WO2005091447A1 - Équipement laser - Google Patents

Équipement laser Download PDF

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Publication number
WO2005091447A1
WO2005091447A1 PCT/JP2005/005176 JP2005005176W WO2005091447A1 WO 2005091447 A1 WO2005091447 A1 WO 2005091447A1 JP 2005005176 W JP2005005176 W JP 2005005176W WO 2005091447 A1 WO2005091447 A1 WO 2005091447A1
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WO
WIPO (PCT)
Prior art keywords
solid
core
state laser
light guide
light
Prior art date
Application number
PCT/JP2005/005176
Other languages
English (en)
Japanese (ja)
Inventor
Masaki Tsunekane
Takunori Taira
Original Assignee
Japan Science And Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science And Technology Agency filed Critical Japan Science And Technology Agency
Priority to JP2006511288A priority Critical patent/JPWO2005091447A1/ja
Publication of WO2005091447A1 publication Critical patent/WO2005091447A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/042—Arrangements for thermal management for solid state lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H01S3/0635—Thin film lasers in which light propagates in the plane of the thin film provided with a periodic structure, e.g. using distributed feed-back, grating couplers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments

Definitions

  • the present invention relates to a solid-state laser medium and a solid-state laser device equipped with the same.
  • a core made of a solid-state laser crystal containing a lasing element is provided in the center of the laser medium, and a transparent material for guiding excitation light around the core is provided.
  • a thin crystal with a thickness of lmm or less having a light guide is arranged, and the surface of this crystal opposite to the surface from which laser light is emitted is fixed to a heat sink and has a structure that is cooled (see below).
  • Patent document 1 Non-patent document 1, 2).
  • the core is circular or square, and the same base material containing no laser oscillation element is used for the light guide.
  • Patent document 1 U.S. Pat.No. 6,625,193
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2003-258350
  • Non-Patent Document 1 Optake's Letters, Vol. 27 (published in 2002), p. 1791
  • Non-Patent Document 2 Applied 'Physics' Letters, Vol. 83 (issued in 2003), p. 4086 Disclosure of the Invention
  • the present invention uses a translucent ceramic material for a light guide that guides excitation light on the outer periphery of a core, and forms a boundary between a core having an arbitrary shape or a plurality of cores at a boundary surface. It is an object of the present invention to provide a solid-state laser medium that can easily and inexpensively produce a light guide with low light loss and high mechanical strength, and a compact high-performance solid-state laser device equipped with the medium.
  • the present invention provides:
  • a core containing a lasing element is provided at the center, and a transparent light guide for excitation light absorbed by the core is integrated around this core, and the core is exposed.
  • the light guide or the light guide and the core are made of translucent ceramic, and one or more cores are provided in the same light guide. It is characterized by.
  • the plurality of cores are arranged at equal intervals.
  • the plurality of cores are arranged on the same optical path of the laser light through a surface that is not fixed to the heat sink by a mirror provided on the heat sink.
  • a waveguide through which laser-oscillated light passes through is provided near the surface of the solid-state laser medium that is not fixed to the heat sink.
  • An optical block is arranged, a total reflection film for laser light is provided on an outer surface of the light guide block, and the plurality of cores are arranged in the same optical path of the laser light in this block via the total reflection film. It is characterized by.
  • an output mirror is provided independently for each of the plurality of cores.
  • the excitation lights emitted from the semiconductor laser bars arranged in a stacked manner are each in a fast axis direction by a microphone aperture lens.
  • the semiconductor laser and the lens are arranged so that the light is condensed on the incident window on the side surface of the light guide by a single condenser lens.
  • FIG. 1 is a plan view of a solid-state laser medium showing a first embodiment of the present invention.
  • FIG. 2 is a sectional view taken along line AA of a solid-state laser device (laser resonator) including the solid-state laser medium shown in FIG.
  • FIG. 3 is a plan view of a solid-state laser medium according to a second embodiment of the present invention.
  • FIG. 4 is a sectional view of the solid-state laser medium shown in FIG. 3, taken along line BB.
  • FIG. 5 is a view showing a Yb concentration distribution of a core part shown in FIG. 3.
  • FIG. 6 is a diagram showing an excitation light absorption energy density distribution of a core part shown in FIG. 3.
  • FIG. 7 is a plan view of a solid-state laser medium according to a third embodiment of the present invention.
  • FIG. 8 A solid-state laser device (laser resonator) equipped with the solid-state laser medium shown in FIG. 7
  • FIG. 9 is a sectional view of a solid-state laser device (laser resonator) showing a fourth embodiment of the present invention.
  • FIG. 10 is a sectional view of a solid-state laser device (laser resonator) showing a fifth embodiment of the present invention. is there.
  • FIG. 11 is a plan view of a solid-state laser medium according to a sixth embodiment of the present invention.
  • FIG. 12 is a sectional view of a solid-state laser device according to a seventh embodiment of the present invention.
  • a core containing a lasing element is provided at the center, a transparent light guide for excitation light absorbed by the core is integrated around the core, and one of the cores is exposed.
  • the surface is a solid-state laser medium fixed to a heat sink, and the light guide or the light guide and the core are made of translucent ceramic.
  • a light guide can be easily configured for a core having an arbitrary shape or a plurality of cores.
  • FIG. 1 is a plan view of a solid-state laser medium showing a first embodiment of the present invention
  • FIG. 2 is a cross-sectional view taken along line AA of a solid-state laser device (laser resonator) provided with the solid-state laser medium shown in FIG. It is.
  • 1 is a heat sink
  • 2 is a high heat conductive adhesive layer provided on the heat sink
  • 3 is a total reflection film provided on the high heat conductive adhesive layer
  • 4 is a laser oscillation element.
  • Excitation light that enters the core through the inside of the light guide 5, 8 is a total reflection mirror
  • 9 is a laser single oscillation light
  • 10 is an output mirror
  • 11 is an output beam (circular).
  • a light guide 5 made of a translucent ceramic material is formed around the elliptical cylindrical core 4 in close contact with the core by a sintering method.
  • a sintering method An example of a method for forming a translucent ceramic by a sintering method is described in Patent Document 2 described above.
  • the length of the major axis of the elliptical cylindrical core 4 is 8 mm, and the length of its minor axis is 3 mm.
  • the thickness of the light-transmitting ceramic 5 as the light guide and the thickness of the elliptical cylindrical core 4 are 0.3 mm.
  • the excitation light beams 6 and 7 are made to enter the elliptic cylindrical core 4 in the short axis direction, thereby narrowing the excitation light in the horizontal direction as compared with the case where the excitation light is incident from the long axis direction. Therefore, the light can be absorbed in the elliptical cylindrical core 4 with a simple condensing optical system.
  • the material of the elliptic cylindrical core 4 is, for example, YAG (yttrium aluminum garnet) containing Yb (ytterbium) as a laser oscillation element, and a light guide (translucent ceramic) 5 as a material of a laser.
  • YAG yttrium aluminum garnet
  • Yb ytterbium
  • a light guide (translucent ceramic) 5 as a material of a laser.
  • a typical example is a YAG that does not contain an oscillating element, but other oscillating elements may be Nd (neodymium) or transition metals such as Tm (thulium) and Ho (holmium). Further, Cr (chromium) or Ti (titanium) may be used, or a plurality of them may be included.
  • YVO yttrium vanadate
  • GdVO gadolium vanadate
  • YLF yttrium 'lithium.fluoride
  • GGG gad
  • Excitation lights 6 and 7 have wavelengths that are absorbed by the laser oscillation element.
  • a core 4 using Yb: YAG is suitable for a 940 nm or 970 nm force.
  • the wavelengths of the excitation lights 6 and 7 are selected according to the material of the core 4 to be used.
  • the base materials of the core 4 and the light guide 5 may be different, but the same material has a closer refractive index, so that light loss at the boundary can be suppressed.
  • the handling is easier, and the power S can be reduced to suppress light loss at the boundary.
  • the light guide 5 may be made of a translucent ceramic
  • the power core 4 may be made of a crystal, and may be a translucent ceramic containing a laser-oscillating element.
  • the high thermal conductive adhesive layer 2 may be an organic or inorganic adhesive, or may be Au, Ag, Sn, Sb, In.
  • a metal solder material containing Pb, Zn, Cu, etc. may be used.
  • the heat sink 1 includes metal materials such as Cu and CuW, as well as diamond, SiC, A1N, and Be.
  • Nonmetals such as 0, CBN and DLC, and composite materials may be used.
  • the laser oscillation light 9 is emitted in the major axis direction of the core 4 with respect to the laser light incident surface of the core 4 to the Brewster angle (Brewster angle). Therefore, if the direction of polarization of light is in the plane of incidence, the mirror position is configured to be incident at a specific angle of incidence at which the reflectance of light at the material surface is zero), so that the laser of core 4 Even if an anti-reflection film is not formed on the surface through which the oscillating light passes, the reflectance becomes zero, and a laser resonator with low loss can be constructed.
  • FIG. 3 is a plan view of a solid-state laser medium according to a second embodiment of the present invention
  • FIG. 4 is a cross-sectional view taken along a line BB of the solid-state laser device including the solid-state laser medium shown in FIG.
  • 21 is a first cylindrical core
  • 22 is a second cylindrical core formed around the first cylindrical core
  • 23 is a second cylindrical core.
  • the excitation light 24, 25, 26, 27 is the excitation light that enters the core through the inside of the light guide 23 from four directions around .
  • the cylindrical first core 21 has a Yb concentration of 10 at% and a diameter of 3 mm
  • the cylindrical second core 22 has a Yb concentration of 5 at% and a diameter of 3 at%.
  • the laser oscillation element concentration can be increased toward the center of the core as in the present invention, pseudo-uniform excitation distribution can be achieved, and laser emission within the core can be achieved by making the excitation distribution uniform. Dispersion and reduction of distortion due to heat generated by vibration can be achieved, and as a result, laser output and the quality of one laser beam can be improved.
  • both the first core and the second core may have a cylindrical outer shape.
  • the elliptical cylindrical shape shown in FIG. 1 or a polygonal column shape may be used.
  • Either or both of the first core and the second core may be made of a translucent ceramic.
  • the second core also a translucent ceramic, an integrated structure can be formed regardless of the outer shape of the first core.
  • the third and fourth cores may be provided outside the second core. Ko It is possible to obtain a more uniform absorption distribution in the core by making the concentration of laser elements smaller and making the concentration difference of the laser element smaller.
  • the core power is the center of laser oscillation.
  • a plurality of cores serving as the center of laser oscillation are formed in the same light guide. It ’s been good, it ’s okay.
  • FIG. 7 is a plan view of a solid-state laser medium showing a third embodiment of the present invention
  • FIG. 8 is a cross-sectional view taken along line C-C of the solid-state laser device (laser resonator) provided with the solid-state laser medium shown in FIG. It is.
  • 31 is a first cylindrical core
  • 32 is a second cylindrical core
  • 33 is a third cylindrical core
  • 34 is a fourth cylindrical core
  • 35 Is a light guide (translucent ceramic) formed outside the cylindrical cores 31-34
  • 36 is an anti-reflection film
  • 37 and 38 are excitation lights
  • 41 is a first total reflection mirror
  • 42 is a 2 is a total reflection mirror
  • 43 is an output mirror
  • 44 is one laser output.
  • Other configurations in FIG. 8 are the same as those in FIG.
  • a plurality of cylindrical cores 31 to 34 are formed in the same light guide 35 at equal intervals.
  • the reflection mirror 42 provided on the outside for reflection reflects the laser light three times with one sheet by utilizing the fact that the cores are at equal intervals. You can use a mirror and reflect it with three mirrors.
  • FIG. 9 is a sectional view of a solid-state laser device (laser resonator) showing a fourth embodiment of the present invention.
  • 51 is a light guide block
  • 52 and 54 are antireflection films
  • 53 is a total reflection film
  • 55 is a total reflection mirror
  • 56 is an output mirror
  • 57 is a laser output.
  • Other configurations are the same as those in FIG.
  • This embodiment also has a configuration having a plurality of cores as shown in the third embodiment.
  • a light guide block 51 through which laser oscillation light passes is provided with a laser medium.
  • the total reflection film 53 is provided outside the light guide block 51 so that the laser oscillation light is turned back.
  • FIG. 10 is a sectional view of a solid-state laser device (laser resonator) showing a fifth embodiment of the present invention.
  • 61 is a first output mirror
  • 62 is a second output mirror
  • 63 is a third output mirror
  • 64 is a fourth output mirror
  • 65 is a first laser output
  • 66 is a first output mirror
  • 67 is the third laser output
  • 68 is the fourth laser output.
  • Other configurations are the same as those in FIG.
  • output mirrors 61-64 are provided independently for a plurality of cores 31-34 so that laser oscillation operation is performed.
  • FIG. 11 is a plan view of a solid-state laser device according to a sixth embodiment of the present invention.
  • 71 is a cylindrical first core
  • 72 is a cylindrical second core
  • 73 is a cylindrical third core
  • 74 is a cylindrical fourth core
  • 75 is a cylindrical core
  • 76 is a cylindrical sixth core
  • 77 is a seventh cylindrical core.
  • the number of cores is further increased from the plurality of cores shown in FIG. 7, and the arrangement thereof is made two-dimensional, so that the excitation on the opposite side is possible even for uniform excitation.
  • Light absorption leakage It is configured so that excitation can be efficiently performed without any omission.
  • Numeral 78 is a light guide (translucent ceramic), and 79 and 80 are excitation lights.
  • FIG. 12 is a sectional view of a solid-state laser device according to a seventh embodiment of the present invention.
  • 81 is a heat sink
  • 82 is a semiconductor laser bar
  • 83 is a micro lens
  • 84 and 85 are condenser lenses
  • 86 is excitation light
  • 91 is a heat sink
  • 92 is a high thermal conductive adhesive layer
  • 93 is A total reflection film
  • 94 is a cylindrical core
  • 95 is a light guide
  • 96 is an antireflection film
  • 97 is an output mirror
  • 98 is laser oscillation light.
  • the excitation light 86 emitted from the stacked semiconductor laser bars 82 is collimated in the fast axis direction by the microlenses 83, and after passing through the condenser lens 84, The light is condensed by a single condenser lens 85 into the entrance window 95A on the side of the light guide 95.
  • the condenser lens 84 is used to collect the excitation light 86 in the slow axis direction.
  • the excitation light 86 that has entered the light guide 95 propagates through the light guide 95 while repeating total reflection on the upper and lower surfaces of the light guide 95, and reaches the cylindrical core 94.
  • a laser element that absorbs excitation light and stimulates and emits laser light is added to the cylindrical core 94, and a laser resonator is formed between the output mirror 97 and the total reflection film 93, and laser oscillation occurs.
  • the cylindrical core 94 and the light guide 95 are fixed to the heat sink 91 via the total reflection film 93 and the high thermal conductive adhesive layer 92, and the heat generated when the excitation light is absorbed in the cylindrical core 94. Has the effect of effectively dissipating heat.
  • a solid-state laser medium having an arbitrary shape that is optimal for excitation or oscillation is produced by a technology for forming a translucent ceramic, so that a core having an arbitrary shape or a plurality of cores can be irradiated with light.
  • the guide can be easily configured, and high oscillation efficiency and beam quality of the laser can be obtained.
  • the same light guide for transmitting the excitation light to a core having an arbitrary shape or a plurality of cores can be easily formed at a low cost for a short period of time.
  • Laser medium that can be manufactured with A high-performance type laser device can be used as a laser device capable of obtaining high laser output and beam quality.

Abstract

Un équipement laser dans lequel un guide de lumière peut être facilement constitué pour un centre ayant une forme discrétionnaire ou une pluralité de centres en utilisant un matériau céramique translucide pour le guide de lumière, qui guide les ondes de lumière d'excitation sur une circonférence extérieure du centre. L'équipement laser est fourni avec un centre (4) qui inclut un élément d'oscillation laser en son cœur et un guide de lumière (5), formés intégralement sur une circonférence du centre (4) et transparents à la lumière d'excitation. L'équipement laser réalise une oscillation laser en introduisant la lumière d'excitation à partir d'un côté externe du guide de lumière (5) d'un cristal de laser à l'état solide sur un dissipateur thermique sur un plan et en excitant une région du centre (4). Le guide de lumière (5) ou le guide de lumière (5) et le centre (4) sont constitués de céramique translucide.
PCT/JP2005/005176 2004-03-24 2005-03-23 Équipement laser WO2005091447A1 (fr)

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Application Number Priority Date Filing Date Title
JP2006511288A JPWO2005091447A1 (ja) 2004-03-24 2005-03-23 レーザー装置

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JP2004-087361 2004-03-24
JP2004087361 2004-03-24

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WO2005091447A1 true WO2005091447A1 (fr) 2005-09-29

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JP2006237170A (ja) * 2005-02-23 2006-09-07 Hamamatsu Photonics Kk レーザ増幅装置
JP2008003273A (ja) * 2006-06-22 2008-01-10 Japan Science & Technology Agency 非線形光学結晶を備えた超短パルスレーザー装置
JP2008294145A (ja) * 2007-05-23 2008-12-04 Chiba Univ レーザー増幅器、レーザー発振器、レーザー増幅方法およびレーザー発振方法
JP2011518445A (ja) * 2009-05-04 2011-06-23 ベイジン ジーケー レーザー テクノロジー カンパニー リミテッド 受動モードロックピコ秒レーザー
WO2012111354A1 (fr) 2011-02-14 2012-08-23 大学共同利用機関法人自然科学研究機構 Matériau polycristallin émetteur de lumière et son procédé de production
JP2012248609A (ja) * 2011-05-26 2012-12-13 Mitsubishi Electric Corp 平面導波路型レーザ装置
FR3006510A1 (fr) * 2013-06-04 2014-12-05 Cilas Systeme d'amplification laser a disque epais et applications
WO2020174779A1 (fr) * 2019-02-27 2020-09-03 三菱重工業株式会社 Dispositif laser
WO2021020475A1 (fr) * 2019-07-31 2021-02-04 国立研究開発法人理化学研究所 Dispositif laser et son procédé de fabrication
US20220393424A1 (en) * 2020-02-07 2022-12-08 Jx Nippon Mining & Metals Corporation Yag ceramic joined body and production method therefor

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