SE0101182D0 - Micro electromechanical switches - Google Patents

Micro electromechanical switches

Info

Publication number
SE0101182D0
SE0101182D0 SE0101182A SE0101182A SE0101182D0 SE 0101182 D0 SE0101182 D0 SE 0101182D0 SE 0101182 A SE0101182 A SE 0101182A SE 0101182 A SE0101182 A SE 0101182A SE 0101182 D0 SE0101182 D0 SE 0101182D0
Authority
SE
Sweden
Prior art keywords
micro electromechanical
electromechanical switches
switches
micro
sensitivity
Prior art date
Application number
SE0101182A
Other languages
English (en)
Inventor
Paul Hallbjoerner
Erik Carlsson
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE0101182A priority Critical patent/SE0101182D0/sv
Publication of SE0101182D0 publication Critical patent/SE0101182D0/sv
Priority to CNB028078616A priority patent/CN1221468C/zh
Priority to PCT/SE2002/000528 priority patent/WO2002079077A1/en
Priority to EP02708886A priority patent/EP1373127A1/en
Priority to US10/112,046 priority patent/US6720851B2/en
Priority to US10/750,900 priority patent/US6930873B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
SE0101182A 2001-04-02 2001-04-02 Micro electromechanical switches SE0101182D0 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE0101182A SE0101182D0 (sv) 2001-04-02 2001-04-02 Micro electromechanical switches
CNB028078616A CN1221468C (zh) 2001-04-02 2002-03-20 一种微机电开关
PCT/SE2002/000528 WO2002079077A1 (en) 2001-04-02 2002-03-20 Micro electromechanical switches
EP02708886A EP1373127A1 (en) 2001-04-02 2002-03-20 Micro electromechanical switches
US10/112,046 US6720851B2 (en) 2001-04-02 2002-04-01 Micro electromechanical switches
US10/750,900 US6930873B2 (en) 2001-04-02 2004-01-05 Micro electromechanical switches

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0101182A SE0101182D0 (sv) 2001-04-02 2001-04-02 Micro electromechanical switches

Publications (1)

Publication Number Publication Date
SE0101182D0 true SE0101182D0 (sv) 2001-04-02

Family

ID=20283651

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0101182A SE0101182D0 (sv) 2001-04-02 2001-04-02 Micro electromechanical switches

Country Status (5)

Country Link
US (2) US6720851B2 (sv)
EP (1) EP1373127A1 (sv)
CN (1) CN1221468C (sv)
SE (1) SE0101182D0 (sv)
WO (1) WO2002079077A1 (sv)

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US6855264B1 (en) 1997-07-15 2005-02-15 Kia Silverbrook Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7337532B2 (en) * 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
SE0101184D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
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US6891240B2 (en) * 2002-04-30 2005-05-10 Xerox Corporation Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
US7006720B2 (en) * 2002-04-30 2006-02-28 Xerox Corporation Optical switching system
EP1365507A1 (en) * 2002-05-22 2003-11-26 Lucent Technologies Inc. Universal tuning and matching device
US6924966B2 (en) * 2002-05-29 2005-08-02 Superconductor Technologies, Inc. Spring loaded bi-stable MEMS switch
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US7106066B2 (en) * 2002-08-28 2006-09-12 Teravicta Technologies, Inc. Micro-electromechanical switch performance enhancement
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JP4123044B2 (ja) * 2003-05-13 2008-07-23 ソニー株式会社 マイクロマシンおよびその製造方法
JP4114552B2 (ja) * 2003-06-10 2008-07-09 ソニー株式会社 マイクロマシンの製造方法
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
FR2864527B1 (fr) * 2003-12-26 2008-04-18 Commissariat Energie Atomique Composants mems electrostatiques permettant un deplacement vertical important
US7486163B2 (en) * 2003-12-30 2009-02-03 Massachusetts Institute Of Technology Low-voltage micro-switch actuation technique
FR2868591B1 (fr) * 2004-04-06 2006-06-09 Commissariat Energie Atomique Microcommutateur a faible tension d'actionnement et faible consommation
KR100619110B1 (ko) 2004-10-21 2006-09-04 한국전자통신연구원 미세전자기계적 스위치 및 그 제조 방법
JP4740751B2 (ja) * 2005-01-21 2011-08-03 パナソニック株式会社 電気機械スイッチ
KR100631204B1 (ko) * 2005-07-25 2006-10-04 삼성전자주식회사 Ｍｅｍｓ 스위치 및 그 제조방법
US7482664B2 (en) * 2006-01-09 2009-01-27 Microsoft Corporation Out-of-plane electrostatic actuator
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US7473859B2 (en) * 2007-01-12 2009-01-06 General Electric Company Gating voltage control system and method for electrostatically actuating a micro-electromechanical device
ES2388126T3 (es) * 2009-03-20 2012-10-09 Delfmems Estructura de tipo MEMS con una membrana flexible y medios de accionamiento eléctrico mejorados
JP5398411B2 (ja) * 2009-08-10 2014-01-29 株式会社東芝 マイクロ可動デバイスおよびマイクロ可動デバイスの製造方法
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
CN101714481B (zh) * 2009-10-26 2012-08-22 华映光电股份有限公司 微机械式开关结构
US8354290B2 (en) * 2010-04-07 2013-01-15 Uchicago Argonne, Llc Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
WO2012164725A1 (ja) * 2011-06-02 2012-12-06 富士通株式会社 電子デバイスとその製造方法、及び電子デバイスの駆動方法
US8988586B2 (en) 2012-12-31 2015-03-24 Digitaloptics Corporation Auto-focus camera module with MEMS closed loop compensator
US9097748B2 (en) * 2013-03-14 2015-08-04 DigitalOptics Corporation MEMS Continuous capacitance measurement for MEMS-actuated movement of an optical component within an auto-focus camera module
DE102014225934B4 (de) * 2014-12-15 2017-08-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Elektrostatisch auslenkbares mikromechanisches Bauelement und Verfahren zu seiner Herstellung
CN109495119B (zh) * 2018-12-28 2021-08-10 Tcl移动通信科技（宁波）有限公司 一种射频开关控制方法、装置、移动终端及存储介质
TWI697747B (zh) * 2019-01-15 2020-07-01 台灣積體電路製造股份有限公司 微機電系統裝置之控制方法及測試方法
DE102021212369A1 (de) 2021-11-03 2023-05-04 Robert Bosch Gesellschaft mit beschränkter Haftung Relais und Verfahren zum Betreiben eines Relais

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US5621157A (en) * 1995-06-07 1997-04-15 Analog Devices, Inc. Method and circuitry for calibrating a micromachined sensor
US5717631A (en) * 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
CN1119681C (zh) 2000-01-14 2003-08-27 清华大学 静电驱动垂直微镜微光学开关及其制作方法
AU2001268742A1 (en) * 2000-06-28 2002-01-08 The Regents Of The University Of California Capacitive microelectromechanical switches

Also Published As

Publication number Publication date
CN1500063A (zh) 2004-05-26
WO2002079077A1 (en) 2002-10-10
US20020191897A1 (en) 2002-12-19
CN1221468C (zh) 2005-10-05
US6930873B2 (en) 2005-08-16
US6720851B2 (en) 2004-04-13
US20040136138A1 (en) 2004-07-15
EP1373127A1 (en) 2004-01-02

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