establish, in a second stable position, an electrical contact between at least one first conductive pad formed on the substrate and at at least one second conductive pad, formed on a lower surface of the membrane,
- Microswitches are widely used, especially in the telecommunications field for signal routing, impedance tuning networks, gain adjustment of amplifiers, etc.
- the frequency bands of the signals to be switched can range from a few MHz to several tens of GHz.
- silicon FET Field Effect Transistor
- MESFET Metal Semiconductor Field Effect Transistor
- GaAs gallium arsenide
- all these microswitches have a significant insertion loss in the on state, around 1 dB at 2 dB, and a fairly low insulation in the open state, of the order from -20dB to -25dB.
- Electrostatic microswitches have the advantage of having a high switching speed and relatively simple technology. However, they encounter reliability problems, in particular because of an increased risk of sticking of the structure of the microswitch, and they only allow small displacements.
- the thermally actuated microswitches have the advantage of having a low actuation voltage (less than 5V), a high energy density and a high deflection amplitude, but they encounter excessive consumption problems and have a low switching speed.
- the actuating means 4 comprise, for example, thermal actuators 7 cooperating with heating resistors 8, inserted in the ends of the beam 2.
- the microswitch 1 also comprises complementary electrostatic holding members 9, respectively integral with the beam 2 and of the substrate 3. The electrostatic holding members 9 are intended to hold the microswitch 1 in the second stable position (FIG. 3).
- FIG. 1 The tilting of the microswitch 1 is shown in Figures 1 to 3.
- the beam 2 is in its first stable position.
- the actuating means 4 and the electrostatic holding members 9 are not stressed.
- FIG. 2 the temperature variation generated by the thermal actuator 7, represented by the waves and the arrows 10, causes the deformation of the beam 2.
- the conductive pad 6 of the beam 2 then enters contact with the conductive pad 5 of the substrate 3 to establish an electrical contact.
- electrostatic forces 11 between the electrostatic holding members 9 are then generated, to maintain the beam 2 in this stable position.
- the thermal actuation is interrupted and the stable position is then maintained by the electrostatic forces 11.
- the electrostatic holding is interrupted, that is to say when the electrostatic forces 1 1 are deactivated, the beam 2 returns to its non-deformed state, that is to say in the first stable position shown in FIG. 1, and the electrical contact is interrupted.
- FIG 4 In Figure 4 are illustrated the different areas of the deformation of the beam 2, which have more or less significant displacements.
- the central zone 16, shown in dark gray illustrates the zone of greatest deformation of the beam 2, namely the location of the conductive pad 6 and the zone of contact of the beam 2 with the substrate 3.
- the intermediate zones 17 and 18 represent the areas of the beam 2 urged by the electrostatic holding members 9.
- the end zones 19, shown in light gray, comprise the thermal actuation means 4 and correspond to the parts of the beam 2 which do not deform, or practically do not.
- microswitch 1 The main part of the electrical consumption of microswitch 1 is thus limited only to the fraction of time necessary for it to toggle, from the first stable position (FIG. 1) to the second stable position (FIG. 3).
- the electrostatic holding voltage is reduced, since the forces 11 are applied to the deformed beam 2 ( Figures 3 and 4).
- the electrical consumption of the microswitch 1, as well as the actuation and electrostatic holding voltages, are therefore relatively low.
- the holding electrodes 9 being linked to the beam 2, they deform like the beam 2.
- the area of weak air gap namely the height between the members 9 for electrostatic holding of the beam 2 and of the substrate 3 in the second stable position ( Figure 3), is reduced laterally.
- the decrease in the holding voltage is consequently limited, in particular compared to a simple electrostatic actuation.
- the deformation of the electrostatic holding members 9, linked to the beam 2 can cause reliability problems of the microswitch 1.
- the invention aims to remedy these drawbacks and relates to the production of a reliable microswitch e, having a low actuation voltage and low consumption.
- the membrane comprises at least:
- At least one contact branch substantially parallel to the bending branches, arranged between the bending branches and fixed to the bending branches at the level of zones of strong deformation of the bending branches, the contact branch moving substantially parallel to the substrate during actuation of the microswitch and comprising the electrostatic holding members of the membrane and the second conductive pad.
- Figures 1 to 3 show the tilting of a deformable beam of a microswitch with thermal actuation and electrostatic holding according to the prior art.
- FIG. 4 represents, in perspective, the deformation of the beam according to FIGS. 1 to 3.
- FIG. 5 represents, in top view, a first embodiment of a deformable membrane of a microswitch according to the invention.
- FIG. 6 represents, in perspective, the deformation of the membrane according to FIG. 5.
- Figure 7 shows, in section along the axis A-A, the membrane according to Figure 6 fixed on a substrate.
- FIG. 8 represents, in top view, an alternative embodiment of a deformable membrane according to the invention.
- FIG. 9 represents, in perspective, the deformation of the membrane according to FIG. 8.
- a deformable membrane 12 of a microswitch 1 with thermal actuation and electrostatic holding comprises two flexion branches 13, substantially parallel and comprising, at their ends, the thermal actuating means 4 of the microswitch 1.
- the membrane 12 comprises, between the bending branches 1 3, a contact branch 14, substantially parallel to the bending branches 13 and preferably comprising two electrodes 15 for electrostatic holding, arranged on either side of the conductive pad 6 of the membrane 12.
- the flexing branches 13 are constituted by bimetallic strips, which have good deformation characteristics under the effect of a temperature variation.
- the thermal actuation means 4 consist, for example, of heating resistors inserted into the ends of the flexing branches 13 of the membrane 12.
- the deformation of the flexion branches 13 causes the contact branch 14 to move substantially parallel to the substrate 3 (FIG. 7), so that the contact branch 14 does not deform, or practically not, when the microswitch 1 is actuated.
- Areas 20 of strong deformation of the bending branches 13, shown in dark gray in FIG. 6, are located at the level of the central part of the bending branches 13.
- the variation in gray levels illustrates a more or less significant deformation of the flexion branches 13.
- the end zones 21 of the flexion branches 13, shown in light gray, are the zones associated with the thermal actuation of the microswitch 1, namely the zones of weak deformation.
- the contact branch 14 is connected to the flexion branches 13 at their zones 20 of strong deformation, namely at their central parts.
- the electrostatic holding electrodes 15, located on this contact branch 14, therefore move substantially parallel to the substrate 3 and do not deform, or practically not, when the microswitch 1 is actuated by thermal effect.
- the flexing branches 13 are attached to protruding edges of the substrate 3 by their two ends.
- the conductive pad 6, integral with the contact branch 14 of the membrane 12 is in contact with the conductive pad 5 of the substrate 3.
- the contact branch 14 is substantially parallel to the substrate 3 and the electrostatic holding electrodes 15, not deformed, are arranged at a very short distance opposite the members 9 for electrostatic holding of the substrate 3, complementary to the electrodes 15, so as to maintain the membrane 12 in this position stable.
- the contact branch 14 can be lowered until it comes into contact with the electrostatic holding members 9.
- a dielectric layer (not shown) is then necessary between the contact branch 14 and the electrostatic holding members 9, in order to isolate the branch 14 from the members 9.
- the electrostatic forces generated in the small gap between the contact branch 14 and the electrostatic holding members 9 of the substrate 3 cause the membrane 12 of the microswitch 1 to be held in this position.
- the electrodes 15 do not deform, or practically not, which leads to an improvement in the reliability of the microswitch 1.
- each bending branch 13 thus has a first end integral with the substrate 3 (not shown) and a second end secured to the contact branch 14.
- the end of each flexure branch 13 secured to the substrate 3 comprises the thermal actuation means 4, for example, heating resistors.
- the contact branch 14, arranged between the two flexion branches 13, may comprise only a single electrostatic holding electrode 15, the conductive stud 6 of the membrane 12 then being placed on the side of the contact branch 14.
- the zones 20 of strong deformation of the flexing branches 13 of the membrane 12 are the two integral ends of the contact branch 14.
- the two adjacent flexing branches 13 are therefore connected to the contact branch 14 opposite, that is to say that the first end of a bending branch 13 is secured to the substrate 3, while its second end is secured to a first end of the contact branch 14.
- the first end of the bending branch 13 adjacent to the first is then secured to the second end of the contact branch 14, while the second end of the bending branch
- the zones 20 of strong deformation, represented in dark gray, are therefore the ends of the bending branches 13 integral with the contact branch 14, while the zones 21 of small deformation, represented in light gray, are the ends of the bending branches 13 attached to the substrate 3 and comprise the thermal actuation means 4.
- the substrate 3 (not shown for this embodiment) is then shaped so as to cooperate with the membrane 12. It comprises a conductive pad 5, opposite the conductive pad 6 of the contact branch 14, and holding members 9 electrostatic, opposite the electrode 15 of the contact branch 14.
- Such a deformable embrane 12 according to FIGS. 8 and 9 makes it possible to obtain a more compact microcomputer 1.
- the switching of the microswitch 1 is as follows.
- the mem brane 12 is substantially horizontal and parallel to the substrate 3, to which it is attached by the protruding edges of the substrate 3.
- the bimetallic strips of the bending branches 13 are stressed, for example, by the passage of a current in the heating resistors.
- the actuation of the flexion branches 13 causes the membrane 12 of the microswitch 1 to deflect, as far as the vicinity or in contact between the conductive pads 5 and 6.
- a potential difference is then applied between the electrostatic electrodes 15, arranged on the lower surface of the contact branch 14, and the complementary members 9, produced on the substrate 3.
- the micro-feeder 1 remains in its second stable position (FIGS. 6, 7 and 9).
- the potential difference applied between the electrodes 15 and the electrostatic holding members 9 is canceled, which causes the membrane 12 to rise to its initial position, that is to say the first stable position.
- the microswitch 1, comprising a membrane 12 according to FIGS. 5 and 8, is produced according to techniques known in microelectronics.
- the materials used for manufacturing the microswitch 1 are silicon oxide (Si0 2 ) or silicon nitride (Si x N y ) for the substrate 3, aluminum (Al) for the actuator for the thermal bimetal, titanium nitride (TiN) for the heating resistance, titanium (Ti), aluminum (Al) or a chromium-gold alloy (Cr / Au) for the electrodes 15 and the organs 9 for electrostatic holding, gold (Au) or platinum (Pt) for the conductive pads 5 and 6.
- the contact branch 14 carrying the electrostatic holding electrodes 15 is, preferably, elongated.
- the contact branch 14 has a length greater than half the length of the flexion branches 3.
- the contact branch 14 has a length close to the length of the flexion branches 13. This results in a significant saving in space, since it is possible to produce a very reliable microswitch 1, of low consumption and with dimensions which may be less than 100 / vm 2 .
- microswitch 1 provides the following advantages, namely a low actuation and electrostatic holding voltage, of the order of 5V, low consumption, conservation of all the advantages actuation by bimetallic strip (high deflection amplitude, high energy density, low actuation voltage) and a technological achievement compatible with integrated circuit technology.
- the invention is not limited to the embodiments described above.
- the actuation means 4 of the microswitch 1 may in particular comprise a piezoelectric actuator.
- the flexion branches 13 then comprise at least one layer of piezoelectric material. They can optionally be constituted by bimetallic strips SiN / piezoelectric layer and are provided with excitation electrodes on their upper and lower face.
- a voltage is then applied to the piezoelectric layer of the bending branches 13, to cause the deformation of the bending branches 13.
- the materials used for the realization of the actuator piezoelectric are lead titano-zirconate (PZT), aluminum nitride (AIN) or zinc oxide (ZnO).
- the membrane 2 may comprise flexion arms 13, contact branches 14, electrodes 15 and additional conductive pads 6, the electrodes 15 and the conductive pads 6 always being arranged on the contact branches 14.
- the contact branches 14 are then fixed in the same way to the adjacent bending branches 13, with the ends of the bending branches 13 fixed "in opposition" .
- Preferred applications for microswitch 1 are, in general, all applications using microswitches in the fields of electronics and microelectronics, and more particularly radio frequency applications, namely antenna microswitches, transmitters / receivers, band microswitches, etc.
Landscapes
- Micromachines (AREA)
- Thermally Actuated Switches (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05751606.4A EP1743349B1 (fr) | 2004-04-06 | 2005-04-04 | Microcommutateur a faible tension d"actionnement et faible consommation |
US10/593,876 US7782170B2 (en) | 2004-04-06 | 2005-04-04 | Low consumption and low actuation voltage microswitch |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0403586A FR2868591B1 (fr) | 2004-04-06 | 2004-04-06 | Microcommutateur a faible tension d'actionnement et faible consommation |
FR0403586 | 2004-04-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005101434A2 true WO2005101434A2 (fr) | 2005-10-27 |
WO2005101434A3 WO2005101434A3 (fr) | 2006-01-12 |
Family
ID=34944406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2005/000815 WO2005101434A2 (fr) | 2004-04-06 | 2005-04-04 | Microcommutateur a faible tension d’actionnement et faible consommation |
Country Status (4)
Country | Link |
---|---|
US (1) | US7782170B2 (fr) |
EP (1) | EP1743349B1 (fr) |
FR (1) | FR2868591B1 (fr) |
WO (1) | WO2005101434A2 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1798745A2 (fr) * | 2005-12-15 | 2007-06-20 | Samsung Electronics Co., Ltd. | Commutateur MEMS pneumatique et procédé de fabrication |
NL2003681C2 (en) * | 2009-10-21 | 2011-04-26 | Stichting Materials Innovation Inst M2I | Micro electromechanical switch and method of manufacturing such a micro electromechanical switch. |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101501805B (zh) * | 2006-08-09 | 2012-07-04 | 皇家飞利浦电子股份有限公司 | 微机电器件及其驱动方法 |
US8154378B2 (en) * | 2007-08-10 | 2012-04-10 | Alcatel Lucent | Thermal actuator for a MEMS-based relay switch |
JP5081038B2 (ja) * | 2008-03-31 | 2012-11-21 | パナソニック株式会社 | Memsスイッチおよびその製造方法 |
JP5176148B2 (ja) * | 2008-10-31 | 2013-04-03 | 富士通株式会社 | スイッチング素子および通信機器 |
US8779886B2 (en) * | 2009-11-30 | 2014-07-15 | General Electric Company | Switch structures |
FR2951873B1 (fr) * | 2009-10-26 | 2011-12-09 | St Microelectronics Crolles 2 | Dispositif de conversion d'energie thermique en electricite |
KR102005808B1 (ko) * | 2011-09-02 | 2019-07-31 | 카벤디시 키네틱스, 인크. | Mems 장치용으로 병합된 레그 및 반가요성 고정장치 |
US10439591B2 (en) * | 2015-11-12 | 2019-10-08 | LGS Innovations LLC | MEMS device with large out-of-plane actuation and low-resistance interconnect and methods of use |
WO2020239930A1 (fr) * | 2019-05-28 | 2020-12-03 | B&R Industrial Automation GmbH | Dispositif de transport |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020160549A1 (en) * | 2001-04-26 | 2002-10-31 | Arunkumar Subramanian | MEMS micro-relay with coupled electrostatic and electromagnetic actuation |
EP1308977A2 (fr) * | 2001-11-06 | 2003-05-07 | Omron Corporation | Actionneur électrostatique, et relais électrostatique et autres dispositifs utilisant le même |
EP1321957A1 (fr) * | 2001-12-19 | 2003-06-25 | Abb Research Ltd. | Dispositif de micro-relais avec une membrane fendue |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4423401A (en) * | 1982-07-21 | 1983-12-27 | Tektronix, Inc. | Thin-film electrothermal device |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US5065978A (en) * | 1988-04-27 | 1991-11-19 | Dragerwerk Aktiengesellschaft | Valve arrangement of microstructured components |
US5058856A (en) * | 1991-05-08 | 1991-10-22 | Hewlett-Packard Company | Thermally-actuated microminiature valve |
DE4437260C1 (de) * | 1994-10-18 | 1995-10-19 | Siemens Ag | Mikromechanisches Relais |
DE4437261C1 (de) * | 1994-10-18 | 1995-10-19 | Siemens Ag | Mikromechanisches elektrostatisches Relais |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
JPH10334778A (ja) * | 1997-05-30 | 1998-12-18 | Hyundai Motor Co Ltd | 臨界マイクロスイッチ及びその製造方法 |
US6091050A (en) * | 1997-11-17 | 2000-07-18 | Roxburgh Limited | Thermal microplatform |
US6115231A (en) * | 1997-11-25 | 2000-09-05 | Tdk Corporation | Electrostatic relay |
FR2772512B1 (fr) * | 1997-12-16 | 2004-04-16 | Commissariat Energie Atomique | Microsysteme a element deformable sous l'effet d'un actionneur thermique |
US6100477A (en) * | 1998-07-17 | 2000-08-08 | Texas Instruments Incorporated | Recessed etch RF micro-electro-mechanical switch |
US6153839A (en) * | 1998-10-22 | 2000-11-28 | Northeastern University | Micromechanical switching devices |
US6236300B1 (en) * | 1999-03-26 | 2001-05-22 | R. Sjhon Minners | Bistable micro-switch and method of manufacturing the same |
JP2001076605A (ja) * | 1999-07-01 | 2001-03-23 | Advantest Corp | 集積型マイクロスイッチおよびその製造方法 |
US6307452B1 (en) * | 1999-09-16 | 2001-10-23 | Motorola, Inc. | Folded spring based micro electromechanical (MEM) RF switch |
US6239685B1 (en) * | 1999-10-14 | 2001-05-29 | International Business Machines Corporation | Bistable micromechanical switches |
US6310339B1 (en) * | 1999-10-28 | 2001-10-30 | Hrl Laboratories, Llc | Optically controlled MEM switches |
US6396368B1 (en) * | 1999-11-10 | 2002-05-28 | Hrl Laboratories, Llc | CMOS-compatible MEM switches and method of making |
US6307169B1 (en) * | 2000-02-01 | 2001-10-23 | Motorola Inc. | Micro-electromechanical switch |
US6376787B1 (en) * | 2000-08-24 | 2002-04-23 | Texas Instruments Incorporated | Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer |
JP2002075156A (ja) * | 2000-09-01 | 2002-03-15 | Nec Corp | マイクロスイッチおよびその製造方法 |
US6531947B1 (en) * | 2000-09-12 | 2003-03-11 | 3M Innovative Properties Company | Direct acting vertical thermal actuator with controlled bending |
US6483419B1 (en) * | 2000-09-12 | 2002-11-19 | 3M Innovative Properties Company | Combination horizontal and vertical thermal actuator |
US6489857B2 (en) * | 2000-11-30 | 2002-12-03 | International Business Machines Corporation | Multiposition micro electromechanical switch |
FR2818795B1 (fr) * | 2000-12-27 | 2003-12-05 | Commissariat Energie Atomique | Micro-dispositif a actionneur thermique |
US6621387B1 (en) * | 2001-02-23 | 2003-09-16 | Analatom Incorporated | Micro-electro-mechanical systems switch |
KR100738064B1 (ko) * | 2001-02-27 | 2007-07-12 | 삼성전자주식회사 | 비선형적 복원력의 스프링을 가지는 mems 소자 |
US6768403B2 (en) * | 2002-03-12 | 2004-07-27 | Hrl Laboratories, Llc | Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring |
US6506989B2 (en) * | 2001-03-20 | 2003-01-14 | Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College | Micro power switch |
SE0101182D0 (sv) * | 2001-04-02 | 2001-04-02 | Ericsson Telefon Ab L M | Micro electromechanical switches |
US6803534B1 (en) * | 2001-05-25 | 2004-10-12 | Raytheon Company | Membrane for micro-electro-mechanical switch, and methods of making and using it |
US6768412B2 (en) * | 2001-08-20 | 2004-07-27 | Honeywell International, Inc. | Snap action thermal switch |
US6787438B1 (en) * | 2001-10-16 | 2004-09-07 | Teravieta Technologies, Inc. | Device having one or more contact structures interposed between a pair of electrodes |
US6919784B2 (en) * | 2001-10-18 | 2005-07-19 | The Board Of Trustees Of The University Of Illinois | High cycle MEMS device |
FR2831705B1 (fr) * | 2001-10-25 | 2004-08-27 | Commissariat Energie Atomique | Micro-condensateur variable a fort rapport et faible tension d'actionnement |
AU2002359369A1 (en) * | 2001-11-09 | 2003-05-26 | Coventor, Incorporated | Trilayered beam mems device and related methods |
US6791441B2 (en) * | 2002-05-07 | 2004-09-14 | Raytheon Company | Micro-electro-mechanical switch, and methods of making and using it |
US6924966B2 (en) * | 2002-05-29 | 2005-08-02 | Superconductor Technologies, Inc. | Spring loaded bi-stable MEMS switch |
US6794101B2 (en) * | 2002-05-31 | 2004-09-21 | Motorola, Inc. | Micro-electro-mechanical device and method of making |
US6657525B1 (en) * | 2002-05-31 | 2003-12-02 | Northrop Grumman Corporation | Microelectromechanical RF switch |
US7053736B2 (en) * | 2002-09-30 | 2006-05-30 | Teravicta Technologies, Inc. | Microelectromechanical device having an active opening switch |
US7411792B2 (en) * | 2002-11-18 | 2008-08-12 | Washington State University Research Foundation | Thermal switch, methods of use and manufacturing methods for same |
FR2848020B1 (fr) * | 2002-11-28 | 2005-01-07 | Commissariat Energie Atomique | Micro-commutateur electrostatique pour composants a faible tension d'actionnement |
US7084724B2 (en) * | 2002-12-31 | 2006-08-01 | The Regents Of The University Of California | MEMS fabrication on a laminated substrate |
FR2865724A1 (fr) * | 2004-02-04 | 2005-08-05 | St Microelectronics Sa | Microsysteme electromecanique pouvant basculer entre deux positions stables |
US7101724B2 (en) * | 2004-02-20 | 2006-09-05 | Wireless Mems, Inc. | Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
US7362199B2 (en) * | 2004-03-31 | 2008-04-22 | Intel Corporation | Collapsible contact switch |
US7372348B2 (en) * | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
US7230513B2 (en) * | 2004-11-20 | 2007-06-12 | Wireless Mems, Inc. | Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch |
JP2006179252A (ja) * | 2004-12-21 | 2006-07-06 | Fujitsu Component Ltd | スイッチデバイス |
KR100633101B1 (ko) * | 2005-07-27 | 2006-10-12 | 삼성전자주식회사 | 비대칭 스프링 강성을 갖는 rf 멤스 스위치 |
-
2004
- 2004-04-06 FR FR0403586A patent/FR2868591B1/fr not_active Expired - Fee Related
-
2005
- 2005-04-04 WO PCT/FR2005/000815 patent/WO2005101434A2/fr not_active Application Discontinuation
- 2005-04-04 EP EP05751606.4A patent/EP1743349B1/fr active Active
- 2005-04-04 US US10/593,876 patent/US7782170B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020160549A1 (en) * | 2001-04-26 | 2002-10-31 | Arunkumar Subramanian | MEMS micro-relay with coupled electrostatic and electromagnetic actuation |
EP1308977A2 (fr) * | 2001-11-06 | 2003-05-07 | Omron Corporation | Actionneur électrostatique, et relais électrostatique et autres dispositifs utilisant le même |
EP1321957A1 (fr) * | 2001-12-19 | 2003-06-25 | Abb Research Ltd. | Dispositif de micro-relais avec une membrane fendue |
Non-Patent Citations (1)
Title |
---|
SAIAS D ET AL: "An above-IC RF MEMS switch" IEEE INTERNATIONAL SOLID-STATE CIRCUITS CONFERENCE, 9 février 2003 (2003-02-09), pages 1-8, XP010661612 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1798745A2 (fr) * | 2005-12-15 | 2007-06-20 | Samsung Electronics Co., Ltd. | Commutateur MEMS pneumatique et procédé de fabrication |
EP1798745A3 (fr) * | 2005-12-15 | 2009-01-28 | Samsung Electronics Co., Ltd. | Commutateur MEMS pneumatique et procédé de fabrication |
US7759591B2 (en) | 2005-12-15 | 2010-07-20 | Samsung Electronics Co., Ltd. | Pneumatic MEMS switch and method of fabricating the same |
NL2003681C2 (en) * | 2009-10-21 | 2011-04-26 | Stichting Materials Innovation Inst M2I | Micro electromechanical switch and method of manufacturing such a micro electromechanical switch. |
Also Published As
Publication number | Publication date |
---|---|
US7782170B2 (en) | 2010-08-24 |
EP1743349B1 (fr) | 2013-10-09 |
FR2868591A1 (fr) | 2005-10-07 |
WO2005101434A3 (fr) | 2006-01-12 |
FR2868591B1 (fr) | 2006-06-09 |
EP1743349A2 (fr) | 2007-01-17 |
US20070215447A1 (en) | 2007-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1743349B1 (fr) | Microcommutateur a faible tension d"actionnement et faible consommation | |
FR2857153A1 (fr) | Micro-commutateur bistable a faible consommation. | |
EP0587032B1 (fr) | Transducteur capacitif intégré | |
EP1562207A1 (fr) | Microsystème électromécanique pouvant basculer entre deux positions stables | |
EP1468960B1 (fr) | Microrésonateur accordable sur poutre isolante déformable par effet bilame | |
FR2725028A1 (fr) | Detecteur d'acceleration a semi-conducteur | |
EP1543535B1 (fr) | Procédé de réalisation des microcommutateurs a actuation electrostatique a faible temps de reponse et a commutation de puissance | |
CA3025338A1 (fr) | Membrane mems a ligne de transmission integree | |
FR2599833A1 (fr) | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication | |
EP1717830B1 (fr) | Micro-condensateur électromécanique à capacité variable et procédé de fabrication d'un tel micro-condensateur | |
EP1565921B1 (fr) | Micro-commutateur electrostatique pour composant a faible tension d'actionnement | |
EP1692475B1 (fr) | Dispositif de mesure d energie rayonnante ameliore a deux positions | |
EP0874379B1 (fr) | Micro-contacteur magnétique et son procédé de fabrication | |
EP1805100B1 (fr) | Microsysteme comportant un pont deformable | |
EP1570504B1 (fr) | Commutateur micro-mecanique et procede de realisation | |
EP2673816B1 (fr) | Dispositif microelectromecanique avec structure d'actionnement piezoelectrique | |
FR2952754A1 (fr) | Dispositif radiofrequence magnetique a reponse variable | |
FR2835963A1 (fr) | Micro-composant du type micro-interrupteur et procede de fabrication d'un tel micro-composant | |
FR2848020A1 (fr) | Micro-commutateur electrostatique pour composants a faible tension d'actionnement | |
FR2946036A1 (fr) | Procede d'integration de micro-interrupteurs de type mems sur des substrats en gan comportant des composants electroniques de puissance | |
EP4162527A1 (fr) | Dispositif électronique pour capture ou émission d'une grandeur physique et procédé de fabrication | |
FR3143256A1 (fr) | Elément actif piézoélectrique pour système électromécanique | |
FR3087007A1 (fr) | Dispositif de detection pyroelectrique a membrane rigide | |
FR2839194A1 (fr) | Microcommutateur destine a etre employe dans un circuit radiofrequence | |
FR2954003A1 (fr) | Composant rf comprenant un commutateur a base de nanotubes |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WR | Later publication of a revised version of an international search report | ||
DPEN | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed from 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 10593876 Country of ref document: US Ref document number: 2007215447 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2005751606 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: DE |
|
WWP | Wipo information: published in national office |
Ref document number: 2005751606 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 10593876 Country of ref document: US |