WO2005054802A1 - Capteur de pression a couplage capacitif - Google Patents

Capteur de pression a couplage capacitif Download PDF

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Publication number
WO2005054802A1
WO2005054802A1 PCT/JP2004/016391 JP2004016391W WO2005054802A1 WO 2005054802 A1 WO2005054802 A1 WO 2005054802A1 JP 2004016391 W JP2004016391 W JP 2004016391W WO 2005054802 A1 WO2005054802 A1 WO 2005054802A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
pressure
dielectric layer
detecting device
detection device
Prior art date
Application number
PCT/JP2004/016391
Other languages
English (en)
Japanese (ja)
Inventor
Yasuji Ogawa
Original Assignee
Xiroku, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiroku, Inc. filed Critical Xiroku, Inc.
Publication of WO2005054802A1 publication Critical patent/WO2005054802A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry

Definitions

  • the present invention relates to a pressure detection device, and more particularly, to a pressure detection device that uses electrostatic coupling differentially.
  • Japanese Patent Application Laid-Open No. Sho 62-226030 is one that uses electrostatic coupling. This is to detect a change in capacitance between two electrodes.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 62-226600
  • the present invention has been made in view of the above circumstances, and has as its object to provide a pressure detection device that can measure pressure with high accuracy, is resistant to noise, and uses differentially electrostatic coupling that can be used anywhere. It is.
  • a pressure detecting device using electrostatic coupling comprises: a first electrode; a second electrode provided so as to overlap the first electrode; A third electrode provided to overlap the second electrode, a first dielectric layer provided between the first electrode and the second electrode, and a third dielectric layer provided between the second electrode and the third electrode.
  • the driving unit applies a voltage to the first electrode and the third electrode, and a waveform of the voltage applied to the first electrode and a waveform of the voltage applied to the third electrode are inverted from each other.
  • a waveform, and the detection unit may detect a signal from the second electrode due to electrostatic coupling.
  • the detection unit may include a current amplifier whose input impedance is close to zero.
  • the drive unit may apply a voltage to the second electrode, and the detection unit may detect a difference between signals from the first electrode and the third electrode due to electrostatic coupling.
  • the detection unit has a differential amplifier, and the difference between the signals is detected by inputting signals from the first electrode and the third electrode to an input terminal of the differential amplifier. Just do it.
  • the first electrode may have flexibility, for example, may have a zigzag pattern.
  • each first electrode is connected in series in the X-axis direction
  • each second electrode is connected in series in the Y-axis direction.
  • the third electrodes may be connected in series in the X-axis direction so that the pressure distribution can be measured.
  • the pressure detection device using the electrostatic coupling of the present invention has an advantage that pressure and pressure distribution can be measured with high accuracy. Since it is also resistant to noise, the detection circuit is simple, so it can be manufactured at low cost.
  • FIG. 1 is a side sectional view for explaining the structure of a sensor portion of the pressure detecting device of the present invention. is there.
  • the sensor section has a laminated structure of a first electrode 1, a first dielectric layer 4, a second electrode 2, a second dielectric layer 5, and a third electrode 3 in this order.
  • the first electrode 1, the second electrode 2, and the third electrode 3 are provided so as to overlap each other.
  • the first dielectric layer 4 and the second dielectric layer 5 have different elastic moduli.
  • the second dielectric layer does not have a cushioning property like the first dielectric layer, but may be a hard spacer or the like.
  • the first dielectric layer is made of a dielectric material and is made of a flexible elastic material having excellent linearity and restorability.
  • a dielectric material for example, natural rubber or silicone rubber can be used for this.
  • the second electrode 2, the second dielectric layer 5, and the third electrode 3 are formed of a double-sided printed circuit board, the epoxy substrate is used as the dielectric layer, and the conductive foil layers on both sides are used as the second and third electrodes. It is possible. Therefore, in the sensor section, a silicon rubber sheet may be stuck on a double-sided printed circuit board, and a conductive foil layer serving as a first electrode may be stuck on the silicon rubber sheet.
  • FIG. 2 is a schematic diagram for explaining a connection configuration of a sensor unit capable of measuring a pressure distribution of the pressure detection device of the present invention, a drive unit, and a detection unit.
  • each layer is expanded so that the connection form of the electrode rows of each layer can be understood.
  • the sensor units are arranged in a matrix. That is, the first electrodes 1 are connected in series in the X-axis direction to form a first electrode row, and a plurality of these are arranged in parallel to the X-axis.
  • the second electrodes 2 are connected in series in a Y-axis direction orthogonal to the X-axis to form a second electrode row, and a plurality of these are arranged in parallel to the Y-axis.
  • the third electrodes 3 are connected in series in the X-axis direction to form a third electrode row, and a plurality of the third electrodes are arranged in parallel to the X-axis.
  • these electrode rows are formed by patterning the conductive foil layer on the substrate by etching or the like.
  • the first electrode is preferably flexible since the distance between the first electrode and the second electrode is desired to easily change with respect to pressure. For example, it may be made easy to bend by forming a thin film layer, or as shown in FIG. 3, an electrode row may be formed in a zigzag pattern.
  • the driving section includes an oscillator 10 and an inverting amplifier 11.
  • the output of the oscillator 10 is applied to the first electrode row. At this time, a voltage is applied to each row using the switch means 12.
  • the output of the oscillator 10 is also applied to the third electrode train via the inverting amplifier 11.
  • the output waveform of the oscillator 10 is inverted by the inverting amplifier 11.
  • the voltage is applied to the third electrode row for each row using the switch means 13.
  • the switch means 12 and the switch means 13 are linked, and simultaneously connect the oscillator to the electrode rows at the same position in the vertical direction. It is preferable that the electrode rows other than the electrode row to which the oscillator is connected are grounded so as not to affect other electrode rows.
  • the detection unit includes a current amplifier 14 and a synchronous detection unit 15.
  • the signal due to the electrostatic coupling from each second electrode row is directly input to the current amplifier 14 via the switch means 16, amplified, and then input to the synchronous detector 15.
  • a signal from the second electrode array may be amplified using a plurality of current amplifiers and then input to the synchronous detection unit via the switch unit 16.
  • a signal is directly input to one of the input terminals of the current amplifier 14, and the other is grounded.
  • the current amplifier 14 has an input impedance approaching zero, and a feedback resistor is provided at a terminal to which a signal is input from the output terminal of the current amplifier 14.
  • the signal from the oscillator 10 is also input to the synchronous detector 15.
  • the first electrode and the third electrode are driven by the oscillator 10.
  • One row of the electrode rows is selectively connected by the switch means 12 and the switch means 13.
  • the second electrode rows are sequentially connected one by one from the end using the switch means 16. All the rows of the second electrode row are connected sequentially
  • the switch means 12 and the switch means 13 are operated to connect the electrode rows next to the first electrode row and the third electrode row, and the second electrode row is sequentially turned on again using the switch means 16. Connect. By repeating this, signals from all the electrodes arranged in a matrix can be detected. While one of the second electrode rows is selected using the switch means 16, the first electrode row and the third electrode row are simultaneously used using the switch means 12 and 13, respectively.
  • the driving unit or the detecting unit may be sequentially connected to all the electrode rows.
  • the signal is amplified by 14 and detected by the synchronous detector 15 while synchronizing with the oscillator 10.
  • the object is placed on the first electrode, and the first electrode is bent to change the distance between the first electrode and the second electrode. Since the change in distance at this time can be detected by a signal from the second electrode row, it is possible to measure the pressure by arithmetically processing this signal.
  • they are arranged in a matrix, it is possible to know where the signal is changing, so that it is possible to measure the pressure distribution.
  • FIG. 4 is a schematic diagram for explaining a connection configuration of a sensor unit capable of measuring a pressure distribution of a pressure detection device according to a second embodiment of the present invention, a drive unit, and a detection unit. Note that, in FIG. 4, as in FIG. 2, each layer is expanded so that the connection form of the electrode rows in each layer can be understood. The difference from the first embodiment is that the drive unit is connected to the second electrode, and the detection unit is connected to the first and third electrodes.
  • the oscillator 10 of the driving section is connected to the second electrode row via the switch means 12.
  • the switch means 12 sequentially connects the second electrode row to the oscillator for each row. It is preferable that the electrode rows other than the electrode row to which the oscillator is connected be grounded so as not to affect other electrode rows.
  • the detection section includes a differential amplifier 20 and a synchronous detection section 15.
  • the signal output from the electrodes corresponding to the upper and lower electrodes in the first and third electrode rows is Input to the two input terminals of the loop 20 respectively.
  • From the differential amplifier 20 a signal corresponding to the difference between the signal due to the electrostatic coupling between the first and second electrode rows and the signal due to the electrostatic coupling between the second and third electrode rows is obtained. Is output. That is, since the change in the distance between the two electrodes at this time can be detected by taking the difference between the signals, the pressure can be measured by calculating the difference. Since the electrodes are arranged in a matrix, it is possible to determine where the signal is changing, so it is possible to measure the pressure distribution.
  • the pressure detecting device using the electrostatic coupling of the present invention is not limited to the above illustrated example, and various changes can be made without departing from the scope of the present invention. It is.
  • FIG. 1 is a side sectional view for explaining a structure of a sensor part of a pressure detecting device according to a first embodiment of the present invention.
  • FIG. 2 is a schematic diagram for explaining a connection configuration of a sensor unit capable of measuring a pressure distribution of a pressure detection device of the present invention, a driving unit, and a detection unit.
  • FIG. 3 is a view for explaining a pattern of an electrode row of a sensor section of the pressure detecting device of the present invention.
  • FIG. 4 is a schematic diagram for explaining a connection configuration of a sensor unit capable of measuring a pressure distribution, a drive unit, and a detection unit of a pressure detection device according to a second embodiment of the present invention. . Explanation of symbols
  • Switch Current amplifier
  • Synchronous detector Switch Differential amplifier

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur de pression capable de mesurer la pression avec précision, résistant au bruit, utilisable dans n'importe quel endroit et utilisant le couplage capacitif. Une partie capteur utilisée pour le capteur de pression comprend une première électrode, une deuxième électrode ménagée en dessus de la première électrode, une troisième électrode ménagée en dessus de la deuxième électrode, une première couche diélectrique intercalée entre les première et deuxième électrodes, et une deuxième couche diélectrique intercalée entre les deuxième et troisième électrodes et possédant un module d'élasticité différent de celui de la première couche diélectrique. Une partie de pilotage pilote les première et troisième électrodes. Une partie de détection détecte de façon différentielle la pression exercée entre les première et troisième électrodes sur la base du signal généré par le couplage capacitif de la deuxième électrode.
PCT/JP2004/016391 2003-12-04 2004-11-05 Capteur de pression a couplage capacitif WO2005054802A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003-405286 2003-12-04
JP2003405286A JP4001288B2 (ja) 2003-12-04 2003-12-04 静電結合を用いる圧力検出装置

Publications (1)

Publication Number Publication Date
WO2005054802A1 true WO2005054802A1 (fr) 2005-06-16

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PCT/JP2004/016391 WO2005054802A1 (fr) 2003-12-04 2004-11-05 Capteur de pression a couplage capacitif

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WO (1) WO2005054802A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3093640A1 (fr) * 2015-05-11 2016-11-16 HiDeep Inc. Capteur de pression, détecteur de pression et dispositif d'entrée tactile le comprenant
WO2018011464A1 (fr) * 2016-07-11 2018-01-18 Forciot Oy Capteur de force et/ou de pression
US10760982B2 (en) 2016-02-29 2020-09-01 Nissha Co., Ltd. Pressure detecting device
CN113932952A (zh) * 2021-11-22 2022-01-14 浙江大学 对数响应函数的仿生柔性压力电容传感器
US11397499B2 (en) 2018-12-21 2022-07-26 Sony Group Corporation Pressure-sensitive sensor and electronic apparatus

Families Citing this family (13)

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KR101076247B1 (ko) * 2006-07-14 2011-10-26 뉴콤 테크노 가부시키가이샤 전자기 결합을 이용한 압력 분포 센서
JP4860430B2 (ja) * 2006-10-26 2012-01-25 株式会社イマック 荷重計測装置
US8963828B2 (en) 2007-06-04 2015-02-24 Shimane Prefectural Government Information inputting device, information outputting device and method
CA2707912C (fr) 2007-12-03 2016-01-05 Shimane Prefectural Government Dispositif de reconnaissance d'image et procede de reconnaissance d'image
JP4565359B2 (ja) * 2008-08-08 2010-10-20 東海ゴム工業株式会社 静電容量型面圧分布センサ
JP5448752B2 (ja) * 2009-11-27 2014-03-19 東海ゴム工業株式会社 入力インターフェイス装置
WO2011111812A1 (fr) 2010-03-12 2011-09-15 株式会社コナミデジタルエンタテインメント Dispositif de charge et dispositif ludique
JP5530798B2 (ja) * 2010-05-11 2014-06-25 東海ゴム工業株式会社 静電容量型センサおよびセンサ取付構造
KR102553036B1 (ko) * 2016-06-29 2023-07-07 엘지이노텍 주식회사 압력 감지 센서
JP6696853B2 (ja) * 2016-07-29 2020-05-20 株式会社ジャパンディスプレイ 力検出装置
JP6682398B2 (ja) * 2016-08-02 2020-04-15 株式会社ジャパンディスプレイ 力検出装置、表示装置及び有機エレクトロルミネッセンス表示装置
JP2020068892A (ja) * 2018-10-29 2020-05-07 住友理工株式会社 咬合力検出シートとそれを用いた咬合力検出装置
CN117916567A (zh) * 2021-09-22 2024-04-19 松下知识产权经营株式会社 载荷传感器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278925A (ja) * 1988-09-16 1990-03-19 Yokohama Syst Kenkyusho:Kk 静電容量型圧力センサ
JPH0755615A (ja) * 1993-08-10 1995-03-03 Agency Of Ind Science & Technol 静電容量型力センサ
JPH10142093A (ja) * 1996-11-14 1998-05-29 Osaka Gas Co Ltd 静電容量式センサの診断装置および方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278925A (ja) * 1988-09-16 1990-03-19 Yokohama Syst Kenkyusho:Kk 静電容量型圧力センサ
JPH0755615A (ja) * 1993-08-10 1995-03-03 Agency Of Ind Science & Technol 静電容量型力センサ
JPH10142093A (ja) * 1996-11-14 1998-05-29 Osaka Gas Co Ltd 静電容量式センサの診断装置および方法

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106155407B (zh) * 2015-05-11 2019-10-01 高深公司 压力传感装置、压力检测器及包括这些的装置
US20160334914A1 (en) * 2015-05-11 2016-11-17 Hideep Inc. Pressure sensor, pressure detector and touch input device including the same
CN106155407A (zh) * 2015-05-11 2016-11-23 高深公司 压力传感装置、压力检测器及包括这些的装置
EP3093640A1 (fr) * 2015-05-11 2016-11-16 HiDeep Inc. Capteur de pression, détecteur de pression et dispositif d'entrée tactile le comprenant
US10534466B2 (en) 2015-05-11 2020-01-14 Hideep Inc. Pressure sensor, pressure detector and touch input device including the same
US10760982B2 (en) 2016-02-29 2020-09-01 Nissha Co., Ltd. Pressure detecting device
CN109564137A (zh) * 2016-07-11 2019-04-02 富西特有限公司 力和/或压力传感器
US10591367B2 (en) 2016-07-11 2020-03-17 Forciot Oy Capacitive force and/or pressure sensor having stretchable electrodes
EP3623784A1 (fr) * 2016-07-11 2020-03-18 Forciot OY Capteur capacitif de force et/ou de pression
WO2018011464A1 (fr) * 2016-07-11 2018-01-18 Forciot Oy Capteur de force et/ou de pression
CN109564137B (zh) * 2016-07-11 2021-01-05 富西特有限公司 力和/或压力传感器
CN112525390A (zh) * 2016-07-11 2021-03-19 富西特有限公司 力和/或压力传感器
CN112525390B (zh) * 2016-07-11 2022-08-02 富西特有限公司 力和/或压力传感器
US11397499B2 (en) 2018-12-21 2022-07-26 Sony Group Corporation Pressure-sensitive sensor and electronic apparatus
CN113932952A (zh) * 2021-11-22 2022-01-14 浙江大学 对数响应函数的仿生柔性压力电容传感器

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Publication number Publication date
JP2005164448A (ja) 2005-06-23
JP4001288B2 (ja) 2007-10-31

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