ATE341822T1 - Mems-vermittelter stufenförmig veränderlicher kondensator - Google Patents

Mems-vermittelter stufenförmig veränderlicher kondensator

Info

Publication number
ATE341822T1
ATE341822T1 AT01272461T AT01272461T ATE341822T1 AT E341822 T1 ATE341822 T1 AT E341822T1 AT 01272461 T AT01272461 T AT 01272461T AT 01272461 T AT01272461 T AT 01272461T AT E341822 T1 ATE341822 T1 AT E341822T1
Authority
AT
Austria
Prior art keywords
mems
capacitor
variable capacitor
stepped
stepped variable
Prior art date
Application number
AT01272461T
Other languages
English (en)
Inventor
Qing Ma
Valluri R Rao
Peng Cheng
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE341822T1 publication Critical patent/ATE341822T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Filters That Use Time-Delay Elements (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Memory System Of A Hierarchy Structure (AREA)
AT01272461T 2000-12-22 2001-11-26 Mems-vermittelter stufenförmig veränderlicher kondensator ATE341822T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/746,718 US6593672B2 (en) 2000-12-22 2000-12-22 MEMS-switched stepped variable capacitor and method of making same

Publications (1)

Publication Number Publication Date
ATE341822T1 true ATE341822T1 (de) 2006-10-15

Family

ID=25002038

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01272461T ATE341822T1 (de) 2000-12-22 2001-11-26 Mems-vermittelter stufenförmig veränderlicher kondensator

Country Status (10)

Country Link
US (1) US6593672B2 (de)
EP (1) EP1346382B1 (de)
JP (1) JP2004519845A (de)
KR (1) KR100532210B1 (de)
CN (1) CN100576386C (de)
AT (1) ATE341822T1 (de)
AU (1) AU2002217909A1 (de)
DE (1) DE60123659T2 (de)
TW (1) TW575887B (de)
WO (1) WO2002052592A2 (de)

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EP1343190A3 (de) * 2002-03-08 2005-04-20 Murata Manufacturing Co., Ltd. Element mit veränderlicher Kapazität
EP1383234B1 (de) * 2002-07-16 2010-03-17 Lucent Technologies Inc. Varaktor mit erweitertem Durchstimmungsbereich
US6885597B2 (en) * 2002-09-10 2005-04-26 Infineon Technologies Aktiengesellschaft Sensing test circuit
US6661069B1 (en) * 2002-10-22 2003-12-09 International Business Machines Corporation Micro-electromechanical varactor with enhanced tuning range
FR2851368B1 (fr) * 2003-02-18 2008-03-07 Agence Spatiale Europeenne Composants electroniques comportant des condensateurs micro electromecaniques a capacite ajustable
US6975193B2 (en) * 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
US6987432B2 (en) * 2003-04-16 2006-01-17 Robert Bosch Gmbh Temperature compensation for silicon MEMS resonator
US7167135B2 (en) * 2003-09-11 2007-01-23 Intel Corporation MEMS based tunable antenna for wireless reception and transmission
CN100345229C (zh) * 2003-09-19 2007-10-24 清华大学 一种平行四边形结构的微机械可变电容
US7068125B2 (en) 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7126438B2 (en) * 2004-05-19 2006-10-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Circuit and method for transmitting an output signal using a microelectromechanical systems varactor and a series inductive device
US7928914B2 (en) * 2004-06-21 2011-04-19 Motorola Mobility, Inc. Multi-frequency conductive-strip antenna system
US7365959B1 (en) 2004-08-12 2008-04-29 Charles Barry Ward Multi value capacitor
US7348928B2 (en) 2004-12-14 2008-03-25 Intel Corporation Slot antenna having a MEMS varactor for resonance frequency tuning
US7957277B2 (en) * 2005-02-25 2011-06-07 Interdigital Technology Corporation Wireless communication method and system for routing packets via intra-mesh and extra-mesh routes
US7617577B2 (en) * 2005-08-31 2009-11-17 The United States Of America As Represented By The Secretary Of The Air Force Method of forming a low cost digital variable capacitor
US7283347B2 (en) * 2005-08-31 2007-10-16 The United States Of America As Represented By The Secretary Of The Air Force Low cost digital variable capacitor
JP4910679B2 (ja) * 2006-12-21 2012-04-04 株式会社ニコン 可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路
JP5147857B2 (ja) * 2007-01-18 2013-02-20 エプコス アクチエンゲゼルシャフト 切替可能なキャパシタアレイ
US20100134195A1 (en) * 2008-12-03 2010-06-03 Electronics And Telecommunications Research Institute Capacitor having variable capacitance and digitally controlled oscillator including the same
US8519966B2 (en) * 2009-04-28 2013-08-27 Broadcom Corporation Capacitor for use in a communication device and methods for use therewith
US8363380B2 (en) 2009-05-28 2013-01-29 Qualcomm Incorporated MEMS varactors
JP2010284748A (ja) * 2009-06-11 2010-12-24 Toshiba Corp 電気部品
IT1397115B1 (it) * 2009-11-27 2012-12-28 St Microelectronics Rousset Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.
KR101630759B1 (ko) * 2010-12-14 2016-06-16 삼성전자주식회사 초음파 변환기의 셀, 채널 및 이를 포함하는 초음파 변환기
CN102176376A (zh) * 2010-12-31 2011-09-07 航天时代电子技术股份有限公司 一种基于mems继电器的宽幅可调电容
TWI527071B (zh) * 2011-06-03 2016-03-21 鐿鈦科技股份有限公司 Contact structure of electromechanical system switch
US9196429B2 (en) * 2011-06-03 2015-11-24 Intai Technology Corp. Contact structure for electromechanical switch
KR101761819B1 (ko) 2011-08-24 2017-07-26 삼성전자주식회사 초음파 변환기 및 그 제조 방법
US8940570B2 (en) 2012-01-03 2015-01-27 International Business Machines Corporation Micro-electro-mechanical system (MEMS) structures and design structures
US20130176657A1 (en) * 2012-01-11 2013-07-11 Qualcomm Mems Technologies, Inc. Electromechanical systems variable capacitance assembly
KR101477699B1 (ko) 2012-05-04 2015-01-06 삼성전자주식회사 디지털 코드에 따라 지수적으로 제어되는 차단주파수 특성을 갖는 필터 및 증폭기
US9197188B2 (en) 2012-09-13 2015-11-24 The Regents Of The University Of Michigan Wide range continuously tunable capacitor bank
CN108281286B (zh) * 2012-09-20 2020-04-07 维斯普瑞公司 微机电系统(mems)可变电容器装置及相关方法
US9443657B1 (en) 2013-12-10 2016-09-13 Tdk Corporation Piezo controlled variable capacitor
US9474150B2 (en) 2013-12-10 2016-10-18 Tdk Corporation Transmission line filter with tunable capacitor
US9424994B2 (en) 2013-12-10 2016-08-23 Tdk Corporation Tunable interdigitated capacitor
EP3556247B1 (de) 2018-04-18 2021-03-31 Braun GmbH Vorrichtung zur persönlichen hygiene mit behandlungskraftmesseinheit
CN111750905B (zh) * 2019-03-29 2023-05-09 财团法人工业技术研究院 可调整感应电容值的微机电感测装置
DE102020202137A1 (de) 2020-02-19 2021-08-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung für lineare variable Kapazität

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US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5644349A (en) * 1994-09-07 1997-07-01 Xerox Corporation Mechanical capacitor
JPH09199376A (ja) * 1996-01-18 1997-07-31 Murata Mfg Co Ltd 可変容量コンデンサ
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6034414A (en) 1997-11-18 2000-03-07 Industrial Technology Research Institute Variable capacitor using resistor generated heat to control dielectric thickness
US6049702A (en) 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
US6242989B1 (en) * 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
US6150901A (en) 1998-11-20 2000-11-21 Rockwell Collins, Inc. Programmable RF/IF bandpass filter utilizing MEM devices
US6418006B1 (en) * 2000-12-20 2002-07-09 The Board Of Trustees Of The University Of Illinois Wide tuning range variable MEMs capacitor

Also Published As

Publication number Publication date
EP1346382B1 (de) 2006-10-04
HK1058259A1 (en) 2004-05-07
JP2004519845A (ja) 2004-07-02
US6593672B2 (en) 2003-07-15
EP1346382A2 (de) 2003-09-24
CN100576386C (zh) 2009-12-30
KR100532210B1 (ko) 2005-11-29
DE60123659T2 (de) 2007-08-16
WO2002052592A3 (en) 2003-03-27
TW575887B (en) 2004-02-11
KR20030064856A (ko) 2003-08-02
CN1529890A (zh) 2004-09-15
WO2002052592A2 (en) 2002-07-04
DE60123659D1 (de) 2006-11-16
AU2002217909A1 (en) 2002-07-08
US20020079743A1 (en) 2002-06-27

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Legal Events

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